CN102157891B - Laser for generating high-power axisymmetric polarized light - Google Patents

Laser for generating high-power axisymmetric polarized light Download PDF

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CN102157891B
CN102157891B CN 201110067616 CN201110067616A CN102157891B CN 102157891 B CN102157891 B CN 102157891B CN 201110067616 CN201110067616 CN 201110067616 CN 201110067616 A CN201110067616 A CN 201110067616A CN 102157891 B CN102157891 B CN 102157891B
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mirror
grating
laser
axial cone
turning
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CN102157891A (en
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王又青
赵江
李波
杨扬
贺昌玉
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Abstract

The invention discloses a laser for generating high-power axisymmetric polarized light, which comprises a total-reflection mirror, an output mirror, a laser working medium and a pumping source, wherein the laser working medium is located on all folding arms perpendicular to the total-reflection mirror; the pumping source is a radio frequency semiconductor laser or a flash lamp pumping source. The laser is characterized by also comprising 4*N turning mirrors, N equals to 1, 2 and 3, and the centers of the 4*N turning mirrors are all located on the optical axis of a resonator, wherein the normal lines of 2*N turning mirrors are parallel to the meridian plane, and an included angle between the normal lines of two adjacent turning mirrors is 90 DEG; and the normal lines of the rest 2*N turning mirrors are parallel to the sagittal plane, an included angle between the normal lines of the rest two adjacent turning mirrors is also 90 DEG, and the included angles between the normal lines of the 4*N turning mirrors and the optical axis are 45 DEG. The total-reflection mirror is a medium grating mirror or an inner axial-cone metal grating mirror. The laser provided by the invention has the characteristics of simple structure, high output axisymmetric polarized light power, high degree of polarization, good beam quality and the like.

Description

A kind of laser that is used to produce high power axial symmetry polarised light
Technical field
The invention belongs to laser, relate to the laser of output shaft symmetrical polarized light, be specifically related to a kind of laser that is used to produce high power axial symmetry polarised light.
Background technology
Because the particular polarization characteristic of axial symmetry polarised light shows tempting application prospect in a lot of fields.Wherein, tool is used potential quality is that ((two types of axial symmetry polarised lights of Fig. 1-b), the arrow points among Fig. 1 is the electric vector direction to the hoop polarised light for Fig. 1-a) and radial polarisation light.Hoop polarised light and radial polarisation polarisation of light direction in beam cross-section except that beam center each point all with radially be 90 ° and 0 ° respectively.
In laser processing, during for example laser cutting, laser welding, laser drilling etc. were used, the polarization state of laser all can produce material impact to the laser processing quality.The hoop polarised light is applied to industrial lasers when punching, and sidewall to the absorption of laser energy seldom absorbs the bottom that mainly concentrates on the hole.Therefore, adopt the hole of hoop polarised light processing to compare, have characteristics such as the aperture is little, hole depth is big, tapering is little, the heat affected area is little with the hole of circularly polarized light processing.In the high power laser light cutting, the circularly polarized light that uses at present can be eliminated linearly polarized light and on different cutting paths, absorb different problems, improves cutting accuracy and cut quality.But material is not high to the absorption efficiency of circularly polarized light, makes the capacity usage ratio of present laser cutting not reach maximum.And radial polarisation light is radial distribution owing to the polarization direction along beam cross-section, and for the every bit on the cut surface, the laser of incident all is the P polarised light, and material is bigger than the absorptivity of S polarised light to the absorptivity of P polarised light.Research shows that radial polarisation light can improve about 2 times than the circularly polarized light cutting efficiency.
In middle high power gas laser, generally adopt refrative cavity to increase the length of gain, so that improve laser output power.But, the reflectivity of P polarised light and S polarised light there is certain difference because turning mirror is with non-zero angle incident the time.Therefore, in this structure, the polarization selectivity characteristic of turning mirror will reduce the degree of polarization of axial symmetry polarised light, in the time of serious even can not get the annulus hollow beam of axial symmetry polarization.
Application number 200820165973.0 discloses " a kind of linearly polarized light of realizing converts the device of radial polarisation light into "; This device adopts passive producing method; Rearrange by half-wave plate, quarter-wave plate, birefringece crystal, quartz polarization circulator etc., linearly polarized light is converted into radial polarisation light.The weak point of this method is that the optics of employing is many, and system is strict to the relative position between wave plate and the birefringence element optical axis, and these devices should not bear high power.Therefore this method is unwell to acquisition high power radial polarisation light.Application number 200910051101.0 discloses a kind of " laser of outputting radial polarized light beam ", and this method adopts initiatively producing method, produces radial polarisation light with Brewster axial cone mirror as polarizer in the chamber.But, increased the loss of resonant cavity owing to insert Brewster axial cone mirror in the chamber.And the manufacturing of Brewster axial cone mirror and the adjustment required precision very high, limited the efficient of system and the degree of polarization of outputting radial polarised light.Simultaneously, the end pumping structure has also limited the power of output laser.Therefore, this mode also is unfavorable for the axial symmetry polarised light of output high-power and high-polarization.
Summary of the invention
The present invention is directed to the deficiency of above-mentioned technology, a kind of laser that is used to produce high power axial symmetry polarised light is provided, this laser structure is simple, has power output and degree of polarization height, the characteristics of good beam quality.
A kind of laser that is used to produce high power axial symmetry polarised light provided by the invention; It comprises total reflective mirror, outgoing mirror, laser working medium and pumping source; Laser working medium is positioned on the folding arm vertical with all total reflective mirrors, and pumping source is radio-frequency pumped source, diode-end-pumped source or flash lamp pumping source.It is characterized in that it also comprises 4*N turning mirror, N=1,2 or 3; 4*N turning mirror is the plane high reflection mirror; 4*N turning mirror on the light path between total reflective mirror and outgoing mirror, and the center of each turning mirror all is positioned on the optical axis of laserresonator; The normal turning mirror number parallel with meridian plane equates with the parallel turning mirror number of sagittal surface with normal; Wherein, The normal of 2*N turning mirror is parallel with meridian plane, and the angle between adjacent two turning mirror normals is 90 °, and the normal of all the other 2*N turning mirror is parallel with sagittal surface; Angle also is 90 ° between adjacent two turning mirror normals, and the angle of the normal of 4*N turning mirror and optical axis is 45 °.
The completely reflecting mirror of laser resonant cavity is that polarization is selected mirror; Polarization is selected on the optical axis that is centered close to laserresonator of mirror; And minute surface is perpendicular to optical axis, and it is dielectric grating mirror or interior axial cone metal grating mirror that polarization is selected mirror, and the etched line of dielectric grating mirror or interior axial cone metal grating mirror is an annulus; Grating region etching annulus width evenly distributes, and the groove section of grating is a rectangle.Polarization select mirror only to radially or hoop axial symmetry polarised light have high reflectance.
As the further improvement of technique scheme, dielectric grating mirror preferred construction is: the dielectric grating mirror comprises dielectric grating, multilayer dielectric film and substrate; The groove of dielectric grating is concentric with substrate, and the size of dielectric grating mirror etched area satisfies relation: φ 2=φ 1-2*L, wherein, φ 1Be basal diameter, φ 2Be the diameter of dielectric grating etched area annulus, L is not a plated film and not the annulus width of etching dielectric grating in the substrate; Multilayer dielectric film forms by high low-index material is alternately laminated; Multilayer dielectric film is between dielectric grating and substrate, and the dielectric grating layer thickness is less than the multilayer dielectric film gross thickness.
Further improve as the another kind of of technique scheme, interior axial cone metal grating mirror preferred construction is: at the copper substrate interior axial cone of getting on the bus out, the cone angle of interior axial cone is 90 °; And the axis of axial cone is vertical with the outer round platform of awl; And with the resonant cavity optical axis coincidence, in metal grating is engraved on the axial cone face, perpendicular to interior axial cone face; The metal grating etched line is concentric with axial cone, and the size of interior axial cone metal grating mirror satisfies relation: φ a=φ b+ 2*d, wherein, φ aBe the interior axial cone metal grating etched area awl diameter at the end, φ bThe diameter of the interior axial cone metal grating etched area vertex of a cone, d are the etched area height of interior axial cone metal grating mirror.
Technique effect of the present invention: the present invention has eliminated the influence that a plurality of turning mirrors are selected light field polarization in the chamber in the same plane through adopting the structure of space fold resonator.Employing has the polarization of high polarization selectivity and high reflectance and selects mirror can obtain the axial symmetry light beam of high-polarization.Resonant cavity does not have other and inserts element, and the loss of resonant cavity is low, and gain length is big, can realize high power output.Wide adaptability of the present invention, simple in structure, Installation and Debugging convenience.Can satisfy the output requirement of middle and high power shaft symmetrical polarized light.The present invention is easy to promote the use of in the industrial processes field.
