CN100486063C - High power pulsed laser maladjustment proof resonant cavity - Google Patents

High power pulsed laser maladjustment proof resonant cavity Download PDF

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CN100486063C
CN100486063C CNB2006101245923A CN200610124592A CN100486063C CN 100486063 C CN100486063 C CN 100486063C CN B2006101245923 A CNB2006101245923 A CN B2006101245923A CN 200610124592 A CN200610124592 A CN 200610124592A CN 100486063 C CN100486063 C CN 100486063C
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total reflection
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CN1929217A (en
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李宏棋
程祖海
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Huazhong University of Science and Technology
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Abstract

本发明公开了一种高功率脉冲激光器抗失调谐振腔,包括全反射镜,平面输出镜及激光工作介质,全反射镜为直角内外圆锥面组合反射镜,该反射镜为直角外圆锥面反射镜和直角圆台内侧面反射镜的组合,这两个反射镜的中心轴线重合,直角外圆锥面反射镜的高度大于直角圆台内侧面反射镜的高度,其高度差大于零小于或等于2mm。本发明输出近似实心平行光束,近场光斑光强分布均匀,远场光能集中,发散角极小,模体积大;调整极其简便,工作极其稳定;可以用于高功率气体激光器、固体激光器,特别适用于高能脉冲激光器。

Figure 200610124592

The invention discloses a high-power pulse laser anti-distuning resonant cavity, which includes a total reflection mirror, a plane output mirror and a laser working medium. Combination with the inner surface reflector of the right-angle circular frustum, the central axes of the two reflectors coincide, the height of the right-angle outer conical reflector is greater than the height of the inner surface reflector of the right-angle circular frustum, and the height difference is greater than zero and less than or equal to 2mm. The invention outputs approximately solid parallel light beams, the light intensity distribution of the near-field spot is uniform, the far-field light energy is concentrated, the divergence angle is extremely small, and the mode volume is large; the adjustment is extremely simple and the work is extremely stable; it can be used in high-power gas lasers and solid-state lasers. Especially suitable for high energy pulsed lasers.

Figure 200610124592

Description

高功率脉冲激光器抗失调谐振腔 High power pulsed laser anti-detuning resonator

技术领域 technical field

本发明涉及一种激光谐振腔。The invention relates to a laser resonant cavity.

背景技术 Background technique

高能激光器件设计中的主要问题是,如何获得尽可能大的模体积和好的横模鉴别能力,以实现高能量单模运转,从而既能从激活物质中高效率地提取能量,又能保持高的光束质量。The main problem in the design of high-energy laser devices is how to obtain the largest possible mode volume and good transverse mode discrimination ability to achieve high-energy single-mode operation, so as to extract energy efficiently from the active material while maintaining high beam quality.

常用的激光谐振腔有稳定腔,非稳腔和临界腔。Commonly used laser resonators include stable cavity, unstable cavity and critical cavity.

