DE10045428A1 - Silicium-Bor-Kohlenstoff-Stickstoff-Keramiken und Vorläuferverbindungen, Verfahren zu deren Herstellung sowie deren Verwendung - Google Patents
Silicium-Bor-Kohlenstoff-Stickstoff-Keramiken und Vorläuferverbindungen, Verfahren zu deren Herstellung sowie deren VerwendungInfo
- Publication number
- DE10045428A1 DE10045428A1 DE10045428A DE10045428A DE10045428A1 DE 10045428 A1 DE10045428 A1 DE 10045428A1 DE 10045428 A DE10045428 A DE 10045428A DE 10045428 A DE10045428 A DE 10045428A DE 10045428 A1 DE10045428 A1 DE 10045428A1
- Authority
- DE
- Germany
- Prior art keywords
- ceramic
- hal
- compound
- amine
- hydrocarbon radical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 150000001875 compounds Chemical class 0.000 title claims abstract description 48
- 238000000034 method Methods 0.000 title claims abstract description 31
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 239000000919 ceramic Substances 0.000 title claims description 53
- 239000002243 precursor Substances 0.000 title description 11
- ZQOBAJVOKBJPEE-UHFFFAOYSA-N [B].[C].[N].[Si] Chemical compound [B].[C].[N].[Si] ZQOBAJVOKBJPEE-UHFFFAOYSA-N 0.000 title 1
- 150000001412 amines Chemical class 0.000 claims abstract description 14
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 4
- JFARXVHRYLERAI-UHFFFAOYSA-N B[SiH2]N Chemical class B[SiH2]N JFARXVHRYLERAI-UHFFFAOYSA-N 0.000 claims abstract description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 29
- 125000004432 carbon atom Chemical group C* 0.000 claims description 19
- 239000004215 Carbon black (E152) Substances 0.000 claims description 16
- 229930195733 hydrocarbon Natural products 0.000 claims description 16
- 229910021529 ammonia Inorganic materials 0.000 claims description 14
- -1 boryl silyl amine Chemical compound 0.000 claims description 14
- 239000001257 hydrogen Substances 0.000 claims description 12
- 229910052739 hydrogen Inorganic materials 0.000 claims description 12
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 12
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 239000000835 fiber Substances 0.000 claims description 9
- 239000007789 gas Substances 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 239000012298 atmosphere Substances 0.000 claims description 8
- UORVGPXVDQYIDP-UHFFFAOYSA-N borane Chemical compound B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 claims description 8
- 229910052794 bromium Inorganic materials 0.000 claims description 7
- 238000005524 ceramic coating Methods 0.000 claims description 7
- 229910052801 chlorine Inorganic materials 0.000 claims description 7
- 229910052740 iodine Inorganic materials 0.000 claims description 7
- 229910052582 BN Inorganic materials 0.000 claims description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 6
- 238000005229 chemical vapour deposition Methods 0.000 claims description 6
- 238000002360 preparation method Methods 0.000 claims description 6
- 229910000077 silane Inorganic materials 0.000 claims description 6
- 239000002131 composite material Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- MHSVPESLLPEISB-UHFFFAOYSA-N 1,1-dichloro-n-(trichlorosilyl)-boranamine Chemical group ClB(Cl)N[Si](Cl)(Cl)Cl MHSVPESLLPEISB-UHFFFAOYSA-N 0.000 claims description 4
- 229910007991 Si-N Inorganic materials 0.000 claims description 4
- 229910006294 Si—N Inorganic materials 0.000 claims description 4
- 229910000085 borane Inorganic materials 0.000 claims description 4
- 238000006704 dehydrohalogenation reaction Methods 0.000 claims description 4
- 238000000465 moulding Methods 0.000 claims description 4
- 238000005240 physical vapour deposition Methods 0.000 claims description 4
- 229910002106 crystalline ceramic Inorganic materials 0.000 claims description 3
- 239000011222 crystalline ceramic Substances 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 claims description 2
- FJUPHZVEXJHQLE-UHFFFAOYSA-N N-[dimethylamino-(silylamino)boranyl]-N-methylmethanamine Chemical compound CN(C)B(N[SiH3])N(C)C FJUPHZVEXJHQLE-UHFFFAOYSA-N 0.000 claims description 2
