DD229208B1 - Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen - Google Patents
Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen Download PDFInfo
- Publication number
- DD229208B1 DD229208B1 DD26976884A DD26976884A DD229208B1 DD 229208 B1 DD229208 B1 DD 229208B1 DD 26976884 A DD26976884 A DD 26976884A DD 26976884 A DD26976884 A DD 26976884A DD 229208 B1 DD229208 B1 DD 229208B1
- Authority
- DD
- German Democratic Republic
- Prior art keywords
- interferometer
- beam splitter
- elements
- measuring
- splitter
- Prior art date
Links
- 238000012512 characterization method Methods 0.000 title 1
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 4
- 239000011159 matrix material Substances 0.000 claims 1
- 230000010287 polarization Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 206010010219 Compulsions Diseases 0.000 description 1
- 241000282326 Felis catus Species 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02061—Reduction or prevention of effects of tilts or misalignment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD26976884A DD229208B1 (de) | 1984-11-22 | 1984-11-22 | Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen |
| DE19853540856 DE3540856A1 (de) | 1984-11-22 | 1985-11-18 | Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen |
| FR8517360A FR2573525A1 (fr) | 1984-11-22 | 1985-11-22 | Interferometre, notamment pour l'exploration par increment de structures variables d'interference. |
| GB8528756A GB2168476B (en) | 1984-11-22 | 1985-11-22 | Interferometer in particular for incremental scanning of variable interference structures |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD26976884A DD229208B1 (de) | 1984-11-22 | 1984-11-22 | Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DD229208A1 DD229208A1 (de) | 1985-10-30 |
| DD229208B1 true DD229208B1 (de) | 1988-02-10 |
Family
ID=5562479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DD26976884A DD229208B1 (de) | 1984-11-22 | 1984-11-22 | Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen |
Country Status (4)
| Country | Link |
|---|---|
| DD (1) | DD229208B1 (enrdf_load_stackoverflow) |
| DE (1) | DE3540856A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2573525A1 (enrdf_load_stackoverflow) |
| GB (1) | GB2168476B (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3623244A1 (de) * | 1985-12-23 | 1987-06-25 | Suhl Feinmesszeugfab Veb | Beruehrungsloser interferometrischer sensor zur inkrementalen abtastung veraenderlicher interferenzstrukturen |
| DE3930632A1 (de) * | 1989-09-13 | 1991-03-14 | Steinbichler Hans | Verfahren zur direkten phasenmessung von strahlung, insbesondere lichtstrahlung, und vorrichtung zur durchfuehrung dieses verfahrens |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1460861A (en) * | 1974-03-05 | 1977-01-06 | Nat Res Dev | Interferrometers |
| DE2926738C2 (de) * | 1979-07-03 | 1982-10-28 | Ibm Deutschland Gmbh, 7000 Stuttgart | Verfahren zur interferometrischen Oberflächenformanalyse |
| DD201191B1 (de) * | 1981-09-24 | 1987-07-15 | Ilmenau Tech Hochschule | Kippinvariantes interferometer mit ebenen spiegeln |
-
1984
- 1984-11-22 DD DD26976884A patent/DD229208B1/de not_active IP Right Cessation
-
1985
- 1985-11-18 DE DE19853540856 patent/DE3540856A1/de active Granted
- 1985-11-22 GB GB8528756A patent/GB2168476B/en not_active Expired
- 1985-11-22 FR FR8517360A patent/FR2573525A1/fr active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DD229208A1 (de) | 1985-10-30 |
| DE3540856A1 (de) | 1986-05-28 |
| GB2168476B (en) | 1988-06-08 |
| GB8528756D0 (en) | 1985-12-24 |
| FR2573525A1 (fr) | 1986-05-23 |
| DE3540856C2 (enrdf_load_stackoverflow) | 1989-07-20 |
| GB2168476A (en) | 1986-06-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| UW | Conversion of economic patent into exclusive patent | ||
| NPI | Change in the person, name or address of the patentee (addendum to changes before extension act) | ||
| ENJ | Ceased due to non-payment of renewal fee |