稳定腔的主要优点是损耗极低。在所有稳定腔中,傍轴光线的几何偏折损耗均为零,而且只要腔的菲涅尔不太小,衍射损耗通常也小到可以忽略。但稳定腔也有其内在的缺点:(1)模体积小。对于典型的稳定腔激光器基模体积通常只占整个激活介质体积的很小一部分。实际上,稳定腔的高斯基模就像一条细长的带子一样处在激活物质的轴线附近,大部分激活能量都不能有效地转化为高斯基模的激光能量。特别值得指出的是,对菲涅尔数较大的稳定腔,光斑半径及基模体积与腔的横向尺寸(它通常由气体放电管或固体激光棒的直径决定)无关。因此,当腔长一定时,我们不可能用增大激活物质的横向尺寸的办法来增加基模体积,从而提高激光器的输出功率。相反地,激活物质的横向尺寸越大,工作物质的利用系数越低。(2)当腔的菲涅尔较大时,若干较低阶横模的衍射损耗都小到可以忽略,因而谐振腔也就实际上失去了横模选择能力,这将不可避免地导致多模运转,从而降低光束质量。稳定腔运转于多模状态可以增大模体积,从而提高激活物质的利用系数并增大输出功率。因为稳定腔模体积随模的阶次增大而增大,当足够的厄米高斯(或拉盖尔高斯)模形成震荡时即可提高激活物质的有效利用系数,但这时光束质量将比基模光束差得多。The main advantage of a stable cavity is that losses are extremely low. In all stable cavities, the geometric deflection loss of paraxial rays is zero, and the diffraction loss is usually negligibly small as long as the Fresnel of the cavity is not too small. But the stable cavity also has its inherent disadvantages: (1) The mold volume is small. For a typical stable cavity laser, the fundamental mode volume usually only occupies a small part of the volume of the active medium. In fact, the Gaussian mode of the stable cavity is like a long and thin ribbon near the axis of the activated material, and most of the activation energy cannot be effectively converted into the laser energy of the Gaussian mode. It is particularly worth pointing out that for a stable cavity with a large Fresnel number, the spot radius and fundamental mode volume have nothing to do with the cavity's lateral size (which is usually determined by the diameter of the gas discharge tube or solid-state laser rod). Therefore, when the cavity length is constant, it is impossible for us to increase the volume of the fundamental mode by increasing the lateral size of the active material, thereby increasing the output power of the laser. Conversely, the larger the lateral dimension of the active substance, the lower the utilization coefficient of the working substance. (2) When the Fresnel of the cavity is large, the diffraction losses of several lower-order transverse modes are so small that they can be ignored, so the resonant cavity actually loses the ability to select the transverse mode, which will inevitably lead to multi-mode operation, thereby degrading the beam quality. Stable cavity operating in a multi-mode state can increase the mode volume, thereby improving the utilization factor of the activated material and increasing the output power. Because the volume of the stable cavity mode increases with the order of the mode, when enough Hermitian-Gaussian (or Laguerre-Gauerian) modes form oscillations, the effective utilization coefficient of the activated material can be improved, but the beam quality will be lower than that of The fundamental mode beam is much worse.

非稳腔和临界腔可以保证有效地从激活物质中提取能量而同时又能获得高质量的输出光束。最常用的非稳腔是虚共焦非稳腔。它由一凹面镜和一凸面镜组成。凹面镜的实焦点和凸面镜的虚焦点重合,公共焦点在腔外。通过选择反射镜的尺寸,平面波将有效地通过全部工作物质。这时激活物质的利用效率最高并能获得准直的,均匀的输出光束。对圆形镜腔其远场图就是一个被平面波均匀照明的圆环的衍射图样。虚共焦非稳腔的不足之处就是圆环衍射图样的能量分布相对于圆孔衍射将有相当的能量分布在周围亮环上,远场能量分布不够集中。虚共焦非稳腔的调整过程复杂,要求高。Unsteady and critical cavities can ensure efficient energy extraction from activated species while obtaining high-quality output beams. The most commonly used unstable cavity is the virtual confocal unstable cavity. It consists of a concave mirror and a convex mirror. The real focus of the concave mirror coincides with the virtual focus of the convex mirror, and the common focus is outside the cavity. By choosing the dimensions of the mirrors, the plane wave will efficiently pass through the entire working substance. At this time, the utilization efficiency of the active substance is the highest and a collimated and uniform output beam can be obtained. The far-field pattern of a circular mirror cavity is the diffraction pattern of a ring uniformly illuminated by a plane wave. The disadvantage of the virtual confocal unstable cavity is that the energy distribution of the circular ring diffraction pattern will have a considerable energy distribution on the surrounding bright ring compared with the circular hole diffraction, and the far-field energy distribution is not concentrated enough. The adjustment process of the virtual confocal unstable cavity is complex and demanding.