- 239000007983 Tris buffer Substances 0.000 claims description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 2
- 239000012159 carrier gas Substances 0.000 claims description 2
- 125000002147 dimethylamino group Chemical group [H]C([H])([H])N(*)C([H])([H])[H] 0.000 claims description 2
- 239000004744 fabric Substances 0.000 claims description 2
- 239000011888 foil Substances 0.000 claims description 2
- 150000002430 hydrocarbons Chemical class 0.000 claims description 2
- 239000012442 inert solvent Substances 0.000 claims description 2
- 238000001746 injection moulding Methods 0.000 claims description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 2
- 239000002904 solvent Substances 0.000 claims description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims description 2
- 229920002554 vinyl polymer Polymers 0.000 claims description 2
- CFOAUMXQOCBWNJ-UHFFFAOYSA-N [B].[Si] Chemical compound [B].[Si] CFOAUMXQOCBWNJ-UHFFFAOYSA-N 0.000 claims 5
- BWJXZAWGSCPZIZ-UHFFFAOYSA-N BN[SiH3] Chemical class BN[SiH3] BWJXZAWGSCPZIZ-UHFFFAOYSA-N 0.000 claims 1
- SHFWTBUAUPZPCK-UHFFFAOYSA-N N-chloro-N-dichloroboranyl-1-dimethylsilylmethanamine Chemical compound ClN(C[SiH](C)C)B(Cl)Cl SHFWTBUAUPZPCK-UHFFFAOYSA-N 0.000 claims 1
- 125000000707 boryl group Chemical group B* 0.000 claims 1
- 238000002425 crystallisation Methods 0.000 claims 1
- 230000008025 crystallization Effects 0.000 claims 1
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 claims 1
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 26
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 20
- 238000006243 chemical reaction Methods 0.000 description 18
- 229920000642 polymer Polymers 0.000 description 15
- 239000000460 chlorine Substances 0.000 description 13
- 238000004132 cross linking Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229910052796 boron Inorganic materials 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 239000002244 precipitate Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 4
- AGIRUHDXGXFMEU-UHFFFAOYSA-N n-dichloroboranyl-n-trichlorosilylmethanamine Chemical compound ClB(Cl)N(C)[Si](Cl)(Cl)Cl AGIRUHDXGXFMEU-UHFFFAOYSA-N 0.000 description 4
- 239000011541 reaction mixture Substances 0.000 description 4
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000005915 ammonolysis reaction Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 3
- 239000000706 filtrate Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000000197 pyrolysis Methods 0.000 description 3
- 230000035484 reaction time Effects 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000005046 Chlorosilane Substances 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 238000007098 aminolysis reaction Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical class Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 2
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000013067 intermediate product Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- NQMRYBIKMRVZLB-UHFFFAOYSA-N methylamine hydrochloride Chemical compound [Cl-].[NH3+]C NQMRYBIKMRVZLB-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910003697 SiBN Inorganic materials 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 239000000010 aprotic solvent Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- UORVGPXVDQYIDP-BJUDXGSMSA-N borane Chemical class [10BH3] UORVGPXVDQYIDP-BJUDXGSMSA-N 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- USAWKSHHLNIEQM-UHFFFAOYSA-N chloro(methyl)borane Chemical class CBCl USAWKSHHLNIEQM-UHFFFAOYSA-N 0.000 description 1
- YGZSVWMBUCGDCV-UHFFFAOYSA-N chloro(methyl)silane Chemical class C[SiH2]Cl YGZSVWMBUCGDCV-UHFFFAOYSA-N 0.000 description 1
