CN103594918B - A kind of method and apparatus exporting hollow laser beam - Google Patents
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Abstract
本发明公开了一种输出空心光束的方法,包括:(1)激光器产生的实心光束,经整形系统整形为中空的环形泵浦光;(2)该中空的环形泵浦光,沿光轴入射到耦合系统,该耦合系统将所述环形泵浦光变换成合适直径大小的空心光束;(3)该空心光束从激光谐振腔的一端面耦合进入谐振腔,对激光器增益介质进行泵浦,通过相位控制使得所述谐振腔中的增益介质吸收泵浦光产生连续的空心激光输出。本发明还公开了一种空心光束输出装置。本发明的装置和方法通过将入射的泵浦光从通常的实心形式改变成为空心形式,使激光振荡的轴心部分没有增益,再通过相位控制,得到空心激光光束输出,具有实现简单、可靠性高、转换效率高和输出功率高的优点。
The invention discloses a method for outputting a hollow beam, comprising: (1) the solid beam generated by a laser is shaped into a hollow annular pump light by a shaping system; (2) the hollow annular pump light is incident along the optical axis To the coupling system, the coupling system transforms the annular pump light into a hollow beam of suitable diameter; (3) the hollow beam is coupled into the resonator from one end face of the laser resonator, and the laser gain medium is pumped, through The phase control makes the gain medium in the resonant cavity absorb the pumping light to generate continuous hollow laser output. The invention also discloses a hollow beam output device. The device and method of the present invention change the incident pump light from the usual solid form to the hollow form, so that there is no gain in the axis of the laser oscillation, and then through phase control, the output of the hollow laser beam is obtained, which has the advantages of simple implementation and reliability. High efficiency, high conversion efficiency and high output power.
Description
技术领域 technical field
本发明属于激光领域,具体涉及一种输出空心激光光束的方法和装置。 The invention belongs to the field of lasers, and in particular relates to a method and a device for outputting a hollow laser beam.
背景技术 Background technique
长期以来,实心激光光束在传统激光行业如切割、熔覆、焊接和打标等上有着广泛的应用。但是近年来,由于应用技术的促进,各种中心强度为零的激光束——空心激光光束相继产生,并正在形成一个新颖的所谓空心光束(也称暗中空光束)的大家族。空心光束作为激光导管、光学镊子(光钳)和光学扳手,在微观粒子(如微米粒子、纳米粒子、自由电子、生物细胞和原子或分子等)的精确、无接触操纵和控制中有着广泛的应用。 For a long time, solid laser beams have been widely used in traditional laser industries such as cutting, cladding, welding and marking. But in recent years, due to the promotion of application technology, various laser beams with zero central intensity—hollow laser beams have been produced one after another, and a new family of so-called hollow beams (also known as dark hollow beams) is being formed. As a laser catheter, optical tweezers (optical tweezers) and optical wrench, the hollow beam has a wide range of applications in the precise, non-contact manipulation and control of microscopic particles (such as microparticles, nanoparticles, free electrons, biological cells and atoms or molecules, etc.) application.
由于空心光束的产生,反过来也促进了很多传统激光应用领域反思光束形式的进一步优化。例如最近甚至发现对于激光冲击成形这样的传统激光加工领域,空心光束也具有一定的优势。这种空心光束除了具有激光频率、激光功率和光束发散角等激光束的一般参数外,还具有暗斑尺寸、光束宽度、光束半径和宽度半径比等一些特殊的参数。各类空心光束都有其独特的物理性质,如强度呈圆筒形分布、很小的暗斑尺寸、无加热效应、传播不变性以及具有自旋与轨道角动量等,这些性质使得空心光束在激光光学、光信息处理、微粒波导、同位素分离、微电子学和材料科学、生物技术、医学以及原子学、分子学等领域中有着广泛的应用前景。 Due to the generation of hollow beams, in turn, it also promotes the further optimization of reflective beam forms in many traditional laser application fields. For example, it has even recently been found that for traditional laser processing fields such as laser shock forming, hollow beams also have certain advantages. In addition to the general parameters of laser beams such as laser frequency, laser power and beam divergence angle, this hollow beam also has some special parameters such as dark spot size, beam width, beam radius and width-to-radius ratio. All kinds of hollow beams have their unique physical properties, such as cylindrical intensity distribution, small dark spot size, no heating effect, propagation invariance, and spin and orbital angular momentum, etc. These properties make hollow beams in the Laser optics, optical information processing, particle waveguide, isotope separation, microelectronics and material science, biotechnology, medicine, atomics, molecular science and other fields have broad application prospects.
