CN2911757Y - Intelligent optical membrane full automatic monitoring system - Google Patents
Intelligent optical membrane full automatic monitoring system Download PDFInfo
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- CN2911757Y CN2911757Y CN 200620113727 CN200620113727U CN2911757Y CN 2911757 Y CN2911757 Y CN 2911757Y CN 200620113727 CN200620113727 CN 200620113727 CN 200620113727 U CN200620113727 U CN 200620113727U CN 2911757 Y CN2911757 Y CN 2911757Y
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- monochromator
- spectrometer
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- optical
- vacuum chamber
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Application Number | Priority Date | Filing Date | Title |
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CN 200620113727 CN2911757Y (en) | 2006-05-09 | 2006-05-09 | Intelligent optical membrane full automatic monitoring system |
Applications Claiming Priority (1)
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CN 200620113727 CN2911757Y (en) | 2006-05-09 | 2006-05-09 | Intelligent optical membrane full automatic monitoring system |
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CN2911757Y true CN2911757Y (en) | 2007-06-13 |
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CN 200620113727 Expired - Fee Related CN2911757Y (en) | 2006-05-09 | 2006-05-09 | Intelligent optical membrane full automatic monitoring system |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105925951A (en) * | 2016-07-07 | 2016-09-07 | 成都国泰真空设备有限公司 | Crystal control device with six wafers |
CN110058343A (en) * | 2019-04-16 | 2019-07-26 | 河南平原光电有限公司 | A kind of short-pass optical filtering membrane preparation method based on multi-angle spectral measurement |
CN112126907A (en) * | 2020-08-28 | 2020-12-25 | 佛山市博顿光电科技有限公司 | Vacuum coating control system and control method thereof, and vacuum coating equipment |
CN113774353A (en) * | 2021-09-15 | 2021-12-10 | 佛山市博顿光电科技有限公司 | Technological parameter optimization method and device in film coating process and film coating real-time monitoring system |
CN117089817A (en) * | 2023-06-29 | 2023-11-21 | 同济大学 | Optical film hybrid monitoring method based on Kalman filtering data fusion |
-
2006
- 2006-05-09 CN CN 200620113727 patent/CN2911757Y/en not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105925951A (en) * | 2016-07-07 | 2016-09-07 | 成都国泰真空设备有限公司 | Crystal control device with six wafers |
CN110058343A (en) * | 2019-04-16 | 2019-07-26 | 河南平原光电有限公司 | A kind of short-pass optical filtering membrane preparation method based on multi-angle spectral measurement |
CN110058343B (en) * | 2019-04-16 | 2021-08-17 | 河南平原光电有限公司 | Preparation method of short wave pass filter film based on multi-angle spectral measurement |
CN112126907A (en) * | 2020-08-28 | 2020-12-25 | 佛山市博顿光电科技有限公司 | Vacuum coating control system and control method thereof, and vacuum coating equipment |
CN113774353A (en) * | 2021-09-15 | 2021-12-10 | 佛山市博顿光电科技有限公司 | Technological parameter optimization method and device in film coating process and film coating real-time monitoring system |
CN117089817A (en) * | 2023-06-29 | 2023-11-21 | 同济大学 | Optical film hybrid monitoring method based on Kalman filtering data fusion |
CN117089817B (en) * | 2023-06-29 | 2024-02-13 | 同济大学 | Optical film hybrid monitoring method based on Kalman filtering data fusion |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Changzhou Yamadun Technology Co., Ltd. Assignor: Zhang Zhemin|Jia Qiuping|Beijing Aoptek Scientific & Technical Co., Ltd. Contract fulfillment period: 2007.7.1 to 2013.6.30 Contract record no.: 2008320000810 Denomination of utility model: Intelligent optical membrane full automatic monitoring system Granted publication date: 20070613 License type: Exclusive license Record date: 20081012 |
|
LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2007.7.1 TO 2013.6.30; CHANGE OF CONTRACT Name of requester: AMA CHANGZHOU KINGSTON PV GLASS CO., LTD. Effective date: 20081012 |
|
EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Changzhou Yamadun Technology Co., Ltd. Assignor: Beijing Aoptek Scientific & Technical Co., Ltd.|Zhang Zhemin|Jia Qiuping Contract record no.: 2008320000810 Date of cancellation: 20101129 |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070613 Termination date: 20140509 |