DD283528A7 - Interferometrische kraftmessvorrichtung - Google Patents
Interferometrische kraftmessvorrichtung Download PDFInfo
- Publication number
- DD283528A7 DD283528A7 DD31557688A DD31557688A DD283528A7 DD 283528 A7 DD283528 A7 DD 283528A7 DD 31557688 A DD31557688 A DD 31557688A DD 31557688 A DD31557688 A DD 31557688A DD 283528 A7 DD283528 A7 DD 283528A7
- Authority
- DD
- German Democratic Republic
- Prior art keywords
- bending
- optical
- prism
- interferometer
- force measuring
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 30
- 238000005452 bending Methods 0.000 claims abstract description 22
- 125000006850 spacer group Chemical group 0.000 claims abstract description 12
- 230000005855 radiation Effects 0.000 claims abstract description 4
- 241001212149 Cathetus Species 0.000 claims 1
- 239000013307 optical fiber Substances 0.000 abstract description 5
- 238000005303 weighing Methods 0.000 abstract description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000005538 encapsulation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 108091008695 photoreceptors Proteins 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
- G01G3/125—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing wherein the weighing element is an optical member
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD31557688A DD283528A7 (de) | 1988-05-09 | 1988-05-09 | Interferometrische kraftmessvorrichtung |
DE19893902569 DE3902569A1 (de) | 1988-05-09 | 1989-01-28 | Interferometrische kraftmesseinrichtung |
CH31789A CH677830A5 (enrdf_load_stackoverflow) | 1988-05-09 | 1989-01-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD31557688A DD283528A7 (de) | 1988-05-09 | 1988-05-09 | Interferometrische kraftmessvorrichtung |
Publications (1)
Publication Number | Publication Date |
---|---|
DD283528A7 true DD283528A7 (de) | 1990-10-17 |
Family
ID=5599098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DD31557688A DD283528A7 (de) | 1988-05-09 | 1988-05-09 | Interferometrische kraftmessvorrichtung |
Country Status (3)
Country | Link |
---|---|
CH (1) | CH677830A5 (enrdf_load_stackoverflow) |
DD (1) | DD283528A7 (enrdf_load_stackoverflow) |
DE (1) | DE3902569A1 (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4132110A1 (de) * | 1991-09-26 | 1993-04-01 | Siemens Ag | Kraftsensor |
DE19517467C2 (de) * | 1995-05-12 | 1998-10-22 | Sios Mestechnik Gmbh | Vorrichtung zur Messung mechanischer Größen |
-
1988
- 1988-05-09 DD DD31557688A patent/DD283528A7/de not_active IP Right Cessation
-
1989
- 1989-01-28 DE DE19893902569 patent/DE3902569A1/de not_active Withdrawn
- 1989-01-31 CH CH31789A patent/CH677830A5/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE3902569A1 (de) | 1989-11-16 |
CH677830A5 (enrdf_load_stackoverflow) | 1991-06-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE19514852C2 (de) | Verfahren und Anordnung zur Beschleunigungs- und Vibrationsmessung | |
DE2119486B2 (de) | Elektro-optische lagekorrekturanordnung fuer ein optisches messystem | |
DE3733549A1 (de) | Faseroptischer sensor | |
DE2113477A1 (de) | Optischer Abtaster und Messanordnungen mit solchen optischen Abtastern | |
DE102006004898A1 (de) | Abtastsystem einer Positionsmesseinrichtung | |
DE2919699C2 (enrdf_load_stackoverflow) | ||
EP1546645A2 (de) | Interferometrische messeinrichtung | |
DD283528A7 (de) | Interferometrische kraftmessvorrichtung | |
DE4129359C2 (de) | Laserinterferometrischer Sensor | |
DE3621862A1 (de) | Vorrichtung zur druckmessung | |
DE3012811A1 (de) | Messwandler, insbesondere zur digitalen kraftmessung | |
DE3426981C2 (enrdf_load_stackoverflow) | ||
WO1995013518A1 (de) | Halterung für eine tastspitze eines rasterkraft- oder rastertunnelmikroskops | |
DE3738977C1 (de) | Lichtelektrische Positionsmesseinrichtung | |
DE3605789C1 (de) | Lichtelektrische inkrementale Positionsmesseinrichtung | |
DD239867A1 (de) | Druckmesswandler | |
DE2624884B2 (de) | Beschleunigungsmesser | |
DE4006716C1 (en) | Control appts. using two-arm interferometer - has two flexible plates in parallel at set distance but independently bendable | |
DE3612157A1 (de) | Interferometrisch-inkrementale vorrichtung zur ebenheitsmessung | |
EP0576885A1 (de) | Mehrarmiges Interferometer | |
DE3422223A1 (de) | Vorrichtung, insbesondere zur wegmessung | |
DE3632922A1 (de) | Interferometer fuer geradheitsmessungen | |
DE3428474A1 (de) | Messeinrichtung | |
CH660916A5 (de) | Vorrichtung zur modulation optischer gangunterschiede. | |
DE4132113A1 (de) | Messaufnehmer fuer laengen- oder abstandsaenderungen |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RPI | Change in the person, name or address of the patentee (searches according to art. 11 and 12 extension act) | ||
RPI | Change in the person, name or address of the patentee (searches according to art. 11 and 12 extension act) | ||
ENJ | Ceased due to non-payment of renewal fee |