CS263499B1 - Device for coat application in vacuum - Google Patents

Description

1 • in OIIHCAHHE H30BPETEHHH TO ABTOPCKOMY CBWTEJlBCTBy3aHBKa PP 389J 902 / 24-21,

SaaBJíeHoi 06.05.85MKH * s d23 C 147 26

Abtoph: r.T.JIesyeHKo h Á.H. PaflSHKOBCKuň

3aHBHT & ni>: 'Κηθβοκη # noJiHTexHiraecKtdi hhctutyt hm. 50-neTHa ΒεπηκοίίOkthSpbckoíí couHaJiHCTPlayersKoň pesojnoipiH

Ha3BaHHe H3o6peTeHiw: yCTPOnCTBO fllIB ΗΑΠΒΙΠΕΗΗΒμΙΙΠΕΗΟΚ B ΒΑΚΥΎΜΕ Η3ο6ρβτβΗΗβ KaaaeTCH HaHeceHHa ποκρώτκή b BaKyyMe η Μοκβτ 6ωτ & ncnoJihso-BaHO flJIH HanbineHHH flOporOCTOHmHX MaTépnaJIOB fíJIH SJíeKTpOHhoH TeXHHKH, paflHO-ΤβΧΗΗΚΗ, ΟΠΤΗΚΗ.

UejiBio Η3θ6ρετβΗΗ »flBJweTCH CHHsceHHe pjicxoflaHanbmaeMÓroiMaTepHana saCMeT CyjKeHHH 3OHM cnafla HHTeHCHBHOCTH napoBoro noToxa

Ha conpoBOJKflaromeM Don't H3o6pa®eHo ycT leastcTBo flnn HaHeceHHH ihmhok bBaKyyMe, pa3pe3 b βκαοΗΟΜβτρΗΉβοκοκ προεκμπΗ. ycTpoiicTBo coflepjKHT RPA $ HToBbiií Turejib HanbinaeMbrn MaTepnanoM 1 c 2 ', Ha-npHMep, cepeSpoM, ycTaHoBJíeHHbtíí b rpaifrHTOBOM flHnHHflpHnecKOM meneBOM Harpe Baten-3-oKpyaceHHOM MoJlHCfí eHoBbíM TennoBbíM SKpaHOM fourth, ΓρβφκτοΒβΗ BCTaBKa 5c BbixoflHbíM KaHaaoM, ycTaHoBJíeHHaa B Turn 1, coctoht H3 flByx load 6h 7, Meatfly kotopmmh b lijiockocth CHMMeTpHH KaHana ycTaHOBJiHH flHaAparMa 8 c ot-BepcTaeM 9 ajih npoxoacfleHHH ποτοκβ napa. HacTH 6, 7 η "Η & φρβΓΜε 8 coěflHHeHbíMeatfly co6oft nocpeflcŤBOM πιτκφτοΒ (ηθ noKa3aHbi) H3 TyronnaBKoro MeTanna, HaflycTpoňCTBOM b 30He HanbineHHH ycTaHOBneHa noflnoaoca 10 coBnaflaromas C HEN noφορΜβ Ha KOHuax BCTaBKH 5 βμποπη6ημ npotbunnpoBaHHbie Bbipeabi 11 tbopMa koto-pbix onpeflenaeTCH nepeceneHHeM flHnHHflpHnecKoň noBepxHocTH bct3Bkh 5-c noeepx hoctbjo, oSpasoBaHHoit JiHHneň 12 npoxoflameň nepe3 τρκ HanpaBnaromHe: Hapyac-Hblň KOHTyp 3OHM ΗβΠΜΠβΗΗΗ (nOflHOJKKH 1 0) ΠβρΗΜβΤρ OTBepCTHH 9 ΑΗβφρβΓΜΜ 8h reoMeTpHMecKaa OCB 13 bcthbkh fifth ycTpoiícTBo paSoTaeT cneflyromiw o6pa3OM. 263499