- NEHMKBQYUWJMIP-UHFFFAOYSA-N chloromethane Chemical compound ClC NEHMKBQYUWJMIP-UHFFFAOYSA-N 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 229920006037 cross link polymer Polymers 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000006735 deficit Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- YOODLSJCDALOBI-UHFFFAOYSA-N dichloromethylborane Chemical compound BC(Cl)Cl YOODLSJCDALOBI-UHFFFAOYSA-N 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 150000002366 halogen compounds Chemical class 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 125000000250 methylamino group Chemical group [H]N(*)C([H])([H])[H] 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- NCMVPNWADQCPNO-UHFFFAOYSA-N n-trichlorosilylmethanamine Chemical compound CN[Si](Cl)(Cl)Cl NCMVPNWADQCPNO-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910052575 non-oxide ceramic Inorganic materials 0.000 description 1
- 239000011225 non-oxide ceramic Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 150000003141 primary amines Chemical class 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 125000000467 secondary amino group Chemical group [H]N([*:1])[*:2] 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- DWAWYEUJUWLESO-UHFFFAOYSA-N trichloromethylsilane Chemical compound [SiH3]C(Cl)(Cl)Cl DWAWYEUJUWLESO-UHFFFAOYSA-N 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/589—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10045428A DE10045428A1 (de) | 2000-09-14 | 2000-09-14 | Silicium-Bor-Kohlenstoff-Stickstoff-Keramiken und Vorläuferverbindungen, Verfahren zu deren Herstellung sowie deren Verwendung |
| AU2001291865A AU2001291865A1 (en) | 2000-09-14 | 2001-09-14 | Silicon-boron-carbon-nitrogen ceramics and precursor compounds, methods for the production and use thereof |
| EP01972063A EP1324961B1 (de) | 2000-09-14 | 2001-09-14 | Silicium-bor-kohlenstoff-stickstoff-keramiken und vorläuferverbindungen, verfahren zu deren herstellung sowie deren verwendung |
| PCT/EP2001/010669 WO2002022522A2 (de) | 2000-09-14 | 2001-09-14 | Silicium-bor-kohlenstoff-stickstoff-keramiken und vorläuferverbindungen, verfahren zu deren herstellung sowie deren verwendung |
| JP2002526723A JP5215521B2 (ja) | 2000-09-14 | 2001-09-14 | 構造特徴Ｓｉ−Ｎ−Ｂを有する化合物の製造方法 |
| US10/380,387 US7795461B2 (en) | 2000-09-14 | 2001-09-14 | Silicon-boron-carbon-nitrogen ceramics and precursor compounds, methods for the production and use thereof |
| US12/851,589 US8242298B2 (en) | 2000-09-14 | 2010-08-06 | Silicon-boron-carbon-nitrogen ceramics and precursor compounds, method for the production and use thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10045428A DE10045428A1 (de) | 2000-09-14 | 2000-09-14 | Silicium-Bor-Kohlenstoff-Stickstoff-Keramiken und Vorläuferverbindungen, Verfahren zu deren Herstellung sowie deren Verwendung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE10045428A1 true DE10045428A1 (de) | 2002-03-28 |
Family
ID=7656156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE10045428A Ceased DE10045428A1 (de) | 2000-09-14 | 2000-09-14 | Silicium-Bor-Kohlenstoff-Stickstoff-Keramiken und Vorläuferverbindungen, Verfahren zu deren Herstellung sowie deren Verwendung |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US7795461B2 (enExample) |
| EP (1) | EP1324961B1 (enExample) |
| JP (1) | JP5215521B2 (enExample) |
| AU (1) | AU2001291865A1 (enExample) |
| DE (1) | DE10045428A1 (enExample) |
| WO (1) | WO2002022522A2 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004002886A1 (de) * | 2002-06-28 | 2004-01-08 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Integriertes, kontinuierliches verfahren zur herstellung molekularer einkomponentenvorläufer mit stickstoff-brückenfunktion |
| WO2006082069A1 (de) | 2005-02-05 | 2006-08-10 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren zur kontinuierlichen herstellung kohlenstoffhaltiger mono-, oliqo- und/oder polvborosilazane |
| DE102008018062A1 (de) | 2008-04-09 | 2009-10-15 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Silicium-Bor-Kohlenstoff-Stickstoff-Keramiken und Vorläuferverbindungen, Verfahren zur salzfreien Polymerisation von RnHal3-nSi-X-BRmHal2-m |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004059942B4 (de) * | 2004-12-13 | 2006-10-26 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Kontinuierliches Verfahren für Silazanspaltungen, insbesondere für die Herstellung von molekularen Einkomponentenvorläufern für nichtoxidische Keramiken |
