DE102007038702A1 - Verfahren und System zum Reduzieren der Überlagerungsfehler in Belichtungsfeldern mittels APC-Steuerungsstrategien - Google Patents
Verfahren und System zum Reduzieren der Überlagerungsfehler in Belichtungsfeldern mittels APC-Steuerungsstrategien Download PDFInfo
- Publication number
- DE102007038702A1 DE102007038702A1 DE102007038702A DE102007038702A DE102007038702A1 DE 102007038702 A1 DE102007038702 A1 DE 102007038702A1 DE 102007038702 A DE102007038702 A DE 102007038702A DE 102007038702 A DE102007038702 A DE 102007038702A DE 102007038702 A1 DE102007038702 A1 DE 102007038702A1
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- 238000000034 method Methods 0.000 title claims abstract description 103
- 238000011217 control strategy Methods 0.000 title description 3
- 238000005259 measurement Methods 0.000 claims abstract description 109
- 238000012937 correction Methods 0.000 claims abstract description 50
- 238000001459 lithography Methods 0.000 claims description 59
- 239000000758 substrate Substances 0.000 claims description 49
- 238000004519 manufacturing process Methods 0.000 claims description 33
- 238000003384 imaging method Methods 0.000 claims description 8
- 230000008569 process Effects 0.000 abstract description 62
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- 238000004886 process control Methods 0.000 description 3
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70633—Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
- G03F7/70458—Mix-and-match, i.e. multiple exposures of the same area using a similar type of exposure apparatus, e.g. multiple exposures using a UV apparatus
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70681—Metrology strategies
- G03F7/70683—Mark designs
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/706835—Metrology information management or control
- G03F7/706839—Modelling, e.g. modelling scattering or solving inverse problems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70783—Handling stress or warp of chucks, masks or workpieces, e.g. to compensate for imaging errors or considerations related to warpage of masks or workpieces due to their own weight
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7007—Alignment other than original with workpiece
- G03F9/7011—Pre-exposure scan; original with original holder alignment; Prealignment, i.e. workpiece with workpiece holder
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7019—Calibration
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7046—Strategy, e.g. mark, sensor or wavelength selection
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007038702A DE102007038702A1 (de) | 2006-08-31 | 2007-08-16 | Verfahren und System zum Reduzieren der Überlagerungsfehler in Belichtungsfeldern mittels APC-Steuerungsstrategien |
| CN2007800324545A CN101535898B (zh) | 2006-08-31 | 2007-08-24 | 用于通过apc控制策略来减少曝光场内的覆盖误差的方法及系统 |
| PCT/EP2007/007453 WO2008025492A1 (en) | 2006-08-31 | 2007-08-24 | A method and a system for reducing overlay errors within exposure fields by apc control strategies |
| JP2009525960A JP5134625B2 (ja) | 2006-08-31 | 2007-08-24 | Ａｐｃ制御ストラテジーにより露光フィールド内のオーバーレイ誤差を小さくする方法およびシステム |
| EP07801880A EP2057506B1 (en) | 2006-08-31 | 2007-08-24 | A method and a system for reducing overlay errors within exposure fields by apc control strategies |
| KR1020097005323A KR101421258B1 (ko) | 2006-08-31 | 2007-08-24 | Ａｐｃ 제어 방법으로 노출 필드 내 오버레이 오차를 줄이는 방법 및 시스템 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102006040766 | 2006-08-31 | ||
| DE102006040766.0 | 2006-08-31 | ||
