CS245745B1 - Method of chemical processing of wastes produced in production of semiconductor elements - Google Patents
Method of chemical processing of wastes produced in production of semiconductor elements Download PDFInfo
- Publication number
- CS245745B1 CS245745B1 CS827086A CS708682A CS245745B1 CS 245745 B1 CS245745 B1 CS 245745B1 CS 827086 A CS827086 A CS 827086A CS 708682 A CS708682 A CS 708682A CS 245745 B1 CS245745 B1 CS 245745B1
- Authority
- CS
- Czechoslovakia
- Prior art keywords
- water
- point
- solution
- τλθηηηη
- ammonia
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims 6
- 239000004065 semiconductor Substances 0.000 title claims 3
- 238000004519 manufacturing process Methods 0.000 title claims 2
- 239000002699 waste material Substances 0.000 title claims 2
- 238000012993 chemical processing Methods 0.000 title 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims 4
- 239000000203 mixture Substances 0.000 claims 3
- 239000000243 solution Substances 0.000 claims 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- TWRXJAOTZQYOKJ-UHFFFAOYSA-L Magnesium chloride Chemical compound [Mg+2].[Cl-].[Cl-] TWRXJAOTZQYOKJ-UHFFFAOYSA-L 0.000 claims 2
- 229910021529 ammonia Inorganic materials 0.000 claims 2
- 239000003795 chemical substances by application Substances 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 2
- 239000007800 oxidant agent Substances 0.000 claims 2
- 230000001376 precipitating effect Effects 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 1
- 239000005708 Sodium hypochlorite Substances 0.000 claims 1
- 235000019270 ammonium chloride Nutrition 0.000 claims 1
- 239000007864 aqueous solution Substances 0.000 claims 1
- 229910052785 arsenic Inorganic materials 0.000 claims 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000005520 cutting process Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 229910052733 gallium Inorganic materials 0.000 claims 1
- 229910021513 gallium hydroxide Inorganic materials 0.000 claims 1
- DNUARHPNFXVKEI-UHFFFAOYSA-K gallium(iii) hydroxide Chemical group [OH-].[OH-].[OH-].[Ga+3] DNUARHPNFXVKEI-UHFFFAOYSA-K 0.000 claims 1
- 239000007792 gaseous phase Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims 1
- 230000007774 longterm Effects 0.000 claims 1
- 229910001629 magnesium chloride Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 150000003018 phosphorus compounds Chemical class 0.000 claims 1
- 231100000614 poison Toxicity 0.000 claims 1
- 230000007096 poisonous effect Effects 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 239000002244 precipitate Substances 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 239000008237 rinsing water Substances 0.000 claims 1
- SUKJFIGYRHOWBL-UHFFFAOYSA-N sodium hypochlorite Chemical compound [Na+].Cl[O-] SUKJFIGYRHOWBL-UHFFFAOYSA-N 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 239000002910 solid waste Substances 0.000 claims 1
- 238000003860 storage Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000002351 wastewater Substances 0.000 claims 1
- 241000375392 Tana Species 0.000 description 1
- XOYLJNJLGBYDTH-UHFFFAOYSA-M chlorogallium Chemical compound [Ga]Cl XOYLJNJLGBYDTH-UHFFFAOYSA-M 0.000 description 1
- 101150115538 nero gene Proteins 0.000 description 1
- 235000019583 umami taste Nutrition 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
Landscapes
- Manufacture And Refinement Of Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Treating Waste Gases (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD81235308A DD210809A3 (de) | 1981-12-02 | 1981-12-02 | Aufbereitung von bei der herstellung elektronischer halbleiterbauelemente anfallenden abprodukten |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CS708682A1 CS708682A1 (en) | 1985-06-13 |
| CS245745B1 true CS245745B1 (en) | 1986-10-16 |
Family
ID=5535057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CS827086A CS245745B1 (en) | 1981-12-02 | 1982-10-05 | Method of chemical processing of wastes produced in production of semiconductor elements |
Country Status (5)
| Country | Link |
|---|---|
| BG (1) | BG43909A1 (de) |
| CS (1) | CS245745B1 (de) |
| DD (1) | DD210809A3 (de) |
| RO (1) | RO84411B (de) |
| SU (1) | SU1308653A1 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5972073A (en) * | 1997-10-02 | 1999-10-26 | The University Of Dayton | Recovery of the components of group III-V material aqueous wastes |
-
1981
- 1981-12-02 DD DD81235308A patent/DD210809A3/de not_active IP Right Cessation
-
1982
- 1982-09-29 BG BG5812482A patent/BG43909A1/xx unknown
- 1982-09-29 SU SU827772645A patent/SU1308653A1/ru active
- 1982-10-05 CS CS827086A patent/CS245745B1/cs unknown
- 1982-11-30 RO RO109183A patent/RO84411B/ro unknown
Also Published As
| Publication number | Publication date |
|---|---|
| SU1308653A1 (ru) | 1987-05-07 |
| DD210809A3 (de) | 1984-06-20 |
| RO84411B (ro) | 1984-08-30 |
| RO84411A (ro) | 1984-06-21 |
| BG43909A1 (en) | 1988-09-15 |
| CS708682A1 (en) | 1985-06-13 |
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