| DE102009034090A1 (de) | 2009-07-21 | 2011-01-27 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren zur Darstellung anorganischer Harze auf der Basis wasserstofffreier, polymerer Isocyanate zur Darstellung nitridischer, carbidischer und carbonitridischer Netzwerke und deren Verwendung als Schutzüberzüge |
| WO2013119806A1 (en) * | 2012-02-07 | 2013-08-15 | Kansas State University Research Foundation | Boron-modified silazanes for synthesis of sibnc ceramics |
| CN104387078B (zh) * | 2014-10-22 | 2016-11-30 | 陈伟东 | 硅硼碳氮基复合材料及其制备方法 |
| CN107935616B (zh) * | 2017-12-12 | 2021-04-02 | 西北工业大学 | CVD/CVI法制备透波型BN纤维增韧Si-B-N陶瓷基复合材料的方法 |
| CN110066397B (zh) * | 2019-04-25 | 2021-03-26 | 中国人民解放军国防科技大学 | 一种聚硼硅氮烷的串并联合成方法 |
| CN111441104B (zh) * | 2020-03-10 | 2022-10-28 | 哈尔滨工业大学 | 一种由碳纤维制备CSiNB四元纤维的方法 |
| FR3111135B1 (fr) * | 2020-06-09 | 2023-01-13 | Safran Ceram | Procédé de fabrication d’une pièce en matériau composite à l’aide d’un copolymère réticulé hybride |
| CN112851363B (zh) * | 2021-01-22 | 2022-03-22 | 哈尔滨工业大学 | 氧化石墨烯增强硅硼碳氮陶瓷复合材料及其制备方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0453350A1 (fr) * | 1990-04-20 | 1991-10-23 | Rhone-Poulenc Chimie | Procédé de réticulation de polymères à base de bore et d'azote, notamment pour l'obtention de fibres céramiques |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05320356A (ja) * | 1990-12-20 | 1993-12-03 | Tonen Corp | ポリボロシラザン及びその製造方法 |
| DE4107108A1 (de) | 1991-03-06 | 1992-09-10 | Bayer Ag | Siliciumbornitridkeramik und vorlaeuferverbindungen, verfahren zu deren herstellung sowie deren verwendung |
| JPH0711001A (ja) * | 1993-06-25 | 1995-01-13 | Nippon Oil Co Ltd | ホウ素含有オルガノシラザンポリマーとその製造方法 |
| DE19530390A1 (de) | 1995-08-18 | 1997-02-20 | Bayer Ag | Unschmelzbare Polyborosilazane |
| DE19628448A1 (de) | 1996-07-15 | 1998-01-22 | Bayer Ag | Polymere Silaborocarboazane, ein Verfahren zu deren Herstellung und deren Verwendung |
| DE19635848C1 (de) | 1996-09-04 | 1997-04-24 | Daimler Benz Ag | Verfahren zur Beschichtung von Substraten |
| US6093840A (en) | 1997-04-03 | 2000-07-25 | Bayer Aktiengesellschaft | Silylalkylboranes, oligo or polyborocarbosilazanes and silicon carbonitride ceramics |
| DE19817680A1 (de) | 1998-04-21 | 1999-10-28 | Bayer Ag | Verfahren zur Herstellung eines Siliciumbornitridkeramikpulvers |
| US7297649B2 (en) | 2001-09-14 | 2007-11-20 | Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. | Silicoboroncarbonitride ceramics and precursor compounds, method for the production and use thereof |
| DE10330644B3 (de) | 2003-07-07 | 2004-12-30 | Fen Gmbh Schlafsysteme | Federelement für eine Polsterunterlage |
-
2000
- 2000-09-14 DE DE10045428A patent/DE10045428A1/de not_active Ceased
-
2001
- 2001-09-14 EP EP01972063A patent/EP1324961B1/de not_active Expired - Lifetime
- 2001-09-14 JP JP2002526723A patent/JP5215521B2/ja not_active Expired - Fee Related
- 2001-09-14 US US10/380,387 patent/US7795461B2/en not_active Expired - Fee Related
- 2001-09-14 WO PCT/EP2001/010669 patent/WO2002022522A2/de not_active Ceased
- 2001-09-14 AU AU2001291865A patent/AU2001291865A1/en not_active Abandoned
-
2010
- 2010-08-06 US US12/851,589 patent/US8242298B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0453350A1 (fr) * | 1990-04-20 | 1991-10-23 | Rhone-Poulenc Chimie | Procédé de réticulation de polymères à base de bore et d'azote, notamment pour l'obtention de fibres céramiques |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004002886A1 (de) * | 2002-06-28 | 2004-01-08 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Integriertes, kontinuierliches verfahren zur herstellung molekularer einkomponentenvorläufer mit stickstoff-brückenfunktion |
| US7683197B2 (en) | 2002-06-28 | 2010-03-23 | Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften Ev | Integrated, continuous method for the production of molecular single-component percursors having a nitrogen bridging function |
| WO2006082069A1 (de) | 2005-02-05 | 2006-08-10 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren zur kontinuierlichen herstellung kohlenstoffhaltiger mono-, oliqo- und/oder polvborosilazane |
