FR2573525A1 - Interferometre, notamment pour l'exploration par increment de structures variables d'interference. - Google Patents

Interferometre, notamment pour l'exploration par increment de structures variables d'interference. Download PDF

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Publication number
FR2573525A1
FR2573525A1 FR8517360A FR8517360A FR2573525A1 FR 2573525 A1 FR2573525 A1 FR 2573525A1 FR 8517360 A FR8517360 A FR 8517360A FR 8517360 A FR8517360 A FR 8517360A FR 2573525 A1 FR2573525 A1 FR 2573525A1
Authority
FR
France
Prior art keywords
interferometer
exploration
diaphragm
lines
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
FR8517360A
Other languages
English (en)
French (fr)
Inventor
Hans-Joachim Buchner
Gerd Jager
Wilfried Hirschfeld
Georg Ranft
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUHL FEINMESSZEUGFAB VEB
Original Assignee
SUHL FEINMESSZEUGFAB VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUHL FEINMESSZEUGFAB VEB filed Critical SUHL FEINMESSZEUGFAB VEB
Publication of FR2573525A1 publication Critical patent/FR2573525A1/fr
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR8517360A 1984-11-22 1985-11-22 Interferometre, notamment pour l'exploration par increment de structures variables d'interference. Pending FR2573525A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD26976884A DD229208B1 (de) 1984-11-22 1984-11-22 Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen

Publications (1)

Publication Number Publication Date
FR2573525A1 true FR2573525A1 (fr) 1986-05-23

Family

ID=5562479

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8517360A Pending FR2573525A1 (fr) 1984-11-22 1985-11-22 Interferometre, notamment pour l'exploration par increment de structures variables d'interference.

Country Status (4)

Country Link
DD (1) DD229208B1 (enrdf_load_stackoverflow)
DE (1) DE3540856A1 (enrdf_load_stackoverflow)
FR (1) FR2573525A1 (enrdf_load_stackoverflow)
GB (1) GB2168476B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3623244A1 (de) * 1985-12-23 1987-06-25 Suhl Feinmesszeugfab Veb Beruehrungsloser interferometrischer sensor zur inkrementalen abtastung veraenderlicher interferenzstrukturen
DE3930632A1 (de) * 1989-09-13 1991-03-14 Steinbichler Hans Verfahren zur direkten phasenmessung von strahlung, insbesondere lichtstrahlung, und vorrichtung zur durchfuehrung dieses verfahrens

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2509556A1 (de) * 1974-03-05 1975-10-16 Nat Res Dev Interferometer
DE2926738A1 (de) * 1979-07-03 1981-01-08 Ibm Deutschland Verfahren zur interferometrischen bestimmung der form und des vorzeichens von unebenheiten oder neigungen

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD201191B1 (de) * 1981-09-24 1987-07-15 Ilmenau Tech Hochschule Kippinvariantes interferometer mit ebenen spiegeln

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2509556A1 (de) * 1974-03-05 1975-10-16 Nat Res Dev Interferometer
DE2926738A1 (de) * 1979-07-03 1981-01-08 Ibm Deutschland Verfahren zur interferometrischen bestimmung der form und des vorzeichens von unebenheiten oder neigungen

Also Published As

Publication number Publication date
DD229208A1 (de) 1985-10-30
DE3540856A1 (de) 1986-05-28
GB2168476B (en) 1988-06-08
GB8528756D0 (en) 1985-12-24
DE3540856C2 (enrdf_load_stackoverflow) 1989-07-20
DD229208B1 (de) 1988-02-10
GB2168476A (en) 1986-06-18

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