目前为止,现有技术中存在多种产生空心激光光束的方法,如几何光学法、中空光纤法、π位相板法、光学全息法和计算机全息法等。其中,几何光学法、中空光纤法和π位相板法获得空心光束,优点是结构简单、便于实现,但转换效率低、输出空心光束的纯度不高和较低的光束质量的缺点也很明显;而计算机全息法和光学全息法获得空心光束,虽然输出空心光束的纯度高、光束质量好,但成本较高,制作难度很大。 So far, there are many methods for generating hollow laser beams in the prior art, such as geometric optics, hollow fiber, π phase plate, optical holography, and computer holography. Among them, the geometric optics method, the hollow fiber method and the π phase plate method to obtain the hollow beam have the advantages of simple structure and easy implementation, but the disadvantages of low conversion efficiency, low purity of the output hollow beam and low beam quality are also obvious; However, computer holography and optical holography obtain hollow beams. Although the output hollow beams have high purity and good beam quality, they are expensive and difficult to manufacture.
中国专利文献201210049178.6中公开了一种采用端面泵浦,将泵浦光焦点耦合到激光增益介质内部或者外部,来得到空心激光光束的方法。该方法得到的 空心光束的光斑是由很多小的旁瓣组成的,这种非连续的环状空心光束在实际应用过程中会有一定的限制,譬如在受激损耗显微术中,由于旁瓣的存在,空心光束对激发光的荧光抑制作用就不是那么明显,导致零星的杂质荧光的产生,降低了受激损耗显微术的分辨率。 Chinese patent document 201210049178.6 discloses a method for obtaining a hollow laser beam by using end pumping to couple the focus of the pump light to the inside or outside of the laser gain medium. The spot of the hollow beam obtained by this method is composed of many small side lobes. This kind of discontinuous annular hollow beam will have certain limitations in the actual application process. For example, in stimulated loss microscopy, due to the side lobes With the existence of the lobes, the fluorescence inhibition effect of the hollow beam on the excitation light is not so obvious, resulting in the generation of sporadic impurity fluorescence, which reduces the resolution of stimulated depletion microscopy.
发明内容 Contents of the invention
针对现有技术的以上缺陷或改进需求,本发明提供一种输出空心激光光束的方法和装置,其目的在于利用环形泵浦光,通过轴向端面泵浦,在增益介质中形成中空形式的增益区,直接获得空心激光束的输出,通过对环形泵浦光的环状光斑大小精确的控制,实现对激光模式的控制,解决了空心光束中心并非完全无光的问题,同时通过相位控制,解决了空心光束空心环不连续的问题。 Aiming at the above defects or improvement needs of the prior art, the present invention provides a method and device for outputting a hollow laser beam, the purpose of which is to form a hollow form of gain in the gain medium by using annular pump light through axial end-face pumping area, directly obtain the output of the hollow laser beam, through the precise control of the annular spot size of the annular pump light, the control of the laser mode is realized, and the problem that the center of the hollow beam is not completely dark is solved. At the same time, through the phase control, it is solved The problem of the discontinuity of the hollow ring of the hollow beam is solved.
