CN102064458B - Hollow frustum resonant cavity gas laser - Google Patents

Hollow frustum resonant cavity gas laser Download PDF

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Publication number
CN102064458B
CN102064458B CN2009102162141A CN200910216214A CN102064458B CN 102064458 B CN102064458 B CN 102064458B CN 2009102162141 A CN2009102162141 A CN 2009102162141A CN 200910216214 A CN200910216214 A CN 200910216214A CN 102064458 B CN102064458 B CN 102064458B
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discharge tube
round table
laser
hollow round
reflecting mirror
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CN102064458A (en
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刘静伦
李育德
陈梅
李继陶
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Sichuan University
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Sichuan University
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Abstract

The invention discloses a hollow frustum resonant cavity gas laser, belongs to the fields of optics and optical engineering, and constructs and provides a gas laser generating laser beams having special space distribution shapes. Light beams output by the laser are evolved into solid light beams from hollow light beams and then are evolved into hollow light beams together with the increase of transmission distance. Because an output mirror is reflected through a circular ring part, waist spot positions of the light beams are positioned outside the cavity, the power density required to be borne by the output mirror is effectively reduced, and even if under the condition of high power, materials of the output mirror are easily selected; and the distance from the sample to the output mirror is long enough, and the maximum power density distribution position of the light beams can be effectively utilized. Because the beams are directly combined outside the cavity through the laser, high-power output is easily realized. The gas laser can emit low-power laser and high-power laser; and the emitted laser beams can be used for biomedicine, scientific research, special material treatment and other aspects.

Description

Hollow round table resonant cavity gas laser
Technical field the present invention relates to optics and optical engineering field, mainly is the method and the device of gas laser that is obtained a kind of laser beam of special shape by the hollow round table resonant cavity.
The spatial form of background technology laser beam has the branch of solid light beam and hollow beam usually.They play a significant role in application separately.The realization of hollow beam can obtain through solid optical beam transformation.The gas laser good beam quality, directivity is stable.Patent ZL2007100483280 makes up and provides a kind of gas laser that can directly produce the hollow laser beam.This invents simple possible.But, the waist spot of the output beam of the laser of this invention is positioned at the outgoing mirror position just, seek out powerful laser, to choosing and cooling processing of outgoing mirror material, must consider by emphasis.And because the waist spot of this Laser Output Beam is positioned at the outgoing mirror position; Power density distribution is maximum here; In use; Must keep certain distance guaranteeing that outgoing mirror can not polluted by sputter because sample is placed with the outgoing mirror minute surface, thus the maximum place of this laser output power density distribution can not be used effectively.The 3rd is exactly that the output beam of this laser need pass through the hollow laser beam that focusing just can obtain to comprise the various sizes of very small dimensions.
Summary of the invention the present invention is directed to patent ZL2007100483280 invention have more universality method and device; Purpose is to make up and provide a kind of gas laser that produces special space shape laser light beam; The light beam of this laser output is along with the increase of transmission range; Developing from hollow beam is solid light beam, develops to be hollow beam again.Through resonant cavity rationally is set, the output beam of two these lasers can also be realized hollowing shape laser zone.The present invention has not only inherited ZL2007100483280 and has directly produced hollow light beam and gas laser good beam quality, the advantage that directivity is stable, and overcome the shortcoming that its output beam begins to disperse from the outgoing mirror position.The present invention is owing to adopt the symmetrical annulus partial reflection outgoing mirror of rotation; And the waist spot of light beam is positioned at outside the chamber; Effectively reduced the power density that the needs of outgoing mirror bear, even the high power situation realizes the choosing also of material of outgoing mirror easily; And the minimum beam radial location of output beam is enough far away apart from outgoing mirror, make laboratory sample can effectively utilize the maximum power density distributing position of light beam and can bespatter the output eyeglass.Because this invention directly realizes outside the chamber through laser and restraints, and realizes high power output easily.Invention can realize middle low power laser and high power laser light, and the laser beam that this invention realizes can be used for biomedicine, scientific research and to the aspects such as special processing of material.