Description of drawings
Fig. 1 is two types of axial symmetry polarised light LG 01*The electric vector structure chart of mould;
Fig. 2 is the embodiment of the invention 1 space three folded medium grating mirror laser structure sketch mapes;
Fig. 3 is the embodiment of the invention 1 space three folded medium grating mirror laser right views;
Fig. 4 is the structural representation of the embodiment of the invention 1 turning mirror assembly;
Fig. 5 is a view under the embodiment of the invention 1 turning mirror assembly;
Fig. 6 is the embodiment of the invention 1 a planar medium grating mirror structural representation;
Fig. 7 is the embodiment of the invention 1 a planar medium grating mirror assembly sketch map;
Fig. 8 is the embodiment of the invention 1 a planar medium grating mirror assembly top view;
Fig. 9 is a view under the embodiment of the invention 1 planar medium grating mirror assembly;
Figure 10 is an axial cone metal grating mirror assembly sketch map in the embodiment of the invention 1;
Figure 11 is an axial cone metal grating mirror assembly top view in the embodiment of the invention 1;
Figure 12 is a view under the embodiment of the invention 1 interior axial cone metal grating mirror assembly;
Figure 13 is the embodiment of the invention 1 an outgoing mirror assembly sketch map;
Figure 14 is the embodiment of the invention 2 spaces five folded medium grating mirror laser structure sketch mapes;
Figure 15 is the embodiment of the invention 2 spaces five folded medium grating mirror laser right views;
Figure 16 is the embodiment of the invention 1 a planar medium grating mirror typical structure sketch map;
Figure 17 is the reflectivity of the embodiment of the invention 1 planar medium grating mirror typical structure and the graph of a relation between the grating degree of depth;
Figure 18 is the reflectivity of axial cone metal grating mirror typical structure in the embodiment of the invention 1 and the graph of a relation between the grating degree of depth.
Embodiment
Below in conjunction with accompanying drawing the present invention is done further detailed description.
Like Fig. 2, shown in 3, instance 1 is three folded medium grating mirror lasers, and it comprises dielectric grating mirror 1, turning mirror 2,3,4,5, outgoing mirror 6, laser working medium 7, pumping source 8, angle mirror support 9,10. Turning mirror 2,3 is installed on the angle mirror support 9, and turning mirror 4,5 is installed on the angle mirror support 10.
Like Fig. 4, shown in 5, turning mirror 2,3,4,5 are the bronze mirror of same size, in the substrate 11 of polishing, are coated with highly reflecting films, and the back side is milled with ring-like water cooling passageway 12, on the turning mirror back shroud 13, entry interface 14 and water outlet interface 15 is arranged.Turning mirror back shroud 13 can link together through welding manner with turning mirror.
Turning mirror 2,3, on 4,5 the optical axis that is centered close to laserresonator, the normal of turning mirror 2,3 is positioned at same plane, and the angle between the two is 90 °, and this plane parallel is in sagittal surface.The normal of turning mirror 4,5 also is positioned at same plane, and the angle between the two is 90 °, and this plane parallel is in meridian plane.Turning mirror 2,3,4,5 the normal and the angle of optical axis are 45 °.The radial polarized light beam that is parallel to optical axis incident passes through and will be parallel to the optical axis outgoing after turning mirror 2,3 reflects.The intensity of polarized component will be higher than the intensity of polarized component on the sagitta of arc direction on the meridian direction.The radial polarized light beam that is parallel to optical axis incident passes through and will be parallel to the optical axis outgoing after turning mirror 4,5 reflects.The intensity of polarized component will be lower than the intensity of polarized component on the sagitta of arc direction on the meridian direction.But after the axial symmetry polarised light reflected through turning mirror 2,3,4,5, radially the intensity of polarized component was all identical on all directions.So just eliminated in the same plane turning mirror to the inclined to one side influence of moving back of axial symmetry polarised light.
Like Fig. 6,7,8, shown in 9, dielectric grating mirror 1 is loaded on the support 19.Be milled with annular water-cooled groove 20 on the support 19.Can the two be coupled together the formation water-cooling channel through the mode of welding between support 19 and the cover plate 21, be used for the coolant grating mirror.Entry interface 22 and water outlet interface 23 are arranged on the cover plate 21.
Dielectric grating mirror 1 adopts the substrate 16 with excellent heat conductivity performance and low absorption characteristic.In substrate 16, be coated with multilayer dielectric film 17.Dielectric grating 18 is positioned on the multilayer dielectric film 17, and the etched line of dielectric grating is circle, and each etching annulus is concentric with the substrate of dielectric grating mirror, and the grating section is a rectangle.The center not diameter of etched area is φ 3, its value generally should be less than 30 grating cycles.The size of dielectric grating mirror etched area satisfies relation: φ 2=φ 1-2*L.φ wherein 1Be the diameter of substrate, multilayer dielectric film 17 has identical diameter phi with grating etched area 18 2, L is the width of etching annulus not.In specific grating parameter (grating periods lambda; The wide b of grating ridge; Groove depth h) under; Cross the P polarized component of normal incidence in arbitrary plane of incidence of grating mirror diameter or with it the reflectivity of the S polarized component of quadrature approach 100%, and the reflectivity of S polarized component or P polarized component that is higher than quadrature with it just has extraordinary polarization to select effect more than 10%.So; With the tail mirror of grating mirror as laserresonator; Crossing in the chamber only has the P polarization in the plane of incidence of arbitrary dielectric grating mirror diameter or can almost completely be reflected with the S polarized component, and the S polarization of polarization direction quadrature or P polarized component major part will transmit the dielectric grating mirror with it.Therefore, only there are P polarization or S polarized component can realize vibration.And the round symmetrical structure of dielectric grating mirror can make laser outputting radial or hoop axial symmetry polarised light.Grating mirror both can be plane or concave surface dielectric grating mirror, also can be interior axial cone metal grating mirror.Need only guarantee that grating mirror has high reflectivity and bigger polarization selectivity characteristic.
Like Figure 10, shown in 11,12, interior axial cone metal grating mirror 24 is at the copper substrate 25 interior axial cone of getting on the bus out.The cone angle of interior axial cone is 90 °, and the axis of axial cone is vertical with awl outer round platform 26, and with the resonant cavity optical axis coincidence.Grating 27 is engraved on the interior axial cone face 40, perpendicular to interior axial cone face 40.The grating etched line is an annulus, and concentric with axial cone.Grating etching section is a rectangle.The size of interior axial cone metal grating mirror 24 satisfies relation: φ a=φ b+ 2*d.Wherein, φ aBe the interior axial cone metal grating etched area awl diameter at the end, φ bBe the diameter of the interior axial cone metal grating etched area vertex of a cone, d is the etched area degree of depth of interior axial cone metal grating mirror.Interior axial cone metal grating mirror 24 can be loaded on the grating mirror support 19 equally.With interior axial cone metal grating mirror as the tail mirror, laser with respect to grating with 45 incident.In specific grating parameter (grating periods lambda; The wide b of grating ridge; Groove depth h) under, in a certain mistake, in the plane of incidence of axial cone axis, only there is the laser of P polarization or S polarized component almost completely to be reflected; Its reflectivity is higher than S polarization or the P polarized component reflectivity of quadrature with it more than 10%, just has good polarization selectivity.Therefore, only there are P polarization or S polarized component can realize vibration.Axial symmetry in view of interior axial cone metal grating mirror can obtain radially or hoop axial symmetry polarised light equally.
Shown in figure 13, outgoing mirror 6 is a part transmitance mirror, is installed on the support 19.Outgoing mirror 6 can cool off through support 19.
Like Figure 14, shown in 15, instance 2 is the structure of the laser of space five folded medium grating mirror resonant cavitys formation, specifically comprises: dielectric grating mirror 1, outgoing mirror 6, laser working medium 7, pumping source 8, turning mirror 32; 33,34,35,36,37; 38,39 and angle mirror support 28,29,30,31. Turning mirror 32,33 is installed on the angle mirror support 28, and turning mirror 34,35 is installed on the angle mirror support 29, and turning mirror 36,37 is installed on the angle mirror support 30, and turning mirror 38,39 is installed on the angle mirror support 31. Turning mirror 32,33,34,35,36,37,38,39 the normal and the angle of optical axis are 45 °, the center of each turning mirror and optical axis coincidence.
Turning mirror 32 and 33 normal are positioned at same plane, and turning mirror 36 and 37 normal also are positioned at same plane, and the angle between the normal is 90 °, and these two planes all are parallel to sagittal surface.Turning mirror 34 and 35 normal are positioned at same plane, and turning mirror 38 and 39 normal also are positioned at same plane, and the angle between the normal is 90 °, and these two planes all are parallel to meridian plane.Turning mirror 32,33, the turning mirror that 34,35,36,37,38,39 space five fold resonators formed with grating mirror 1 and outgoing mirror 6 have been eliminated arrangement same plane in equally is to the inclined to one side influence of moving back of axial symmetry polarised light.And increased the length of gain region, and improved beam quality, help obtaining more radially high-power or hoop axial symmetry polarised light.
