CN104009372A - Phase-locked multi-channel strip discharging array carbon dioxide laser - Google Patents
Phase-locked multi-channel strip discharging array carbon dioxide laser Download PDFInfo
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- CN104009372A CN104009372A CN201410260693.8A CN201410260693A CN104009372A CN 104009372 A CN104009372 A CN 104009372A CN 201410260693 A CN201410260693 A CN 201410260693A CN 104009372 A CN104009372 A CN 104009372A
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Abstract
The invention discloses a construction method and device for a phase-locked multi-channel strip discharging array carbon dioxide laser, and relates to the field of optical engineering and laser application. According to the method and device, the laser obtains high-power phase-locked carbon dioxide laser output through a plurality of rectangular strips according to symmetrical structure configuration and radio-frequency discharging excitation. The method is characterized by comprising the steps of placing a quartz discharging tube or a glass discharging tube on the symmetry axis of a system, enabling the rectangular strips to intersect with one another, symmetrically placing the rectangular strips on the symmetry axis of the system, arranging only one output mirror, enabling the two surfaces of the output mirror to be two parallel plane mirrors or plane convex mirrors, and arranging a convergence system behind the output mirror, wherein a beam of convergent high-power carbon dioxide laser light with the good coherence is obtained after convergence of array parallel beams output from the array carbon dioxide laser through the convergence system. The system is characterized in that oscillation light beams inside the strips are excited by the laser light through convex reflection of the output mirror or the first reflection face of a concave mirror behind the output mirror, wherein the laser light is generated by the discharging tube on the symmetry axis of the system under the action of two mirror cavities on the axis. Therefore, the obtained carbon dioxide laser beams are good in coherence.
Description
Technical field
The present invention relates to the laser processing of optical engineering and laser manufacture field, is mainly by the combination of array lath electric discharge carbon dioxide laser system, double-curved surface mirror, concave mirror and outgoing mirror, to be built method and the device of phase place locking multichannel lath discharge arrays carbon dioxide laser; The light beam of phase place locking multichannel lath discharge arrays carbon dioxide laser output obtains the good laser beam of a branch of tiny coherence after convergence yoke is assembled, and can be directly used in metal, nonmetallic materials processing, is the visual plant of field of laser processing.
Background technology
In field of laser processing, the energy of laser is that the form with light is converged to the laser beam that a branch of density is very high, when such light beam arrives machined material surperficial, will produce huge heat, at this moment the temperature on rapidoprint surface raises rapidly and is melted, thereby reaches the object of processing; Therefore, in order to improve working (machining) efficiency, to metal, nonmetallic materials carry out fast, high accuracy processing, require laser to have higher power output and beam quality preferably; For the laser processed, successively experienced and take the pulse laser that ruby laser and neodymium glass laser be representative, take the continuous-wave laser that Nd:YAG laser and carbon dioxide laser be representative; In recent years, laser-processing system mainly adopts and take the continuous-wave laser that Nd:YAG laser and carbon dioxide laser be representative in the world, and its output value has reached 4,000,000,000 dollars, and wherein the carbon dioxide laser system output value is over 2,000,000,000 dollars; Carbon dioxide laser system of processing mainly comprises the fast flow pattern of axle, cross-flow type and planar waveguide type carbon dioxide laser, the electro-optical efficiency of the fast flow pattern carbon dioxide laser of axle is more than 20%, the laser beam of output is fundamental-mode gaussian beam, power output surpasses 600W, is mainly used in the cutting, welding, punching of metal, nonmetallic materials etc.; Cross-flow type carbon dioxide laser gain volume is large, and power output can reach myriawatt level, but zlasing mode is relatively poor, is mainly used in laser welding and surface treatment etc.; More than planar waveguide type carbon dioxide laser power output can reach 800W, due to lightweight, volume is little and directly by frame in machine tooling; In the cooling slat CO 2 laser of diffusion, the DC series continuous wave 8KW of Rofin spreads cooling slat CO 2 laser, is the main representative of the cooling slat CO 2 laser scientific and technological level of current diffusion; Several lasers have pluses and minuses separately above, the fast stream of axle and cross-flow type carbon dioxide laser power output are high, be mainly used in laser metal and nonmetal manufacture field, but due to the volume of flow model laser, to compare other lasers larger, its processing machine head can only be separated with laser, uses inconvenient; With flow model carbon dioxide laser, the direct frame of planar waveguide type carbon dioxide laser volume I is in processing machine lathe, but the structural limitations of this laser the power output of laser; For dull and stereotyped carbon dioxide laser power output, be restricted this feature, in order to obtain high power laser light output, can increase dull and stereotyped quantity and increase active medium volume, thereby improve power output; Flat board is placed on symmetry system having symmetry axle symmetrically according to radial, facilitate and extract laser energy, can to laser beam, control better again, suitably choose outgoing mirror and completely reflecting mirror, can obtain high power laser light output, but because each light beam does not have fixing phase relation each other, the coherence of the light beam of assembling by convergence yoke is poor, be unfavorable for laser high-precision processing; Therefore, utilize phase-locking method to there is symmetric radial array slab laser to this type of and carry out phase place locking, can make each light beam after convergence yoke is assembled, become a branch of coherence and the good fine carbon dioxide laser beam of beam quality, be conducive to laser high-precision, rapid processing; Therefore, there is defect in prior art, needs to improve.