按照本发明的一个方面,提供一种输出空心光束的方法,通过将实心泵浦光整形为空心泵浦光后,再利用耦合系统将泵浦光耦合进入激光谐振腔,以轴向端面泵浦的方式,在增益介质中形成中空形式的增益区,通过激光振荡,实现空心激光光束的直接输出,具体步骤如下: According to one aspect of the present invention, a method for outputting a hollow beam is provided. After shaping the solid pump light into a hollow pump light, the coupling system is used to couple the pump light into the laser resonator to pump In this way, a hollow gain region is formed in the gain medium, and the direct output of the hollow laser beam is realized through laser oscillation. The specific steps are as follows:
(1)激光器产生的实心光束,经整形系统整形为中空的环形泵浦光; (1) The solid beam generated by the laser is shaped into a hollow annular pump light by the shaping system;
(2)该中空的环形泵浦光,沿光轴入射到耦合系统,该耦合系统将所述环形泵浦光变换成合适直径大小的空心光束; (2) The hollow annular pump light is incident to the coupling system along the optical axis, and the coupling system transforms the annular pump light into a hollow beam with a suitable diameter;
(3)该空心光束从激光谐振腔的一端面耦合进入谐振腔,对激光器增益介质进行泵浦,通过相位控制使得所述谐振腔中的增益介质吸收泵浦光产生连续的空心激光输出。 (3) The hollow beam is coupled into the resonator from one end face of the laser resonator to pump the gain medium of the laser, and through phase control, the gain medium in the resonator absorbs the pump light to generate continuous hollow laser output.
作为本发明的改进,所述连续的空心激光通过连续改变入射光束的相位,使得谐振腔内只有一种相位模式能够持续振荡而实现。 As an improvement of the present invention, the continuous hollow laser is realized by continuously changing the phase of the incident light beam, so that only one phase mode in the resonant cavity can continuously oscillate.
作为本发明的改进,所述入射光束相位的连续改变通过一设置在谐振腔中的螺旋相位板实现,该螺旋相位板为光学厚度与旋转方位角成正比的相位衍射光学元件。 As an improvement of the present invention, the continuous change of the phase of the incident light beam is realized by a spiral phase plate arranged in the resonant cavity, and the spiral phase plate is a phase diffractive optical element whose optical thickness is proportional to the rotation azimuth angle.
按照本发明的另一方面,提供一种输出空心光束的装置,用于实现将实心泵浦光变换为连续的空心泵浦光束,其特征在于,该装置包括: According to another aspect of the present invention, there is provided a device for outputting a hollow beam, which is used to convert the solid pump light into a continuous hollow pump beam, characterized in that the device includes:
整形系统,其设置在输入的实心光束后,用于将该实心光束整形为空心光束; A shaping system, which is arranged after the input solid beam, is used to shape the solid beam into a hollow beam;
泵浦光耦合系统,其沿光路设置在所述整形系统后,用于将所述空心光束变 换成合适直径大小的空心光束; A pump light coupling system, which is arranged behind the shaping system along the optical path, and is used to transform the hollow beam into a hollow beam with a suitable diameter;
激光谐振腔,其沿光路设置在所述耦合系统后,所述合适直径大小的空心光束从该激光谐振腔的一端面耦合进入谐振腔,对激光器增益介质进行泵浦,通过相位控制使得所述谐振腔中的增益介质吸收泵浦光产生连续的空心激光输出。 A laser resonator, which is arranged behind the coupling system along the optical path, and the hollow beam with a suitable diameter is coupled into the resonator from one end face of the laser resonator to pump the laser gain medium, and the phase control makes the The gain medium in the resonator absorbs the pump light to generate continuous hollow-core laser output.
作为本发明的改进,所述整形系统由外圆锥面反射镜和与之同轴放置的具有相同顶角的环形中空内圆锥面反射镜构成,即外圆锥面反射镜的发射面与环形中空内圆锥面反射镜的反射面平行,入射光光轴与外圆锥面反射镜和环形中空内圆锥面反射镜的旋转对称轴重合,光束从外圆锥面反射镜处入射,反射光为以光轴为中心的发散环形光束,其经环形中空内圆锥面反射镜反射后,以与最初进入整形系统的入射光束平行的方式出射,即为与光轴平行的空心光束。 As an improvement of the present invention, the shaping system is composed of an outer conical reflector and an annular hollow inner conical reflector with the same apex angle placed coaxially with it, that is, the emitting surface of the outer conical reflector and the annular hollow inner The reflective surface of the conical reflector is parallel, the optical axis of the incident light coincides with the rotational symmetry axis of the outer conical reflector and the annular hollow inner conical reflector, the light beam is incident from the outer conical reflector, and the reflected light is centered on the optical axis The divergent annular light beam in the center, after being reflected by the annular hollow inner conical mirror, exits in parallel with the incident light beam that first entered the shaping system, that is, the hollow light beam parallel to the optical axis.