The objective of the invention is to be realized by following measure: the device of hollow round table gas laser is divided into helium neon laser or carbon dioxide laser by working-laser material; Employing is easy to realize at special-shaped region of discharge the radio frequency discharge mode of glow discharge; Laser is characterised in that its resonant cavity is a hollow round table shape resonant cavity; The bottom of resonant cavity is the symmetrical concave surface annulus total reflective mirror of rotation; The top is the symmetrical convex surface annulus partial reflection outgoing mirror of rotation; The hollow round table interlayer that the hollow round table shape material that uses two drift angles to equate is nested to form is the laser medium zone; This concave mirror surface and convex lens face are about the central axis rotation symmetry of truncated conical shape dielectric area, and resonant cavity is called the sub-chamber of hollow round table shape resonant cavity along bunch concavo-convex stable cavity of formation of the transmission ray in the vertical section of the central symmetry axes in laser medium district; The chamber axle in this sub-chamber and the central symmetry axes in laser medium district intersect, the waist spot position of sub-chamber output beam can be arranged on as required outgoing mirror apart between the intersection point of the axis of symmetry of ion chamber and the central symmetry axes in laser medium district, also can overlap with this intersection point or outside.Therefore; The laser that this construction method provides is compared the advantage with gain region volume and power output big a lot (increase of the order of magnitude) with the general gas laser of same region of discharge length; Because the waist spot of output beam is positioned at outside the outgoing mirror; Under same power output situation, the power little a lot (reducing of the order of magnitude) that outgoing mirror of the present invention need bear than the outgoing mirror unit are of patent ZL2007100483280, and owing to the waist spot of output beam is positioned at outside the outgoing mirror; Help sample and effectively utilize light beam maximum power density distributing position, have more practicality than patent ZL2007100483280 (the waist spot of output beam is positioned on the outgoing mirror).So it is less and export higher laser device to make volume.And the waist spot position in sub-chamber can rationally be provided with as required, thereby the evolution that hollow beam arrives hollow beam again to solid light beam appears in the spatial distribution that realizes light beam.Output beam small-power situation of the present invention can be used for aspects such as Laser Biomedicine research (realizing light spanner, light tweezer, laser accunputure moxibustion etc.), microelectronics and laser education experiment; High-power helium-neon laser can be used for the photodynamics medical treatment, and high-power carbon dioxide laser can be used for the special processing of material.
Helium neon laser, discharge tube adopts glass or quartz ampoule.Carbon dioxide laser; From 9.2 to 10.8 microns of its laser wavelength ranges, discharge tube adopts glass or quartz ampoule or other insulating material, and large-scale carbon dioxide laser adopts rf discharge excitation mode or preionization energisation mode; Working method is continuous; Adopt blower fan to drive the working gas water cooling method of holding concurrently, when carrying out pulsed discharge when radio-frequency power supply is modulated, working method then is pulse.
Description of drawings Fig. 1,2, the 3rd, the profile of hollow round table type gas laser device structural perspective, device, hollow round table shape laser along in the axle vertical section about the sketch map of chamber mirror.
In accompanying drawing 1-3, the 1st, rotate symmetrical concave surface annular completely reflecting mirror, the 2nd, interior electrode; The 3rd, hollow round table shape discharge tube, the 4th, external electrode, the 5th, water collar; The 6th, rotate symmetrical convex surface annulus partially reflecting mirror, the 7th, blower fan, the 8th, radio-frequency power supply and matching network; The 9th, cylinder, the 1st, with respect to 10 rotational symmetric concave mirrors, the center of curvature of the upper and lower part branch of this mirror lays respectively at O in the section 11, O 12, radius of curvature is r 1, the 6th, with respect to axle 10 rotational symmetric convex mirrors, the center of curvature of the upper and lower part branch of this mirror lays respectively at O in the section 21, O 22, radius of curvature is r 2, l is the distance between mirror 1 and the mirror 6, the i.e. length of discharge tube.When being used for helium neon laser, among the accompanying drawing 1-2,5 and 7 is unwanted, so when being used for this laser, 5 and 7 are cancelled.10 is the axis of symmetry in truncated cone-shaped gas laser medium district among Fig. 2; 10 consistent with among Fig. 3; 11 is the center circle conical surface in truncated cone-shaped gas medium district and the intersection in vertical section; Also be axis and the resonant cavity of light bunch in this vertical section in the chamber, sub-chamber of this cross-sectional area axle, the waist spot position of upper and lower sub-chamber output beam lays respectively at O 01, O 02, axle 10 is O with the intersection point of axle 11.O 01, O 02Can be designed as between mirror 6 and intersection point O, also can all overlap with the O point.θ is the drift angle of the center circle conical surface, and a is the radial width in gas medium district, and l is the length of dielectric area., discharge tube 3 charges into gas laser medium after being pumped into high vacuum; Radio frequency discharge through electrode 2 and 4 comes excitable media, is amplified along the stimulated radiation of the spontaneous radiation induction of the axis of arbitrary section as shown in Figure 2 11 transmission, and receives the interreflection of speculum 1 and 6 and set up at this section and vibrate; Output is provided by the transmission of mirror 6; When gas medium need cool off, then carry out, when gas medium need not cool off, then do not establish 5 and 7 by 5 and 7; This moment 5 with 7 and the connecting pipe of discharge tube 3 by the vacuum leakproofness obstruction, cylinder 9 can make laser have more the multiplex (MUX) makes material and increases the service life.
Embodiment is done detailed description below in conjunction with accompanying drawing and embodiment to the present invention.
The symmetrical concave surface annular of rotation of the present invention completely reflecting mirror 1 adopts circular optical glass or quartz wedge to do substrate, to He-Ne laser and CO 2Laser is suitable for, and adopts the higher round copper billet of the good hardness of compactness to do substrate, and this is to the CO of very high output 2Laser is suitable for, and adopts the part of hole cutter sweep between will be wherein to cut down by requirements of annular mirror inner dimensions, but the centre this part should be glued together so that grind processing with ring block.The grinding tool that grinds minute surface adopts low-carbon steel material to press Design and Machining by Digit Control Machine Tool; Because minute surface does not possess the single center of curvature; So grinding tool does not possess the single center of curvature yet; So design and processing is difficulty, but its curved surface has strict rotating shaft symmetry characteristic, so there is not big difficulty in the processing of grinding tool.After grinding tool processes; Process of lapping to mirror must keep strict rotating shaft symmetry requirement; One that will be glued at the center after the mirror ultrafinish polishing is again taken off, and can obtain rotating the symmetroid speculum, cleans and plates the film rear of being all-trans through strictness and can be used on the device of the present invention.Convex surface annulus partially reflecting mirror 6 of the present invention; Process of lapping is consistent with the process of lapping of mirror 1; Difference is that mirror 6 is that convex surface is as partially reflecting mirror reflecting surface plating partial reflection film; The another side relative with convex surface is from seeing it is taper in face of the direction of central symmetry axes, and the bus of this taper is vertical with the chamber axle in the concavo-convex chamber of section.The material of mirror 6 substrates can be selected glass for use for helium neon laser, for carbon dioxide laser, can select germanium wafer or zinc selenide etc. for use according to power requirement.
Hollow round table shape discharge tube 3 of the present invention then adopts the liquid of glass or quartzy fusing to inject in the graphite jig that is in uniform temperature to helium neon laser and makes after the cooling gradually.Hollow round table shape discharge tube is made up of inside and outside two-layer truncated cone-shaped glass or quartz ampoule, so graphite jig should be two covers.Graphite intensity is better, so can go up lathe comparatively accurately by Design and Machining, precision can reach 0.1 millimeter.When mould is longer, assembling again after the then available several graphite material segmental machining, the mould ectonexine all can adopt certain auxiliary clamp.Mould is not enough as if precision after use, the mould that then should repair or more renew.Hollow round table shape discharge tube of the present invention is to CO 2Laser then adopts aluminium, copper or thin stainless steel material to make, and inside and outside two hollow round table shape metal tubes then directly are used as two sparking electrodes.
