GB2107079B - Improvements in and relating to interferometers - Google Patents

Improvements in and relating to interferometers

Info

Publication number
GB2107079B
GB2107079B GB08226924A GB8226924A GB2107079B GB 2107079 B GB2107079 B GB 2107079B GB 08226924 A GB08226924 A GB 08226924A GB 8226924 A GB8226924 A GB 8226924A GB 2107079 B GB2107079 B GB 2107079B
Authority
GB
United Kingdom
Prior art keywords
interferometers
relating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08226924A
Other versions
GB2107079A (en
Inventor
Hans Buchner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUHL FEINMESSZEUGFAB VEB
Original Assignee
SUHL FEINMESSZEUGFAB VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUHL FEINMESSZEUGFAB VEB filed Critical SUHL FEINMESSZEUGFAB VEB
Publication of GB2107079A publication Critical patent/GB2107079A/en
Application granted granted Critical
Publication of GB2107079B publication Critical patent/GB2107079B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB08226924A 1981-09-24 1982-09-21 Improvements in and relating to interferometers Expired GB2107079B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD81233527A DD201191B1 (en) 1981-09-24 1981-09-24 KIPPINVARIANT INTERFEROMETER WITH LEVELS MIRROR

Publications (2)

Publication Number Publication Date
GB2107079A GB2107079A (en) 1983-04-20
GB2107079B true GB2107079B (en) 1986-09-10

Family

ID=5533687

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08226924A Expired GB2107079B (en) 1981-09-24 1982-09-21 Improvements in and relating to interferometers

Country Status (4)

Country Link
DD (1) DD201191B1 (en)
DE (1) DE3226137A1 (en)
FR (1) FR2513375B1 (en)
GB (1) GB2107079B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD229208B1 (en) * 1984-11-22 1988-02-10 Ilmenau Tech Hochschule INTERFEROMETERS, ESPECIALLY FOR INCREMENTAL CHARACTERIZATION OF CHANGED INTERFERENCE STRUCTURES
US4702603A (en) * 1985-07-23 1987-10-27 Cmx Systems, Inc. Optical phase decoder for interferometers
DE3623244A1 (en) * 1985-12-23 1987-06-25 Suhl Feinmesszeugfab Veb CONTACTLESS INTERFEROMETRIC SENSOR FOR INCREMENTAL SCANNING OF VARIOUS INTERFERENCE STRUCTURES
DE59007132D1 (en) * 1989-03-03 1994-10-20 Buehler Ag POLARIZATION INTERFEROMETER.
GB2256480B (en) * 1991-06-05 1995-02-01 Marconi Gec Ltd Improvements to optical sensors

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1126744A (en) * 1965-07-02 1968-09-11 Rank Organisation Ltd Apparatus for producing interference fringes
US3601490A (en) * 1966-12-30 1971-08-24 Keuffel & Esser Co Laser interferometer
NL6707681A (en) * 1967-06-02 1968-12-03
DE1772171B1 (en) * 1968-04-08 1972-03-09 Optomechanisms Inc OPTICAL INTERFEROMETER
NL6904621A (en) * 1969-03-25 1970-09-29

Also Published As

Publication number Publication date
FR2513375B1 (en) 1986-11-21
DD201191B1 (en) 1987-07-15
GB2107079A (en) 1983-04-20
DE3226137A1 (en) 1983-04-07
DD201191A1 (en) 1983-07-06
DE3226137C2 (en) 1990-05-17
FR2513375A1 (en) 1983-03-25

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19930921