作为本发明的改进,所述整形系统由内圆锥面反射镜和与之相对放置的具有相同顶角的外圆锥面反射镜构成,该内圆锥面反射镜旋转对称轴与入射光束光轴成135°夹角,外圆锥面反射镜的旋转对称轴与内圆锥面反射镜旋转对称轴平行,内圆锥面反射镜与外圆锥面反射镜顶点连线与入射光束光轴垂直。 As an improvement of the present invention, the shaping system is composed of an inner conical reflector and an outer conical reflector with the same apex angle placed opposite it. ° included angle, the rotational symmetry axis of the outer conical reflector is parallel to the rotational symmetry axis of the inner conical reflector, and the line connecting the vertices of the inner conical reflector and the outer conical reflector is perpendicular to the optical axis of the incident beam.
作为本发明的改进,所述整形系统由内圆锥面透镜和与之同轴放置的具有相同顶角、相同折射率的外圆锥面透镜构成,两透镜均是一侧为平面,一侧为圆锥面的镜体结构,其中圆锥面的旋转对称轴与平面垂直,且与入射光束的光轴同轴。 As an improvement of the present invention, the shaping system is composed of an inner conical lens and an outer conical lens with the same apex angle and the same refractive index placed coaxially with it. Both lenses are plane on one side and conical on the other. The mirror structure of the surface, in which the rotational symmetry axis of the conical surface is perpendicular to the plane and coaxial with the optical axis of the incident beam.
作为本发明的改进,所述端面泵浦耦合通过球面透镜组合或者柱面透镜组合进行耦合、由自聚焦透镜进行耦合或通过光纤耦合实现。 As an improvement of the present invention, the coupling of the end pump is realized through spherical lens combination or cylindrical lens combination, through self-focusing lens or through optical fiber coupling.
作为本发明的改进,所述激光谐振腔4包括沿光轴依次设置的镜片、螺旋相位板、增益介质、焦距均为f的柱面镜构成的柱面镜系统要以及设在两柱面镜之间与两柱面镜的距离均为f的镜片,光束从所述镜片入射,在镜片和镜片之间来回振荡,其中所述光束每通过一次螺旋相位板,相位因子就会增加使得只输出单一相位模式的单一高阶光束,从而形成连续的空心光束。 As an improvement of the present invention, the laser resonator 4 includes a lens system arranged sequentially along the optical axis, a spiral phase plate, a gain medium, and a cylindrical mirror with a focal length f. The distance between the lens and the two cylindrical mirrors is f, the light beam is incident from the lens, and oscillates back and forth between the lens and the lens, wherein each time the light beam passes through the spiral phase plate, the phase factor will increase so that only the output A single high-order beam in a single phase mode, resulting in a continuous hollow-core beam.
作为本发明的改进,所述增益介质为YAG棒。 As an improvement of the present invention, the gain medium is a YAG rod.
本发明中,入射的泵浦光可以是实心的,实心泵浦光先入射到一个整形系统,通过整形输出的泵浦光变为空心的环形泵浦光。 In the present invention, the incident pump light can be solid. The solid pump light first enters a shaping system, and the output pump light becomes hollow ring-shaped pump light after shaping.
本发明中,实心泵浦光可以为半导体激光器发出的实心激光束,耦合系统可以为半导体激光耦合系统。 In the present invention, the solid pump light may be a solid laser beam emitted by a semiconductor laser, and the coupling system may be a semiconductor laser coupling system.
总体而言,本发明的装置和方法相对于现有技术,其通过将入射的泵浦光从通常的实心形式改变成为空心形式,使激光振荡的轴心部分没有增益,再通过相位控制,得到空心激光光束输出,具有实现简单、可靠性高、转换效率高和输出功率高的优点。 Generally speaking, compared with the prior art, the device and method of the present invention change the incident pump light from a solid form to a hollow form, so that there is no gain in the axis of the laser oscillation, and then through phase control, it is obtained Hollow laser beam output has the advantages of simple implementation, high reliability, high conversion efficiency and high output power.