| DE102007038702A DE102007038702A1 (de) | 2006-08-31 | 2007-08-16 | Verfahren und System zum Reduzieren der Überlagerungsfehler in Belichtungsfeldern mittels APC-Steuerungsstrategien |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102007038702A1 true DE102007038702A1 (de) | 2008-07-31 |
Family
ID=38752431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102007038702A Ceased DE102007038702A1 (de) | 2006-08-31 | 2007-08-16 | Verfahren und System zum Reduzieren der Überlagerungsfehler in Belichtungsfeldern mittels APC-Steuerungsstrategien |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP2057506B1 (https=) |
| JP (1) | JP5134625B2 (https=) |
| KR (1) | KR101421258B1 (https=) |
| DE (1) | DE102007038702A1 (https=) |
| WO (1) | WO2008025492A1 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL2009345A (en) | 2011-09-28 | 2013-04-02 | Asml Netherlands Bv | Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods. |
| US9442391B2 (en) | 2013-03-12 | 2016-09-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Overlay sampling methodology |
| US10146141B2 (en) | 2014-08-28 | 2018-12-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lithography process and system with enhanced overlay quality |
| US10289009B2 (en) | 2015-07-03 | 2019-05-14 | Asml Netherlands B.V. | Lithographic apparatus, control method and computer program product |
| US9841687B2 (en) | 2015-07-14 | 2017-12-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Synchronized integrated metrology for overlay-shift reduction |
| JP2021508078A (ja) | 2017-12-19 | 2021-02-25 | エーエスエムエル ネザーランズ ビー．ブイ． | 計算メトロロジに基づく補正および制御 |
| KR102739716B1 (ko) * | 2019-08-22 | 2024-12-05 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 장치 제어 방법 |
| KR102824041B1 (ko) | 2020-02-19 | 2025-06-23 | 에스케이하이닉스 주식회사 | 반도체 장치 및 반도체 장치의 제조 방법 |
| KR20250015898A (ko) * | 2023-07-24 | 2025-02-03 | 캐논 가부시끼가이샤 | 리소그래피 방법, 물품 제조방법, 정보 처리방법, 컴퓨터 프로그램 및 정보 처리장치 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0738376B2 (ja) * | 1993-08-13 | 1995-04-26 | 株式会社ニコン | 投影露光装置 |
| JP3651074B2 (ja) * | 1995-09-13 | 2005-05-25 | 株式会社ニコン | 露光方法、それを用いた半導体集積回路又は液晶表示素子の製造方法、及び露光装置 |
| JP2000114132A (ja) * | 1998-10-01 | 2000-04-21 | Hitachi Ulsi Systems Co Ltd | 生産支援システム、重ね合わせ精度の検査方法および記録媒体 |
| JP4022374B2 (ja) | 2001-01-26 | 2007-12-19 | 株式会社ルネサステクノロジ | 半導体デバイスの製造方法およびそのシステム |
| JP2002280286A (ja) * | 2001-03-19 | 2002-09-27 | Hitachi Ltd | 電子装置の製造方法、露光制御システム並びに電子部品及びその製造方法 |
| JP3626448B2 (ja) * | 2001-11-28 | 2005-03-09 | 株式会社東芝 | 露光方法 |
| TWI266154B (en) | 2004-09-21 | 2006-11-11 | Promos Technologies Inc | Method and system for determining lithography overlay offsets |
| TWI281115B (en) | 2005-01-25 | 2007-05-11 | Promos Technologies Inc | Integration system for managing photolithography tools and the method for operating the same |
-
2007
- 2007-08-16 DE DE102007038702A patent/DE102007038702A1/de not_active Ceased
- 2007-08-24 JP JP2009525960A patent/JP5134625B2/ja active Active
- 2007-08-24 EP EP07801880A patent/EP2057506B1/en active Active
- 2007-08-24 WO PCT/EP2007/007453 patent/WO2008025492A1/en not_active Ceased
- 2007-08-24 KR KR1020097005323A patent/KR101421258B1/ko active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010502024A (ja) | 2010-01-21 |
| KR20090067139A (ko) | 2009-06-24 |
| JP5134625B2 (ja) | 2013-01-30 |
| WO2008025492A1 (en) | 2008-03-06 |
| KR101421258B1 (ko) | 2014-07-18 |
| EP2057506B1 (en) | 2012-08-01 |
| EP2057506A1 (en) | 2009-05-13 |
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| Date | Code | Title | Description |
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| OP8 | Request for examination as to paragraph 44 patent law | ||
| R016 | Response to examination communication | ||
| R002 | Refusal decision in examination/registration proceedings | ||
| R003 | Refusal decision now final |
Effective date: 20140614 |