DE102016107235B3 - Differenzdruckmesszelle - Google Patents

Differenzdruckmesszelle Download PDF

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Publication number
DE102016107235B3
DE102016107235B3 DE102016107235.4A DE102016107235A DE102016107235B3 DE 102016107235 B3 DE102016107235 B3 DE 102016107235B3 DE 102016107235 A DE102016107235 A DE 102016107235A DE 102016107235 B3 DE102016107235 B3 DE 102016107235B3
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DE
Germany
Prior art keywords
support
chamber
counter
differential pressure
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102016107235.4A
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German (de)
English (en)
Inventor
Daniel Sixtensson
Rafael Teipen
Benjamin Lemke
Timo Kober
Thomas Uehlin
Nils Ponath
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Priority to DE102016107235.4A priority Critical patent/DE102016107235B3/de
Application granted granted Critical
Publication of DE102016107235B3 publication Critical patent/DE102016107235B3/de
Priority to PCT/EP2017/056568 priority patent/WO2017182213A1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0618—Overload protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE102016107235.4A 2016-04-19 2016-04-19 Differenzdruckmesszelle Active DE102016107235B3 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE102016107235.4A DE102016107235B3 (de) 2016-04-19 2016-04-19 Differenzdruckmesszelle
PCT/EP2017/056568 WO2017182213A1 (fr) 2016-04-19 2017-03-20 Cellule de mesure de pression différentielle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102016107235.4A DE102016107235B3 (de) 2016-04-19 2016-04-19 Differenzdruckmesszelle

Publications (1)

Publication Number Publication Date
DE102016107235B3 true DE102016107235B3 (de) 2017-01-26

Family

ID=57739064

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102016107235.4A Active DE102016107235B3 (de) 2016-04-19 2016-04-19 Differenzdruckmesszelle

Country Status (2)

Country Link
DE (1) DE102016107235B3 (fr)
WO (1) WO2017182213A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017131263A1 (de) * 2017-12-22 2019-06-27 Endress+Hauser SE+Co. KG Verfahren zur Herstellung einer Messeinrichtung

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4458537A (en) * 1981-05-11 1984-07-10 Combustion Engineering, Inc. High accuracy differential pressure capacitive transducer
EP1299701B1 (fr) * 2000-07-13 2004-07-14 Endress + Hauser GmbH + Co. KG Capteur de pression differentielle
DE102006040325A1 (de) * 2006-08-29 2008-03-13 Endress + Hauser Gmbh + Co. Kg Vorrichtung zur Überwachung der Dichtigkeit von Fügestellen bei einem Druckmessgerät
DE102006057828A1 (de) * 2006-12-06 2008-06-12 Endress + Hauser Gmbh + Co. Kg Differenzdruckmeßaufnehmer
DE102009046229A1 (de) * 2009-10-30 2011-05-12 Endress + Hauser Gmbh + Co. Kg Drucksensor, insbesondere Differenzdrucksensor
DE102012113033A1 (de) * 2012-12-21 2014-06-26 Endress + Hauser Gmbh + Co. Kg Mechanische Stabilisierung und elektrische sowie hydraulische Adaptierung eines Silizium Chips durch Keramiken
DE102014109491A1 (de) * 2014-07-08 2016-02-11 Endress + Hauser Gmbh + Co. Kg Differenzdruckmesszelle
US9274016B2 (en) * 2012-11-20 2016-03-01 Azbil Corporation Pressure sensor chip

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5740626A (en) 1980-08-23 1982-03-06 Yokogawa Hokushin Electric Corp Differential pressure, pressure detector
DE10393943B3 (de) 2002-12-19 2012-06-14 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor
US7334484B2 (en) 2005-05-27 2008-02-26 Rosemount Inc. Line pressure measurement using differential pressure sensor
JP5970017B2 (ja) * 2014-03-31 2016-08-17 アズビル株式会社 圧力センサチップ
JP6034819B2 (ja) * 2014-03-31 2016-11-30 アズビル株式会社 圧力センサチップ
JP2015194343A (ja) * 2014-03-31 2015-11-05 アズビル株式会社 差圧発信器
JP5970018B2 (ja) * 2014-03-31 2016-08-17 アズビル株式会社 圧力センサチップ

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4458537A (en) * 1981-05-11 1984-07-10 Combustion Engineering, Inc. High accuracy differential pressure capacitive transducer
EP1299701B1 (fr) * 2000-07-13 2004-07-14 Endress + Hauser GmbH + Co. KG Capteur de pression differentielle
DE102006040325A1 (de) * 2006-08-29 2008-03-13 Endress + Hauser Gmbh + Co. Kg Vorrichtung zur Überwachung der Dichtigkeit von Fügestellen bei einem Druckmessgerät
DE102006057828A1 (de) * 2006-12-06 2008-06-12 Endress + Hauser Gmbh + Co. Kg Differenzdruckmeßaufnehmer
DE102009046229A1 (de) * 2009-10-30 2011-05-12 Endress + Hauser Gmbh + Co. Kg Drucksensor, insbesondere Differenzdrucksensor
US9274016B2 (en) * 2012-11-20 2016-03-01 Azbil Corporation Pressure sensor chip
DE102012113033A1 (de) * 2012-12-21 2014-06-26 Endress + Hauser Gmbh + Co. Kg Mechanische Stabilisierung und elektrische sowie hydraulische Adaptierung eines Silizium Chips durch Keramiken
DE102014109491A1 (de) * 2014-07-08 2016-02-11 Endress + Hauser Gmbh + Co. Kg Differenzdruckmesszelle

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017131263A1 (de) * 2017-12-22 2019-06-27 Endress+Hauser SE+Co. KG Verfahren zur Herstellung einer Messeinrichtung

Also Published As

Publication number Publication date
WO2017182213A1 (fr) 2017-10-26

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R012 Request for examination validly filed
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final
R081 Change of applicant/patentee

Owner name: ENDRESS+HAUSER SE+CO. KG, DE

Free format text: FORMER OWNER: ENDRESS + HAUSER GMBH + CO. KG, 79689 MAULBURG, DE

R082 Change of representative

Representative=s name: ANDRES, ANGELIKA, DIPL.-PHYS., DE

R082 Change of representative

Representative=s name: HAHN, CHRISTIAN, DIPL.-PHYS. DR.RER.NAT., DE