Among the present invention, the number of turning mirror can be 4*N, N=1,2 or 3; 4*N turning mirror on the light path between total reflective mirror and outgoing mirror, and the center of each turning mirror all is positioned on the optical axis of laserresonator.The normal turning mirror number parallel with meridian plane equates with the parallel turning mirror number of sagittal surface with normal; Wherein, Have the normal of 2*N turning mirror parallel with meridian plane, and the angle between adjacent two turning mirror normals is 90 °, the normal of all the other 2*N turning mirror is parallel with sagittal surface; Angle between adjacent two turning mirror normals also is 90 °, and the angle of the normal of 4*N turning mirror and optical axis is 45 °.Laser working medium 7 can be a gas, solid or liquid, and it is positioned on all folding arms vertical with total reflective mirror.Folding arm is meant in the folding laserresonator, on the optical axis, and the space between adjacent two mirror bodies.
In fact; Among the present invention; Arrange with the folding mode in space as long as guarantee resonant cavity, normal parallel equates that in the number of the turning mirror of meridian plane and sagittal surface the normal angle of two turning mirrors of normal in same plane is 90 °; And adopt axial symmetry grating mirror that axial symmetry grating mirror with high reflectance and high polarization selectivity has partial reflectance and high polarization selectivity as total reflective mirror or employing as outgoing mirror, all can produce the axial symmetry polarised light.
Technique scheme is applicable to different output wavelengths, the required resonator mirror of different types of laser, and wherein, dielectric grating mirror applied range is applicable to the laser of far infrared, near-infrared even visible light wave range.Interior axial cone metal grating mirror only limits to the laser of far infrared output wavelength.Be 10.6 microns CO below with output wavelength 2Laser is an example, and the concrete implementation procedure of technique scheme is described in further detail.
Instance 1
Dielectric grating mirror concrete structure shown in figure 16, substrate and grating region all adopt GaAs.φ 1Be 27.94 millimeters, φ 2Be 22.00 millimeters, φ 3It is 0.20 millimeter.The high-index material of multilayer dielectric film is a zinc selenide, and low-index material is a thorium tetrafluoride, and the number of plies of multilayer dielectric film is 5 layers.The periods lambda of grating is 6 microns, and the wide b of grating ridge is 3 microns, and the degree of depth h that changes grating calculates the reflectance curve of two kinds of polarised lights, and is shown in figure 17.When near the interval A of grating degree of depth h 1.50 microns during (h greater than 1.40 microns less than 1.75 microns) value, the reflectivity of the P polarized component of normal incidence surpasses 99.0%, and the reflectivity of normal incidence S polarized component is all less than 53.54%.Equally, when near the interval B of grating degree of depth h 3.30 microns during (h greater than 3.25 microns less than 4.25 microns) value, the reflectivity of the P polarized component of normal incidence surpasses 99.0%, and the reflectivity of normal incidence S polarized component is all less than 88.41%.It is thus clear that when the degree of depth value of grating was in regional A, B, this grating mirror structure had both had high reflectivity and had good polarization selectivity simultaneously, be suitable for producing radial polarisation light as the tail mirror of laserresonator.Therefore, can be in regional A, B when making grating the degree of depth of preferred grating, make it reach the requirement of tail mirror on the one hand, polarization selectivity is strong on the other hand, and has bigger manufacturing tolerance scope.
Instance 2
Interior axial cone metal grating mirror structure shown in figure 13, substrate and grating region all adopt red copper.φ aBe 24.0 millimeters, φ bBe 2.0 millimeters, b is 11.0 millimeters.The periods lambda of grating is 10 microns, and the wide b of grating ridge is 5 microns, and the degree of depth h that changes grating calculates the reflectance curve of two kinds of polarised lights, and is shown in figure 18.When near the interval C of grating degree of depth h 5.20 microns during (h greater than 5.1 microns less than 5.3 microns) value; Metal grating surpasses 97.4% to the reflectivity of the P polarized component of 45 ° of incidents; So interior axial cone metal grating mirror surpasses 94.9% to the reflectivity of the P polarized component of normal incidence; And metal grating to the reflectivity of 45 ° of incident S polarized components all less than 65.0%, so interior axial cone metal grating mirror to the reflectivity of the S polarized component of normal incidence all less than 42.3%.It is thus clear that when the degree of depth value of grating was in zone C, this grating mirror structure had both had higher reflectivity and had had good polarization selectivity simultaneously, was suitable for as high power CO 2The tail mirror of laserresonator produces radial polarisation light.
The present invention not only is confined to above-mentioned embodiment; Persons skilled in the art are according to content disclosed by the invention; Can adopt other multiple embodiment embodiment of the present invention, therefore, every employing project organization of the present invention and thinking; Do some simple designs that change or change, all fall into the scope of the present invention's protection.

Claims (3)

1. laser that is used to produce high power axial symmetry polarised light; It comprises total reflective mirror, outgoing mirror, laser working medium and pumping source; Laser working medium is positioned on the folding arm vertical with all total reflective mirrors, and pumping source is radio-frequency pumped source, diode-end-pumped source or flash lamp pumping source, it is characterized in that; It also comprises 4*N turning mirror, N=1,2 or 3; 4*N turning mirror on the light path between total reflective mirror and outgoing mirror; And the center of each turning mirror all is positioned on the optical axis of laserresonator, and wherein, the normal of 2*N turning mirror is parallel with meridian plane; And the angle between adjacent two turning mirror normals is 90 °; The normal of all the other 2*N turning mirror is parallel with sagittal surface, and angle also is 90 ° between adjacent two turning mirror normals, and the angle of the normal of 4*N turning mirror and optical axis is 45 °;
The completely reflecting mirror of laser resonant cavity is that polarization is selected mirror; Polarization is selected on the optical axis that is centered close to laserresonator of mirror; And minute surface is perpendicular to optical axis, and it is dielectric grating mirror or interior axial cone metal grating mirror that this polarization is selected mirror, and the etched line of dielectric grating mirror or interior axial cone metal grating mirror is an annulus; Grating region etching annulus width evenly distributes, and the groove section of grating is a rectangle.
2. laser according to claim 1 is characterized in that, said dielectric grating mirror comprises dielectric grating, multilayer dielectric film and substrate; The groove of dielectric grating is concentric with substrate, and the size of grating mirror etched area satisfies relation: φ 2=φ 1-2*L, wherein, φ 1Be basal diameter, φ 2Be the diameter of grating etched area annulus, L is not a plated film and not the annulus width of etched diffraction grating in the substrate; Multilayer dielectric film forms by high low-index material is alternately laminated; Multilayer dielectric film is between grating and substrate, and grating layer thickness is less than the multilayer dielectric film gross thickness.
3. laser according to claim 1 is characterized in that, the cone angle of axial cone is 90 ° in the said interior axial cone metal grating mirror; And the axis of axial cone is vertical with the outer round platform of awl; And with the resonant cavity optical axis coincidence, in metal grating is engraved on the axial cone face, perpendicular to interior axial cone face; The metal grating etched line is concentric with axial cone, and the size of interior axial cone metal grating mirror satisfies relation: φ a=φ b+ 2*d, wherein, φ aBe the interior axial cone metal grating etched area awl diameter at the end, φ bThe diameter of the interior axial cone metal grating etched area vertex of a cone, d are the etched area height of interior axial cone metal grating mirror.
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CN103149640B (en) * 2013-03-06 2014-12-17 上海理工大学 Device and method for generating axisymmetric polarized light
CN105024263B (en) * 2014-04-17 2019-02-19 大族激光科技产业集团股份有限公司 Laser resonant cavity
CN105006728B (en) * 2014-04-17 2019-02-19 大族激光科技产业集团股份有限公司 Radial polarisation laser system
CN104319608A (en) * 2014-09-23 2015-01-28 武汉博问光电有限公司 Resonant cavity structure used for generating radially polarized laser
WO2016045218A1 (en) * 2014-09-23 2016-03-31 武汉博问光电有限公司 Resonant cavity structure for generating radial polarized laser
CN105742950B (en) * 2015-12-17 2019-01-04 武汉光谷科威晶激光技术有限公司 It is a kind of for generating the device and method of angularly polarized light
CN105958309A (en) * 2016-07-07 2016-09-21 中国人民解放军武汉军械士官学校 Pyramid prism-based array laser self-restraint multi-pass folded resonator
CN113422283A (en) * 2021-06-23 2021-09-21 伯纳激光科技有限公司 Polarization selection mirror for high-power laser resonant cavity

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