Summary of the invention
The present invention proposes in order to overcome the shortcoming of above-mentioned all kinds of processing lasers just, invent a kind of phase place locking multichannel lath discharge arrays carbon dioxide laser, utilize the reflection of light beam on axle to inject, make each light beam of exporting in array lath have each other fixed phase relationship; Therefore, from the light beam of outgoing mirror output, after convergent mirror is assembled, become a branch of tiny high power carbon dioxide laser beam, Output of laser beam power is large, coherence good, good beam quality directly frame in machining tool to metal with nonmetallic materials are carried out rapid processing and high accuracy is processed.
The present invention is realized by the following stated scheme, and a plurality of rectangular strip are placed on symmetry system having symmetry axle radially symmetrically; In order to realize the vibration of each light beam in lath array, in one end of lath array, place the double-curved surface mirror coaxial with symmetry system having symmetry axle, the other end is placed the concave spherical mirror coaxial with symmetry system having symmetry axle, places another concave mirror and outgoing mirror on symmetry system having symmetry axle; In order to realize phase-locked output, a quartz discharge tube or glass discharge vessel are placed on symmetry axis between concave mirror and outgoing mirror, its axis is consistent with symmetry system having symmetry axle; The vibration of the four mirror refrative cavities that formed by double-curved surface mirror, the first concave mirror, the second concave mirror and outgoing mirror for setting up lath array inner light beam, the vibration for setting up light beam on axle of the concave mirror on symmetry system having symmetry axle and outgoing mirror; Quartz discharge tube on symmetry system having symmetry axle or glass discharge vessel are activated at by radio-frequency power supply the laser of exporting under the effect in two mirror chambeies on axle and export along axis, be output after the convex surface of mirror rear surface or the reflection of the first surface of the 3rd concave mirror after outgoing mirror, and be divergently injected in lath array as control source, if Injection Signal is stronger, it will set up four mirror refrative cavities and vibrate accordingly in lath array, with wavelength and the phase place of this light beam that comes to vibrate in control board strip array; Therefore, the vibration light beam in lath array must be subject to the control of this injection light beam, thereby obtains the phase-locked Laser output of coherence's high power good, good beam quality.
Phase place locking multichannel lath discharge arrays carbon dioxide laser provided by the invention, from the light beam of outgoing mirror output, after assembling, convergence yoke obtains the good laser beam of a branch of tiny coherence, can be directly used in metal, nonmetallic materials processing, be the visual plant of field of laser processing.