In laser array process of assembling of the present invention, the support of inside and outside two round table surface of hollow round table shape discharge tube 3 of the present invention and fixedly through adopting special support to realize.When being helium neon laser; All grind at the bottom and the top of two glass or quartzy round table surface; The vertical section of bottom annulus mirror 1 is a concave surface; The diameter of crossing the mid point of this concave surface is parallel to the round platform bus, and the vertical section reflecting surface of top annulus mirror 6 partly is a convex surface, and the diameter of crossing the mid point of this convex surface is parallel to the round platform bus.The grinding back surface of mirror 1 is the plane, and when mirror 1 glued together with the hollow round table discharge tube, the back side plane of mirror 1 was perpendicular to the axis of symmetry 10 of hollow round table discharge tube.The grinding back surface of mirror 6 is the conical surface.The vertical section of this conical surface is the bus of straight line perpendicular to the hollow round table discharge tube.Select glass that the two sides is parallel and flatness is higher or quartzy annulus, the inner edge radius of round table surface bottom is smaller in the inner edge radius ratio of annulus, and the outer rim radius of the outer round table surface of outer rim radius ratio bottom is bigger.This annulus is placed the flat top of not high metallic support; The mirror 1 that interior physical dimension and round type bottom size is matched and slightly can become flexible places on this ring; The inside that will lighter electrode places internal layer truncated cone-shaped glass or quartz ampoule; Place the bottom of interior round type on this annulus again and be positioned within the axisymmetric curved surface mirror inner edge; Place outer round table surface bottom on this annulus again and be enclosed within the outer rim of mirror 1, because precision has been guaranteed in the processing of element, so can reach requirement after in the suitable monitoring of optical correction's instrument with through supplementary means each element suitably being adjusted; And then with vacuum compound mirror 1, inside and outside round platform pipe and annulus are sticked together, 6 in the mirror at top is installed under in advance consistent with axis calibration beam is monitored and is glued together.Again external electrode is loaded onto.This laser can be at this support vertical working, the output from the top, and its advantage is easy to assembly, optical element is stressed very little.Also can traverse or inverted work after assembled; But tackle support at traverse or before standing upside down and do certain processing; Make it that supplemental support of certain intensity arranged the ectonexine round type; Make its traverse or the gravity of stand upside down back ectonexine round platform pipe and electrode almost by the support support, this moment, laser output mirror was from laterally or from following output.When being carbon dioxide laser, because the ectonexine round type is a metal tube and simultaneously as electrode, so the intensity of managing is very high; Its support problem solves easily; Assemble the basic identical of preceding preparation and assembling process and helium neon laser, it should be noted that the Insulation Problems that is between two electrodes, when the time with glass or quartz substrate axisymmetric curved surface mirror; If the plating deielectric-coating does not then have problems; If metal-coated membrane, then should two conical base with insulating barrier is arranged between completely reflecting mirror is connected, but the voltage of radio-frequency power supply all is lower.
After laser array installs, discharge tube and coupling part all are pumped into high vacuum.Helium neon laser is worked as vacuum degree reach 10 -6During * 133.3Pa, in Ne: He=1: 8 ratio, charging into gaseous mixture pressure is 0.8 * 133.3Pa; Half-reflecting mirror is 98% to the reflectivity of 0.6328 micron wave length light wave; The completely reflecting mirror reflectivity is more than 99.8%, it to be imposed radio frequency discharge, can obtain output.To carbon dioxide laser, when vacuum degree reaches 10 -3During * 133.3Pa, press CO 2: N 2: He=1: 1.5: 7.5, stagnation pressure was 10 * 133.3Pa, and half-reflecting mirror is 80% to 10.6 micron wave length light wave reflectivity, and the completely reflecting mirror reflectivity is more than 99%, it to be imposed radio frequency discharge, can obtain output.
Embodiment discharge tube 3 adopts the hollow platform shape glass tube of 300 millimeters long, and spacing a=4 millimeter between the ectonexine round type, the drift angle of round platform are 2.29 degree (0.04 radian); Completely reflecting mirror 1 is the symmetrical concave surface annular mirror of rotation, and interior outer rim radius is respectively: 16 millimeters, 20 millimeters, the radius of curvature of section concave surface is 1100 millimeters; Outgoing mirror 6 is the symmetrical convex surface annular part outgoing mirror of rotation, and interior outer rim radius is respectively: 10 millimeters, 14 millimeters, the radius of curvature of section convex surface is 900 millimeters; The concavo-convex chamber of section constitutes stable cavity; Light beam wavelength 632.8 nanometers of mirror 6 output, 0.66 millimeter of annular beam ring width, annular beam is 11.67 millimeters of heart radiuses in the dark; 12.33 millimeters of annular beam outer shroud radiuses; Apart from 0.53 millimeter of the annular beam ring width of 600 millimeters far away of outgoing mirrors, annular beam is 1.73 millimeters of heart radiuses in the dark, 2.26 millimeters of annular beam outer shroud radiuses.