| DE102008018062A1 (de) | 2008-04-09 | 2009-10-15 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Silicium-Bor-Kohlenstoff-Stickstoff-Keramiken und Vorläuferverbindungen, Verfahren zur salzfreien Polymerisation von RnHal3-nSi-X-BRmHal2-m |
Also Published As
| Publication number | Publication date |
|---|---|
| US8242298B2 (en) | 2012-08-14 |
| AU2001291865A1 (en) | 2002-03-26 |
| JP5215521B2 (ja) | 2013-06-19 |
| WO2002022522A3 (de) | 2002-07-18 |
| US20040019230A1 (en) | 2004-01-29 |
| US20100298518A1 (en) | 2010-11-25 |
| EP1324961A2 (de) | 2003-07-09 |
| WO2002022522A2 (de) | 2002-03-21 |
| US7795461B2 (en) | 2010-09-14 |
| EP1324961B1 (de) | 2012-05-02 |
| JP2004523471A (ja) | 2004-08-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0502399B1 (de) | Siliciumbornitridkeramik und Vorläuferverbindungen, Verfahren zu deren Herstellung sowie deren Verwendung | |
| US8242298B2 (en) | Silicon-boron-carbon-nitrogen ceramics and precursor compounds, method for the production and use thereof | |
| WO2011064174A1 (de) | Verfahren zum herstellen von polysilan-polycarbosilanen mit reduziertem kohlenstoffgehalt sowie aus diesen hergestellte fasern | |
| EP0659806B1 (de) | Präkeramische Polyborosilazane, Verfahren zu deren Herstellung sowie daraus erhältliches keramisches Material | |
| WO2007110183A1 (de) | Siliciumborcarbonitridkeramiken aus polycyclischen vorläuferverbindungen, verfahren zu deren herstellung und verwendung | |
| EP1317463B1 (de) | Hochtemperaturstabile siliciumborcarbidnitridkeramiken aus silylalkylborazinen, verfahren zu deren herstellung sowie deren verwendung | |
| EP1317462B1 (de) | Siliciumborkarbonitridkeramiken und vorlaeuferverbindungen, verfahren zu deren herstellung und verwendung | |
| EP0973781B1 (de) | Silylalkylborane, oligo oder polyborocarbosilazane, und silicium carbonitridkeramiken | |
| DE3879582T2 (de) | Modifiziertes anorganisches polysilazan und verfahren zu seiner herstellung. | |
| EP0511568A1 (de) | Organische Silazanpolymere, Verfahren zu ihrer Herstellung, sowie ein Verfahren zur Herstellung von Keramikmaterialien | |
| DE10045427A1 (de) | Siliciumborcarbonitridkeramiken und Vorläuferverbindungen, Verfahren zu deren Herstellung und Verwendung | |
| US5071935A (en) | Boron/nitrogen preceramic polymers and boron nitride ceramic materials produced therefrom | |
| EP0601407A1 (de) | Siliciumaluminiumnitridkeramik und Vorläuferverbindungen, Verfahren zu ihrer Herstellung sowie deren Verwendung | |
| EP0372379B1 (de) | Chlorhaltige Silazanpolymere, Verfahren zu ihrer Herstellung, Verfahren zur Herstellung von Siliziumnitrid enthaltenden keramischen Materialien | |
| EP0511567B1 (de) | Organische Silazanpolymere, Verfahren zu ihrer Herstellung, sowie ein Verfahren zur Herstellung von Keramikmaterialien daraus | |
| DE10104536A1 (de) | Siliciumborcarbonitridkeramiken und Vorläuferverbindungen, Verfahren zu deren Herstellung und Verwendung | |
| US7297649B2 (en) | Silicoboroncarbonitride ceramics and precursor compounds, method for the production and use thereof | |
| EP0971934A1 (de) | Borhaltige carbosilane, borhaltige oligo- oder polycarbosilazane und siliciumborcarbonitridkeramiken | |
| DE19817680A1 (de) | Verfahren zur Herstellung eines Siliciumbornitridkeramikpulvers | |
| EP0372378A2 (de) | Oligomere Silazane und Verfahren zu ihrer Herstellung | |
| DE10108069A1 (de) | Hochtemperaturstabile Siliciumborcarbidnitridkeramiken aus Silylalkylborazinen, Verfahren zu deren Herstellung sowie deren Verwendung | |
| DE10045050A1 (de) | Kohlenstoffreiche Siliciumborcarbidnitridkeramiken und Vorläuferverbindungen, Verfahren zu deren Herstellung sowie deren Verwendung |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OM8 | Search report available as to paragraph 43 lit. 1 sentence 1 patent law | ||
| 8110 | Request for examination paragraph 44 | ||
| R002 | Refusal decision in examination/registration proceedings | ||
| R003 | Refusal decision now final |
Effective date: 20130730 |