附图说明 Description of drawings
图1为按照本发明实施例的装置结构示意图; Fig. 1 is a schematic diagram of the device structure according to an embodiment of the present invention;
图2为图1中整形系统的一个实施例的结构示意图; Fig. 2 is a structural representation of an embodiment of the shaping system in Fig. 1;
图3为图1中整形系统另一个实施例的结构示意图; Fig. 3 is a schematic structural view of another embodiment of the shaping system in Fig. 1;
图4为图1中整形系统再一个实施例的结构示意图; Fig. 4 is the structural representation of another embodiment of shaping system in Fig. 1;
图5为图1中耦合系统示意图; Fig. 5 is a schematic diagram of the coupling system in Fig. 1;
图6为图1中激光谐振腔示意图; Fig. 6 is a schematic diagram of the laser resonator in Fig. 1;
图7为图6中螺旋相位板示意图; Fig. 7 is a schematic diagram of the spiral phase plate in Fig. 6;
图8为单一LG简并模式激光光束叠加过程示意图; Fig. 8 is a schematic diagram of a single LG degenerate mode laser beam superposition process;
图9为LG0,+l模式光束的相位因子在谐振腔中往返传输的过程分析; Figure 9 is an analysis of the phase factor of the LG 0,+l mode beam in the resonant cavity and back and forth;
图10为LG0,-l模式光束的相位因子在谐振腔中往返传输的过程分析; Figure 10 is an analysis of the phase factor of the LG 0,-l mode beam traveling back and forth in the resonator;
在所有附图中,同样的附图标记代表相同的技术特征,其中,1-泵浦光,2-整形系统,3-耦合系统,4-激光谐振腔,5-空心输出光束。 In all the drawings, the same reference numerals represent the same technical features, wherein, 1-pumping light, 2-shaping system, 3-coupling system, 4-laser resonant cavity, 5-hollow output beam.
具体实施方式 detailed description
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。此外,下面描述的本发明各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互结合。 In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below may be combined with each other as long as they do not constitute a conflict with each other.
半导体激光器发出的光束为实心光束,但其光束在快轴和慢轴方向上是象散光束,通过普通透镜准直,即可以得到圆形实心的输出光束,以作为本发明实施例图1中的泵浦光1。 The light beam emitted by the semiconductor laser is a solid light beam, but its light beam is an astigmatic light beam in the direction of the fast axis and the slow axis. It can be collimated by an ordinary lens to obtain a circular solid output light beam, as shown in Figure 1 of the embodiment of the present invention. The pump light 1.
泵浦光1通过整形系统2,使得实心光束变为空心光束。本发明中的整形系统用于将实心光束整形为空心光束,其具体的装置和方法有多种,下面是优选的三种整形系统具体结构。 The pump light 1 passes through the shaping system 2, so that the solid beam becomes a hollow beam. The shaping system in the present invention is used to shape a solid light beam into a hollow light beam. There are various specific devices and methods. The following are the specific structures of the three preferred shaping systems.
如图2所示,本实施例的整形系统2由外圆锥面反射镜201和与之同轴放置 的具有相同顶角的环形中空内圆锥面反射镜202构成,即外圆锥面反射镜201的发射面与环形中空内圆锥面反射镜202的反射面平行,入射光光轴与外圆锥面反射镜201和环形中空内圆锥面反射镜202的旋转对称轴重合,光束从外圆锥面反射镜201处入射,反射光为以光轴为中心的发散环形光束,由于环形中空内圆锥面反射镜202的反射面与外圆锥面反射镜201的反射面平行,因此光束再经过环形中空内圆锥面反射镜202反射后,会以与最初进入整形系统的入射光束平行的方式出射,即为与光轴平行的空心光束。 As shown in Figure 2, the shaping system 2 of the present embodiment consists of an outer conical reflector 201 and an annular hollow inner conical reflector 202 with the same apex angle placed coaxially therewith, that is, the outer conical reflector 201 The emission surface is parallel to the reflection surface of the annular hollow inner conical reflector 202, and the optical axis of the incident light coincides with the rotational symmetry axis of the outer conical reflector 201 and the annular hollow inner conical reflector 202, and the light beam passes from the outer conical reflector 201 The reflected light is a divergent annular light beam centered on the optical axis. Since the reflection surface of the annular hollow inner conical reflector 202 is parallel to the reflective surface of the outer conical reflector 201, the light beam is reflected by the annular hollow inner conical surface After being reflected by the mirror 202, it will emerge parallel to the incident beam that initially entered the shaping system, that is, a hollow beam parallel to the optical axis.
