DE102008016923A1 - Vorrichtung zur Plasmabehandlung von Werkstücken - Google Patents

Vorrichtung zur Plasmabehandlung von Werkstücken Download PDF

Info

Publication number
DE102008016923A1
DE102008016923A1 DE102008016923A DE102008016923A DE102008016923A1 DE 102008016923 A1 DE102008016923 A1 DE 102008016923A1 DE 102008016923 A DE102008016923 A DE 102008016923A DE 102008016923 A DE102008016923 A DE 102008016923A DE 102008016923 A1 DE102008016923 A1 DE 102008016923A1
Authority
DE
Germany
Prior art keywords
seal
plasma
chamber
workpiece
workpieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102008016923A
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KHS GmbH
Original Assignee
KHS Corpoplast GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KHS Corpoplast GmbH filed Critical KHS Corpoplast GmbH
Priority to DE102008016923A priority Critical patent/DE102008016923A1/de
Priority to PCT/DE2009/000370 priority patent/WO2009121324A1/fr
Priority to DE112009001341T priority patent/DE112009001341A5/de
Publication of DE102008016923A1 publication Critical patent/DE102008016923A1/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45578—Elongated nozzles, tubes with holes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
DE102008016923A 2008-03-31 2008-03-31 Vorrichtung zur Plasmabehandlung von Werkstücken Pending DE102008016923A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE102008016923A DE102008016923A1 (de) 2008-03-31 2008-03-31 Vorrichtung zur Plasmabehandlung von Werkstücken
PCT/DE2009/000370 WO2009121324A1 (fr) 2008-03-31 2009-03-13 Dispositif de traitement de pièces au plasma
DE112009001341T DE112009001341A5 (de) 2008-03-31 2009-03-13 Vorrichtung zur Plasmabehandlung von Werkstücken

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008016923A DE102008016923A1 (de) 2008-03-31 2008-03-31 Vorrichtung zur Plasmabehandlung von Werkstücken

Publications (1)

Publication Number Publication Date
DE102008016923A1 true DE102008016923A1 (de) 2009-10-01

Family

ID=40910042

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102008016923A Pending DE102008016923A1 (de) 2008-03-31 2008-03-31 Vorrichtung zur Plasmabehandlung von Werkstücken
DE112009001341T Withdrawn DE112009001341A5 (de) 2008-03-31 2009-03-13 Vorrichtung zur Plasmabehandlung von Werkstücken

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE112009001341T Withdrawn DE112009001341A5 (de) 2008-03-31 2009-03-13 Vorrichtung zur Plasmabehandlung von Werkstücken

Country Status (2)

Country Link
DE (2) DE102008016923A1 (fr)
WO (1) WO2009121324A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011110162A1 (fr) * 2010-03-12 2011-09-15 Khs Corpoplast Gmbh & Co Kg Procédé et dispositif de traitement au plasma de pièces
DE102010023119A1 (de) * 2010-06-07 2011-12-22 Khs Corpoplast Gmbh Vorrichtung zur Plasmabehandlung von Werkstücken
WO2017102280A3 (fr) * 2015-12-14 2018-01-04 Khs Gmbh Procédé et dispositif de traitement par plasma de récipients
DE102022119836A1 (de) 2022-08-08 2024-02-08 Khs Gmbh Positionier- und Dichtvorrichtung für das Halten und Abdichten eines Werkstückes in einer Plasmakammer einer Plasmabeschichtungsvorrichtung

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995022413A1 (fr) 1994-02-16 1995-08-24 The Coca-Cola Company Recipients creux a revetement interieur inerte ou impermeable applique par reaction superficielle au plasma ou polymerisation superficielle
WO1999017334A1 (fr) 1997-09-30 1999-04-08 Tetra Laval Holdings & Finance S.A. Procede et appareil pour le traitement de la surface interieure de bouteilles en plastique, dans un procede active par plasma
EP1010773A1 (fr) 1997-02-19 2000-06-21 Kirin Beer Kabushiki Kaisha Procede et appareil pour produire un recipient plastique presentant un pelliculage en carbone
WO2000058631A1 (fr) 1999-03-30 2000-10-05 Sidel Machine a carrousel pour le traitement de corps creux comportant un circuit de distribution de pression perfectionne
WO2001031680A1 (fr) 1999-10-25 2001-05-03 Sidel Actis Services Circuit de vide pour un dispositif de traitement d'un recipient a l'aide d'un plasma a basse pression
DE19957744A1 (de) * 1999-12-01 2001-06-07 Tetra Laval Holdings & Finance Vorrichtung zum Abdichten des Stirnrandes eines Behälterhalses
WO2003100121A2 (fr) * 2002-05-24 2003-12-04 Schott Ag Dispositif d'application de revetement multiplace et procede d'application de revetement par plasma
DE10300734A1 (de) * 2003-01-11 2004-07-22 Sig Technology Ltd. Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE102004020185A1 (de) 2004-04-22 2005-11-24 Schott Ag Gaslanze für die Innenbeschichtung von Hohlkörpern
US20070102888A1 (en) * 2003-03-31 2007-05-10 Nichias Corporation Ring-shaped metal gasket