平行平面腔由一平面全反镜和一平面输出镜组成。两平面镜相互平行。输出均匀平行光束。平平腔的主要优点是:光束发散角小,模体积较大。比较容易获得单模振荡。其主要缺点是调整精度要求极高且容易失调。苛刻的平行度和光腔稳定性要求严重限制了它的应用。The parallel plane cavity is composed of a plane total reflection mirror and a plane output mirror. Two plane mirrors are parallel to each other. Output a uniform parallel beam. The main advantages of flat cavity are: small beam divergence angle and large mode volume. It is relatively easy to obtain single-mode oscillation. Its main disadvantage is that the adjustment accuracy is extremely high and it is easy to get out of adjustment. Strict parallelism and cavity stability requirements severely limit its applications.

申请号200610018552.0公开了一种“不失调激光谐振腔”,该激光谐振腔全反镜由中心直角内锥面和一个直角圆台的外侧面和一个直角圆台的内侧面组合形成,使用平面输出镜。该激光谐振腔可以消除增益介质不均匀分布的影响,压缩输出激光光斑的面积,实现带有中心光斑的特殊环形光斑输出。但是该全反镜由三个锥面反射镜组合形成,结构复杂,使用中要求三个直角内外锥面反射镜同轴,加工制造相对比较困难。Application No. 200610018552.0 discloses a "non-detuned laser resonator". The laser resonator full reflection mirror is formed by a combination of a central right-angled inner conical surface, an outer side of a right-angled circular frustum, and an inner surface of a right-angled circular frustum, and a planar output mirror is used. The laser resonator can eliminate the influence of the uneven distribution of the gain medium, compress the area of the output laser spot, and realize the output of a special annular spot with a central spot. However, the total reflection mirror is formed by combining three conical mirrors, and has a complex structure. In use, three right-angled inner and outer conical mirrors are required to be coaxial, and it is relatively difficult to manufacture.

发明内容 Contents of the invention

本发明的目的在于克服上述现有技术的不足之处,提供一种高功率脉冲激光器抗失调谐振腔,该谐振腔不仅抗失调能力强,可以消除增益介质不均匀分布的影响,具有高热稳定性,改善了光束质量,而且结构简单,加工制造简便,没有中心焦线,因此可以用于高能脉冲激光器中。The purpose of the present invention is to overcome the shortcomings of the above-mentioned prior art, and provide a high-power pulsed laser anti-offset resonator, which not only has strong anti-offset ability, but also can eliminate the influence of uneven distribution of the gain medium, and has high thermal stability , improves the beam quality, and has a simple structure, easy processing and manufacturing, and no central focal line, so it can be used in high-energy pulsed lasers.

为达到上述目的,本发明采用的技术方案是:一种高功率脉冲激光器抗失调谐振腔,包括全反射镜,平面输出镜及激光工作介质,全反射镜为直角外圆锥面反射镜和直角圆台内侧面反射镜的组合,这两个反射镜的中心轴线重合,直角外圆锥面反射镜的高度大于直角圆台内侧面反射镜的高度,其高度差大于零小于或等于2mm。In order to achieve the above object, the technical solution adopted in the present invention is: a high-power pulsed laser anti-detuning resonator, including a total reflection mirror, a plane output mirror and a laser working medium, and the total reflection mirror is a right-angled outer conical mirror and a right-angled circular truncated The combination of inner side mirrors, the central axes of the two mirrors coincide, the height of the right-angle outer conical mirror is greater than the height of the right-angle circular frustum inner side mirror, and the height difference is greater than zero and less than or equal to 2mm.

本发明与现有技术相比,具有以下优点:Compared with the prior art, the present invention has the following advantages:

(1)在本发明中,直角外圆锥面反射镜的高度大于直角圆台内侧面反射镜的高度,所以本发明高功率脉冲激光器抗失调谐振腔没有中心焦线,避免了在焦线上的空气被击穿,可以用于大能量脉冲激光器中;而且,提高了直角外圆锥面反射镜顶尖部位抗脉冲强激光损伤的能力。(1) In the present invention, the height of the right-angled outer conical reflector is greater than the height of the inner side reflector of the right-angled circular platform, so the high-power pulsed laser anti-detuning resonator of the present invention does not have a central focal line, avoiding the air on the focal line It is broken down and can be used in high-energy pulse lasers; moreover, it improves the ability of the top part of the right-angle outer conical reflector to resist pulse-intensive laser damage.