如图3所示,本发明另一实施例的整形系统由内圆锥面反射镜203和与之相对放置的具有相同顶角的外圆锥面反射镜204构成,内圆锥面反射镜203旋转对称轴与入射光束光轴成135°夹角,外圆锥面反射镜204的旋转对称轴与内圆锥面反射镜203旋转对称轴平行,内圆锥面反射镜203与外圆锥面反射镜204顶点连线与入射光束光轴垂直,光束整形过程与1相同。 As shown in Fig. 3, the shaping system of another embodiment of the present invention is made up of inner conical reflector 203 and the outer conical reflector 204 with the same apex angle placed opposite it, and inner conical reflector 203 rotational symmetry axis Form an included angle of 135° with the optical axis of the incident light beam, the axis of rotational symmetry of the outer conical reflector 204 is parallel to the axis of rotational symmetry of the inner conical reflector 203, and the line connecting the vertices of the inner conical reflector 203 and the outer conical reflector 204 is The optical axis of the incident beam is vertical, and the beam shaping process is the same as 1.
如图4所示,本发明又一实施例的整形系统由内圆锥面透镜205和与之同轴放置的具有相同顶角、相同折射率的外圆锥面透镜206构成,两透镜均是一侧为平面,一侧为圆锥面的镜体结构,其中圆锥面的旋转对称轴与平面垂直,且与入射光束的光轴同轴。入射光束从内圆锥面透镜205的平面一侧入射,再从圆锥面侧出射时,由于折射效应,光束会向远离光轴方向偏折,然后光束从外圆锥面透镜206的外圆锥面侧入射,再次发生折射,而由于两次折射的折射面平行,折射率也相同,出射光束会与入射到内圆锥面透镜205的光束平行,即为光轴平行的空心光束。 As shown in Fig. 4, the shaping system of another embodiment of the present invention is made of an inner conical lens 205 and an outer conical lens 206 with the same apex angle and the same refractive index placed coaxially therewith, and the two lenses are all on one side. is a mirror structure with a conical surface on one side, wherein the rotational symmetry axis of the conical surface is perpendicular to the plane and coaxial with the optical axis of the incident beam. When the incident light beam is incident from the plane side of the inner conical surface lens 205, and then emerges from the conical surface side, due to the refraction effect, the light beam will be deflected away from the optical axis, and then the light beam is incident from the outer conical surface side of the outer conical surface lens 206 , refraction occurs again, and because the refraction planes of the two refractions are parallel and the refractive index is the same, the outgoing beam will be parallel to the beam incident on the inner conical lens 205, that is, a hollow beam with parallel optical axes.
经上述整形系统2整形获得空心激光光束即空心泵浦光束,其然后以端面泵浦的方式耦合进入激光谐振腔对增益介质进行泵浦。 The hollow laser beam is shaped by the shaping system 2 above to obtain a hollow pump beam, which is then coupled into the laser resonator in an end-pumped manner to pump the gain medium.
本实施例优选的端面泵浦耦合方式有以下几种:1)组合透镜系统聚光:用球面透镜组合或者柱面透镜组合进行耦合。2)自聚焦透镜耦合:由自聚焦透镜取代组合透镜进行耦合,优点是结构简单,准直光斑的大小取决于自聚焦透镜的数值孔径。3)光纤耦合:指用带尾纤输出的LD进行泵浦耦合,优点是结构灵活。图5为由组合透镜构成的耦合系统示意图,光束半径较大的空心光束经透镜组后,输出更易进行泵浦的细空心光束,提高泵浦效率。 The preferred end-pump coupling methods in this embodiment are as follows: 1) Combination lens system for concentrating light: use spherical lens combination or cylindrical lens combination for coupling. 2) Self-focusing lens coupling: the self-focusing lens replaces the combined lens for coupling. The advantage is that the structure is simple, and the size of the collimated spot depends on the numerical aperture of the self-focusing lens. 3) Fiber coupling: refers to the pump coupling with LD with pigtail output, the advantage is that the structure is flexible. Figure 5 is a schematic diagram of a coupling system composed of combined lenses. After the hollow beam with a larger beam radius passes through the lens group, it outputs a thin hollow beam that is easier to pump and improves the pumping efficiency.