Accompanying drawing explanation
Accompanying drawing 1 is the structural representation of phase place locking multichannel lath discharge arrays carbon dioxide laser of the present invention, in accompanying drawing 1, be numbered the double-curved surface mirror of (1), the first concave mirror that is numbered (6), the second concave mirror that is numbered (13) and be completely reflecting mirror, the outgoing mirror that is numbered (11) is partially reflecting mirror, and laser is from this outgoing mirror output, double-curved surface mirror (1) has a groove or two grooves or three grooves or a plurality of groove, and radius of curvature is 8-10m, is positioned at array lath left end 10-15cm and is fixed on laser light path by the first support (16), the 7th support (22), the first rectangular strip (2), the second rectangular strip (3), the 3rd rectangular strip (4), the 4th rectangular strip (5) all have identical size, long 60cm, wide 10cm, thick 5mm, angle between adjacent slat is 45 degree, the triangle water cooled electrode that is staggeredly placed between adjacent two laths (8), array lath is fixed on laser optical path by the second support (17), the 3rd support (18), the 7th support (22), and the mist in each lath is in radio-frequency power supply excitation and produce laser under resonant cavity effect, the second concave mirror (13) radius of curvature is 5-6m, by the 4th support (19), the 7th support (22), is fixed on laser optical path, and there is a hollow area centre, for placing outgoing mirror and extracting laser energy, the first concave mirror (6), radius of curvature is 4m, is placed on distance lath left end 10cm place on symmetry system having symmetry axle, quartz discharge tube or glass discharge vessel (7) length 30cm, be placed on symmetry system having symmetry axle, apart from concave mirror (6) 5cm, apart from lath right-hand member 12-15cm, the first rectangular strip (2), the second rectangular strip (3), the 3rd rectangular strip (4), the 4th rectangular strip (5), triangle water cooled electrode (8) are closed in cylindrical shape vacuum system (9), and there is a common circle cylindricality air storage chamber (10) each lath intersection for mist in circulation plates strip array, outgoing mirror has parallel plane and two surfaces of convex surface, this mirror is positioned at the hollow area of the second concave mirror (13), its axis is consistent with the axis of symmetry system having symmetry axle, the 3rd concave mirror (14) has two concave surfaces, the first reflecting surface reflectivity is 1%, and radius of curvature is 15-20m, for light beam on axis of reflection, carries out phase place locking, this mirror and convergent mirror (15) are placed on the 5th support (20), the 7th support (22) is upper and keep coaxial with symmetry system having symmetry axle, and the focal length of convergent mirror (15) is 20cm, in array lath, be full of high-purity mist that carbon dioxide, helium and nitrogen form, by RF excited mixture gas medium, obtain carbon dioxide laser beam, when the surface after outgoing mirror is planar section plating anti-reflection film, from the parallel array laser beam of outgoing mirror output, the convergent mirror (15) being output mirror is converged to coherence and the good tiny light beam of beam quality (24), it is characterized in that after the laser beam of quartz discharge tube axle or glass discharge vessel (7) output is positioned at the first reflecting surface reflection of the 3rd concave mirror (14) on axle after the rear surface (12) of outgoing mirror is reflected or is output mirror, divergently be injected in lath array, because this injection light beam is symmetrical with respect to this radial array lath, and it is identical with resonator mirror radius of curvature or very approaching again at the equiphase surface at each minute surface place to inject light beam, therefore, inject light beam and can be full of whole cylinder region of discharge, under the effect of resonant cavity, its energy will be coupled on the eigen mode of array lath inner laser bundle, thereby arrive the object of phase place locking.
Accompanying drawing 2 is cross-sectional view of accompanying drawing 1, the first rectangular strip (2), the second rectangular strip (3), the 3rd rectangular strip (4), the 4th rectangular strip (5) are placed on symmetry system having symmetry axle radially symmetrically, triangle water cooled electrode (8) is staggeredly placed between adjacent two laths, for encouraging the mixture gas medium in lath, each lath intersection is a cylindrical air storage chamber (10), and whole lath system is closed in cylinder vacuum system (9).
Accompanying drawing 3 is longitudinal sectional drawings of accompanying drawing 1, mainly for the situation of outgoing mirror convex surface reflection; Double-curved surface mirror (1) comprises a groove (each lath output 2 bundle laser), vibration light beam in lath array arrives the second concave mirror (13) after this groove reflection, then be reflected to the first concave mirror (6) on axle, again be reflected arrival outgoing mirror, lath array laser can obtain the symmetrical array laser bundle of 8 bundles.
Accompanying drawing 4 is longitudinal sectional drawings of accompanying drawing 1, mainly for the situation of outgoing mirror convex surface reflection; Double-curved surface mirror (1) comprises two grooves (each lath output 4 bundle laser), vibration light beam in lath array arrives the second concave mirror (13) after these two groove reflections, then be reflected to the first concave mirror (6) on axle, again be reflected arrival outgoing mirror, lath array laser can obtain the symmetrical array laser bundle of 16 bundles.