(2)在本发明中,直角外圆锥面反射镜的高度大于直角圆台内侧面反射镜的高度,利用逆向反射特性,可以消除脉冲强激光器中的增益不均匀分布的影响,对固体激光棒、固体激光晶体板条薄片在激励下的不均匀性,气体放电不均匀性,气体折射率不均匀性等起到光学补偿作用,充分保证了固体或气体脉冲激光器输出光束的质量和能量。(2) In the present invention, the height of the right-angled outer conical surface reflector is greater than the height of the right-angled circular frustum inner side reflector, and the retroreflection characteristics can be used to eliminate the influence of the uneven distribution of gain in the pulsed intensity laser, to solid laser rods, The inhomogeneity of solid laser crystal slabs under excitation, the inhomogeneity of gas discharge, the inhomogeneity of gas refractive index, etc. play an optical compensation role, which fully guarantees the quality and energy of the output beam of solid or gas pulse lasers.

(3)本发明结构简单,加工制造简便。(3) The present invention is simple in structure, easy to process and manufacture.

(4)抗失调能力强,全反镜或输出镜的容许失调角远远超过现有大能量脉冲激光器所使用的稳定腔,非稳腔和平行平面腔,使用维护方便可靠。(4) Strong anti-misalignment ability, the allowable misalignment angle of the total reflection mirror or the output mirror far exceeds the stable cavity, unstable cavity and parallel plane cavity used in the existing high-energy pulse laser, and the use and maintenance are convenient and reliable.

(5)本发明也可以用于固体或气体高功率连续激光器中。(5) The present invention can also be used in solid or gas high-power continuous lasers.

附图说明 Description of drawings

图1为本发明的一种实施例的结构示意图。Fig. 1 is a structural schematic diagram of an embodiment of the present invention.

图2为图1中全反镜的主视图。Fig. 2 is a front view of the total reflection mirror in Fig. 1 .

图3为图1中全反镜的右视图。Fig. 3 is a right view of the total reflection mirror in Fig. 1 .

具体实施方式 Detailed ways

由图1~图3所示,本发明高功率脉冲激光器抗失调谐振腔,包括全反射镜1,平面输出镜3及激光工作介质2,全反射镜1为直角外圆锥面反射镜4和直角圆台内侧面反射镜5的组合,这两个反射镜的中心轴线重合,直角外圆锥面反射镜4的高度h1大于直角圆台内侧面反射镜5的高度h2,其高度差大于零小于或等于2mm。As shown in Figures 1 to 3, the high-power pulsed laser anti-detuning resonator of the present invention includes a total reflection mirror 1, a plane output mirror 3 and a laser working medium 2, and the total reflection mirror 1 is a right-angle outer conical reflector 4 and a right-angle The combination of the inner side reflector 5 of the circular frustum, the central axes of the two reflectors coincide, the height h 1 of the right angle outer conical reflector 4 is greater than the height h 2 of the inner side reflector 5 of the right angle circular frustum, and the height difference is greater than zero and less than or Equal to 2mm.

激光介质2可以是气体介质,比如二氧化碳;或固体介质,比如Nd:YAG激光晶体。在平面输出镜3的外表面镀增透膜。The laser medium 2 can be a gaseous medium, such as carbon dioxide; or a solid medium, such as Nd:YAG laser crystal. An anti-reflection film is coated on the outer surface of the plane output mirror 3 .

该激光谐振腔应用于高功率激光器时,全反射镜1及平面输出镜3用水冷却散热,一般在全反射镜1背面加工水槽,使用常规自来水冷却即可。直角外圆锥面反射镜4和直角圆台内侧面反射镜5位于全反射镜1背面的结合部缝隙密封,以防止向组合反射镜内部渗水,一般使用粘和剂或焊接密封即可。When the laser resonator is applied to a high-power laser, the total reflection mirror 1 and the planar output mirror 3 are cooled with water to dissipate heat. Generally, a water tank is processed on the back of the total reflection mirror 1, and conventional tap water can be used for cooling. The right-angle outer conical surface reflector 4 and the right-angle circular frustum inner surface reflector 5 are located at the junction gap of the total reflector 1 backside and are sealed to prevent water seepage into the combined reflector. Generally, adhesives or welding are used for sealing.

上述全反射镜1和平面输出镜3的中心轴线与谐振腔光轴最好重合。The central axes of the above-mentioned total reflection mirror 1 and the plane output mirror 3 preferably coincide with the optical axis of the resonant cavity.

直角外圆锥面反射镜4和直角圆台内侧面反射镜5要求具有较高的面形精度,直角精度,同轴度和高反射率。实践证明,用金刚石刀具超精密切削的无氧铜反射镜表面的耐热和抗激光损伤性能超过抛光表面,由于在直角外圆锥面反射镜4和直角圆台内侧面反射镜5的反射面镀制均匀反射膜存在困难,金刚石机床可以直接将内外锥面切削成镜面,直接作为反光镜使用,而不必镀制反射膜。The right angle outer conical reflector 4 and the right angle circular frustum inner side reflector 5 are required to have higher surface shape accuracy, right angle accuracy, coaxiality and high reflectivity. Practice has proved that the heat resistance and laser damage resistance of the surface of the oxygen-free copper mirror cut with diamond tools are superior to those of the polished surface. There are difficulties in the uniform reflection film. The diamond machine tool can directly cut the inner and outer cones into a mirror surface, which can be directly used as a reflector without coating a reflective film.

直角外圆锥面反射镜4和直角圆台内侧面反射镜5可用螺纹、键、花键或粘和剂实现可拆同轴连接。直角外圆锥面反射镜4和直角圆台内侧面反射镜5也可用焊接连接。The right-angle outer conical reflector 4 and the right-angle circular frustum inner surface reflector 5 can be detachably connected by threads, keys, splines or adhesives. The right angle outer conical reflector 4 and the right angle circular frustum inner side reflector 5 can also be connected by welding.

在上述平面输出镜3的内表面镀圆环状全反膜,圆环外径等于输出镜的直径,环宽小于平面输出镜3直径的一半。这样,可以产生压缩激光器输出光斑半径的效果。The inner surface of the above-mentioned plane output mirror 3 is plated with a ring-shaped total reflection film, the outer diameter of the ring is equal to the diameter of the output mirror, and the ring width is less than half of the diameter of the plane output mirror 3 . In this way, the effect of compressing the output spot radius of the laser can be produced.

全反射镜1的光学性质是:任何方向的入射光线经全反射镜1反射以后,反射光线与入射光线平行。或者说,只要入射光线方向不变,无论全反射镜1绕直角外圆锥面反射镜4的顶点如何晃动,反射光线的方向始终不变,与入射光线方向保持一致。根据这一性质,本发明高功率脉冲激光器抗失调谐振腔输出光线的方向与平面输出镜3的法线方向相同,且当直角外圆锥面反射镜4的顶点位于光轴附近,全反射镜1的中心轴线与光轴近似重合时即可出光,出光能量与光束质量没有明显下降。The optical property of the total reflection mirror 1 is: after the incident light in any direction is reflected by the total reflection mirror 1, the reflected light is parallel to the incident light. In other words, as long as the direction of the incident light remains unchanged, no matter how the total reflection mirror 1 shakes around the apex of the right-angled outer conical reflector 4, the direction of the reflected light will always remain the same, consistent with the direction of the incident light. According to this property, the direction of the output light of the high-power pulsed laser anti-detuning resonator of the present invention is the same as the normal direction of the plane output mirror 3, and when the apex of the right-angled outer conical mirror 4 is located near the optical axis, the total reflection mirror 1 The light can be emitted when the central axis and the optical axis are approximately coincident, and the light energy and beam quality do not decrease significantly.