入射的空心泵浦光激励激光谐振腔中的增益介质,由于激光振荡的轴心部分 没有增益,因此通常率先振荡的LG0,0模的增益低于高阶模式被压制,空心的高阶模式则率先振荡输出,得到空心光束。通过整形系统和耦合系统对环形泵浦光的环状光斑大小精确的控制,使谐振腔中形成特定的高阶LG0, ± l模式振荡。图6为本发明一个实施例的激光谐振腔示意图,泵浦光经镜片401入射,在镜片401和镜片405之间来回振荡,增益介质403为YAG棒,其中镜片401为泵浦光全透,1064nm全反,镜片405对1064nm光具有一定的反射率(非全反),激光光束由镜片405输出。 The incident hollow pump light excites the gain medium in the laser resonator. Since there is no gain in the axial part of the laser oscillation, the gain of the LG 0,0 mode, which is usually the first to oscillate, is lower than that of the high-order mode and is suppressed. The hollow high-order mode Then it is the first to oscillate and output, and a hollow beam is obtained. Through the precise control of the annular spot size of the annular pump light by the shaping system and the coupling system, a specific high-order LG 0, ± l mode oscillation is formed in the resonator. 6 is a schematic diagram of a laser resonator in an embodiment of the present invention. The pump light is incident through the lens 401 and oscillates back and forth between the lens 401 and the lens 405. The gain medium 403 is a YAG rod, and the lens 401 is fully transparent for the pump light. 1064nm total reflection, lens 405 has a certain reflectivity (non-total reflection) for 1064nm light, and the laser beam is output by lens 405.
由于LG0 , +l和LG0 , -l具有相同的径向分布,因此,常规激光谐振腔内这两种相位模式将一起振荡,并稳定存在,在这种情况下,两个中空环形光束LG0 , +l和LG0 , -l叠加在一起后,形成的空心光束为旁瓣形式,如图8所示。为了得到连续的空心光束,需要使谐振腔内只有一种相位模式能够持续振荡,本发明在谐振腔中加入了螺旋相位板402和柱面镜系统。其中,螺旋相位板402(如图7所示)是一种光学的厚度与旋转方位角成正比的纯相位衍射光学元件,用来改变入射光束的相位。柱面镜系统由焦距均为f的柱面镜404、406构成,柱面镜404和柱面镜406相距为2f,并且两柱面镜相对镜片405左右对称,即镜片405与两柱面镜的距离均为f。 Since LG 0 , +l and LG 0 , -l have the same radial distribution, these two phase modes will oscillate together and exist stably in conventional laser resonators, in this case, two hollow ring beams After LG 0 , +l and LG 0 , -l are superimposed together, the hollow beam formed is in the form of side lobes, as shown in Figure 8. In order to obtain a continuous hollow beam, only one phase mode in the resonator needs to be able to oscillate continuously. The present invention adds a helical phase plate 402 and a cylindrical mirror system in the resonator. Wherein, the spiral phase plate 402 (as shown in FIG. 7 ) is a phase-only diffractive optical element whose optical thickness is proportional to the rotation azimuth angle, and is used to change the phase of the incident light beam. The cylindrical mirror system is composed of cylindrical mirrors 404 and 406 whose focal lengths are f. The distance between the cylindrical mirror 404 and the cylindrical mirror 406 is 2f, and the two cylindrical mirrors are symmetrical to the left and right of the lens 405, that is, the lens 405 and the two cylindrical mirrors The distance is f.
