CN101251609A - Wide spectrum optical film-coating on-line monitoring system having colority monitoring function - Google Patents
Wide spectrum optical film-coating on-line monitoring system having colority monitoring function Download PDFInfo
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- CN101251609A CN101251609A CNA2008100268537A CN200810026853A CN101251609A CN 101251609 A CN101251609 A CN 101251609A CN A2008100268537 A CNA2008100268537 A CN A2008100268537A CN 200810026853 A CN200810026853 A CN 200810026853A CN 101251609 A CN101251609 A CN 101251609A
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 66
- 238000001228 spectrum Methods 0.000 title claims abstract description 27
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- 238000009501 film coating Methods 0.000 title 1
- 230000003595 spectral effect Effects 0.000 claims abstract description 16
- 238000012545 processing Methods 0.000 claims description 12
- 230000008020 evaporation Effects 0.000 claims description 9
- 238000001704 evaporation Methods 0.000 claims description 9
- 238000011156 evaluation Methods 0.000 claims description 8
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- 230000005540 biological transmission Effects 0.000 claims description 6
- 238000004611 spectroscopical analysis Methods 0.000 claims description 5
- 238000012935 Averaging Methods 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 229910052736 halogen Inorganic materials 0.000 claims description 4
- 150000002367 halogens Chemical class 0.000 claims description 4
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 238000013523 data management Methods 0.000 claims description 3
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- 238000000576 coating method Methods 0.000 description 9
- 239000010409 thin film Substances 0.000 description 8
- 238000004364 calculation method Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
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- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 4
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Abstract
The invention relates to a wide spectrum optical filming on-line monitoring system with a chromaticity monitoring function, comprising a light source, a vacuum chamber for optical filming, a monitoring plate, a polychromator, an electric coupled device, an A/D converting circuit and a computer arranged in the vacuum chamber. The light emitted from the light source enters the vacuum chamber, irradiates onto the monitoring plate, penetrates the vacuum chamber and incidents onto the polychromator, wide spectrum formed after grating of the polychromator diffracts the light incidents onto the electric coupled device which collects, drives and amplifies the corresponding light intensity of all spectral lines of the wide spectrum, then the light is inputted to the computer via the A/D converting circuit and a monitoring software system in the computer processes the light. The on-line monitoring system has high monitoring precision and is convenient to operate.
Description
Technical field
The present invention relates to the supervisory system field of optical vacuum coating machine, a kind of wide spectroscopic optics plated film online monitoring system that contains the colourity monitoring function of saying so more specifically.
Background technology
The optical characteristics of optical thin film and the thickness of its each layer are closely related, must accurately monitor thickness for being coated with satisfactory optical thin film in preparation process.Therefore the film thickness monitoring technology has caused that as a gordian technique in the thin film technique people more and more pay attention to.Film thickness monitoring is a kind of dynamic, real-time measurement and control to thickness.
In being coated with of non-quarter-wave broadband optical thin film, single wavelength monitor is difficult to accurately its broadband characteristic of control.Propositions such as therefore French horse plug country surface and the breadboard E.Pettetier of optical thin film are carried out the wide spectrum film thickness monitoring with evaluation function.
Wide spectral scan mode can be divided into mechanical scanning mode, spike interference filter scan mode, fibre-optic bundle in conjunction with the detection method of interference filter, utilize multiple modes such as ccd array scan mode.But because optical coating wide spectrum film thickness monitor procedure is a real-time monitor procedure, the semaphore request of whole monitor optical spectral limit is had quick demonstration, also requirement has high resolving power in being coated with optical communication dense wave division multipurpose optical filter.Therefore the above-mentioned several wide optical spectrum monitor modes of comprehensive contrast, ccd array scan method have advantages such as resolution height, reaction velocity are fast, good stability, are preferred plan.
Summary of the invention
The objective of the invention is to solve a difficult problem of the prior art, a kind of precision height, easy to operate, multi-functional and contain the wide spectroscopic optics plated film online monitoring system of colourity monitoring function of monitoring is provided.
For achieving the above object, technical scheme of the present invention is: a kind of wide spectroscopic optics plated film online monitoring system that contains the colourity monitoring function, comprise light source, be used for optically coated vacuum chamber, be located at the monitoring piece in the vacuum chamber, polychromator, charge coupled device, A/D change-over circuit and computing machine, the light that light source sends enters vacuum chamber and shines on the monitoring piece, the light transmission vacuum chamber also incides polychromator, the wide spectrum that forms behind the polychromator diffraction incides on the charge coupled device, charge coupled device gather wide spectrum each spectral line correspondence light intensity and amplify through the driving of charge coupled device, again by importing computing machine behind the A/D change-over circuit, and handle by the monitoring software system of computing machine.
Be connected with the light-conductive optic fibre that light is imported polychromator by vacuum chamber between vacuum chamber and the polychromator.In addition, also can be set to light is reflected into by vacuum chamber the catoptron of polychromator between vacuum chamber and the polychromator.
This polychromator comprises entrance slit, first, second plane mirror, curved reflector and grating, light is by entrance slit incident, through first flat mirror reflects to curved reflector, reflex to grating by curved reflector again, and, penetrate polychromator through the curved surface catoptron and second plane mirror again by optical grating reflection.
This light source adopts the halogen tungsten lamp of 150W, and is driven by stabilized voltage supply.
In addition, the monitoring software system of this computing machine comprise the initialization module that is used to be provided with plated film and charge coupled device parameter, be used to control charge coupled device receiving spectrum information and with the analog signal conversion that receives be digital signal data acquisition module, spectroscopic data is handled and result and theoretical curve is declared the data processing module that stops by evaluation function as evaporation and be used for being responsible for measured data and data management module that gross data is described at the output and the curve at watchdog routine interface.Data processing module also carries out sample averaging and smoothing processing to the spectroscopic data that collects.
The present invention has gathered monitoring hardware system and monitoring software system, has multi-functional, sensitive characteristics, and the operator can carry out wide optical spectrum monitor and colourity monitoring to optical coating in coating process.And in monitor procedure, the operator can see intuitively actual spectrum curvilinear motion in the process of being coated with, the Design Theory curve of spectrum and they near process, reduced requirement, and can both control regular film system and non-regular thin film to operator's proficiency.The colourity monitoring function can allow the operator be coated with when color had the optical thin film of strict demand, convenient the colorimetry parameter of film is monitored.
In addition, monitoring precision height of the present invention, and rete monitoring favorable repeatability have superiority to the monitoring of non-regular thin film, and measure and write down the transmission change situation in the whole wave band in evaporate process.The gained abundant information, this also helps our a series of character such as optical constant, dispersion of refractive index and heterogeneity of MEASUREMENTS OF THIN in real time.
Description of drawings
Fig. 1 contains the structure principle chart of the wide spectroscopic optics plated film online monitoring system of colourity monitoring function for the present invention;
Fig. 2 is polychromator interior lights line structure figure;
Fig. 3 is the general structure block diagram and the process flow diagram of monitoring software program of the present invention.
Embodiment
Following simple declaration contains the ultimate principle of the wide spectroscopic optics plated film online monitoring system of colourity monitoring function.
Wide spectral scanning method is to utilize the wide spectral scan curve of actual measurement and the target optical spectrum curve of Theoretical Calculation to compare, and gives a kind of film thickness monitoring method of control system with evaluation function feedback comparative result.System's reception luminous energy is when supposing not have monitoring piece
And establish: T
r, R
rBe respectively the transmissivity and the reflectivity of monitoring piece rear surface; T
0, R
0And T
i, R
iBe respectively before the monitoring piece front surface plated film and transmissivity and reflectivity in the coating process.So, the luminous energy that sees through before evaporation begins is:
Wherein
Before evaporation, deposit computing machine in calibration.Luminous energy in evaporate process is:
(2), (1) formula is divided by then
By cancellation:
When the preparation multilayer film, the transmissivity T of i layer
iRefractive index n with this tunic material
iWith thickness d
iAnd the wavelength X of being surveyed is relevant.If the n and the d of preceding i-1 tunic are known, and the refractive index n of i tunic coating materials
iUnder the stable situation, T then
iOnly relevant with the survey wavelength X, that is: T
i=T
i(λ, nd).Available range estimation is to measured spectra curve T in evaporate process
i(λ is nd) with the curve of spectrum T of Theoretical Calculation
i(λ
i, n
id
i) compare, but this method precision is lower, is to judge whether two curves reach consistent because be difficult to range estimation.So when film vapor deposition, by
Calculate T
i(λ nd), uses COMPUTER CALCULATION at λ again
1To λ
2The evaluation function F of i layer between whole wide spectral range
i:
In evaporate process, when d approaches d gradually
iThe time, F
iStop evaporation when reaching a minimal value, can reach the purpose of monitoring thickness.
The colourity monitoring then is the CIE standard colorimetric system according to modern colorimetry, after the data that obtain wide optical spectrum monitor, by calculating actual chromaticity coordinate, and compare with theoretical chromaticity coordinate, when actual chromaticity coordinate and theoretical chromaticity coordinate are the most approaching, stop evaporation, can reach the purpose of colourity monitoring.
In order to calculate the chromaticity coordinate of light source colour or object color, at first must measure the luminous power spectrum distribution of light source or spectral reflectivity (transmissivity) distribution of object, calculate the tristimulus values of color then, at last tristimulus values is converted to chromaticity coordinate.
The computing method of CIE 1931 color tristimulus values are to use the colour stimulus function
Multiply by CIE colorimetric functions respectively, and respectively these products are carried out integration in whole limit of visible spectrum, come approximate integration with summation in actual computation, the expression formula of summation is:
X, Y, Z are the tristimulus values of CIE1931 standard colorimetric system in the formula (5);
Be CIE1931 standard colorimetric observer spectral tristimulus value (table look-up and to get); V λ is the wavelength interval, generally gets 5nm or 10nm.
In the formula (5)
For working flare or light source is their relative luminous power spectrum distribution; For object color,
Be the product of the spectral reflectivity ρ (λ) of the bright factor β of spoke (λ) of the spectral transmittance τ (λ) of relative spectral power distribution S (λ) and object of working flare or light source or object or object:
Constant k in the formula (5) is called the adjustment factor, and it is that Y value with working flare (or light source) is adjusted at 100 o'clock and draws:
For the tristimulus values of asking in following reflecting object of working flare (or light source) or transparent objects, then need not multiply by and adjust factor k.
The luminance factor of object color is its Y values divided by working flare or the adjusted Y values of light source:
Calculate by formula (5) after the CIE1931 tristimulus values of object, be converted into CIE 1931 chromaticity coordinates of object again by the form of formula (9), that is:
The present invention is described in further detail below in conjunction with accompanying drawing.
As shown in Figure 1, a kind of wide spectroscopic optics plated film online monitoring system that contains the colourity monitoring function, comprise light source 1, be used for optically coated vacuum chamber 2, be located at the monitoring piece 3 in the vacuum chamber 2, polychromator 4, charge coupled device (Charge Coupled Device is called for short CCD) 5, A/D change-over circuit 6 and computing machine 7, the light that light source 1 sends enters vacuum chamber 2 and shines on the monitoring piece 3, light transmission vacuum chamber 2 also incides polychromator 4, the wide spectrum that forms behind polychromator 4 diffraction incides on the charge coupled device 5, charge coupled device 5 gather wide spectrum each spectral line correspondence light intensity and amplify through the driving of charge coupled device 5, handle again by A/D change-over circuit 6 back input computing machines 7, and by the supervisory system of computing machine 7.
As shown in Figure 2, this polychromator 4 comprises entrance slit 9, first, second plane mirror 10,11, first, second curved reflector 12,15 and grating 13, light reflexes to first surface catoptron 12 by entrance slit 9 incidents through first level crossing 10, reflexes to grating 13 by first surface catoptron 12 again, and, penetrate polychromator 4 through second curved reflector 15 and second plane mirror 11 again by grating 13 reflections.
Native system adopts the TCD1251UD of Toshiba type CCD, and effectively pixel is 2700.When plated film, owing to reasons such as electron gun, ion gun and bakings, be an environment that the background light intensity is very big in the vacuum chamber 2, by contrast, signal light intensity is very little.Therefore must improve the signal to noise ratio (S/N ratio) of monitor signal by effective method to the light path transformation of original system:
(1) halogen tungsten lamp that the halogen tungsten lamp of 30W is changed into 150W to be improving light source 1 light intensity, and uses 1 output of stabilized voltage supply stabilized light source.
(2) adopt light-conductive optic fibre 8 will monitor light and import polychromator 4, to reduce the loss of light signal energy in communication process and the interference of parasitic light.In addition, also can be set to light is reflected into by vacuum chamber 2 catoptron of polychromator 4 between vacuum chamber 2 and the polychromator 4.
(3) by special anchor clamps 14 8 of light-conductive optic fibres are fixed on the entrance slit 9 of polychromator 4 before, adjust distance and make the imaging point of optical fiber head enter entrance slit 9 just.Grating 13 in the polychromator 4 projects incident light on the CCD.
System select for use the CCD neutral line preferably 2000 effective pixels 380nm-780nm spectrum is detected, wavelength resolution reaches 0.5nm.The detected signal of CCD has had than higher precision and reasonable stability, and the data processing precision of coupled computer monitoring software and degree of stability will further improve again, can reach the requirement of real-time monitoring fully.
Software systems of the present invention adopt the MatrixVB exploitation of the Visual Basic 6.0 of Microsoft company in conjunction with MathWorks company.MatrixVB is the Matlab com component that MathWorks provides at VB, and it provides more than 600 Matlab function and mass efficient algorithm, can strengthen the built-in mathematical operation of VB.MatrixVB mainly handles a large amount of operational analysis in backstage in this program, and as the film feature calculation, the smoothing denoising of input data is handled the computing of evaluation function etc.; VB mainly handles foreground work, as showing output interface, describes data and curves, assists to declare and stops showing data file management etc.
The monitoring software system is made up of four module, and primary control program combines this four module, and realizes human-computer interaction function.The general structure block diagram of watchdog routine and monitoring process flow diagram, as shown in Figure 3.
(1) initialization module.When being responsible for plated film is set such as parameters such as incident angle, reference wavelength, the operation parameter of the corresponding relation and the CCD of CCD pixel and position of spectral line is set, sampling time and average sampling number when monitoring is set.Simultaneously the bias light that measures is forced after revising and be defined as largest light intensity
The calibration of realization light intensity.Transmissivity T (λ then
i) be:
Wherein
Be the light intensity that records in the coating process, A is a modified value.
(2) data acquisition module.Be responsible for control CCD driving circuit and make line array CCD carry out the spectral information that autoscan receives each pixel, controlling 12 A/D capture cards is digital signal with the analog signal conversion that CCD receives, and finally sends into computing machine.
(3) data processing module.
At first import film and be the thickness of each layer and refractive index and the theoretical curve when calculating each tunic and stop plating and the tendency of evaluation function, stop providing reference as declaring of evaporation by transfer matrix method.
Secondly produce noise because in actual plated film monitoring, can occur interference of stray light unavoidably, make spectrum produce burr and shake.So the function of this module comprises the spectroscopic data to collecting and carries out sample averaging and smoothing processing.
It is that mode by the identical pixel value of measurement result repeatedly is averaged is eliminated shake that sample averaging is handled.And smoothing processing is to come smoothed data by the method that per three points are averaged.λ wherein
IntBe the wavelength sampling interval, can carry out repeatedly smoothing processing according to actual conditions.
T(λ)＝(T(λ-λ
int)+T(λ)+T(λ+λ
int))/3
More than two kinds of methods use the instability that can eliminate light source to obtain the level and smooth curve of spectrum simultaneously, but its cost is to sacrifice response speed.Because be 10ms the integral time of general acquiescence CCD in the system, average sample 20 times, smoothing processing 30 times, then general every 0.4s once exports, and this is sufficient in time for evaporation rate in the coating process.And the user can change the time interval that above parameter reduces monitoring according to the operating position of reality.
The actual transmission data that will deal with are at last compared with theoretical value, do to stop in the coating process judgement of evaporation.
(4) data management module.This module mainly is responsible for measured data and gross data and is described at the output and the curve at watchdog routine interface.Simultaneously the user can amplify or dwindles indication range according to the wavelength coverage of required monitoring and transmission ranges, makes monitoring more accurate.This module also comprises file management facilities, can realize sampled data, the preservation of evaluation function data and importing, the preservation and the importing of film system, the management in coating materials storehouse.More than the operation Windows that is based on people and is familiar with operates, and is simple to operation.
Claims (7)
1, a kind of wide spectroscopic optics plated film online monitoring system that contains the colourity monitoring function, it is characterized in that comprising light source (1), be used for optically coated vacuum chamber (2), be located at the monitoring piece (3) in the vacuum chamber (2), polychromator (4), charge coupled device (5), A/D change-over circuit (6) and computing machine (7), the light that light source (1) sends enters vacuum chamber (2) and shines on the monitoring piece (3), light transmission vacuum chamber (2) also incides polychromator (4), the wide spectrum that forms behind polychromator (4) diffraction incides on the charge coupled device (5), charge coupled device (5) gather wide spectrum each spectral line correspondence light intensity and amplify through the driving of charge coupled device (5), handle again by A/D change-over circuit (6) back input computing machine (7), and by the monitoring software system of computing machine (7).
2, the wide spectroscopic optics plated film online monitoring system that contains the colourity monitoring function according to claim 1 is characterized in that: be connected with the light-conductive optic fibre (8) that light is imported polychromator (4) by vacuum chamber (2) between vacuum chamber (2) and the polychromator (4).
3, the wide spectroscopic optics plated film online monitoring system that contains the colourity monitoring function according to claim 1 is characterized in that: be provided with the catoptron that light is reflected into polychromator (4) by vacuum chamber (2) between vacuum chamber (2) and the polychromator (4).
4, the wide spectroscopic optics plated film online monitoring system that contains the colourity monitoring function according to claim 1, it is characterized in that: this polychromator (4) comprises entrance slit (9), first, second plane mirror (10), (11), first, second curved reflector (12), (15) and grating (13), light is by entrance slit (9) incident, reflex to first surface catoptron (12) through first level crossing (10), reflex to grating (13) by first surface catoptron (12) again, and, penetrate polychromator (4) through second curved reflector (15) and second plane mirror (11) again by grating (13) reflection.
5, the wide spectroscopic optics plated film online monitoring system that contains the colourity monitoring function according to claim 1 is characterized in that: this light source (1) adopts the halogen tungsten lamp of 150W, and is driven by stabilized voltage supply.
6, the wide spectroscopic optics plated film online monitoring system that contains the colourity monitoring function according to claim 1, it is characterized in that: the monitoring software system of this computing machine (7) comprises the initialization module that is used to be provided with plated film and charge coupled device parameter, be used to control charge coupled device receiving spectrum information and be the data acquisition module of digital signal the analog signal conversion that receives, spectroscopic data is handled and result and theoretical curve are declared the data processing module that stops by evaluation function as evaporation, and be used for being responsible for the data management module that measured data and gross data are described at the output and the curve at watchdog routine interface.
7, the wide spectroscopic optics plated film online monitoring system that contains the colourity monitoring function according to claim 6, it is characterized in that: data processing module also carries out sample averaging and smoothing processing to the spectroscopic data that collects.
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|---|---|---|---|
| CNA2008100268537A CN101251609A (en) | 2008-03-18 | 2008-03-18 | Wide spectrum optical film-coating on-line monitoring system having colority monitoring function |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100268537A CN101251609A (en) | 2008-03-18 | 2008-03-18 | Wide spectrum optical film-coating on-line monitoring system having colority monitoring function |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102564735A (en) * | 2011-04-06 | 2012-07-11 | 北京国科世纪激光技术有限公司 | Optical index measurement system |
| CN112197711A (en) * | 2020-09-01 | 2021-01-08 | 宜昌南玻显示器件有限公司 | Method for calculating film thickness of shadow eliminating layer of shadow eliminating ITO glass |
| CN113774353A (en) * | 2021-09-15 | 2021-12-10 | 佛山市博顿光电科技有限公司 | Technological parameter optimization method and device in film coating process and film coating real-time monitoring system |
| CN116770257A (en) * | 2023-06-25 | 2023-09-19 | 广州市博泰光学科技有限公司 | Optical lens coating film manufacturing system and manufacturing method thereof |
-
2008
- 2008-03-18 CN CNA2008100268537A patent/CN101251609A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102564735A (en) * | 2011-04-06 | 2012-07-11 | 北京国科世纪激光技术有限公司 | Optical index measurement system |
| CN112197711A (en) * | 2020-09-01 | 2021-01-08 | 宜昌南玻显示器件有限公司 | Method for calculating film thickness of shadow eliminating layer of shadow eliminating ITO glass |
| CN113774353A (en) * | 2021-09-15 | 2021-12-10 | 佛山市博顿光电科技有限公司 | Technological parameter optimization method and device in film coating process and film coating real-time monitoring system |
| CN116770257A (en) * | 2023-06-25 | 2023-09-19 | 广州市博泰光学科技有限公司 | Optical lens coating film manufacturing system and manufacturing method thereof |
| CN116770257B (en) * | 2023-06-25 | 2024-02-06 | 广州市博泰光学科技有限公司 | Optical lens coating film manufacturing system and manufacturing method thereof |
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