Claims (6)

1.一种高功率脉冲激光器抗失调谐振腔,包括全反射镜,平面输出镜及激光工作介质,其特征在于:全反射镜(1)为直角外圆锥面反射镜(4)和直角圆台内侧面反射镜(5)的组合,这两个反射镜的中心轴线重合,直角外圆锥面反射镜(4)的高度大于直角圆台内侧面反射镜(5)的高度,其高度差大于零小于或等2mm。1. A high-power pulsed laser anti-detuning resonator, comprising a total reflection mirror, a plane output mirror and a laser working medium, is characterized in that: the total reflection mirror (1) is a right-angle outer conical reflector (4) and a right-angle circular frustum The combination of side reflectors (5), the central axes of these two reflectors coincide, the height of the right-angled outer conical reflector (4) is greater than the height of the right-angled circular frustum inner side reflector (5), and its height difference is greater than zero and less than or Wait for 2mm. 2.根据权利要求1所述的高功率脉冲激光器抗失调谐振腔,其特征在于:该激光谐振腔应用于高功率激光器时,全反射镜(1)及平面输出镜(3)用水冷却散热,直角外圆锥面反射镜(4)和直角圆台内侧面反射镜(5)位于全反射镜(1)背面的结合部缝隙密封。2. The high-power pulse laser anti-detuning resonator according to claim 1, characterized in that: when the laser resonator is applied to a high-power laser, the total reflection mirror (1) and the plane output mirror (3) are cooled with water to dissipate heat. The gap between the right-angled outer conical surface reflector (4) and the right-angled circular frustum inner surface reflector (5) at the back of the total reflection mirror (1) is sealed. 3.根据权利要求1或2所述的高功率脉冲激光器抗失调谐振腔,其特征在于:全反射镜(1)和平面输出镜(3)的中心轴线与谐振腔光轴重合。3. The high-power pulsed laser anti-detuning resonator according to claim 1 or 2, characterized in that: the central axis of the total reflection mirror (1) and the planar output mirror (3) coincides with the optical axis of the resonator. 4.根据权利要求3所述的高功率脉冲激光器抗失调谐振腔,其特征在于:直角外圆锥面反射镜(4)和直角圆台内侧面反射镜(5)用螺纹、键、花键或粘和剂连接。4. The high-power pulsed laser anti-detuning resonator according to claim 3, characterized in that: the right-angle outer conical reflector (4) and the right-angle circular frustum inner side reflector (5) are threaded, keyed, splined or glued and agent connection. 5.根据权利要求3所述的高功率脉冲激光器抗失调谐振腔,其特征在于:直角外圆锥面反射镜(4)和直角圆台内侧面反射镜(5)用焊接连接。5. The high-power pulsed laser anti-detuning resonator according to claim 3, characterized in that: the right-angle outer conical reflector (4) and the right-angle circular frustum inner surface reflector (5) are connected by welding. 6.根据权利要求3所述的高功率脉冲激光器抗失调谐振腔,其特征在于:在上述平面输出镜(3)的内表面镀圆环状全反膜,圆环外径等于输出镜的直径,环宽小于平面输出镜(3)直径的一半。6. The high-power pulsed laser anti-detuning resonator according to claim 3, characterized in that: the inner surface of the above-mentioned plane output mirror (3) is plated with a ring-shaped total reflection film, and the outer diameter of the ring is equal to the diameter of the output mirror , the ring width is less than half of the diameter of the plane output mirror (3).
CNB2006101245923A 2006-09-22 2006-09-22 High power pulsed laser maladjustment proof resonant cavity Expired - Fee Related CN100486063C (en)

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