DE102013008061A1 - Erdalkalimetalloxid-Polymerpolierkissen - Google Patents

Erdalkalimetalloxid-Polymerpolierkissen Download PDF

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Publication number
DE102013008061A1
DE102013008061A1 DE102013008061A DE102013008061A DE102013008061A1 DE 102013008061 A1 DE102013008061 A1 DE 102013008061A1 DE 102013008061 A DE102013008061 A DE 102013008061A DE 102013008061 A DE102013008061 A DE 102013008061A DE 102013008061 A1 DE102013008061 A1 DE 102013008061A1
Authority
DE
Germany
Prior art keywords
polymeric
alkaline earth
earth metal
metal oxide
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102013008061A
Other languages
German (de)
English (en)
Inventor
David B. James
Donna M. Alden
Andrew R. Wank
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DuPont Electronic Materials Holding Inc
Original Assignee
Rohm and Haas Electronic Materials CMP Holdings Inc
Rohm and Haas Electronic Materials LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm and Haas Electronic Materials CMP Holdings Inc, Rohm and Haas Electronic Materials LLC filed Critical Rohm and Haas Electronic Materials CMP Holdings Inc
Publication of DE102013008061A1 publication Critical patent/DE102013008061A1/de
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
DE102013008061A 2012-05-11 2013-05-10 Erdalkalimetalloxid-Polymerpolierkissen Pending DE102013008061A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/469,527 US9073172B2 (en) 2012-05-11 2012-05-11 Alkaline-earth metal oxide-polymeric polishing pad
US13/469,527 2012-05-11

Publications (1)

Publication Number Publication Date
DE102013008061A1 true DE102013008061A1 (de) 2013-11-14

Family

ID=49475631

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102013008061A Pending DE102013008061A1 (de) 2012-05-11 2013-05-10 Erdalkalimetalloxid-Polymerpolierkissen

Country Status (8)

Country Link
US (1) US9073172B2 (https=)
JP (1) JP6093236B2 (https=)
KR (1) KR102016175B1 (https=)
CN (1) CN103386653B (https=)
DE (1) DE102013008061A1 (https=)
FR (1) FR2990439B1 (https=)
SG (1) SG195465A1 (https=)
TW (1) TWI572644B (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10086494B2 (en) * 2016-09-13 2018-10-02 Rohm And Haas Electronic Materials Cmp Holdings, Inc. High planarization efficiency chemical mechanical polishing pads and methods of making
US11524390B2 (en) * 2017-05-01 2022-12-13 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Methods of making chemical mechanical polishing layers having improved uniformity
US11638978B2 (en) * 2019-06-10 2023-05-02 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Low-debris fluopolymer composite CMP polishing pad
CN114450127B (zh) * 2019-07-12 2024-05-28 Cmc材料有限责任公司 采用多胺及环己烷二甲醇固化剂的抛光垫
US12138738B2 (en) * 2020-06-19 2024-11-12 Sk Enpulse Co., Ltd. Polishing pad, preparation method thereof and method for preparing semiconductor device using same
CN114310656B (zh) * 2020-09-29 2024-03-08 Sk恩普士有限公司 抛光垫、抛光垫的制造方法及半导体器件的制造方法
KR102502516B1 (ko) * 2021-03-12 2023-02-23 에스케이엔펄스 주식회사 연마 패드, 연마 패드의 제조 방법 및 이를 이용한 반도체 소자의 제조 방법
US20230015668A1 (en) * 2021-07-01 2023-01-19 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Cmp polishing pad
CN116262329B (zh) * 2021-12-13 2025-07-29 湖北鼎汇微电子材料有限公司 一种抛光垫

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5578362A (en) 1992-08-19 1996-11-26 Rodel, Inc. Polymeric polishing pad containing hollow polymeric microelements

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040029511A1 (en) * 2001-03-20 2004-02-12 Kincaid Don H. Abrasive articles having a polymeric material
US6838149B2 (en) * 2001-12-13 2005-01-04 3M Innovative Properties Company Abrasive article for the deposition and polishing of a conductive material
JP2004087912A (ja) * 2002-08-28 2004-03-18 Okamoto Machine Tool Works Ltd 基板の乾式化学機械研磨方法およびそれに用いる装置
US7579071B2 (en) * 2002-09-17 2009-08-25 Korea Polyol Co., Ltd. Polishing pad containing embedded liquid microelements and method of manufacturing the same
TW200720017A (en) * 2005-09-19 2007-06-01 Rohm & Haas Elect Mat Water-based polishing pads having improved adhesion properties and methods of manufacture
JP2009184858A (ja) * 2008-02-04 2009-08-20 Nippon Chem Ind Co Ltd ヒドラジンが固定化されたシリカ粒子よりなるコロイダルシリカ
JP5327425B2 (ja) * 2008-04-28 2013-10-30 Ｊｓｒ株式会社 化学機械研磨パッドおよび化学機械研磨方法
JP5222626B2 (ja) * 2008-05-20 2013-06-26 富士紡ホールディングス株式会社 研磨パッドおよび研磨パッドの製造方法
TW201016391A (en) * 2008-10-20 2010-05-01 Bestac Advanced Material Co Ltd Polishing pad having abrasive grains and method for making the same
US8257152B2 (en) * 2010-11-12 2012-09-04 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Silicate composite polishing pad
US8202334B2 (en) 2010-11-12 2012-06-19 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Method of forming silicate polishing pad
US8357446B2 (en) 2010-11-12 2013-01-22 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Hollow polymeric-silicate composite
US8894732B2 (en) * 2012-05-11 2014-11-25 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Hollow polymeric-alkaline earth metal oxide composite

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5578362A (en) 1992-08-19 1996-11-26 Rodel, Inc. Polymeric polishing pad containing hollow polymeric microelements

Non-Patent Citations (7)

* Cited by examiner, † Cited by third party
Title
"Introduction to Surface Roughness and Scattering" von Bennett und Mattsson
ASTM D1622
ASTM D2240
ASTM D412
ASTM D5279
ASTM Standard D1622
Reinhardt et al.

Also Published As

Publication number Publication date
US9073172B2 (en) 2015-07-07
JP6093236B2 (ja) 2017-03-08
KR102016175B1 (ko) 2019-08-29
SG195465A1 (en) 2013-12-30
US20130303061A1 (en) 2013-11-14
JP2013237147A (ja) 2013-11-28
KR20130126521A (ko) 2013-11-20
TWI572644B (zh) 2017-03-01
CN103386653B (zh) 2016-12-28
CN103386653A (zh) 2013-11-13
FR2990439B1 (fr) 2016-07-15
FR2990439A1 (fr) 2013-11-15
TW201402660A (zh) 2014-01-16

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Legal Events

Date Code Title Description
R012 Request for examination validly filed
R081 Change of applicant/patentee

Owner name: DUPONT ELECTRONIC MATERIALS HOLDING, INC., NEW, US

Free format text: FORMER OWNER: ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC., NEWARK, DEL., US

R082 Change of representative

Representative=s name: MUELLER-BORE & PARTNER PATENTANWAELTE PARTG MB, DE

Representative=s name: ABITZ & PARTNER PATENTANWAELTE MBB, DE

R082 Change of representative

Representative=s name: MUELLER-BORE & PARTNER PATENTANWAELTE PARTG MB, DE

R016 Response to examination communication