DE102015203188A1 - Optische Positionsmesseinrichtung - Google Patents
Optische Positionsmesseinrichtung Download PDFInfo
- Publication number
- DE102015203188A1 DE102015203188A1 DE102015203188.8A DE102015203188A DE102015203188A1 DE 102015203188 A1 DE102015203188 A1 DE 102015203188A1 DE 102015203188 A DE102015203188 A DE 102015203188A DE 102015203188 A1 DE102015203188 A1 DE 102015203188A1
- Authority
- DE
- Germany
- Prior art keywords
- scanning
- plane
- scanning unit
- graduation
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000463 material Substances 0.000 claims abstract description 71
- 230000003287 optical effect Effects 0.000 claims abstract description 51
- 230000000737 periodic effect Effects 0.000 claims abstract description 11
- 238000005259 measurement Methods 0.000 claims description 63
- 230000000694 effects Effects 0.000 claims description 9
- 238000005070 sampling Methods 0.000 claims description 9
- 230000005855 radiation Effects 0.000 claims description 7
- 230000002452 interceptive effect Effects 0.000 claims description 4
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 claims description 2
- 238000003491 array Methods 0.000 claims 1
- 239000013598 vector Substances 0.000 description 41
- 230000035945 sensitivity Effects 0.000 description 22
- 238000006073 displacement reaction Methods 0.000 description 12
- 230000007935 neutral effect Effects 0.000 description 8
- 230000001419 dependent effect Effects 0.000 description 2
- BUHVIAUBTBOHAG-FOYDDCNASA-N (2r,3r,4s,5r)-2-[6-[[2-(3,5-dimethoxyphenyl)-2-(2-methylphenyl)ethyl]amino]purin-9-yl]-5-(hydroxymethyl)oxolane-3,4-diol Chemical compound COC1=CC(OC)=CC(C(CNC=2C=3N=CN(C=3N=CN=2)[C@H]2[C@@H]([C@H](O)[C@@H](CO)O2)O)C=2C(=CC=CC=2)C)=C1 BUHVIAUBTBOHAG-FOYDDCNASA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102015203188.8A DE102015203188A1 (de) | 2015-02-23 | 2015-02-23 | Optische Positionsmesseinrichtung |
| JP2016007673A JP6588836B2 (ja) | 2015-02-23 | 2016-01-19 | 光学位置測定装置 |
| EP16154260.0A EP3059554B1 (de) | 2015-02-23 | 2016-02-04 | Optische positionsmesseinrichtung |
| CN201610097949.7A CN105910533B (zh) | 2015-02-23 | 2016-02-23 | 光学位置测量装置 |
| US15/050,620 US9733069B2 (en) | 2015-02-23 | 2016-02-23 | Optical position-measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102015203188.8A DE102015203188A1 (de) | 2015-02-23 | 2015-02-23 | Optische Positionsmesseinrichtung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102015203188A1 true DE102015203188A1 (de) | 2016-08-25 |
Family
ID=55299395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102015203188.8A Withdrawn DE102015203188A1 (de) | 2015-02-23 | 2015-02-23 | Optische Positionsmesseinrichtung |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9733069B2 (enrdf_load_stackoverflow) |
| EP (1) | EP3059554B1 (enrdf_load_stackoverflow) |
| JP (1) | JP6588836B2 (enrdf_load_stackoverflow) |
| CN (1) | CN105910533B (enrdf_load_stackoverflow) |
| DE (1) | DE102015203188A1 (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016210434A1 (de) | 2016-06-13 | 2017-12-14 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| DE102017219125A1 (de) | 2017-10-25 | 2019-04-25 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| CN113280731A (zh) * | 2020-02-19 | 2021-08-20 | 约翰内斯.海德汉博士有限公司 | 光学位置测量装置 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102017201257A1 (de) * | 2017-01-26 | 2018-07-26 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| EP3929529B1 (en) * | 2019-02-21 | 2024-09-25 | Nikon Corporation | Surface position detection device, exposure apparatus, substrate-processing system, and device-manufacturing method |
| CN115993088A (zh) * | 2021-10-20 | 2023-04-21 | 约翰内斯.海德汉博士有限公司 | 光学位置测量设备 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1762828A2 (de) | 2005-09-12 | 2007-03-14 | Dr. Johannes Heidenhain GmbH | Optische Positionsmesseinrichtung zur Erfassung der Position zweier zueinander beweglicher Teile in zwei Bewegungsrichtungen |
| EP2848899A2 (de) | 2013-09-11 | 2015-03-18 | Dr. Johannes Heidenhain GmbH | Optische Positionsmesseinrichtung |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5953209U (ja) * | 1982-10-01 | 1984-04-07 | ソニ−マグネスケ−ル株式会社 | 光学式測長スケ−ル |
| JP4023923B2 (ja) * | 1998-07-02 | 2007-12-19 | ソニーマニュファクチュアリングシステムズ株式会社 | 光学式変位測定装置 |
| KR100531458B1 (ko) * | 1998-08-20 | 2005-11-25 | 소니 매뉴펙츄어링 시스템즈 코포레이션 | 광학식 변위측정장치 |
| DE50105554D1 (de) * | 2000-09-14 | 2005-04-14 | Heidenhain Gmbh Dr Johannes | Positionsmesseinrichtung |
| JP4722474B2 (ja) * | 2004-12-24 | 2011-07-13 | 株式会社ミツトヨ | 変位検出装置 |
| JP4924884B2 (ja) * | 2006-05-19 | 2012-04-25 | 株式会社ニコン | エンコーダ |
| US7858922B2 (en) * | 2006-11-20 | 2010-12-28 | Dr. Johannes Heidenhain Gmbh | Position-measuring device |
| DE102010029211A1 (de) * | 2010-05-21 | 2011-11-24 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| JP5618898B2 (ja) * | 2010-08-31 | 2014-11-05 | Dmg森精機株式会社 | 変位検出装置 |
| EP2776790B1 (en) * | 2011-11-09 | 2016-09-14 | Zygo Corporation | Compact encoder head for interferometric encoder system |
| JP5714780B2 (ja) * | 2011-11-09 | 2015-05-07 | ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ | ダブルパス干渉方式エンコーダシステム |
-
2015
- 2015-02-23 DE DE102015203188.8A patent/DE102015203188A1/de not_active Withdrawn
-
2016
- 2016-01-19 JP JP2016007673A patent/JP6588836B2/ja active Active
- 2016-02-04 EP EP16154260.0A patent/EP3059554B1/de active Active
- 2016-02-23 CN CN201610097949.7A patent/CN105910533B/zh active Active
- 2016-02-23 US US15/050,620 patent/US9733069B2/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1762828A2 (de) | 2005-09-12 | 2007-03-14 | Dr. Johannes Heidenhain GmbH | Optische Positionsmesseinrichtung zur Erfassung der Position zweier zueinander beweglicher Teile in zwei Bewegungsrichtungen |
| EP2848899A2 (de) | 2013-09-11 | 2015-03-18 | Dr. Johannes Heidenhain GmbH | Optische Positionsmesseinrichtung |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016210434A1 (de) | 2016-06-13 | 2017-12-14 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| EP3258220A2 (de) | 2016-06-13 | 2017-12-20 | Dr. Johannes Heidenhain GmbH | Optische positionsmesseinrichtung |
| DE102017219125A1 (de) | 2017-10-25 | 2019-04-25 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| EP3477264A1 (de) | 2017-10-25 | 2019-05-01 | Dr. Johannes Heidenhain GmbH | Optische positionsmesseinrichtung |
| US10527405B2 (en) | 2017-10-25 | 2020-01-07 | Dr. Johannes Heidenhain Gmbh | Optical position-measuring device |
| CN113280731A (zh) * | 2020-02-19 | 2021-08-20 | 约翰内斯.海德汉博士有限公司 | 光学位置测量装置 |
| EP3869161A1 (de) * | 2020-02-19 | 2021-08-25 | Dr. Johannes Heidenhain GmbH | Optische positionsmesseinrichtung |
| US11644348B2 (en) | 2020-02-19 | 2023-05-09 | Dr. Johannes Heidenhain Gmbh | Optical position measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105910533A (zh) | 2016-08-31 |
| US9733069B2 (en) | 2017-08-15 |
| JP2016156805A (ja) | 2016-09-01 |
| CN105910533B (zh) | 2019-02-15 |
| JP6588836B2 (ja) | 2019-10-09 |
| EP3059554A1 (de) | 2016-08-24 |
| US20160245642A1 (en) | 2016-08-25 |
| EP3059554B1 (de) | 2017-08-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R012 | Request for examination validly filed | ||
| R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |