CN102593698B - Laser resonant cavity with pan-shaped mirror surface - Google Patents
Laser resonant cavity with pan-shaped mirror surface Download PDFInfo
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- CN102593698B CN102593698B CN201210057903.4A CN201210057903A CN102593698B CN 102593698 B CN102593698 B CN 102593698B CN 201210057903 A CN201210057903 A CN 201210057903A CN 102593698 B CN102593698 B CN 102593698B
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Abstract
The invention discloses a laser resonant cavity with a pan-shaped mirror surface, comprising an output mirror, a reflecting mirror and a laser working medium, wherein the output mirror and the reflecting mirror are arranged oppositely in the resonant cavity, and the laser working medium is arranged between the output mirror and the reflecting mirror, and at least one of the output mirror and the reflecting mirror is provided with a pan-shaped working surface which is formed by a concave spherical ring surface being internally tangent and connected with a round plane. Particularly, the relationship between the curvature radius R of the concave spherical ring surface and the length L of the laser resonant cavity is as follows: R is greater than L and less than 10L; and the ratio of the diameter b of the round plane to the external diameter of the concave spherical ring surface is as follows: b/a=0.4-0.8. According to the laser resonant cavity, laser with high quality of beams can be output within large fresnel range, and large volume and high power output can be obtained. In addition, the laser resonant cavity has the advantages of simple processing, convenient adjustment, stable operation, large volume of mode, small angle of divergence and high quality of beams. The laser resonant cavity can be applied in medium-high power gas or solid laser, particularly the laser resonant cavity is suitable for laser with large-volume gain medium.
Description
Technical field
The present invention relates to the resonant cavity in the laser generation technology, refer to particularly a kind of laser resonant cavity with pan-shaped mirror surface.
Background technology
In many occasions of laser application, in micro-Precision Machining such as laser drilling, welding, cutting and laser medicine, all wish that laser preferably can be operated in that the angle of divergence is little, the basic mode of good beam quality or low-order mode state.Traditional mode selection technique, can make the beam quality of laser output improve as used aperture diaphragm, but use aperture diaphragm to limit to a great extent the mode volume of laser beam, increased mode loss, thereby caused laser operating efficiency to reduce.
The key of high power laser light device design is when obtaining large as far as possible mode volume and good transverse mode distinguishing ability; realize high power single mode or low step mode running; thereby can extract expeditiously energy from activated material, can keep high beam quality again.The laserresonator that the high power laser light device is commonly used mainly contains stable cavity and unsteady cavity two classes, and stable cavity divides again parallel concave surface stable cavity and parallel plane stable cavity etc.
The vibration loss of parallel concave surface stable cavity is very low, how much deviation losses of paraxial ray are zero, and, as long as the Fresnel number in chamber is not too little, diffraction loss is usually also little of ignoring, so all adopt parallel concave surface stable cavity in the overwhelming majority, in the low-power laser device.But when we require the operation of laser high power basic mode, because the basic mode mode volume of parallel concave surface stable cavity is too little, and irrelevant with stable cavity minute surface size, this just means the lateral dimension that increases active medium or increases the raising that stable cavity minute surface size is helpless to basic mode laser beam power output, easily cause on the contrary many transverse mode runnings of Laser Devices, thereby reduce the beam quality of Output of laser.In addition, in parallel concave surface stable cavity, use hard-edge aperture can obtain basement membrane or low step mode output, but the use of hard-edge aperture can cause the operating efficiency of Laser Devices to descend, and can form diffraction ring in far field, these all are unfavorable for actual laser application.
The parallel plane stable cavity is the stable resonator of another kind of extensive use, and it is comprised of a plane mirror and a planar section speculum.The major advantage of parallel plane stable cavity is that the angle of divergence of its Output of laser is little, and the beam directionality is fabulous, and mode volume is larger, than being easier to obtain single mode or low step mode vibration.Its major defect is to adjust the high and easy imbalance of required precision, also larger with the specific loss of parallel concave surface stable cavity phase, not quite applicable to little gain device.
With parallel concave surface stable cavity, compare, when laserresonator adopts unsteady cavity, its pattern distinguishing ability can significantly improve.In addition, the waveform in unsteady cavity is spherical wave, more insensitive on impacts such as the dynamic Index distortions of working media.Therefore, while using it for the high-gain laser system, can obtain the high brightness output beam that the angle of divergence is quite little.The loss of unsteady cavity is mainly the divergence loss of paraxial ray, and loss by one path is very large, can reach tens percent.For obtaining high-power output, the lateral dimension of laser working medium is often larger, so diffraction loss can be ignored.Because the loss of unsteady cavity is larger, usually need to adopt side to overflow and export coupling, therefore output is mostly hollow and annular light beam or rectangular light beam.The adjustment in this chamber requires high, and can not be applied in all kinds of Optical Maser Systems low gain or thin bore.
Summary of the invention
The object of the invention is to overcome the deficiency that above-mentioned prior art exists, a kind of laser resonant cavity with pan-shaped mirror surface of high light beam quality Laser output is provided in a relatively large Fresnel number scope.This resonant cavity can, under the prerequisite that guarantees laser beam quality, obtain large mode volume and high-power output.
For achieving the above object, the laser resonant cavity with pan-shaped mirror surface that the present invention is designed, be included in outgoing mirror and the speculum of positioned opposite in resonant cavity and be arranged on outgoing mirror and speculum between laser working medium, its special character is: in described outgoing mirror and speculum, have at least the working face of to be pan-shaped, this pan-shaped working face connects a circular flat by a recessed ball face inscribe and forms.
As preferred version, the pass between the radius of curvature R of described recessed ball face and laserresonator length L is: L<R<10L, best span is: 3L≤R≤7L.
Further, the external diameter a of described recessed ball face and the pass between the laserresonator length L are: 1<a
2/ (L λ)<15, wherein λ means the operation wavelength of laser.
Further, the ratio of the external diameter a of the diameter b of described circular flat and recessed ball face is: b/a=0.4～0.8.
The mechanism of action of the present invention is as follows: for traditional parallel concave surface stable cavity, because the working face of outgoing mirror and/or speculum is the pan-shaped structure, cause the light field of the basic mode of laserresonator and low step mode not to be concentrated in the center of this pan-shaped minute surface, but be evenly distributed on whole minute surface, the volume of basic mode and low step mode is just extended like this, and the pattern distinguishing ability of laserresonator also has been enhanced.Therefore, resonant cavity of the present invention can be used for replacing parallel concave surface stable cavity, improves the quality of Output of laser light beam.For traditional parallel plane stable cavity, although the pan-shaped minute surface can cause the volume of Fundamental mode of cavity to enlarge, in fact this time low step mode diffraction loss to compare the parallel plane stable cavity still very little.Therefore, the power output of resonant cavity of the present invention is higher than the power output of parallel plane stable cavity, also can guarantee that resonant cavity has Misalignment Characteristics preferably, can be used for replacing the parallel plane stable cavity simultaneously.
Compared with prior art, the present invention has following advantage:
One, have the advantages that output beam quality is good, the angle of divergence is little, mode volume is large, power output is high, can meet high light beam quality and high-power Laser output simultaneously.
Its two, very high pattern distinguishing ability can be provided, can suppress the vibration of higher order mode, guarantee that resonant cavity is in low step mode work.
Its three, can replace traditional parallel concave surface stable cavity and parallel plane stable cavity, reduce the size of laser, improve the power output of laser.
Its four, there is low-loss, be difficult for the characteristic of imbalance.Adjustment requires low, and mounting, commissioning and maintenance is convenient, and dependable performance.
Its five, easily existing laserresonator is reequiped, can not only improve the beam quality of existing laser, can also improve the power output of laser.
Its six, simple in structure, easy to process, cheap for manufacturing cost.
The accompanying drawing explanation
The outline structural representation that Fig. 1 is the pan-shaped working face of outgoing mirror and/or speculum in laser resonant cavity with pan-shaped mirror surface.
The structural representation of the first embodiment that Fig. 2 is laser resonant cavity with pan-shaped mirror surface.
The near field intensity distribution schematic diagram that Fig. 3 is the first embodiment Output of laser.
The far-field intensity distribution schematic diagram that Fig. 4 is the first embodiment Output of laser.
The key parameter that Fig. 5 is the first embodiment Output of laser changes schematic diagram.
The anti-Misalignment Characteristics schematic diagram that Fig. 6 is the first embodiment Output of laser.
The structural representation of the second embodiment that Fig. 7 is laser resonant cavity with pan-shaped mirror surface.
The structural representation of the third embodiment that Fig. 8 is laser resonant cavity with pan-shaped mirror surface.
Embodiment
Below in conjunction with the drawings and specific embodiments, laser resonant cavity with pan-shaped mirror surface of the present invention is described in further detail.
As shown in Fig. 2, Fig. 7 and Fig. 8, laser resonant cavity with pan-shaped mirror surface provided by the invention, be included in outgoing mirror 1 and the speculum 2 of positioned opposite in resonant cavity and be arranged on outgoing mirror 1 and speculum 2 between laser working medium 3.In speculum 1 and outgoing mirror 2, have at least the working face of to be pan-shaped.
As shown in Figure 1, this pan-shaped working face consists of a circular flat Q of a recessed ball face H inscribe connection.This pan-shaped working face also can define by following mathematical method: establish p
2for straight line p
1p
4mid point, straight line L
1for straight line p
1p
4perpendicular bisector, circular arc p
1p
3with straight line p
1p
4at p
1point is tangent.By curve p
3p
1p
2around straight line p
1p
4perpendicular bisector L
1rotating 360 degrees, can obtain the pan-shaped working face consisted of recessed ball face H and circular flat Q.The radius of a ball that defines recessed ball face H is R, the external diameter of recessed ball face H is a, the diameter of circular flat Q is b (equating with the internal diameter of recessed ball face H), the laser resonance cavity length is L, the operation wavelength of laser is λ, between these parameters, meet following mathematical relationship: b/a=0.4～0.8, L<R<10L (preferably 3L≤R≤7L), 1<a
2/ (L λ)<15.
As shown in Figure 2, in the first embodiment of the present invention, the working face of outgoing mirror 1 is pan-shaped, and the ratio of the external diameter a of the diameter b of its circular flat Q and recessed ball face H is: b/a=0.4～0.7, the radius of curvature R of its recessed ball face H and the pass between the laserresonator length L are: R=5L.The Fresnel number of resonant cavity is a
2/ (L λ)=6.2.The working face of speculum 2 is planar shaped.To the laserresonator of embodiment 1, analyzed known, its output beam in the form of a ring, the power peak position is not or not the center of minute surface, but take on the circle that the minute surface center is the center of circle, can reduce like this temperature at outgoing mirror 1, speculum 2 and outer light path lens center, reduce thermal deformation, improve beam stability.
As shown in Figure 3, for the described laserresonator of embodiment 1 is 6.2 at Fresnel number, during the b/a=0.6 of outgoing mirror 1, the near field intensity distribution schematic diagram of Output of laser.In figure: x axle and y axle mean respectively the spot size of x direction and y direction, and y direction means the relative intensity distribution Relative amplitude of laser.
As shown in Figure 4, for the described laserresonator of embodiment 1 is 6.2 at Fresnel number, during the b/a=0.6 of outgoing mirror 1, the far-field intensity distribution schematic diagram of Output of laser.In figure: x axle and y axle mean respectively the spot size of x direction and y direction, and y direction means the relative intensity distribution Relative amplitude of laser.
From Fig. 3 and Fig. 4, the laser beam that embodiment 1 produces remains a kind of ring-shaped light spot output.Compare with traditional stable cavity, adopt laser resonant cavity with pan-shaped mirror surface can guarantee quality for outputting laser beam.
As shown in Figure 5, the key parameter for the described laserresonator Output of laser of embodiment 1 changes schematic diagram.In figure: transverse axis means the b/a value of outgoing mirror 1, and left vertical means the variation of laser output power Output power, and right vertical means the laser output beam factor M
2the variation of factor.
As can be seen from Figure 5, when the b/a of outgoing mirror 1 value changes, laser output power and laser output beam M
2the factor is respective change also.When the b/a value is 0, an actual spherical mirror, at this moment the output beam M of being equal to of outgoing mirror 1
2the factor is greater than 6, illustrates that pan-shaped minute surface resonant cavity can guarantee high laser beam quality.When the b/a value approaches 0.6, Laser output approaches local maximum, and output beam M
2factor minimum, M
2the factor is near 2.0, and now laser output beam is circular pattern.In actual use, the b/a value is best in 0.4～0.7 scope for embodiment 1.The Fresnel number of laserresonator is less, and it is less that the value of the b/a of pan mirror should be got.The Fresnel number of laserresonator is larger, and the b/a value of outgoing mirror 1 just should obtain larger.