Hollow round table shape resonant cavity gas laser comprises the symmetrical concave surface annular completely reflecting mirror of rotation, hollow round table shape discharge tube; Rotate symmetrical convex surface annulus partially reflecting mirror, interior electrode, external electrode; Cylinder, blower fan, radio-frequency power supply and matching network; Water collar referring to figs. 1 through Fig. 2, rotates symmetrical concave surface annular completely reflecting mirror 1 and is connected with the bottom of hollow round table shape discharge tube 3; Convex surface annulus partially reflecting mirror 6 is connected with the top of discharge tube 3; Interior electrode 2 is close to discharge tube 3 inboards or directly is close to the discharge tube outside for interior electrode (when for metal material) external electrode 4 or directly is external electrode (when for metal material) by outer wall by inner layer wall, and cylinder 9 is connected with discharge tube and around discharge tube, water collar 5 is around discharge tube; Blower fan 7 is connected with discharge tube through cylinder, and radio-frequency power supply and matching network 8 are connected with external electrode 4 with interior electrode 2.It is characterized in that discharge tube 3 is hollow round table shape discharge tubes; Internal and external walls is a round type; Truncated cone-shaped mezzanine space by between two round types constitutes region of discharge; Its bottom and top be respectively by completely reflecting mirror 1 and partially reflecting mirror 6 vacuum property sealing labels, makes the hollow round table clevis sheaf space can pumping high vacuum, under high vacuum condition, He-Ne gaseous mixture or carbon dioxide, nitrogen, helium gas mixture charged into discharge tube 3; Its characteristic is that also resonant cavity is a hollow round table shape resonant cavity; It is made up of a rotation symmetry concave surface annular completely reflecting mirror 1 that is installed on hollow round table shape discharge tube bottom and the symmetrical convex surface annulus of a rotation partially reflecting mirror 6 that is installed on the discharge tube top, the symmetry axis of the symmetry axis of completely reflecting mirror 1, partially reflecting mirror 6 and the dead in line of discharge tube 3, at laser along in arbitrary section of discharge tube axis; Total reflective mirror 1 and partially reflecting mirror 6 all have two centers of curvature to be symmetrically distributed in discharge tube axis both sides respectively; Resonant cavity is designed to stable cavity to bunch formation two concavo-convex thorax chambeies of light in the section, and the waist spot of this sub-chamber output beam is positioned at outside the chamber.
The present invention and the hollow laser beam compared with techniques of existing generation have following characteristics:
1, the light beam that the present invention produces is solid light beam with the increase hollow beam evolution of transmission range, and developing is hollow beam again.
2, the present invention adopts gas laser, good beam quality, and directivity is stable.
3, the present invention proposes hollow round table type resonant cavity and directly produces the hollow laser beam, the acquisition good reproducibility of its hollow laser beam.
4, wave-length coverage of the present invention is wide, suitable multiple needs.
The present invention compares with existing patent ZL2007100483280, has following characteristics:
1, the resonant cavity that the present invention adopts is concavo-convex stable cavity (sub-chamber) along the section of the axis of symmetry, and the waist spot of this sub-chamber output beam is positioned at outside the chamber, and for same high power situation, the power density distribution that outgoing mirror need bear reduces a lot (order of magnitude reduction).
2, the minimum beam radial location of output beam of the present invention is enough far away apart from the outgoing mirror position, make laboratory sample can effectively utilize the maximum power density distributing position of light beam and can bespatter the output eyeglass.
3, the present invention directly realizes and bundle outside the chamber through laser, realizes high power output easily.

