DE102016109433B4 - Kraftsensor - Google Patents
Kraftsensor Download PDFInfo
- Publication number
- DE102016109433B4 DE102016109433B4 DE102016109433.1A DE102016109433A DE102016109433B4 DE 102016109433 B4 DE102016109433 B4 DE 102016109433B4 DE 102016109433 A DE102016109433 A DE 102016109433A DE 102016109433 B4 DE102016109433 B4 DE 102016109433B4
- Authority
- DE
- Germany
- Prior art keywords
- force sensor
- piezoresistive
- resistor
- loaded
- resistors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000011156 evaluation Methods 0.000 claims description 20
- 229910000896 Manganin Inorganic materials 0.000 claims description 7
- 238000005516 engineering process Methods 0.000 claims description 7
- 238000004146 energy storage Methods 0.000 claims description 4
- 238000003306 harvesting Methods 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000011888 foil Substances 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 11
- 238000003860 storage Methods 0.000 description 10
- 238000005259 measurement Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- 239000013590 bulk material Substances 0.000 description 2
- HPDFFVBPXCTEDN-UHFFFAOYSA-N copper manganese Chemical compound [Mn].[Cu] HPDFFVBPXCTEDN-UHFFFAOYSA-N 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
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- 230000005489 elastic deformation Effects 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910000914 Mn alloy Inorganic materials 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
- G01L1/2231—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being disc- or ring-shaped, adapted for measuring a force along a single direction
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Measurement Of Force In General (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102016109433.1A DE102016109433B4 (de) | 2016-05-23 | 2016-05-23 | Kraftsensor |
| JP2017095006A JP6726639B2 (ja) | 2016-05-23 | 2017-05-11 | 力覚センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102016109433.1A DE102016109433B4 (de) | 2016-05-23 | 2016-05-23 | Kraftsensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE102016109433A1 DE102016109433A1 (de) | 2017-11-23 |
| DE102016109433B4 true DE102016109433B4 (de) | 2018-03-01 |
Family
ID=60255055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102016109433.1A Active DE102016109433B4 (de) | 2016-05-23 | 2016-05-23 | Kraftsensor |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6726639B2 (enExample) |
| DE (1) | DE102016109433B4 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102019103625A1 (de) * | 2019-02-13 | 2020-08-13 | Fischerwerke Gmbh & Co. Kg | Kraftmessvorrichtung |
| AT521702B1 (de) * | 2019-03-11 | 2020-04-15 | Piezocryst Advanced Sensorics | Messsystem, geeignet für den einbau zwischen moment- und/oder kraftübertragenden maschinenteilen |
| DE102019119414B3 (de) * | 2019-07-17 | 2020-06-18 | Pilz Gmbh & Co. Kg | Manipulationsdetektionssystem für einen Abfüllstutzen einer Abfüllanlage und Verfahren zum Detektieren einer Manipulation an einem Abfüllstutzen einer Abfüllanlage |
| CN110657976B (zh) * | 2019-10-12 | 2021-09-17 | 北京工业大学 | 一种保证同轴度的螺栓紧固实验装置 |
| CN111820014A (zh) * | 2020-07-21 | 2020-10-27 | 河南科技大学 | 一种纵轴流谷子柔撕脱粒滚筒 |
| CN118829858A (zh) | 2022-03-30 | 2024-10-22 | 阿尔卑斯阿尔派株式会社 | 检测装置 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0128737A2 (en) | 1983-06-10 | 1984-12-19 | Honeywell Inc. | Vibrating quartz diaphragm pressure sensor |
| DE3607491C1 (de) | 1986-03-07 | 1987-07-30 | Sartorius Gmbh | Kraft- oder Druckaufnehmer mit biegemomentfrei geteilter Plattenfeder |
| DE3909274A1 (de) | 1988-03-24 | 1989-10-05 | Zach Johann | Druck- oder kraftmessvorrichtung |
| GB2326719A (en) | 1997-06-19 | 1998-12-30 | John Karl Atkinson | Force sensitive devices |
| DE10325943A1 (de) | 2003-06-07 | 2004-12-30 | Continental Aktiengesellschaft | Elektromagnetische Kraftmesseinrichtung |
| US20080196491A1 (en) | 2005-07-22 | 2008-08-21 | Stmicroelectronics S.R.L. | Integrated pressure sensor with a high full-scale value |
-
2016
- 2016-05-23 DE DE102016109433.1A patent/DE102016109433B4/de active Active
-
2017
- 2017-05-11 JP JP2017095006A patent/JP6726639B2/ja active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0128737A2 (en) | 1983-06-10 | 1984-12-19 | Honeywell Inc. | Vibrating quartz diaphragm pressure sensor |
| DE3607491C1 (de) | 1986-03-07 | 1987-07-30 | Sartorius Gmbh | Kraft- oder Druckaufnehmer mit biegemomentfrei geteilter Plattenfeder |
| DE3909274A1 (de) | 1988-03-24 | 1989-10-05 | Zach Johann | Druck- oder kraftmessvorrichtung |
| GB2326719A (en) | 1997-06-19 | 1998-12-30 | John Karl Atkinson | Force sensitive devices |
| DE10325943A1 (de) | 2003-06-07 | 2004-12-30 | Continental Aktiengesellschaft | Elektromagnetische Kraftmesseinrichtung |
| US20080196491A1 (en) | 2005-07-22 | 2008-08-21 | Stmicroelectronics S.R.L. | Integrated pressure sensor with a high full-scale value |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6726639B2 (ja) | 2020-07-22 |
| DE102016109433A1 (de) | 2017-11-23 |
| JP2017211377A (ja) | 2017-11-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R163 | Identified publications notified | ||
| R082 | Change of representative |
Representative=s name: PRINZ & PARTNER MBB PATENTANWAELTE RECHTSANWAE, DE |
|
| R012 | Request for examination validly filed | ||
| R018 | Grant decision by examination section/examining division | ||
| R020 | Patent grant now final | ||
| R082 | Change of representative |
Representative=s name: PRINZ & PARTNER MBB PATENT- UND RECHTSANWAELTE, DE Representative=s name: PRINZ & PARTNER MBB PATENTANWAELTE RECHTSANWAE, DE |
|
| R082 | Change of representative |
Representative=s name: PRINZ & PARTNER MBB PATENTANWAELTE RECHTSANWAE, DE |