Accompanying drawing 5 is longitudinal sectional drawings of accompanying drawing 1, mainly for the situation of outgoing mirror convex surface reflection; Double-curved surface mirror (1) comprises three grooves (each lath output 6 bundle laser), vibration light beam in lath array arrives the second concave mirror (13) after these three groove reflections, then be reflected to the first concave mirror (6) on axle, again be reflected arrival outgoing mirror, lath array laser can obtain the symmetrical array laser bundle of 24 bundles.
Specific embodiments
Example 1, with reference to accompanying drawing 1-5, double-curved surface mirror (1) has a groove (see figure 3) or two groove (see figure 4)s or three groove (see figure 5)s, radius of curvature is 8-10m, be positioned at array lath left end 10-15 centimetre, the first rectangular strip (2), the second rectangular strip (3), the 3rd rectangular strip (4), the long 60cm that is of the 4th rectangular strip (5), the wide 10cm that is, the thick 5mm that is, angle between adjacent slat is 45 degree, the second concave mirror (13) radius of curvature is 5-6m, on axle, the radius of curvature of the first concave mirror (6) is 4m, be placed on distance lath left end 10cm place on symmetry system having symmetry axle, quartz discharge tube or glass discharge vessel (7) length 30cm, be placed on symmetry system having symmetry axle, distance the first concave mirror (6) 5cm, apart from lath right-hand member 12-15cm, the convex surface reflectivity of outgoing mirror is 1%, and radius of curvature is 2cm, for light beam on axis of reflection, carries out phase place locking, outgoing mirror is the zinc selenide that 5mm is thick, its parallel plane plating multilayer dielectric film, and making it is 10.6 to wavelength
light wave reflection rate be 80%, its back side is to this wavelength plating anti-reflection film, convergent lens focal length is 20cm, each lath is all cooling with water-cooling pattern, and lath inherence reaches vacuum 133.3
10
-3after Pa according to CO
2: N
2: He=2:3:5 or approximate ratio are filled uniform mixing gas mixture 10-20
133.3Pa, mist, under glow discharge excitation, is 10.6 to wavelength
light wave produce gain, the quartz discharge tube or the glass discharge vessel that are positioned on axle should be discharged prior to lath array, thereby make resonant cavity first produce output, this output beam is output the convex surface reflection of mirror and is divergently injected in lath array as seed source, owing to injecting light wave, can in lath array, set up vibration, therefore, the wavelength of its vibration light beam is consistent with injection light beam with phase place, from the light beam of outgoing mirror output, is the fabulous carbon dioxide laser beam of a branch of coherence.
Example 2, with reference to accompanying drawing 1-5, double-curved surface mirror (1) has a groove (see figure 3) or two groove (see figure 4)s or three groove (see figure 5)s, radius of curvature is 8-10m, be positioned at array lath left end 10-15 centimetre, the first rectangular strip (2), the second rectangular strip (3), the 3rd rectangular strip (4), the long 60cm that is of the 4th rectangular strip (5), the wide 10cm that is, the thick 5mm that is, angle between adjacent slat is 45 degree, the second concave mirror (13) radius of curvature is 5-6m, the radius of curvature of the first concave mirror (6) is 4m, be placed on distance lath left end 10cm place on symmetry system having symmetry axle, quartz discharge tube or glass discharge vessel (7) length 30cm, be placed on symmetry system having symmetry axle, distance the first concave mirror (6) 5cm, apart from lath right-hand member 12-15cm, the 3rd concave mirror (14) being placed on after outgoing mirror has two concave surfaces, and the first reflecting surface reflectivity is 1%, and radius of curvature is 15-20m, for light beam on axis of reflection, carries out phase place locking, outgoing mirror is the zinc selenide that 5mm is thick, its parallel plane plating multilayer dielectric film, and making it is 10.6 to wavelength
light wave reflection rate be 80%, its back side is to this wavelength plating anti-reflection film, convergent lens focal length is 20cm, each lath is all cooling with water-cooling pattern, and lath inherence reaches vacuum 133.3
10
-3after Pa according to CO
2: N
2: He=2:3:5 or approximate ratio are filled uniform mixing gas mixture 10-20
133.3Pa, mist, under glow discharge excitation, is 10.6 to wavelength
light wave produce gain, the quartz discharge tube or the glass discharge vessel that are positioned on axle should be discharged prior to lath array, thereby make resonant cavity first produce output, this output beam is output the first reflecting surface reflection of the concave mirror after mirror and is divergently injected in lath array as seed source, owing to injecting light wave, can in lath array, set up vibration, therefore, the wavelength of its vibration light beam is consistent with injection light beam with phase place, from the light beam of outgoing mirror output, is the fabulous carbon dioxide laser beam of a branch of coherence.
