CS189591B2 - Method of removing fluorine and hydrogen fluoride from industrial waste gases - Google Patents
Method of removing fluorine and hydrogen fluoride from industrial waste gasesInfo
- Publication number
- CS189591B2 CS189591B2 CS732072A CS207273A CS189591B2 CS 189591 B2 CS189591 B2 CS 189591B2 CS 732072 A CS732072 A CS 732072A CS 207273 A CS207273 A CS 207273A CS 189591 B2 CS189591 B2 CS 189591B2
- Authority
- CS
- Czechoslovakia
- Prior art keywords
- hydrogen fluoride
- industrial waste
- waste gases
- removing fluorine
- fluorine
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F7/00—Compounds of aluminium
- C01F7/48—Halides, with or without other cations besides aluminium
- C01F7/50—Fluorides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/06—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with moving adsorbents, e.g. rotating beds
- B01D53/10—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with moving adsorbents, e.g. rotating beds with dispersed adsorbents
- B01D53/12—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with moving adsorbents, e.g. rotating beds with dispersed adsorbents according to the "fluidised technique"
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Geology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Inorganic Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Environmental & Geological Engineering (AREA)
- Treating Waste Gases (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Drying Of Gases (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO943/72A NO131825C (sv) | 1972-03-22 | 1972-03-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
CS189591B2 true CS189591B2 (en) | 1979-04-30 |
Family
ID=19877887
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CS732072A CS189591B2 (en) | 1972-03-22 | 1973-03-21 | Method of removing fluorine and hydrogen fluoride from industrial waste gases |
Country Status (21)
Country | Link |
---|---|
US (1) | US3813852A (sv) |
JP (1) | JPS5792B2 (sv) |
AT (1) | AT322867B (sv) |
BE (1) | BE797066A (sv) |
BR (1) | BR7302019D0 (sv) |
CA (1) | CA982786A (sv) |
CH (1) | CH588417A5 (sv) |
CS (1) | CS189591B2 (sv) |
DE (1) | DE2313495C2 (sv) |
ES (1) | ES412890A1 (sv) |
FR (1) | FR2176817B1 (sv) |
GB (1) | GB1389769A (sv) |
HU (1) | HU165523B (sv) |
IT (1) | IT979616B (sv) |
NL (1) | NL154989B (sv) |
NO (1) | NO131825C (sv) |
OA (1) | OA04670A (sv) |
SE (1) | SE436736B (sv) |
SU (1) | SU728691A1 (sv) |
YU (1) | YU39270B (sv) |
ZA (1) | ZA731280B (sv) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5269284U (sv) * | 1976-08-17 | 1977-05-23 | ||
US4415317A (en) * | 1981-02-09 | 1983-11-15 | The Trane Company | Wrap element and tip seal for use in fluid apparatus of the scroll type |
JPS61132494U (sv) * | 1985-02-07 | 1986-08-19 | ||
JPS62284981A (ja) * | 1986-06-02 | 1987-12-10 | Matsushita Refrig Co | スクロ−ルコンプレツサ |
JPH02114785U (sv) * | 1989-03-01 | 1990-09-13 | ||
US5160512A (en) * | 1992-01-13 | 1992-11-03 | Cleveland State University | Gas separation process |
US6905663B1 (en) | 2000-04-18 | 2005-06-14 | Jose I. Arno | Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gas |
US6514471B1 (en) * | 2000-10-31 | 2003-02-04 | Air Products And Chemicals, Inc. | Removing fluorine from semiconductor processing exhaust gas |
GB0101769D0 (en) * | 2001-01-24 | 2001-03-07 | Ineos Fluor Ltd | Decomposition of fluorine compounds |
US7569193B2 (en) | 2003-12-19 | 2009-08-04 | Applied Materials, Inc. | Apparatus and method for controlled combustion of gaseous pollutants |
US7736599B2 (en) * | 2004-11-12 | 2010-06-15 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
JP5102217B2 (ja) * | 2005-10-31 | 2012-12-19 | アプライド マテリアルズ インコーポレイテッド | プロセス削減反応器 |
JP6090845B2 (ja) * | 2013-03-06 | 2017-03-08 | 国立研究開発法人農業・食品産業技術総合研究機構 | 吸引式種子精選装置 |
CN104911631A (zh) * | 2015-06-18 | 2015-09-16 | 中国科学院过程工程研究所 | 多孔氧化铝高效净化铝电解含氟烟气的新方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA613352A (en) * | 1961-01-24 | Aluminum Company Of America | Electrolytic production of aluminum | |
US2059553A (en) * | 1933-10-02 | 1936-11-03 | Harry V Churchill | Removal of fluorine from water |
US3503184A (en) * | 1968-03-07 | 1970-03-31 | Aluminum Co Of America | Treatment of gases evolved in the production of aluminum |
US3721066A (en) * | 1970-12-29 | 1973-03-20 | Teller Environmental Systems | Process for recovery of acid gases |
US3760565A (en) * | 1971-07-19 | 1973-09-25 | Aluminum Co Of America | Anti-pollution method |
-
1972
- 1972-03-22 NO NO943/72A patent/NO131825C/no unknown
-
1973
- 1973-02-22 ZA ZA731280A patent/ZA731280B/xx unknown
- 1973-02-28 IT IT21032/73A patent/IT979616B/it active
- 1973-03-06 YU YU595/73A patent/YU39270B/xx unknown
- 1973-03-13 NL NL737303509A patent/NL154989B/xx not_active IP Right Cessation
- 1973-03-16 GB GB1275973A patent/GB1389769A/en not_active Expired
- 1973-03-16 FR FR7309551A patent/FR2176817B1/fr not_active Expired
- 1973-03-19 US US00342730A patent/US3813852A/en not_active Expired - Lifetime
- 1973-03-19 DE DE2313495A patent/DE2313495C2/de not_active Expired
- 1973-03-20 BE BE129034A patent/BE797066A/xx not_active IP Right Cessation
- 1973-03-20 HU HUEE2116A patent/HU165523B/hu unknown
- 1973-03-20 CA CA166,486A patent/CA982786A/en not_active Expired
- 1973-03-21 SU SU1896654A patent/SU728691A1/ru active
- 1973-03-21 OA OA54858A patent/OA04670A/xx unknown
- 1973-03-21 AT AT253073A patent/AT322867B/de not_active IP Right Cessation
- 1973-03-21 ES ES412890A patent/ES412890A1/es not_active Expired
- 1973-03-21 CS CS732072A patent/CS189591B2/cs unknown
- 1973-03-21 SE SE7303963A patent/SE436736B/sv unknown
- 1973-03-21 BR BR732019A patent/BR7302019D0/pt unknown
- 1973-03-22 CH CH417273A patent/CH588417A5/xx not_active IP Right Cessation
- 1973-03-22 JP JP3196073A patent/JPS5792B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL154989B (nl) | 1977-11-15 |
NO131825B (sv) | 1975-05-05 |
ZA731280B (en) | 1974-10-30 |
FR2176817B1 (sv) | 1976-04-09 |
SU728691A3 (en) | 1980-04-15 |
SU728691A1 (ru) | 1980-04-15 |
AU5356173A (en) | 1974-09-26 |
IT979616B (it) | 1974-09-30 |
JPS497191A (sv) | 1974-01-22 |
US3813852A (en) | 1974-06-04 |
DE2313495C2 (de) | 1982-10-07 |
BR7302019D0 (pt) | 1974-07-25 |
HU165523B (sv) | 1974-09-28 |
JPS5792B2 (sv) | 1982-01-05 |
FR2176817A1 (sv) | 1973-11-02 |
CA982786A (en) | 1976-02-03 |
NO131825C (sv) | 1975-08-13 |
SE436736B (sv) | 1985-01-21 |
NL7303509A (sv) | 1973-09-25 |
AT322867B (de) | 1975-06-10 |
DE2313495A1 (de) | 1973-10-04 |
OA04670A (fr) | 1980-12-31 |
GB1389769A (en) | 1975-04-09 |
BE797066A (fr) | 1973-07-16 |
YU59573A (en) | 1982-06-30 |
YU39270B (en) | 1984-10-31 |
ES412890A1 (es) | 1975-12-16 |
CH588417A5 (sv) | 1977-05-31 |
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