Ilocne στκβπκΗ BaKyyMHoň KaMepů (ho noMaHa) h Harpesa noflnoxcKH 1 0 bkjuo-MajoT HarpesaTejib 3 η aoboaht aq TeMnepaTypbi HcnapeHHH Turem 1 c HanbuineMbiM 1MaTepHanoM 2, hhjkhiow nacTb 7 MaTepnana 2 BbtxoflHT H3 οτβθροτηη 9. UeHTpanbHan nacTb noTOKa ocascflaeTCH, · Ha noflnojKKe 10, pacnonoweHHo β.3οηθ HanbtneHHH. ΠερκφερΗίίΗΜε ynacTKH ποτο-Ka, flBH »yiuHecH mhmo ποαποκκη 10, 3aflep» HBaioTCH BepxHen nacTbto 6 BCTaBKH.5,

Ha κοτοροβ ooh KoHABHCHpyioTCH b TBapflyro $ a3y, τεκ κβκ TeMňepaTypa BepxHeňnacTH 6 HaxoflHtueňCH BH8 3OHbt HarpeBa, Hrae τεΜπερετγρω nnaBneHHH Hanbinne-μογο MaTepnana second BepxHHň cNon = CTaBKH Bnaroflapn HaniWHK 6) b-HBM προφΗΠΗρο BaHHbix Bbipa3OB 11 φορΜΗρνετ HanpaBneHHbtň ποτοκ HanbWJiBMoro MaTBpHana 2 řÍMaromnH ποπερεηΗΟΜ ceneHHH φορΜγ b, c coBnaflaiomyio TpeSyeMOH κοΗφΗΓγρερΗεή3OHbI HanbtneHHH, Πρπ HanbtneHHH Ha HenoflBHKHyro noflnotKKy 10 -κοηΦηγυρθαηπ soHbt HanbtneHHH cos -naflaeT Φορμοη ποααο c) κκη 10th Ecjih ACE očpaSaTbiBatoTCH flBHwymHecH noflnojKKH 10 · KOH0HTypaflHH 3OHbl HanbtneHHH BblČHpaeTCH C yH8T0M TpaeKŤOPHH flBHXeHHH HX. HanpHMep, πρΗ npHMonHHeňHOM nepeMemeHHH ποαποχθκ 10 κοΗΒεήεροη ηπη 6apa6á-HOM 30Ha HanbtneHHH flOJBKHa ΗΜΘΤΒ npHMOyronbHyw ΚΟΗφΗΓγρβΙΤΗΚ), npH BpaméHHHKapycenbto - KoHijjHrypanwo b βηηθ nacTH Konbfla. Πρηηθμ flnn noBbtmeHHH paBHo-M8PHOCTH. TOJimHHbl HanbOTHeMOH ΠΗθΗΚΗ ΚΟΗφΗΓνρείίΗΗ 3OHM HanbtneHHH MO7K8T 6btTbflononHHTenbHo οτκορρθκτηροβηηη} what ctopoh Bxona.H Bbixofla ποηποχεκ 10 εεrpaHHuaM ΑοποηΗΗτεπΒΗο npHflaeTCH BorayTaH φορΜβ, HTO KOMneHcnpyeT HecKonbr- \ ko noBbímeHHyio HHTeHCHBHocTb noTOKa b ηεΗτρε 3οηη HanbtneHHH. Πο oKOHHaHHH AHKJia. HanbinBHHH μθηηιοτ nofljiojKKy 10 b 1 THrenb florpyxaioT .HanbiJiHeMbiň MaTepnan 2 and 5 BCTaBxy nepeBopaHHBaioT h υοτηηηβπηβηιοτ BepxHeň, HacTbio 6 Ha kotopoh appreciate MaTepnan, bhh3.'3tot MaTepnan Hcnonb3yeTcn b CNE-JflyromeM iíhkjib HanbtneHHH Tax »e, x and x n MaTepHana 2 H3 τηγπη 1.

