DE102016209097A1 - Plasmadüse - Google Patents

Plasmadüse Download PDF

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Publication number
DE102016209097A1
DE102016209097A1 DE102016209097.6A DE102016209097A DE102016209097A1 DE 102016209097 A1 DE102016209097 A1 DE 102016209097A1 DE 102016209097 A DE102016209097 A DE 102016209097A DE 102016209097 A1 DE102016209097 A1 DE 102016209097A1
Authority
DE
Germany
Prior art keywords
plasma
electrode
counterelectrode
nozzle
discharge chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE102016209097.6A
Other languages
German (de)
English (en)
Inventor
Martin Bellmann
Christian Ochs
Marcus Harms
Wolfgang Viöl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority to PCT/EP2017/056052 priority Critical patent/WO2017157975A1/de
Priority to CN201780017388.8A priority patent/CN108781498B/zh
Priority to EP17712057.3A priority patent/EP3430864B1/de
Priority to DK17712057.3T priority patent/DK3430864T3/da
Publication of DE102016209097A1 publication Critical patent/DE102016209097A1/de
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2431—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2439—Surface discharges, e.g. air flow control
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/2465—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated by inductive coupling, e.g. using coiled electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3478—Geometrical details

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Fluid Mechanics (AREA)
  • Geometry (AREA)
  • Plasma Technology (AREA)
DE102016209097.6A 2016-03-16 2016-05-25 Plasmadüse Ceased DE102016209097A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
PCT/EP2017/056052 WO2017157975A1 (de) 2016-03-16 2017-03-15 Plasmadüse
CN201780017388.8A CN108781498B (zh) 2016-03-16 2017-03-15 等离子体喷嘴
EP17712057.3A EP3430864B1 (de) 2016-03-16 2017-03-15 Plasmadüse und verfahren zur verwendung der plasmadüse
DK17712057.3T DK3430864T3 (da) 2016-03-16 2017-03-15 Plasmadyse og fremgangsmåde til anvendelse af plasmadysen

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP16160623.1 2016-03-16
EP16160623 2016-03-16

Publications (1)

Publication Number Publication Date
DE102016209097A1 true DE102016209097A1 (de) 2017-09-21

Family

ID=59751555

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102016209097.6A Ceased DE102016209097A1 (de) 2016-03-16 2016-05-25 Plasmadüse

Country Status (5)

Country Link
EP (1) EP3430864B1 (zh)
CN (1) CN108781498B (zh)
DE (1) DE102016209097A1 (zh)
DK (1) DK3430864T3 (zh)
WO (1) WO2017157975A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108566714A (zh) * 2018-06-09 2018-09-21 贵州电网有限责任公司 一种等离子体射流装置
CN117941026A (zh) * 2021-09-01 2024-04-26 朗姆研究公司 用于等离子体处理的电极-介电喷嘴
CN115501361A (zh) * 2022-10-14 2022-12-23 嘉兴和禹净化科技有限公司 羟基等离子发生器和消毒净化设备

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5961772A (en) 1997-01-23 1999-10-05 The Regents Of The University Of California Atmospheric-pressure plasma jet
US6677550B2 (en) 1999-12-09 2004-01-13 Plasmatreat Gmbh Plasma nozzle
US20060189168A1 (en) * 2002-12-27 2006-08-24 Noriyoshi Sato Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device
JP2007207475A (ja) * 2006-01-31 2007-08-16 Ibaraki Univ 携帯型大気圧プラズマ発生装置
CN201528464U (zh) * 2009-09-18 2010-07-14 中国科学院等离子体物理研究所 一种新型大气压射流冷等离子发生器
DE102010011132A1 (de) * 2010-03-11 2011-09-15 Reinhausen Plasma Gmbh Verfahren und Anordnung zur Plasmabehandlung eines Gasstroms
US20120288934A1 (en) * 2009-08-11 2012-11-15 Leibnitz-Institut fuer Plasma. und Tech. e. V. Device and method for treating living cells by means of a plasma
KR20140101235A (ko) * 2013-02-08 2014-08-19 한국기계연구원 분사형 플라즈마 발생기
KR20140108976A (ko) * 2013-03-04 2014-09-15 한국기계연구원 곡면 형상의 구동 전극을 구비한 분사형 플라즈마 발생기

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29911974U1 (de) * 1999-07-09 2000-11-23 Agrodyn Hochspannungstechnik G Plasmadüse
KR20030091438A (ko) * 2002-05-28 2003-12-03 (주)플라젠 플라즈마 분사장치 및 그 장치를 이용한 표면처리방법
EP1689216A1 (en) * 2005-02-04 2006-08-09 Vlaamse Instelling Voor Technologisch Onderzoek (Vito) Atmospheric-pressure plasma jet
DE102008028167A1 (de) * 2008-06-12 2009-12-31 Maschinenfabrik Reinhausen Gmbh Vorrichtung zur Erzeugung eines Plasma-Jets
CN201957326U (zh) * 2010-12-01 2011-08-31 航天环境工程有限公司 自动调气式直流等离子体发生器
CN103237404A (zh) * 2013-05-14 2013-08-07 哈尔滨工业大学 同轴放电模式的大气等离子体发生装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5961772A (en) 1997-01-23 1999-10-05 The Regents Of The University Of California Atmospheric-pressure plasma jet
US6677550B2 (en) 1999-12-09 2004-01-13 Plasmatreat Gmbh Plasma nozzle
US20060189168A1 (en) * 2002-12-27 2006-08-24 Noriyoshi Sato Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device
JP2007207475A (ja) * 2006-01-31 2007-08-16 Ibaraki Univ 携帯型大気圧プラズマ発生装置
US20120288934A1 (en) * 2009-08-11 2012-11-15 Leibnitz-Institut fuer Plasma. und Tech. e. V. Device and method for treating living cells by means of a plasma
CN201528464U (zh) * 2009-09-18 2010-07-14 中国科学院等离子体物理研究所 一种新型大气压射流冷等离子发生器
DE102010011132A1 (de) * 2010-03-11 2011-09-15 Reinhausen Plasma Gmbh Verfahren und Anordnung zur Plasmabehandlung eines Gasstroms
KR20140101235A (ko) * 2013-02-08 2014-08-19 한국기계연구원 분사형 플라즈마 발생기
KR20140108976A (ko) * 2013-03-04 2014-09-15 한국기계연구원 곡면 형상의 구동 전극을 구비한 분사형 플라즈마 발생기

Also Published As

Publication number Publication date
CN108781498B (zh) 2021-07-23
WO2017157975A1 (de) 2017-09-21
DK3430864T3 (da) 2022-02-21
EP3430864B1 (de) 2021-11-17
CN108781498A (zh) 2018-11-09
EP3430864A1 (de) 2019-01-23

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