As shown in Figure 6, for the described laserresonator of embodiment 1 is 6.2 at Fresnel number, when b/a=0.6, the R=15m of outgoing mirror 1, the anti-Misalignment Characteristics schematic diagram of Output of laser.In figure: transverse axis means the imbalance angle misalignment (μ rad) of speculum 2, the longitudinal axis means the variation of laserresonator power output Output power, when solid line means that the working face of outgoing mirror 1 is pan-shaped pan-like mirror resonator, the variation of its laser output power, when dotted line means outgoing mirror 1 for the radius of curvature spherical reflector concave mirror resonator (R=60m) that is 60m, the variation of its laser output power, when chain-dotted line means outgoing mirror 1 for the radius of curvature spherical reflector concave mirror resonator (R=20m) that is 20m, the variation of its laser output power.
As can be seen from Figure 6, the anti-Misalignment Characteristics that the spherical mirror laserresonator that it is 60m that the laser resonant cavity with pan-shaped mirror surface of outgoing mirror 1 parameters R=15m, b/a=0.6 has to radius of curvature is similar, illustrate that its anti-Misalignment Characteristics is good.Therefore, pan-shaped mirror laserresonator is very easy to for industrial production.
As can be seen here, the described laser resonant cavity with pan-shaped mirror surface of embodiment 1 can improve laser output power greatly.In the situation that mode volume is constant, can greatly reduce the angle of divergence, the better laser beam of output quality.This resonant cavity all can be used when laser working medium 3 is gas or solid, particularly, when gain region is larger, more can give full play to its advantage.
As shown in Figure 7, in the second embodiment of the present invention, the working face of speculum 2 is pan-shaped, and the ratio of the external diameter a of the diameter b of its circular flat Q and recessed ball face H is: b/a=0.6～0.7, the radius of curvature R of its recessed ball face H and the pass between the laserresonator length L are: R=5L.The working face of outgoing mirror 1 is planar shaped.Laser working medium 3 adopts the circular cylindrical structure.To the laserresonator of embodiment 2, analyzed known, its output beam in the form of a ring, the power peak position is not or not the center of minute surface, but take on the circle that the minute surface center is the center of circle, can reduce like this temperature at outgoing mirror 1, speculum 2 and outer light path lens center, reduce thermal deformation, improve beam stability.
With traditional stable cavity, compare, the described laser resonant cavity with pan-shaped mirror surface of embodiment 2 is in the situation that guarantee that quality for outputting laser beam, the angle of divergence are constant, can improve laser output power greatly.In the situation that mode volume is constant, can greatly reduce the angle of divergence, the better laser beam of output quality.This resonant cavity all can be used when laser working medium 3 is gas or solid, particularly, when the gain region of laser working medium 3 is the circular cylindrical structure, more can give full play to its advantage.In actual use, the b/a value is best in 0.6～0.7 scope for embodiment 2.The Fresnel number of resonant cavity is less, and the b/a value should obtain less.The Fresnel number of resonant cavity is larger, and the b/a value just should obtain larger.
As shown in Figure 8, in the third embodiment of the present invention, the working face of outgoing mirror 1 and speculum 2 all is pan-shaped, the ratio of the external diameter a of the diameter b of its circular flat Q and recessed ball face H is: b/a=0.6～0.8, the radius of curvature R of its recessed ball face H and the pass between the laserresonator length L are: R=7L.The laserresonator of embodiment 3 is analyzed known, in the form of a ring, the power peak position, or not the center of minute surface, can reduce the temperature at outgoing mirror 1, speculum 2 and outer light path lens center to its output beam like this, reduces thermal deformation, improves beam stability.
With traditional stable cavity, compare, the working face of outgoing mirror 1 and speculum 2 all adopts the laserresonator of pan-shaped in the situation that guarantee that quality for outputting laser beam, the angle of divergence are constant, and its mode volume can increase many, thereby greatly improves laser output power.And, in the situation that mode volume is constant, with traditional stable cavity or monocycle concave mirror resonant cavity, compare, the angle of divergence of many ring laser resonant cavity with pan-shaped mirror surface output beams is less with one heart, focal beam spot is less.Simultaneously, the working face of outgoing mirror 1 and speculum 2 all adopts pan-shaped can make the anti-Misalignment Characteristics of resonant cavity more outstanding, and diffraction loss is further dwindled, and has so just improved the operating efficiency of laser, has reduced the use cost of laser.Embodiment 3 all can be used when laser working medium 3 is gas or solid, particularly, when gain region is larger, more can give full play to its advantage.In actual use, the b/a value is best 0.6～0.8 to embodiment 3.The Fresnel number of resonant cavity is less, and the b/a value should obtain less.The Fresnel number of resonant cavity is larger, and the b/a value just should obtain larger.
