DE10196376B4 - Doppel-Pendelschieberventil-Baugruppe - Google Patents

Doppel-Pendelschieberventil-Baugruppe Download PDF

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Publication number
DE10196376B4
DE10196376B4 DE10196376T DE10196376T DE10196376B4 DE 10196376 B4 DE10196376 B4 DE 10196376B4 DE 10196376 T DE10196376 T DE 10196376T DE 10196376 T DE10196376 T DE 10196376T DE 10196376 B4 DE10196376 B4 DE 10196376B4
Authority
DE
Germany
Prior art keywords
valve body
valve
shaft
valve assembly
assembly according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10196376T
Other languages
German (de)
English (en)
Other versions
DE10196376T1 (de
Inventor
Joseph Ashurst Jun. Wenham Maher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of DE10196376T1 publication Critical patent/DE10196376T1/de
Application granted granted Critical
Publication of DE10196376B4 publication Critical patent/DE10196376B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87917—Flow path with serial valves and/or closures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87917—Flow path with serial valves and/or closures
    • Y10T137/87981—Common actuator

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Mechanically-Actuated Valves (AREA)
  • Compressor (AREA)
  • Lift Valve (AREA)
  • Details Of Valves (AREA)
DE10196376T 2000-06-28 2001-06-21 Doppel-Pendelschieberventil-Baugruppe Expired - Fee Related DE10196376B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/606,382 2000-06-28
US09/606,382 US6328051B1 (en) 2000-06-28 2000-06-28 Dual pendulum valve assembly
PCT/US2001/019765 WO2002001035A2 (en) 2000-06-28 2001-06-21 Dual pendulum valve assembly

Publications (2)

Publication Number Publication Date
DE10196376T1 DE10196376T1 (de) 2003-09-11
DE10196376B4 true DE10196376B4 (de) 2008-08-07

Family

ID=24427741

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10196376T Expired - Fee Related DE10196376B4 (de) 2000-06-28 2001-06-21 Doppel-Pendelschieberventil-Baugruppe
DE10165035A Expired - Fee Related DE10165035B3 (de) 2000-06-28 2001-06-21 Verfahren und System zur präzisen Steuerung des Vakuumdrucks im Inneren einer Prozesskammer

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE10165035A Expired - Fee Related DE10165035B3 (de) 2000-06-28 2001-06-21 Verfahren und System zur präzisen Steuerung des Vakuumdrucks im Inneren einer Prozesskammer

Country Status (5)

Country Link
US (1) US6328051B1 (cg-RX-API-DMAC7.html)
JP (1) JP4785326B2 (cg-RX-API-DMAC7.html)
DE (2) DE10196376B4 (cg-RX-API-DMAC7.html)
GB (1) GB2380242B (cg-RX-API-DMAC7.html)
WO (1) WO2002001035A2 (cg-RX-API-DMAC7.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10394005B4 (de) * 2002-12-30 2011-01-27 Mks Instruments Inc., Andover Pendelventil-Baugruppe
US9638335B2 (en) 2015-01-08 2017-05-02 King Lai Hygienic Materials Co., Ltd. Double sealing valve
US10184570B2 (en) 2015-03-27 2019-01-22 Vat Holding Ag Vacuum valve
DE102012021354B4 (de) 2011-11-04 2024-02-22 Smc Corporation Nicht gleitendes Schieberventil

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6863256B2 (en) * 2003-02-20 2005-03-08 Mks Instruments, Inc. Seal ring for pendulum valve assembly
US7032882B2 (en) * 2003-09-29 2006-04-25 Mks Instruments, Inc. Valve assembly having novel flow characteristics
US7422653B2 (en) * 2004-07-13 2008-09-09 Applied Materials, Inc. Single-sided inflatable vertical slit valve
US7278444B2 (en) * 2005-02-22 2007-10-09 Mks Instruments, Inc. Valve assembly having improved pump-down performance
FR2915550B1 (fr) * 2007-04-27 2012-05-11 Snecma Vanne a clapet pour un systeme de refroidissement dans une turbomachine
US7762526B2 (en) * 2007-08-27 2010-07-27 Nor-Cal Products, Inc. Pendulum valve having independently and rapidly controllable theta-and z-axis motion
JP4714835B1 (ja) * 2009-12-01 2011-06-29 プログレッシオ合同会社 真空用ゲートバルブ
JP4654370B1 (ja) * 2010-08-10 2011-03-16 プログレッシオ合同会社 真空用ゲートバルブ
US8833383B2 (en) 2011-07-20 2014-09-16 Ferrotec (Usa) Corporation Multi-vane throttle valve
TW201340045A (zh) * 2012-03-26 2013-10-01 Hon Hai Prec Ind Co Ltd 基於無線傳輸的監測系統及其監測方法
JP6507516B2 (ja) * 2014-08-06 2019-05-08 株式会社島津製作所 真空バルブ
KR101739729B1 (ko) 2016-08-09 2017-06-14 주식회사 세이프티연구개발 비상용 슬라이드를 더 구비한 차단밸브
EP3372881A1 (de) * 2017-03-07 2018-09-12 VAT Holding AG Optimierte druckregelung für und mit einem vakuumventil
US10704715B2 (en) * 2017-05-29 2020-07-07 Shimadzu Corporation Vacuum pumping device, vacuum pump, and vacuum valve
EP3421852A1 (de) * 2017-06-30 2019-01-02 VAT Holding AG Vakuumventil mit inertialsensor
DE102022129356A1 (de) * 2022-11-07 2024-05-08 Vat Holding Ag Vakuumventil

Citations (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1050435A (cg-RX-API-DMAC7.html) *
US1483081A (en) * 1921-03-12 1924-02-12 Peter P Dean Valve
US2749082A (en) * 1954-12-31 1956-06-05 Cameron Iron Works Inc Valve mechanism
US2850260A (en) * 1954-08-23 1958-09-02 Vacuum Res Company Gate valve
DE1190755B (de) * 1960-06-29 1965-04-08 Commissariat Energie Atomique Absperrschieber
US3557822A (en) * 1969-05-08 1971-01-26 Clyde H Chronister Gate valve
US3722857A (en) * 1971-04-19 1973-03-27 C Townsend Gate valve
US3854696A (en) * 1971-12-14 1974-12-17 Young J & Cunningham Ltd Fluid flow valve
US3972753A (en) * 1973-11-15 1976-08-03 U.S. Philips Corporation Method for the epitaxial growth from the liquid phase
US4052036A (en) * 1974-07-15 1977-10-04 Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik Sliding device for the gas-tight and air-tight closure of a container opening or of a conduit
US4073468A (en) * 1976-09-16 1978-02-14 Erwin Robert L Rotary plug valve
US4088301A (en) * 1975-11-15 1978-05-09 Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik Valve arrangement for a vacuum line
US4089505A (en) * 1975-11-08 1978-05-16 Leybold-Heraeus Gmbh & Co. Kommandit-Gesellschaft Oscillating slide valve
US4135854A (en) * 1976-12-16 1979-01-23 Westinghouse Electric Corp. Control system for variable pitch axial fan for utility boiler
GB2032582A (en) * 1978-10-28 1980-05-08 Westinghouse Brake & Signal Improvements relating to apparatus for handling bulk or fluent materials
US4333631A (en) * 1979-11-24 1982-06-08 Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik Pipe valve assembly with metal valve slide for high vacuum installations
US4395049A (en) * 1979-12-19 1983-07-26 Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik Metallic sealing device for a high-vacuum closure
US4442996A (en) * 1982-03-08 1984-04-17 Josiephine R. Erwin Tapered rotary plug valve
US4458905A (en) * 1979-11-26 1984-07-10 Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik Sealing device for a high-vacuum closure
US4519578A (en) * 1983-03-11 1985-05-28 Dover Corporation High pressure cam seal valve
US4627567A (en) * 1984-12-04 1986-12-09 Mtu Friedrichshafen Gmbh Pivotal slide valve
US4785844A (en) * 1987-08-26 1988-11-22 C & S Valve Company Double-seal flexible gate valve
US4921213A (en) * 1988-09-14 1990-05-01 Vat Holding Ag Valve slide
US5330157A (en) * 1993-07-28 1994-07-19 Hull Corporation Rotary disk valve
US5379983A (en) * 1993-12-21 1995-01-10 Vat Holding Ag Shut-off valves for pipelines
US5577707A (en) * 1995-12-18 1996-11-26 Vat Holding Ag Slide valve
US5873562A (en) * 1996-01-29 1999-02-23 Vat Holding Ag Control apparatus for controlling gas flow in a molecular region
EP1063457A2 (en) * 1999-06-23 2000-12-27 Mks Instruments, Inc. Pendulum valve assembly

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3120944A (en) 1960-06-29 1964-02-11 Commissariat Energie Atomique Mechanical movement gate-valve having positive reduction means
GB1111281A (en) * 1965-02-03 1968-04-24 Speedwell Res Ltd Improvements in fluid control valves
US3973753A (en) 1974-03-18 1976-08-10 Varian Associates High vacuum gate valve
US4044993A (en) 1974-03-18 1977-08-30 Varian Associates, Inc. High vacuum gate valve
CH600223A5 (cg-RX-API-DMAC7.html) 1975-07-01 1978-06-15 Vat Ag
JPS5470131U (cg-RX-API-DMAC7.html) * 1977-10-28 1979-05-18
DE2820531A1 (de) 1978-05-11 1979-11-15 Leybold Heraeus Gmbh & Co Kg Antrieb fuer ventile, schieber u.dgl.
US4524796A (en) * 1982-09-24 1985-06-25 The United States Of America As Represented By The United States Department Of Energy Sliding-gate valve for use with abrasive materials
JPS63231071A (ja) * 1987-03-18 1988-09-27 Kikkoman Corp 耐圧仕切弁
JPH01146073U (cg-RX-API-DMAC7.html) * 1988-03-30 1989-10-06
US5120019A (en) 1989-08-03 1992-06-09 Brooks Automation, Inc. Valve
US5314164A (en) 1992-07-17 1994-05-24 Mks Instruments, Inc. Pivotal diaphragm, flow control valve
JP4055032B2 (ja) * 1998-09-30 2008-03-05 トキコテクノ株式会社 弁装置
US6161576A (en) * 1999-06-23 2000-12-19 Mks Instruments, Inc. Integrated turbo pump and control valve system

Patent Citations (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1050435A (cg-RX-API-DMAC7.html) *
US1483081A (en) * 1921-03-12 1924-02-12 Peter P Dean Valve
US2850260A (en) * 1954-08-23 1958-09-02 Vacuum Res Company Gate valve
US2749082A (en) * 1954-12-31 1956-06-05 Cameron Iron Works Inc Valve mechanism
DE1190755B (de) * 1960-06-29 1965-04-08 Commissariat Energie Atomique Absperrschieber
US3557822A (en) * 1969-05-08 1971-01-26 Clyde H Chronister Gate valve
US3722857A (en) * 1971-04-19 1973-03-27 C Townsend Gate valve
US3854696A (en) * 1971-12-14 1974-12-17 Young J & Cunningham Ltd Fluid flow valve
US3972753A (en) * 1973-11-15 1976-08-03 U.S. Philips Corporation Method for the epitaxial growth from the liquid phase
US4052036A (en) * 1974-07-15 1977-10-04 Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik Sliding device for the gas-tight and air-tight closure of a container opening or of a conduit
US4089505A (en) * 1975-11-08 1978-05-16 Leybold-Heraeus Gmbh & Co. Kommandit-Gesellschaft Oscillating slide valve
US4088301A (en) * 1975-11-15 1978-05-09 Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik Valve arrangement for a vacuum line
US4073468A (en) * 1976-09-16 1978-02-14 Erwin Robert L Rotary plug valve
US4135854A (en) * 1976-12-16 1979-01-23 Westinghouse Electric Corp. Control system for variable pitch axial fan for utility boiler
GB2032582A (en) * 1978-10-28 1980-05-08 Westinghouse Brake & Signal Improvements relating to apparatus for handling bulk or fluent materials
US4333631A (en) * 1979-11-24 1982-06-08 Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik Pipe valve assembly with metal valve slide for high vacuum installations
US4458905A (en) * 1979-11-26 1984-07-10 Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik Sealing device for a high-vacuum closure
US4395049A (en) * 1979-12-19 1983-07-26 Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik Metallic sealing device for a high-vacuum closure
US4442996A (en) * 1982-03-08 1984-04-17 Josiephine R. Erwin Tapered rotary plug valve
US4519578A (en) * 1983-03-11 1985-05-28 Dover Corporation High pressure cam seal valve
US4627567A (en) * 1984-12-04 1986-12-09 Mtu Friedrichshafen Gmbh Pivotal slide valve
US4785844A (en) * 1987-08-26 1988-11-22 C & S Valve Company Double-seal flexible gate valve
US4921213A (en) * 1988-09-14 1990-05-01 Vat Holding Ag Valve slide
US5330157A (en) * 1993-07-28 1994-07-19 Hull Corporation Rotary disk valve
US5379983A (en) * 1993-12-21 1995-01-10 Vat Holding Ag Shut-off valves for pipelines
US5577707A (en) * 1995-12-18 1996-11-26 Vat Holding Ag Slide valve
US5873562A (en) * 1996-01-29 1999-02-23 Vat Holding Ag Control apparatus for controlling gas flow in a molecular region
EP1063457A2 (en) * 1999-06-23 2000-12-27 Mks Instruments, Inc. Pendulum valve assembly

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10394005B4 (de) * 2002-12-30 2011-01-27 Mks Instruments Inc., Andover Pendelventil-Baugruppe
DE102012021354B4 (de) 2011-11-04 2024-02-22 Smc Corporation Nicht gleitendes Schieberventil
US9638335B2 (en) 2015-01-08 2017-05-02 King Lai Hygienic Materials Co., Ltd. Double sealing valve
US10184570B2 (en) 2015-03-27 2019-01-22 Vat Holding Ag Vacuum valve

Also Published As

Publication number Publication date
GB2380242A (en) 2003-04-02
US6328051B1 (en) 2001-12-11
DE10165035B3 (de) 2013-10-17
GB2380242B (en) 2004-06-16
JP4785326B2 (ja) 2011-10-05
JP2004502105A (ja) 2004-01-22
WO2002001035A2 (en) 2002-01-03
WO2002001035A3 (en) 2002-03-14
GB0229782D0 (en) 2003-01-29
DE10196376T1 (de) 2003-09-11

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