Claims (2)

1. a hollow round table resonant cavity gas laser device is characterized in that resonant cavity is the hollow round table shape, and gain media is the hollow round table shape; The light beam of this hollow round table resonant cavity gas laser device output is along with the increase of transmission range; Developing from hollow beam is solid light beam, develops to be hollow beam, this hollow round table resonant cavity gas laser device again; Paste rotation symmetrical concave surface annular completely reflecting mirror (1) in the bottom of hollow round table shape discharge tube; Paste rotation symmetrical convex surface annulus partially reflecting mirror (6) at the top of hollow round table shape discharge tube, this rotates symmetrical convex surface annulus partially reflecting mirror (6) and makes outgoing mirror usefulness, this hollow round table resonant cavity along the interior resonance chamber, arbitrary vertical section of central symmetry axis (10) to light bunch constitute two independent of each other, with respect to this axisymmetric concavo-convex chamber of hollow round table resonant cavity central symmetry axis (10); This concavo-convex chamber is called the sub-chamber of this hollow round table resonant cavity; Be concavo-convex stable cavity, the chamber axle (11) in two concavo-convex chambeies oneself intersects at an O with this hollow round table resonant cavity central symmetry axis, and the waist spot position of two concavo-convex chamber output beams overlaps with intersection point O; Perhaps do not overlap with intersection point O; The vertical section that rotate symmetrical concave surface annular completely reflecting mirror (1) this moment is a concave mirror, and the vertical section that rotates symmetrical convex surface annulus partially reflecting mirror (6) is the convex portions speculum, and the output face end is a straight line.
2. a hollow round table resonant cavity gas laser device comprises glass or quartz discharge tube (3), rotates symmetrical concave surface annular completely reflecting mirror (1); Rotate symmetrical convex surface annulus partially reflecting mirror (6), interior electrode (2), external electrode (4); Cylinder (9), blower fan (7), water collar (5) and radio-frequency power supply and matching network (8); Rotate symmetrical concave surface annular completely reflecting mirror (1) and be connected with discharge tube (3) bottom, rotate symmetrical convex surface annulus partially reflecting mirror (6) and be connected with the top of discharge tube (3), interior electrode (2) is close to discharge tube (3) madial wall; External electrode (4) is close to discharge tube (3) lateral wall; Radio-frequency power supply and matching network (8) and interior electrode (2), external electrode (4) connects, and cylinder (9) is connected with discharge tube (3) and around discharge tube (3); Water collar (5) is connected with discharge tube (3) outer wall; Blower fan (7) is connected with discharge tube (3), it is characterized in that discharge tube (3) is a hollow round table shape discharge tube, and internal and external walls all is round types; Hollow round table clevis sheaf space by between two round types constitutes region of discharge; The bottom of this hollow round table shape discharge tube and top make hollow round table clevis sheaf space ability pumping high vacuum respectively by rotation symmetrical concave surface annular completely reflecting mirror (1) and rotation symmetrical convex surface annulus partially reflecting mirror (6) vacuum property sealing label, under high vacuum condition, He-Ne gaseous mixture or carbon dioxide, nitrogen, helium gas mixture are charged into discharge tube.
CN2009102162141A 2009-11-13 2009-11-13 Hollow frustum resonant cavity gas laser Expired - Fee Related CN102064458B (en)

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CN103545701B (en) * 2013-10-11 2016-04-13 四川大学 The cylindrical shape CO of PGC demodulation 2laser
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EP0610170A1 (en) * 1993-02-01 1994-08-10 Dieter Dr. Univ. Prof. Schuöcker Stabilization device for hollow cylinder plasma gaz laser
CN1845404A (en) * 2006-03-15 2006-10-11 华中科技大学 Combined holophote laser resonant cavity composed of right-angle round platform inboard surface and right-angle taper outboard surface
CN2891409Y (en) * 2006-03-15 2007-04-18 华中科技大学 Right-angle truncated cone inner surface and right-angle taper outer surface combined full reflector laser resonator
CN1996683A (en) * 2006-12-28 2007-07-11 华中科技大学 Laser resonance cavity of the combined full reflection mirror with the right-angle interval and external taper
CN101232147A (en) * 2007-01-25 2008-07-30 四川大学 Hollow beam gas laser

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Publication number Priority date Publication date Assignee Title
EP0610170A1 (en) * 1993-02-01 1994-08-10 Dieter Dr. Univ. Prof. Schuöcker Stabilization device for hollow cylinder plasma gaz laser
CN1845404A (en) * 2006-03-15 2006-10-11 华中科技大学 Combined holophote laser resonant cavity composed of right-angle round platform inboard surface and right-angle taper outboard surface
CN2891409Y (en) * 2006-03-15 2007-04-18 华中科技大学 Right-angle truncated cone inner surface and right-angle taper outer surface combined full reflector laser resonator
CN1996683A (en) * 2006-12-28 2007-07-11 华中科技大学 Laser resonance cavity of the combined full reflection mirror with the right-angle interval and external taper
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