The present invention not only is confined to above-mentioned embodiment; persons skilled in the art are according to content disclosed by the invention; can adopt other multiple embodiment to implement the present invention; therefore; every employing project organization of the present invention and thinking; do some simple designs that change or change, all fall into the scope of protection of the invention.
Claims (6)
1. a laser resonant cavity with pan-shaped mirror surface, be included in outgoing mirror (1) and the speculum (2) of positioned opposite in resonant cavity and be arranged on outgoing mirror (1) and speculum (2) between laser working medium (3), it is characterized in that: in described outgoing mirror (1) and speculum (2), have at least the working face of to be pan-shaped, this pan-shaped working face connects a circular flat (Q) by a recessed ball face (H) inscribe and forms;
Wherein, the radius of curvature R of described recessed ball face (H) and the pass between the laserresonator length L are: L<R<10L;
And the external diameter a of described recessed ball face (H) and the pass between the laserresonator length L are: 1<a
2/ (L λ)<15, wherein λ means the operation wavelength of laser.
2. laser resonant cavity with pan-shaped mirror surface according to claim 1, it is characterized in that: the radius of curvature R of described recessed ball face (H) and the pass between the laserresonator length L are: 3L≤R≤7L.
3. laser resonant cavity with pan-shaped mirror surface according to claim 1 and 2, it is characterized in that: the ratio of the external diameter a of the diameter b of described circular flat (Q) and recessed ball face (H) is: b/a=0.4 ~ 0.8.
4. laser resonant cavity with pan-shaped mirror surface according to claim 3, it is characterized in that: the working face of described outgoing mirror (1) is pan-shaped, and the ratio of the external diameter a of the diameter b of its circular flat (Q) and recessed ball face (H) is: b/a=0.4 ~ 0.7; The working face of described speculum (2) is planar shaped.
5. laser resonant cavity with pan-shaped mirror surface according to claim 3, it is characterized in that: the working face of described speculum (2) is pan-shaped, and the ratio of the external diameter a of the diameter b of its circular flat (Q) and recessed ball face (H) is: b/a=0.6 ~ 0.7; The working face of described outgoing mirror (1) is planar shaped.
6. laser resonant cavity with pan-shaped mirror surface according to claim 3, it is characterized in that: the working face of described outgoing mirror (1) and speculum (2) all is pan-shaped, and the ratio of the external diameter a of the diameter b of its circular flat (Q) and recessed ball face (H) is: b/a=0.6 ~ 0.8.
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| CN112749484B (en) * | 2020-12-28 | 2024-03-19 | 华中科技大学 | Design method of large Fresnel number free-form surface mirror laser resonant cavity and resonant cavity |
| WO2023168951A1 (en) * | 2022-03-07 | 2023-09-14 | 汉威科技集团股份有限公司 | Reflective optical system for long optical path gas absorption cell |
Citations (3)
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|---|---|---|---|---|
| CN101262113A (en) * | 2008-04-20 | 2008-09-10 | 华中科技大学 | A loop concave output mirror laser resonance cavity |
| CN101557072A (en) * | 2008-04-09 | 2009-10-14 | 叶日文 | Laser resonant cavity with high power |
| CN202602079U (en) * | 2012-03-07 | 2012-12-12 | 华中科技大学 | Pan-shaped mirror surface laser resonant cavity |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08148739A (en) * | 1994-11-18 | 1996-06-07 | Mitsubishi Electric Corp | Laser resonator and laser apparatus provided with said laser resonator |
| US20060029120A1 (en) * | 2000-03-06 | 2006-02-09 | Novalux Inc. | Coupled cavity high power semiconductor laser |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101557072A (en) * | 2008-04-09 | 2009-10-14 | 叶日文 | Laser resonant cavity with high power |
| CN101262113A (en) * | 2008-04-20 | 2008-09-10 | 华中科技大学 | A loop concave output mirror laser resonance cavity |
| CN202602079U (en) * | 2012-03-07 | 2012-12-12 | 华中科技大学 | Pan-shaped mirror surface laser resonant cavity |
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| JP特开平8-148739A 1996.06.07 |
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