LG0 , +l模式具有exp(+ilθ)相位项,LG0 , -l模式具有exp(-ilθ)相位项,(图9和图10中的+l代表相位因子为exp(+ilθ)的LG0 , +l模式光束,-l代表相位因子为exp(-ilθ)的LG0 , -l模式光束)。光束每通过一次螺旋相位板402,相位因子就会 增加l;当相位因子为±l的光束通过柱面镜系统时,相位因子会取反变为(光束通过柱面镜404后由镜片405反射再通过柱面镜404的效果与依次通过柱面镜404、镜片405、柱面镜406的效果相同)。 LG 0 , +l mode has exp(+ilθ) phase term, LG 0 , -l mode has exp(-ilθ) phase term, (+l in Fig. 9 and Fig. 10 represents that the phase factor is exp(+ilθ) LG 0 , +l mode beam, -l represents LG 0 , -l mode beam with phase factor exp(-ilθ)). Every time the light beam passes through the spiral phase plate 402, the phase factor will increase by 1; when the light beam with the phase factor of ±1 passes through the cylindrical mirror system, the phase factor will be reversed as (The effect of the light beam passing through the cylindrical mirror 404, being reflected by the mirror 405 and then passing through the cylindrical mirror 404 is the same as the effect of passing through the cylindrical mirror 404, the mirror 405, and the cylindrical mirror 406 in turn).
以增益介质403右侧计为光束振荡的起始位置,LG0 , +l模式在腔内往返一周之后,相位因子仍为+l,满足自再现的相位分布,该LG0 , +l模式可以在谐振腔内稳定振荡,如图9所示。而LG0 , -l模式在腔内往返一周之后,相位因子变为+3l,不满足自再现的相位分布,该LG0 , -l模式在谐振腔内会受到抑制无法继续振荡。因此,在谐振腔内加入螺旋相位板402和柱面镜系统后,激光器会只输出单一相位模式的单一高阶光束,这样得到的空心光束就不再是普通的旁瓣光束,而是连续的空心光束了。 Taking the right side of the gain medium 403 as the starting position of beam oscillation, the phase factor of the LG 0 , + l mode is still +1 after a round trip in the cavity, which satisfies the self-reproducible phase distribution, and the LG 0 , +l mode can Stable oscillation in the resonant cavity, as shown in Figure 9. However, after the LG 0 , -l mode goes back and forth in the cavity for one cycle, the phase factor becomes +3l, which does not satisfy the self-reproducible phase distribution, and the LG 0 , -l mode will be suppressed in the resonant cavity and cannot continue to oscillate. Therefore, after adding the helical phase plate 402 and the cylindrical mirror system in the resonator, the laser will only output a single high-order beam of a single phase mode, so that the obtained hollow beam is no longer an ordinary side lobe beam, but a continuous The hollow beam is gone.
谐振腔中还可以增加调Q器件,形成脉冲Q关激光器,输出环形的调Q脉冲光束;也可以增加调制,形成锁模振荡输出环形锁模脉冲;另外还可以增加倍频或其他频率转换器件,输出倍频或其他频率转换的环形光束。 A Q-switching device can also be added in the resonator to form a pulsed Q-off laser and output a ring-shaped Q-switched pulse beam; modulation can also be added to form a mode-locked oscillation to output a ring-shaped mode-locked pulse; in addition, frequency multiplication or other frequency conversion devices can also be added , output frequency-doubling or other frequency-converted ring beams.
本发明所述的得到空心激光光束的方法,采用腔内器件将普通实心泵浦光束变换为空心泵浦光束。利用该方法得到的空心光束的能量更加集中在环上,通过对环形泵浦光的环状光斑大小和激光谐振腔内振荡光束相位的控制,实现空心模式光束输出。该方法较之以前的方法具有输出激光光束质量好,同时由于能量集中更加集中在环上,使得输出空心光束的斜率效率更高,可以为较高功率空心光束输出提供一种可行的方法。同时,使用该方法得到空心激光光束的装置,具有成本低,装配简单和容易调节的特点。 The method for obtaining a hollow laser beam described in the present invention adopts an intracavity device to transform an ordinary solid pump beam into a hollow pump beam. The energy of the hollow beam obtained by this method is more concentrated on the ring, and the output of the hollow mode beam is realized by controlling the annular spot size of the ring pump light and the phase of the oscillation beam in the laser resonator. Compared with the previous method, this method has better output laser beam quality, and at the same time, because the energy concentration is more concentrated on the ring, the slope efficiency of the output hollow beam is higher, and it can provide a feasible method for higher power hollow beam output. At the same time, the device using the method to obtain a hollow laser beam has the characteristics of low cost, simple assembly and easy adjustment.
本领域的技术人员容易理解,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。 It is easy for those skilled in the art to understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, All should be included within the protection scope of the present invention.
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