DD229208B1 - Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen - Google Patents

Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen Download PDF

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Publication number
DD229208B1
DD229208B1 DD26976884A DD26976884A DD229208B1 DD 229208 B1 DD229208 B1 DD 229208B1 DD 26976884 A DD26976884 A DD 26976884A DD 26976884 A DD26976884 A DD 26976884A DD 229208 B1 DD229208 B1 DD 229208B1
Authority
DD
German Democratic Republic
Prior art keywords
interferometer
beam splitter
elements
measuring
splitter
Prior art date
Application number
DD26976884A
Other languages
German (de)
English (en)
Other versions
DD229208A1 (de
Inventor
Hans-Joachim Buechner
Gerd Jaeger
Wilfried Hirschfeld
Georg Ranft
Original Assignee
Ilmenau Tech Hochschule
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ilmenau Tech Hochschule filed Critical Ilmenau Tech Hochschule
Priority to DD26976884A priority Critical patent/DD229208B1/de
Publication of DD229208A1 publication Critical patent/DD229208A1/de
Priority to DE19853540856 priority patent/DE3540856A1/de
Priority to FR8517360A priority patent/FR2573525A1/fr
Priority to GB8528756A priority patent/GB2168476B/en
Publication of DD229208B1 publication Critical patent/DD229208B1/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056Passive reduction of errors
    • G01B9/02061Reduction or prevention of effects of tilts or misalignment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078Caused by ambiguity
    • G01B9/02079Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DD26976884A 1984-11-22 1984-11-22 Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen DD229208B1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DD26976884A DD229208B1 (de) 1984-11-22 1984-11-22 Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen
DE19853540856 DE3540856A1 (de) 1984-11-22 1985-11-18 Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen
FR8517360A FR2573525A1 (fr) 1984-11-22 1985-11-22 Interferometre, notamment pour l'exploration par increment de structures variables d'interference.
GB8528756A GB2168476B (en) 1984-11-22 1985-11-22 Interferometer in particular for incremental scanning of variable interference structures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD26976884A DD229208B1 (de) 1984-11-22 1984-11-22 Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen

Publications (2)

Publication Number Publication Date
DD229208A1 DD229208A1 (de) 1985-10-30
DD229208B1 true DD229208B1 (de) 1988-02-10

Family

ID=5562479

Family Applications (1)

Application Number Title Priority Date Filing Date
DD26976884A DD229208B1 (de) 1984-11-22 1984-11-22 Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen

Country Status (4)

Country Link
DD (1) DD229208B1 (enrdf_load_stackoverflow)
DE (1) DE3540856A1 (enrdf_load_stackoverflow)
FR (1) FR2573525A1 (enrdf_load_stackoverflow)
GB (1) GB2168476B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3623244A1 (de) * 1985-12-23 1987-06-25 Suhl Feinmesszeugfab Veb Beruehrungsloser interferometrischer sensor zur inkrementalen abtastung veraenderlicher interferenzstrukturen
DE3930632A1 (de) * 1989-09-13 1991-03-14 Steinbichler Hans Verfahren zur direkten phasenmessung von strahlung, insbesondere lichtstrahlung, und vorrichtung zur durchfuehrung dieses verfahrens

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1460861A (en) * 1974-03-05 1977-01-06 Nat Res Dev Interferrometers
DE2926738C2 (de) * 1979-07-03 1982-10-28 Ibm Deutschland Gmbh, 7000 Stuttgart Verfahren zur interferometrischen Oberflächenformanalyse
DD201191B1 (de) * 1981-09-24 1987-07-15 Ilmenau Tech Hochschule Kippinvariantes interferometer mit ebenen spiegeln

Also Published As

Publication number Publication date
DD229208A1 (de) 1985-10-30
DE3540856A1 (de) 1986-05-28
GB2168476B (en) 1988-06-08
GB8528756D0 (en) 1985-12-24
FR2573525A1 (fr) 1986-05-23
DE3540856C2 (enrdf_load_stackoverflow) 1989-07-20
GB2168476A (en) 1986-06-18

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Legal Events

Date Code Title Description
UW Conversion of economic patent into exclusive patent
NPI Change in the person, name or address of the patentee (addendum to changes before extension act)
ENJ Ceased due to non-payment of renewal fee