DD201191B1 - Kippinvariantes interferometer mit ebenen spiegeln - Google Patents

Kippinvariantes interferometer mit ebenen spiegeln Download PDF

Info

Publication number
DD201191B1
DD201191B1 DD81233527A DD23352781A DD201191B1 DD 201191 B1 DD201191 B1 DD 201191B1 DD 81233527 A DD81233527 A DD 81233527A DD 23352781 A DD23352781 A DD 23352781A DD 201191 B1 DD201191 B1 DD 201191B1
Authority
DD
German Democratic Republic
Prior art keywords
measuring
interferometer
splitting
receiver
mirror
Prior art date
Application number
DD81233527A
Other languages
German (de)
English (en)
Other versions
DD201191A1 (de
Inventor
Hans-Joachim Buechner
Original Assignee
Ilmenau Tech Hochschule
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ilmenau Tech Hochschule filed Critical Ilmenau Tech Hochschule
Priority to DD81233527A priority Critical patent/DD201191B1/de
Priority to DE19823226137 priority patent/DE3226137A1/de
Priority to FR8215135A priority patent/FR2513375B1/fr
Priority to GB08226924A priority patent/GB2107079B/en
Publication of DD201191A1 publication Critical patent/DD201191A1/de
Publication of DD201191B1 publication Critical patent/DD201191B1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DD81233527A 1981-09-24 1981-09-24 Kippinvariantes interferometer mit ebenen spiegeln DD201191B1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DD81233527A DD201191B1 (de) 1981-09-24 1981-09-24 Kippinvariantes interferometer mit ebenen spiegeln
DE19823226137 DE3226137A1 (de) 1981-09-24 1982-07-13 Kippinvariantes interferometer mit ebenen spiegeln
FR8215135A FR2513375B1 (fr) 1981-09-24 1982-09-06 Interferometre a basculement invariable et a miroirs plans
GB08226924A GB2107079B (en) 1981-09-24 1982-09-21 Improvements in and relating to interferometers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD81233527A DD201191B1 (de) 1981-09-24 1981-09-24 Kippinvariantes interferometer mit ebenen spiegeln

Publications (2)

Publication Number Publication Date
DD201191A1 DD201191A1 (de) 1983-07-06
DD201191B1 true DD201191B1 (de) 1987-07-15

Family

ID=5533687

Family Applications (1)

Application Number Title Priority Date Filing Date
DD81233527A DD201191B1 (de) 1981-09-24 1981-09-24 Kippinvariantes interferometer mit ebenen spiegeln

Country Status (4)

Country Link
DD (1) DD201191B1 (enrdf_load_stackoverflow)
DE (1) DE3226137A1 (enrdf_load_stackoverflow)
FR (1) FR2513375B1 (enrdf_load_stackoverflow)
GB (1) GB2107079B (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD229208B1 (de) * 1984-11-22 1988-02-10 Ilmenau Tech Hochschule Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen
US4702603A (en) * 1985-07-23 1987-10-27 Cmx Systems, Inc. Optical phase decoder for interferometers
DE3623244A1 (de) * 1985-12-23 1987-06-25 Suhl Feinmesszeugfab Veb Beruehrungsloser interferometrischer sensor zur inkrementalen abtastung veraenderlicher interferenzstrukturen
ES2061011T3 (es) * 1989-03-03 1994-12-01 Buehler Ag Geb Interferometro de polarizacion.
GB2256480B (en) * 1991-06-05 1995-02-01 Marconi Gec Ltd Improvements to optical sensors

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1126744A (en) * 1965-07-02 1968-09-11 Rank Organisation Ltd Apparatus for producing interference fringes
US3601490A (en) * 1966-12-30 1971-08-24 Keuffel & Esser Co Laser interferometer
NL6707681A (enrdf_load_stackoverflow) * 1967-06-02 1968-12-03
DE1772171B1 (de) * 1968-04-08 1972-03-09 Optomechanisms Inc Optisches interferometer
NL6904621A (enrdf_load_stackoverflow) * 1969-03-25 1970-09-29

Also Published As

Publication number Publication date
GB2107079B (en) 1986-09-10
DE3226137C2 (enrdf_load_stackoverflow) 1990-05-17
FR2513375A1 (fr) 1983-03-25
DD201191A1 (de) 1983-07-06
DE3226137A1 (de) 1983-04-07
FR2513375B1 (fr) 1986-11-21
GB2107079A (en) 1983-04-20

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Legal Events

Date Code Title Description
UW Conversion of economic patent into exclusive patent
NPI Change in the person, name or address of the patentee (addendum to changes before extension act)
ENJ Ceased due to non-payment of renewal fee