ΦσΡΜΥΠΑ H3OBPETEHHH

YcTpoňcTBo & ΠΗ HanbuiaHHH ππεΗοκ b BaxyyMa, conapjKamac τηγθπβ απη Hanwa-naaMoro waTepnana c HarpeBaTeneM, cpeflCTBo Φορμηροβηηηη HanpaBneHHoro no-Tokai Napa b βηαθ rpySonpoBofla c nonepe ^ Pursue nnocxocTbw ΟΗΜΜετρηκ, κοΗειχ κο- 'τοροΓο ycTaHOBnaH β ΤΗΓηε, ΑΗεφρεη · ^ c oTBepcTHeM , pacnonojKCHHyio β nnoc- 'kocth εΗΜΜετρΗΗ τργSonpoBofla, η rioflnoacKOAepxaTenb, oTmmaKHnaacji τβμ,; s ητο, c nanbK) chhjkbhhh pacxofla HcnapnaMoro MaTapnana 3a consort ο ^ κθη'ηη 3ohmcnafla hht8hchbhocth napoBoro noTOKa, χοκίφΐ TpySonpoBona BbmonHaHbí προφη-poBaHHbíMH ,. προπεΜ ηρσφΗΠΒ o6pa3osaH. ε ep ep py py py py py py py py py py py py py py py py a H

Hctohhhkh ηηΦορμβαηη: SU, A, 397567, SU, A, 1100952.

Φ Ε A A aca aca aca aca aca aca aca aca aca aca aca aca aca aca aca aca aca aca aca aca aca aca aca aca aca & β ΒρκγγΜβ η Μθ) 6bTb HCnonb3O-BaHO.WlH HanbtneHHH flOPOroCTOHIHHX MaTapHanOB flHH 3ΠβΚΤρθΗΗθή ΤΘΧΗΗΚΗ. IfenbΗ3ο6ρετεΗΗΗ - CHHxeHHe pacxofla HanbinneMoro MaTepnana. Yc Φ bin bin n n n n n n bin 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 c c c c c nap nap nap nap nap nap nap nap Βω-, ΠΟΠΗβΗΗβ ΚΟΗΙΧΟΒ BCTďBKH 5 ΠρσφΚΠΗρσΒ3ΗΗ6ΙΜΗ, cbopMa ΠροφΒΠΒ ΚΟΤΟΡΟΓΟ onpefleJIB-jeTCH nepeceneHHeM uttnmmpHnecKoň noBepxHocTbio Tpy6onpoBofla c noBepxHocTbjo, o6pa3OBaHHoň nHHHeft 12 npoxofljnneň NEP Hapyaatbiň xoHTyp aoHbí HanbineHHH (noanoxKH 10) πβρΗΜβτρ oTBepcTHn 9 ΛΗβφρβΓΜΜ 8h reoMeTpHqecxyro OCB 13TpyConpoBofla 5 cyxaeT 3OHy cnafla ηητθηοηβηοοτη napoBoro noToxa.

ConpoBOMAalomHA ηβρτβχ. npttsHaHo H3o6peTeHHeM no peaynbTaTaM 3xcnepTH3bi, ocymecTBJíeHHoň rocynapcT-BeHHbíM ΚοΜΗΤβτοΜ. CCCP no flenaM H3o6peTeHHn h οτκρμτηΛ, 1 do not exceed 263499.

Claims (1)

BACKGROUND OF THE INVENTION Vacuum coating apparatus comprising a crucible for a material to be coated with a heater, a shaping means for directing a vapor stream in the form of a pipe b, a symmetry equilibrium whose horse is housed in a crucible, a membrane through an aperture located in the symmetry plane of the pipe, and a support for the liner, characterized in that in order to reduce the consumption of material deposited due to the narrowing of the zone of drop in the intensity of the steam flow, the ends of the pipe are profiled, the profile being formed by the intersection of the surface of the pipe by the surface formed by the line passing through the geometric conduit; an opening in the membrane, and an outer periphery of the pad holder 263499