DE102015008969A1 - Dickenmessgerät, Dickenmessverfahen und Computerprogrammprodukt hierfür - Google Patents
Dickenmessgerät, Dickenmessverfahen und Computerprogrammprodukt hierfür Download PDFInfo
- Publication number
- DE102015008969A1 DE102015008969A1 DE102015008969.2A DE102015008969A DE102015008969A1 DE 102015008969 A1 DE102015008969 A1 DE 102015008969A1 DE 102015008969 A DE102015008969 A DE 102015008969A DE 102015008969 A1 DE102015008969 A1 DE 102015008969A1
- Authority
- DE
- Germany
- Prior art keywords
- light
- measured object
- thickness
- focus position
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- BUHVIAUBTBOHAG-FOYDDCNASA-N (2r,3r,4s,5r)-2-[6-[[2-(3,5-dimethoxyphenyl)-2-(2-methylphenyl)ethyl]amino]purin-9-yl]-5-(hydroxymethyl)oxolane-3,4-diol Chemical compound COC1=CC(OC)=CC(C(CNC=2C=3N=CN(C=3N=CN=2)[C@H]2[C@@H]([C@H](O)[C@@H](CO)O2)O)C=2C(=CC=CC=2)C)=C1 BUHVIAUBTBOHAG-FOYDDCNASA-N 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014147542A JP2016024009A (ja) | 2014-07-18 | 2014-07-18 | 厚さ測定装置及び厚さ測定方法 |
| JP2014-147542 | 2014-07-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102015008969A1 true DE102015008969A1 (de) | 2016-01-21 |
Family
ID=55021862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102015008969.2A Withdrawn DE102015008969A1 (de) | 2014-07-18 | 2015-07-10 | Dickenmessgerät, Dickenmessverfahen und Computerprogrammprodukt hierfür |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9354044B2 (https=) |
| JP (1) | JP2016024009A (https=) |
| DE (1) | DE102015008969A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116295051A (zh) * | 2023-03-20 | 2023-06-23 | 河北日泰新型管材有限公司 | 一种基于特频光照识别技术的交联聚乙烯管壁厚测量方法 |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10317344B2 (en) * | 2016-09-07 | 2019-06-11 | Kla-Tencor Corporation | Speed enhancement of chromatic confocal metrology |
| JP6762221B2 (ja) * | 2016-12-19 | 2020-09-30 | 大塚電子株式会社 | 光学特性測定装置および光学特性測定方法 |
| US10382230B2 (en) * | 2017-03-31 | 2019-08-13 | Mitsubishi Electric Research Laboratories, Inc. | System and method for channel estimation in mmWave communications exploiting joint AoD-AoA angular spread |
| CN109990719B (zh) * | 2019-04-11 | 2024-03-01 | 无锡奥特维科技股份有限公司 | 一种厚度检测设备和方法 |
| CN112556991B (zh) * | 2019-09-10 | 2024-11-12 | 宁波法里奥光学科技发展有限公司 | 一种镜片折射率测量装置及其测量方法 |
| CN110632073A (zh) * | 2019-09-25 | 2019-12-31 | 合肥京东方卓印科技有限公司 | 真空干燥设备及监控装置 |
| JP7141120B2 (ja) * | 2019-12-25 | 2022-09-22 | 株式会社ヒューテック | 厚み測定装置 |
| CN213481255U (zh) * | 2020-11-16 | 2021-06-18 | 海伯森技术（深圳）有限公司 | 一种线光谱共焦传感器 |
| US11486694B2 (en) * | 2020-12-18 | 2022-11-01 | Mitutoyo Corporation | Chromatic range sensor system for measuring workpiece thickness |
| JP7650585B2 (ja) * | 2021-01-22 | 2025-03-25 | 株式会社ディスコ | 計測装置 |
| CN116753852A (zh) * | 2023-07-18 | 2023-09-15 | 武汉颐光科技有限公司 | 一种光学散射测量中红外低吸收材料的厚度测量方法 |
| CN117006955A (zh) * | 2023-07-28 | 2023-11-07 | 江苏集萃激光科技有限公司 | 用于在线测量电池膜电极厚度的装置及方法 |
| CN118776471B (zh) * | 2024-06-12 | 2025-11-14 | 北京遥测技术研究所 | 一种基于法珀干涉原理的光学芯片厚度测量方法及装置 |
| CN121383871B (zh) * | 2025-12-23 | 2026-04-14 | 季华实验室 | 一种喷印高度测量计算方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011039026A (ja) | 2009-07-16 | 2011-02-24 | Mitsutoyo Corp | 光学式変位計 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58161808A (ja) * | 1982-03-19 | 1983-09-26 | Hitachi Ltd | レプリカの製造方法 |
| JPS60200108A (ja) * | 1984-03-23 | 1985-10-09 | Daicel Chem Ind Ltd | 光学式厚み測定法および装置 |
| GB2301884A (en) * | 1995-06-06 | 1996-12-18 | Holtronic Technologies Ltd | Characterising multilayer thin film systems by interferometry |
| JP2008276070A (ja) * | 2007-05-02 | 2008-11-13 | Olympus Corp | 拡大撮像装置 |
| US8149668B2 (en) * | 2008-12-24 | 2012-04-03 | Lite-On It Corporation | Optical disk drive and method for determining disk type |
| JP5994504B2 (ja) * | 2012-09-14 | 2016-09-21 | オムロン株式会社 | 共焦点計測装置 |
-
2014
- 2014-07-18 JP JP2014147542A patent/JP2016024009A/ja active Pending
-
2015
- 2015-07-09 US US14/795,311 patent/US9354044B2/en not_active Expired - Fee Related
- 2015-07-10 DE DE102015008969.2A patent/DE102015008969A1/de not_active Withdrawn
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011039026A (ja) | 2009-07-16 | 2011-02-24 | Mitsutoyo Corp | 光学式変位計 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116295051A (zh) * | 2023-03-20 | 2023-06-23 | 河北日泰新型管材有限公司 | 一种基于特频光照识别技术的交联聚乙烯管壁厚测量方法 |
| CN116295051B (zh) * | 2023-03-20 | 2024-01-05 | 河北日泰新型管材有限公司 | 一种基于特频光照识别技术的交联聚乙烯管壁厚测量方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US9354044B2 (en) | 2016-05-31 |
| US20160018213A1 (en) | 2016-01-21 |
| JP2016024009A (ja) | 2016-02-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R082 | Change of representative |
Representative=s name: MUELLER-BORE & PARTNER PATENTANWAELTE PARTG MB, DE |
|
| R012 | Request for examination validly filed | ||
| R016 | Response to examination communication | ||
| R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |