CN2891409Y - Combination of the inner surface of the right-angle circular table and the outer surface of the right-angle cone with all-mirror laser resonator - Google Patents
Combination of the inner surface of the right-angle circular table and the outer surface of the right-angle cone with all-mirror laser resonator Download PDFInfo
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Abstract
Description
技术领域technical field
本实用新型涉及激光谐振腔。The utility model relates to a laser resonant cavity.
背景技术Background technique
在激光应用的许多场合中,例如激光打孔、焊接、切割以及激光医疗等微精密加工中,都希望激光器最好能工作在发散角最小的基模状态。为了提高激光光束质量,传统选模技术(如使用孔径光阑)可以使激光器输出的光束质量提高,但使用孔径光阑在很大程度上限制了模体积,增加了模损耗。In many occasions of laser applications, such as laser drilling, welding, cutting, and laser medical micro-precision processing, it is hoped that the laser can best work in the fundamental mode state with the smallest divergence angle. In order to improve the quality of the laser beam, traditional mode selection techniques (such as using an aperture stop) can improve the quality of the laser output beam, but the use of an aperture stop limits the mode volume to a large extent and increases the mode loss.
在高功率激光器件设计中出现的主要问题是,如何获得尽可能大的模体积和好的横模鉴别能力,以实现高功率单模运转,从而既能从激活物质中高效率地提取能量,又能保持高的光束质量。The main problem in the design of high-power laser devices is how to obtain the largest possible mode volume and good transverse mode discrimination ability to achieve high-power single-mode operation, so as to extract energy efficiently from the active material and Can maintain high beam quality.
常用的激光谐振腔有稳定腔、非稳腔和临界腔三种。There are three types of laser resonators: stable cavity, unstable cavity and critical cavity.
稳定腔的损耗很低,傍轴光线的几何偏折损耗均为零,而且只要腔的菲涅尔数不太小,衍射损耗通常也小到可以忽略,因此在绝大多数中、小功率器件都采用稳定腔。当我们要求激光器高功率基模运行时,由于稳定腔的基模模体积太小,且与谐振腔镜面尺寸无关。这就意味着增大激活介质的横向尺寸或增大谐振腔镜面尺寸无助于基模激光光束输出功率的提高,反而容易导致激光器的多横模运转,降低输出光束的质量。The loss of the stable cavity is very low, the geometric deflection loss of the paraxial light is zero, and as long as the Fresnel number of the cavity is not too small, the diffraction loss is usually small enough to be ignored, so in most medium and small power devices Both use stable chambers. When we require the laser to operate in a high-power fundamental mode, the volume of the fundamental mode of the stable cavity is too small and has nothing to do with the size of the resonator mirror. This means that increasing the lateral size of the active medium or increasing the mirror size of the resonator does not help to increase the output power of the fundamental-mode laser beam, but easily leads to multi-transverse mode operation of the laser and reduces the quality of the output beam.
与一般稳定球面腔相比,非稳腔的波形限制能力显著提高;此外,由于振荡波形为球面波,对工作物质动态折射率畸变等影响比较不敏感,因此用于高增益激光器系统,可获得发散角相当小的高亮度输出光束。非稳腔的损耗主要是傍轴光线的发散损耗,单程的损耗很大,可达百分之几十。为获得高功率输出,工作物质的横向尺寸往往较大,因此衍射损耗可以忽略。由于腔的损耗较大,通常需采用侧面逸出输出耦合,故输出为中心空的环状光束。这种腔调整要求高,且不能用于低增益的或细口径的各类激光器系统中。Compared with the general stable spherical cavity, the waveform confinement ability of the unstable cavity is significantly improved; in addition, because the oscillation waveform is a spherical wave, it is relatively insensitive to the influence of the dynamic refractive index distortion of the working material, so it is used in a high-gain laser system and can obtain High brightness output beam with relatively small divergence angle. The loss of the unstable cavity is mainly the divergence loss of the paraxial light, and the loss of one-way is very large, which can reach tens of percent. In order to obtain high power output, the lateral size of the working substance is often large, so the diffraction loss can be ignored. Due to the large loss of the cavity, it is usually necessary to use side escape output coupling, so the output is a ring-shaped beam with a hollow center. This kind of cavity adjustment requires high requirements, and cannot be used in various laser systems with low gain or narrow aperture.
平行平面腔是临界腔中最广泛应用的一种腔型,它由一平面全反镜和一平面半透半反镜组成。平行平面腔的主要优点是:光束方向性极好(发散角小),模体积较大,比较容易获得单模振荡。平行平面腔的主要缺点是:调整精度要求极高且容易失调,与稳定腔相比,损耗也较大,对小增益器件不大适用。The parallel plane cavity is the most widely used type of cavity in the critical cavity, and it is composed of a plane full mirror and a plane half mirror. The main advantages of the parallel plane cavity are: excellent beam directionality (small divergence angle), large mode volume, and relatively easy to obtain single-mode oscillation. The main disadvantages of parallel planar cavities are: extremely high adjustment accuracy and easy misalignment. Compared with stable cavities, the loss is also larger, which is not suitable for small gain devices.
申请号99816848.3公开了一种《谐振腔含有陀螺形圆锥棱镜的激光器》;申请号200420017131.2公开了一种《直角内圆锥面反射镜激光谐振腔》。这两项专利提出的谐振腔是将平行平面腔的全反镜用直角圆锥棱镜和直角内圆锥面全反镜取代,利用直角圆锥棱镜和直角内圆锥面全反镜的逆向反射特性组成的直角圆锥棱镜谐振腔和直角内圆锥面全反镜谐振腔,可以大大降低腔的调整要求。同时,这些谐振腔除了具有平行平面腔的大模体积,小发散角的特点外,还具有高稳定性。但是这两类谐振腔的缺点是:不能消除增益介质中心与边缘不均匀分布的影响;不能压缩输出激光光斑的面积,从而提输出光斑的功率密度,也不能实现环行空心光斑的激光输出;直角圆锥棱镜腔热稳定性低,某些激光波段的棱镜需要特殊的光学晶体制造,价格昂贵。Application No. 99816848.3 discloses a "Laser with Resonant Cavity Containing Gyro-shaped Conic Prism"; Application No. 200420017131.2 discloses a "Laser Resonator with Right Angle Inner Conical Reflector". The resonant cavity proposed by these two patents replaces the total reflection mirror of the parallel plane cavity with a right angle conical prism and a right angle inner conical surface total reflection mirror, and utilizes the right angle formed by the retroreflection characteristics of the right angle conical prism and the right angle inner conical surface total reflection mirror. The conical prism resonant cavity and the right-angle inner conical surface full mirror resonant cavity can greatly reduce the adjustment requirements of the cavity. At the same time, in addition to the characteristics of large mode volume and small divergence angle of the parallel plane cavity, these resonant cavities also have high stability. However, the disadvantages of these two types of resonators are: the influence of the uneven distribution of the center and edge of the gain medium cannot be eliminated; the area of the output laser spot cannot be compressed to increase the power density of the output spot, and the laser output of the annular hollow spot cannot be realized; the right angle The thermal stability of the conical prism cavity is low, and the prisms in some laser bands need to be manufactured with special optical crystals, which are expensive.
发明内容Contents of the invention
本实用新型的目的在于克服上述现有技术的不足之处,提出一种直角圆台内侧面与直角圆锥外侧面组合全反镜激光谐振腔。该激光谐振腔可以消除增益介质中心与边缘不均匀分布的影响,光束质量好;可以压缩输出激光的光斑面积,并且能输出环形激光光斑;另外,加工方便,热稳定性好,价格低廉。The purpose of the utility model is to overcome the disadvantages of the above-mentioned prior art, and propose a laser resonator with full reflection mirror combined with the inner surface of a right-angled circular truncated truncated cone and the outer surface of a right-angled cone. The laser resonator can eliminate the influence of the uneven distribution of the center and edge of the gain medium, and has good beam quality; it can compress the spot area of the output laser, and can output the ring laser spot; in addition, it is easy to process, good in thermal stability and low in price.
为实现上述目的,本实用新型采用的技术方案是,一种直角圆台内侧面与直角圆锥外侧面组合全反镜激光谐振腔,包括全反镜、输出镜及激光工作介质,全反镜由一个直角圆台的内侧面和一个反向的直角圆锥的外侧面组成,直角圆台和直角圆锥的旋转对称轴同轴,直角圆台的内侧面和直角圆锥的外侧面均为高反射面,相互之间的尺寸关系为Φb=2Φa,其中Φa为直角圆锥的外侧面与直角圆台的内侧面相接圆的直径,Φb为全反镜的底面直径。In order to achieve the above object, the technical solution adopted by the utility model is, a kind of right-angled circular truncated inner surface and right-angled conical outer surface combination total reflection mirror laser resonator, including total reflection mirror, output mirror and laser working medium, total reflection mirror consists of a The inner surface of the right-angled circular frustum and the outer surface of a reverse right-angled cone, the rotational symmetry axes of the right-angled circular frustum and the right-angled cone are coaxial, and the inner surface of the right-angled circular frustum and the outer surface of the right-angled cone are high reflective surfaces The dimensional relationship is Φb=2Φa, where Φa is the diameter of the circle where the outer surface of the right-angled cone meets the inner surface of the right-angled circular truncated cone, and Φb is the diameter of the bottom surface of the total mirror.
本实用新型与现有技术相比具有以下优点:Compared with the prior art, the utility model has the following advantages:
(1)本实用新型在充分利用增益介质,实现大模体积激光输出的情况下,等效的将腔长成倍的增长,同时压缩了输出光斑的面积,可以获得发散角非常小,功率密度非常高,光束质量非常好的激光输出。(1) When the utility model makes full use of the gain medium and realizes the output of the large-mode volume laser, the cavity length is equivalently doubled, and the area of the output spot is compressed at the same time, so that the divergence angle is very small and the power density Very high, very good beam quality laser output.
(2)本实用新型利用其逆向反射特性,可以消除增益介质中心与边缘不均匀分布的影响,对固体激光棒在激励下的不均匀性、气体激光器中气体不均匀性、放电不均匀性等导致的增益不均匀性起到光学补偿作用,降低激光谐振腔镜子的热畸变。(2) The utility model can eliminate the influence of the uneven distribution of the center and edge of the gain medium by using its retroreflection characteristics, and the unevenness of the solid laser rod under excitation, the unevenness of the gas in the gas laser, and the unevenness of the discharge, etc. The resulting gain inhomogeneity acts as an optical compensation and reduces thermal distortion of the laser resonator mirror.
(3)本实用新型没有折射现象,提高了光场分布的均匀性。(3) The utility model has no refraction phenomenon, and improves the uniformity of the light field distribution.
(4)本实用新型可以输出环形空心激光光斑,在特殊的激光加工以及原子冷却、捕获等尖端物理研究中有广泛应用。(4) The utility model can output a ring-shaped hollow laser spot, which is widely used in cutting-edge physical research such as special laser processing and atom cooling and trapping.
(5)本实用新型利用其逆向反射特性,可以大大降低腔的调整要求,而且安装、使用、维护方便,且性能可靠,容易对现有激光器进行改装。(5) The utility model can greatly reduce the adjustment requirements of the cavity by utilizing its retroreflection characteristics, and it is convenient to install, use and maintain, and has reliable performance, and it is easy to refit the existing laser.
(6)本实用新型加工方便,制造成本低。(6) The utility model is easy to process and low in manufacturing cost.
(7)全反镜或者输出镜的轻微扰动,对输出激光的能量与光束质量没有明显影响。(7) A slight disturbance of the total reflection mirror or the output mirror has no obvious influence on the energy and beam quality of the output laser.
附图说明Description of drawings
图1为本实用新型中直角圆台内侧面与直角圆锥外侧面组合全反镜的结构示意图。Fig. 1 is the structural schematic diagram of the total reflection mirror combined with the inner surface of a right-angled circular platform and the outer surface of a right-angled cone in the utility model.
图2为图1的右视图。Fig. 2 is the right side view of Fig. 1 .
图3为图1中带有水槽和盖板的一种实施例的结构简图。Fig. 3 is a schematic structural diagram of an embodiment with a water tank and a cover plate in Fig. 1 .
图4为图3中水槽的左视图。Fig. 4 is a left side view of the water tank in Fig. 3 .
图5为图3中盖板的左视图。Fig. 5 is a left side view of the cover plate in Fig. 3 .
图6为本实用新型实施例1的结构示意图。Fig. 6 is a schematic structural view of
图7为图6中输出镜的结构简图。FIG. 7 is a schematic structural diagram of the output mirror in FIG. 6 .
图8为本实用新型实施例2的结构示意图。Fig. 8 is a schematic structural diagram of
图9为图8中带有水槽和盖板的输出镜一种实施例的结构简图。Fig. 9 is a schematic structural diagram of an embodiment of the output mirror with a water tank and a cover plate in Fig. 8 .
图10为图9中水槽的右视图。Fig. 10 is a right side view of the water tank in Fig. 9 .
图11为图9中盖板的右视图。Fig. 11 is a right view of the cover plate in Fig. 9 .
图12为本实用新型实施例3的结构示意图。Fig. 12 is a schematic structural view of
图13为图12输出镜的左视图。Fig. 13 is a left side view of the output mirror in Fig. 12 .
图14为图12中带有水槽和盖板的输出镜一种实施例的结构简图。Fig. 14 is a schematic structural diagram of an embodiment of the output mirror with a water tank and a cover plate in Fig. 12 .
图15为本实用新型实施例4的结构示意图。Fig. 15 is a schematic structural view of
图16为图15中带有水槽和盖板的输出镜一种实施例的结构简图。Fig. 16 is a schematic structural diagram of an embodiment of the output mirror with a water tank and a cover plate in Fig. 15 .
图17为本实用新型实施例5的结构示意图。Fig. 17 is a schematic structural view of
图18为图17中带有水槽和盖板的输出镜一种实施例的结构简图。Fig. 18 is a schematic structural diagram of an embodiment of the output mirror with a water tank and a cover plate in Fig. 17 .
具体实施方式Detailed ways
以下结合附图对本实用新型作进一步的详细说明。Below in conjunction with accompanying drawing, the utility model is described in further detail.
由图1所示,在本实用新型中,全反镜1由一个直角圆台的内侧面4和一个反向的直角圆锥的外侧面5组成,直角圆台和直角圆锥的旋转对称轴同轴,直角圆台的内侧面4和直角圆锥的外侧面5均为高反射面,相互之间的尺寸关系为Φb=2Φa,其中Φa为直角圆锥的外侧面5与直角圆台的内侧面4相接圆的直径,Φb为全反镜1的底面直径。As shown in Fig. 1, in the utility model,
全反镜1的光学性质是:入射光线经全反镜1反射两次后,反射光线与入射光线平行。或者说,只要入射光线方向不变,无论全反镜1绕其顶点如何晃动,反射光线的方向始终不变,与入射光线方向保持一致。根据这一性质,谐振腔输出光线的方向与输出镜2的法线方向相同,且当全反镜1顶点位于光轴附近,其轴线与光轴近似重合时即可出光,全反镜1或者输出镜2的轻微扰动,对出光能量与光束质量没有明显下降。The optical properties of the
由图2~图5所示,由全反镜1构成的组合体6的后面有冷却水槽7,在水槽盖板10上开有进水口8和出水口9,盖板10与组合体6可采用焊接方式密封连接。As shown in Figures 2 to 5, there is a cooling water tank 7 behind the assembly 6 made of the
在本实用新型的激光谐振腔中,全反镜1均由一个直角圆台的内侧面4和一个反向的直角圆锥的外侧面5组成,而输出镜2可为多种不同的结构。In the laser resonator of the utility model, the
安装时,全反镜1与输出镜2的旋转对称轴同轴,全反镜1所述直角圆锥的顶点最好位于激光腔的光轴上,全反镜1的底平面与光轴垂直。During installation,
实施例1Example 1
由图6~图7所示,本实用新型包括全反镜1、输出镜2和激光工作介质3,全反镜1由一个直角圆台的内侧面4和一个反向的直角圆锥的外侧面5组成。输出镜2是由圆形平面11和边缘的同心环状平面12组成的整体平面镜,在圆形平面11上镀半透半反膜,作为激光输出口,在环状平面12上镀高反膜,相互之间的尺寸关系为Φd=Φb=2Φc,其中Φc为圆形平面11的直径,Φd为输出镜2的直径。Shown in Fig. 6~Fig. 7, the utility model comprises
实施例1激光谐振腔的有效激光输出光斑面积为全反镜1底面面积的四分之一,可以大大提高激光输出功率密度。该谐振腔在工作介质为气体和固体时均可使用,特别是当增益区较大时,更可以充分发挥优势。
实施例2Example 2
由图8~图11所示,本实用新型包括全反镜1、输出镜2和激光工作介质3,全反镜1由一个直角圆台的内侧面4和一个反向的直角圆锥的外侧面5组成。输出镜2为分体输出镜,由圆形平面半透半反镜13和边缘的同心环状平面全反镜14组成,圆形平面半透半反镜13和环状平面全反镜14的旋转对称轴同轴,相互之间的尺寸关系为Φd=Φb=2Φc,Φe>Φc,Φf>Φd,其中Φc为圆形平面半透半反镜13的直径,Φd为输出镜2的直径,Φe为圆形平面半透半反镜13的安装尺寸,Φf为输出镜2的安装尺寸。15为输出镜2的环形冷却水槽,16为环状盖板。Shown in Figures 8 to 11, the utility model includes a
实施例2激光谐振腔的有效激光输出光斑面积为全反镜1底面面积的四分之一,可以大大提高激光输出功率密度。该谐振腔在工作介质为气体和固体时均可使用,特别是当增益区较大时,更可以充分发挥优势。
实施例3Example 3
由图12~图14所示,本实用新型包括全反镜1、输出镜2和激光工作介质3,全反镜1由一个直角圆台的内侧面4和一个反向的直角圆锥的外侧面5组成。输出镜2为分体输出镜,由圆形平面半透半反镜13和边缘的同心环状的全反镜17组成,同心环状的全反镜17由第一直角圆台的内侧面18和反向的第二直角圆台的外侧面19组成,二个直角圆台的旋转对称轴同轴,所述内侧面18和外侧面19均为高反射面,圆形平面半透半反镜13和同心环状的全反镜17旋转对称轴同轴,相互之间的尺寸关系为Φd=Φb=2Φc,Φd-Φg=Φg-Φc,Φe>Φc,Φf>Φd,其中Φc为圆形平面半透半反镜13的直径,Φd为输出镜2的直径,Φg为第二直角圆台的外侧面19与第一直角圆台的内侧面18相接圆的直径,Φe为圆形平面半透半反镜13的安装尺寸,Φf为输出镜2的安装尺寸。15为输出镜2的环形冷却水槽,16为带有进出水口的环状盖板。Shown in Figures 12 to 14, the utility model includes a
实施例3激光谐振腔的有效激光输出光斑面积为全反镜1底面面积的四分之一,可以大大提高激光输出功率密度。该谐振腔在工作介质为气体和固体时均可使用,特别是当增益区较大时,更可以充分发挥优势。
实施例4Example 4
由图15~图16所示,本实用新型包括全反镜1、输出镜2和激光工作介质3,全反镜1由一个直角圆台的内侧面4和一个反向的直角圆锥的外侧面5组成。输出镜2为分体输出镜,由第一整体镜和边缘的同心环状的全反镜17组成,同心环状的全反镜17由第一直角圆台的内侧面18和反向的第二直角圆台的外侧面19组成,二个直角圆台的旋转对称轴同轴,所述内侧面18和外侧面19均为高反射面,第一整体镜由圆形平面20和边缘的同心环状平面21组成,在圆形平面20上镀半透半反膜,在环状平面21上镀高反膜,第一整体镜和同心环状的全反镜17的旋转对称轴同轴,相互之间的尺寸关系为Φd=Φb=2Φc,Φd-Φg=Φg-Φc,Φc=2Φh,Φe>Φc,Φf>Φd,Φf>Φd,其中Φh为圆形平面20的直径,Φc为环状平面21外环的直径,Φd为输出镜2的直径,Φg为第二直角圆台的外侧面19与第一直角圆台的内侧面18相接圆的直径,Φe为第一整体镜的安装尺寸,Φf为分体输出镜2的安装尺寸。15为输出镜2的环形冷却水槽,16为带有进出水口的环状盖板。Shown in Figures 15 to 16, the utility model includes a
实施例4激光谐振腔的有效激光输出光斑面积为全反镜1底面面积的十六分之一,可以大大提高激光输出功率密度。该谐振腔在工作介质为气体和固体时均可使用,特别是当增益区较大时,更可以充分发挥优势。
实施例5Example 5
由图17~图18所示,本实用新型包括全反镜1、输出镜2和激光工作介质3,全反镜1由一个直角圆台的内侧面4和一个反向的直角圆锥的外侧面5组成。输出镜2为分体输出镜,由第二整体镜和边缘的同心环状的全反镜17组成,同心环状的全反镜17由第一直角圆台的内侧面18和反向的第二直角圆台的外侧面19组成,二个直角圆台的旋转对称轴同轴,所述内侧面18和外侧面19均为高反射面,第二整体镜由圆形平面22和边缘的同心环状平面23组成,在圆形平面22上镀全反膜,在环状平面23上镀半透半反膜,第二整体镜和同心环状的全反镜17的旋转对称轴同轴,相互之间的尺寸关系为Φd=Φb=2Φc,Φd-Φg=Φg-Φc,Φc=2Φh,Φe>Φc,Φf>Φd,其中Φh为圆形平面22的直径,Φc为环状平面23外环的直径,Φd为分体输出镜2的直径,Φg为第二直角圆台的外侧面19与第一直角圆台的内侧面18相接圆的直径,Φe为整体镜的安装尺寸,Φf为分体输出镜2的安装尺寸。15为输出镜2的环形水槽,16为带有进出水口的环状盖板。Shown in Figures 17 to 18, the utility model includes a
实施例5输出环形空心光束,在特殊的三维激光加工以及原子捕获、冷却等尖端物理研究中有重要的应用前景。实施例5激光谐振腔的有效激光输出光斑面积为全反镜1底面面积的十六分之三,可以大大提高激光输出功率密度。该谐振腔在工作介质为气体和固体时均可使用,特别是当增益区较大时,更可以充分发挥优势。
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100405678C (en) * | 2006-03-15 | 2008-07-23 | 华中科技大学 | Combination of the inner surface of the right-angle circular table and the outer surface of the right-angle cone with all-mirror laser resonator |
CN102064458B (en) * | 2009-11-13 | 2012-05-23 | 四川大学 | Hollow round table resonant cavity gas laser |
RU2817617C1 (en) * | 2024-01-30 | 2024-04-16 | Юрий Георгиевич Сухой | Reflective reflector returning incident electromagnetic radiation of the optical range in the reverse direction |
-
2006
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100405678C (en) * | 2006-03-15 | 2008-07-23 | 华中科技大学 | Combination of the inner surface of the right-angle circular table and the outer surface of the right-angle cone with all-mirror laser resonator |
CN102064458B (en) * | 2009-11-13 | 2012-05-23 | 四川大学 | Hollow round table resonant cavity gas laser |
RU2817617C1 (en) * | 2024-01-30 | 2024-04-16 | Юрий Георгиевич Сухой | Reflective reflector returning incident electromagnetic radiation of the optical range in the reverse direction |
RU2817617C9 (en) * | 2024-01-30 | 2024-04-25 | Юрий Георгиевич Сухой | Reflective reflector returning incident electromagnetic radiation of the optical range in the reverse direction |
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