DD263422A3 - VACUUM VAPORING DEVICE FOR DUESOUS LAYERS - Google Patents
VACUUM VAPORING DEVICE FOR DUESOUS LAYERS Download PDFInfo
- Publication number
- DD263422A3 DD263422A3 DD28702286A DD28702286A DD263422A3 DD 263422 A3 DD263422 A3 DD 263422A3 DD 28702286 A DD28702286 A DD 28702286A DD 28702286 A DD28702286 A DD 28702286A DD 263422 A3 DD263422 A3 DD 263422A3
- Authority
- DD
- German Democratic Republic
- Prior art keywords
- notoka
- vacuum
- duesous
- layers
- aperture
- Prior art date
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- Soft Magnetic Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Die Erfindung betrifft die Vakuumbeschichtung und kann zum Aufdampfen kostspieliger Materialien fuer die Elektronik angewendet werden. Das Erfindungsziel besteht in der Senkung des Verbrauchs an Aufdampfmaterial. Der Graphiteinsatz 5 ist in dem Tiegel 1 angeordnet und besteht aus den beiden Teilen 6 und 7. Zwischen den Teilen 6 und 7 ist die Blende 8 mit der Oeffnung 9 fuer den Durchtritt des Dampfstroms angebracht. Die Enden des Einsatzes 5 sind profiliert, die Profilform wird bestimmt von der Kreuzungsstelle der Zylinderflaeche der Rohrleitung mit der Flaeche, die durch die Linie 12 gebildet wird, die durch den aeusseren Umfang der Aufdampfzone (des Substrats 10), den Umfang der Oeffnung 9 der Blende 8 und die geometrische Achse 13 der Rohrleitung 5 verlaeuft, wodurch die Zone der Intensitaetsabnahme des Dampfstroms eingeengt wird. FigurThe invention relates to vacuum coating and can be used for vapor deposition of expensive electronic materials. The goal of the invention is to reduce the consumption of vapor deposition material. The graphite insert 5 is arranged in the crucible 1 and consists of the two parts 6 and 7. Between the parts 6 and 7, the aperture 8 is attached to the opening 9 for the passage of the vapor stream. The ends of the insert 5 are profiled, the profile shape is determined by the intersection of the cylindrical surface of the pipe with the surface formed by the line 12, by the outer circumference of the evaporation zone (the substrate 10), the circumference of the opening 9 of the Aperture 8 and the geometric axis 13 of the pipeline 5 runs, whereby the zone of the intensity decrease of the vapor stream is concentrated. figure
Description
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ΠρΗ HanHJieHHH Ha HenOSBHÄHyiO nOflÄOSKy IO Κ0ΗφΗΓνρ8Ι*ΗΗ 30HH ΗΘΠΗΛΘΗΗΠ 00ΒΠ8?13ΘΤ C φορΜΟΜ nOflJIOKKM ΙΟ. ECJIH 3ΚΘ odpaöaTHBaioTcn SBHscymHecfl πο^λοκκη ΙΟ, κοΗφΗ^ρβαππ 3objΠρΗ HanHJieHHH Ha HenOSBHÄHyiO nOFLÄOSKy IO Κ0ΗφΗΓνρ8Ι * ΗΗ 30HH ΗΘΠΗΛΘΗΗΠ 00ΒΠ8? 13ΘΤ C φορΜΟΜ nOflJIOKKM ΙΟ. ECJIH 3ΚΘ odpaöaTHBaioTcn SBHscymHecfl πο ^ λοκκη ΙΟ, κοΗφΗ ^ ρβαππ 3obj
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Πθ OKOHMaHHH UHKJia HQiIbIJIeHHH ΜβΗΗΙΟΤ nOflJIOJKKy 10, BΠθ OKOHMaHHH UHKJia HQiIbIJIeHHH ΜβΗΗΙΟΤ nOflJIOJKKy 10, B
τηγθλβ I «orpyataiOT aanunHemu MaTepnaJi 2, a BCTaBKy 5 nepeBopaMHBaKJT η ycTaHaBJiHBaiOT BepxHeß MacrBio 6, Ha κοτοροίΐ oceji MarepnaJi, bhh3. 3tot MaTöpwaJi HcnojiB3yeTCH β cjiöflyio-HariHJieHHH TaK «e, KaK η Maiepnajia 2 h3 THrjiH I.τηγθλβ I orpyataiOT aanunHemu MaTepnaJi 2, a BCTaBKy 5 nepeBopaMHBaKJT η ycTaHaBJiHBaiOT BepxHeß MacrBio 6, Ha κοτοροίΐ oceji MarepnaJi, bhh3. 3tot MaTöpwaJi HcnojiB3yeTCH β cjiöflyio-HariHJieHHH TaK «e, KaK η Maiepnajia 2 h3 THrjiH I.
Claims (1)
6TC/.A, 1100952. Pi, 397567,
6TC / .A, 1100952.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU3891902 | 1985-05-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DD263422A3 true DD263422A3 (en) | 1989-01-04 |
Family
ID=21175896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DD28702286A DD263422A3 (en) | 1985-05-06 | 1986-02-14 | VACUUM VAPORING DEVICE FOR DUESOUS LAYERS |
Country Status (3)
| Country | Link |
|---|---|
| BG (1) | BG46090A1 (en) |
| CS (1) | CS263499B1 (en) |
| DD (1) | DD263422A3 (en) |
-
1986
- 1986-02-14 DD DD28702286A patent/DD263422A3/en not_active IP Right Cessation
- 1986-02-17 CS CS861057A patent/CS263499B1/en unknown
- 1986-03-17 BG BG7359586A patent/BG46090A1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CS105786A1 (en) | 1988-06-15 |
| CS263499B1 (en) | 1989-04-14 |
| BG46090A1 (en) | 1989-10-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A3 | Published as economic patent | ||
| ENJ | Ceased due to non-payment of renewal fee |