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3403317A1 (de) * 1984-01-31 1985-08-01 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur halterung der die mit substraten bestueckten boote tragenden quarzueberrohre an horizontalen einschwebvorrichtungen von niederdruckphasenbeschichtungsanlagen
DE19722205A1 (de) * 1997-05-27 1998-12-03 Leybold Systems Gmbh Verfahren und Vorrichtung zur Beschichtung von Kunststoff- oder Glasbehältern mittels eines PCVD-Beschichtungsverfahrens
DE10221461B4 (de) * 2002-05-15 2004-05-06 Schott Glas Vorrichtung und Verwendung einer Vorrichtung zum Aufnehmen und Vakuumabdichten eines Behältnisses mit einer Öffnung
DE10224546A1 (de) * 2002-05-24 2003-12-04 Sig Technology Ltd Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995022413A1 (fr) 1994-02-16 1995-08-24 The Coca-Cola Company Recipients creux a revetement interieur inerte ou impermeable applique par reaction superficielle au plasma ou polymerisation superficielle
EP1010773A1 (fr) 1997-02-19 2000-06-21 Kirin Beer Kabushiki Kaisha Procede et appareil pour produire un recipient plastique presentant un pelliculage en carbone
US6294226B1 (en) * 1997-02-19 2001-09-25 Kirin Beer Kabushiki Kaisha Method and apparatus for producing plastic container having carbon film coating
WO1999017334A1 (fr) 1997-09-30 1999-04-08 Tetra Laval Holdings & Finance S.A. Procede et appareil pour le traitement de la surface interieure de bouteilles en plastique, dans un procede active par plasma
WO2000058631A1 (fr) 1999-03-30 2000-10-05 Sidel Machine a carrousel pour le traitement de corps creux comportant un circuit de distribution de pression perfectionne
WO2001031680A1 (fr) 1999-10-25 2001-05-03 Sidel Actis Services Circuit de vide pour un dispositif de traitement d'un recipient a l'aide d'un plasma a basse pression
DE19957744A1 (de) * 1999-12-01 2001-06-07 Tetra Laval Holdings & Finance Vorrichtung zum Abdichten des Stirnrandes eines Behälterhalses
WO2003100121A2 (fr) * 2002-05-24 2003-12-04 Schott Ag Dispositif d'application de revetement multiplace et procede d'application de revetement par plasma
DE10300734A1 (de) * 2003-01-11 2004-07-22 Sig Technology Ltd. Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
US20070102888A1 (en) * 2003-03-31 2007-05-10 Nichias Corporation Ring-shaped metal gasket
DE102004020185A1 (de) 2004-04-22 2005-11-24 Schott Ag Gaslanze für die Innenbeschichtung von Hohlkörpern

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011110162A1 (fr) * 2010-03-12 2011-09-15 Khs Corpoplast Gmbh & Co Kg Procédé et dispositif de traitement au plasma de pièces
US9371585B2 (en) 2010-03-12 2016-06-21 Khs Corpoplast Gmbh Method and device for plasma-treating workpieces
DE102010023119A1 (de) * 2010-06-07 2011-12-22 Khs Corpoplast Gmbh Vorrichtung zur Plasmabehandlung von Werkstücken
WO2017102280A3 (fr) * 2015-12-14 2018-01-04 Khs Gmbh Procédé et dispositif de traitement par plasma de récipients
DE102015121773B4 (de) 2015-12-14 2019-10-24 Khs Gmbh Verfahren und Vorrichtung zur Plasmabehandlung von Behältern
US11660361B2 (en) 2015-12-14 2023-05-30 Khs Gmbh Method and device for the plasma processing of containers
DE102022119836A1 (de) 2022-08-08 2024-02-08 Khs Gmbh Positionier- und Dichtvorrichtung für das Halten und Abdichten eines Werkstückes in einer Plasmakammer einer Plasmabeschichtungsvorrichtung

Also Published As

Publication number Publication date
WO2009121324A1 (fr) 2009-10-08
DE112009001341A5 (de) 2011-03-24

Similar Documents

Publication Publication Date Title
EP1507886B1 (fr) Procede et dispositif pour le traitement au plasma de pieces
EP1507893B1 (fr) Procede et dispositif pour le traitement au plasma de pieces
EP1507890B1 (fr) Procede et dispositif pour le traitement au plasma de pieces
DE10224547B4 (de) Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE102010055155A1 (de) Verfahren zur Plasmabehandlung von Werkstücken sowie Werkstück mit Gasbarriereschicht
EP1507723B1 (fr) Procede et dispositif pour la manipulation de pieces
DE102015121773B4 (de) Verfahren und Vorrichtung zur Plasmabehandlung von Behältern
EP3433395B1 (fr) Procédé et dispositif de traitement par plasma de récipients
DE102010023119A1 (de) Vorrichtung zur Plasmabehandlung von Werkstücken
DE102008016923A1 (de) Vorrichtung zur Plasmabehandlung von Werkstücken
EP2630273B1 (fr) Procédé de traitement au plasma de pièces
EP1507889B1 (fr) Procede et dispositif pour le traitement au plasma de pieces
DE102011104730A1 (de) Verfahren zur Plasmabehandlung von Werkstücken sowie Werkstück mit Gasbarriereschicht
EP1507885B1 (fr) Procede et dispositif pour le traitement au plasma de pieces
DE102014017871A1 (de) Reckstange für den Form-und Füllkopf einer Maschine zum Formen und Füllen von Behältern aus Vorformlingen
EP1507884B1 (fr) Procede et dispositif pour le traitement au plasma de pieces
DE102007045216A1 (de) Vorrichtung zur Plasmabehandlung von Werkstücken
DE10225609A1 (de) Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
WO2003100117A1 (fr) Procede et dispositif pour le traitement au plasma de pieces
WO2003100118A2 (fr) Procede et dispositif pour traiter des pieces

Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8181 Inventor (new situation)

Inventor name: SIEBELS, SOENKE, 22303 HAMBURG, DE

R081 Change of applicant/patentee

Owner name: KHS CORPOPLAST GMBH, DE

Free format text: FORMER OWNER: KHS CORPOPLAST GMBH & CO. KG, 20539 HAMBURG, DE

Effective date: 20110504