Claims (4)
1. the construction method of phase place locking multichannel lath discharge arrays carbon dioxide laser, that rectangular strip by a plurality of carbonateds, helium, nitrogen mixture body is placed on symmetry system having symmetry axle symmetrically, a plurality of rectangular strip intersect on symmetry system having symmetry axle and distribution radially, on symmetry axis, have a discharge tube, its axis is consistent with symmetry system having symmetry axle; The triangle water-cooled positive and negative electrode that the length that is staggeredly placed between two adjacent rectangular strip is consistent with rectangular strip, whole lath and electrode are closed in a cylinder vacuum system; In one end of radial lath array, lay the total reflection double-curved surface mirror coaxial with symmetry system having symmetry axle, at the other end, lay total reflection second concave mirror coaxial with symmetry system having symmetry axle, the first concave mirror on this double-curved surface mirror and the second concave mirror and symmetry system having symmetry axle and outgoing mirror form one group of four mirror refrative cavity; It is characterized in that, vibration light beam is totally reflected the reflection of double-curved surface mirror and arrives the second concave mirror place and reflected by it, and then arrive the first concave mirror surface on symmetry system having symmetry axle and arrived outgoing mirror after its reflection, thus the vibration of setting up four mirror refrative cavities; During mist in radio-frequency (RF) exiting laser device, from the light beam of outgoing mirror output, after assembling, convergence yoke obtains the good high power carbon dioxide laser beam of a branch of coherence; It is characterized in that first to the discharge tube electric discharge on symmetry system having symmetry axle, and obtain laser under two mirror chamber effects on symmetry system having symmetry axle, this output signal is also divergently injected in each lath array after the convex portions reflection of outgoing mirror, this Injection Signal under four mirror refrative cavity effects in the built-in vertical vibration of array lath, when each lath of RF excited, from the laser beam of array lath output, must be to control by injecting light beam, therefore from the light beam of outgoing mirror output, be, the good high power carbon dioxide laser beam of coherence.
2. the construction method of phase place locking multichannel lath discharge arrays carbon dioxide laser, by double-curved surface mirror (1), the first rectangular strip (2), the second rectangular strip (3), the 3rd rectangular strip (4), the 4th rectangular strip (5), the first concave mirror (6), discharge tube on axle (7), triangle water cooled electrode (8), vacuum system (9), air storage chamber (10), outgoing mirror front surface (11), outgoing mirror rear surface (12), the second concave mirror (13), convergent mirror (15), the first support (16), the second support (17), the 3rd support (18), the 4th support (19), the 5th support (20), the 6th support (21), the 7th support (22) forms, the center line of radial lath array is consistent with symmetry system having symmetry axis and place it on the second support (17) and the 3rd (18), double-curved surface mirror (1) is placed on the left end of radial lath array, its axis and symmetry system having symmetry axle axis are consistent and are placed on the first support (16), the second concave mirror (13) is placed on the right-hand member of radial lath array, its axis and symmetry system having symmetry axle axis are consistent and are placed on the 4th support (19), the center of the second concave mirror (13) is hollow, for the passage of Output of laser energy is provided, outgoing mirror front surface (11) is parallel plane mirror, outgoing mirror rear surface (12) is convex mirror, this mirror is placed on symmetry system having symmetry axle, and be positioned at the hollow position of the second concave mirror (13), the first concave mirror (6) is concave mirror, be used for the vibration light beam in transform array lath and Injection Signal on axle is provided, convergent mirror (15) is positioned at outside outgoing mirror, and be placed on the 5th support (20), on the 6th support (21), the first support (16), the second support (17), the 3rd support (18), the 4th support (19), the 5th support (20), the 6th support (21) is placed on the 7th support (22), the 7th support (22) is placed on level ground, (23) be symmetry system having symmetry axle, (24) are the good high power carbon dioxide laser beam of coherence, it is characterized in that, vibration light beam in array lath is to be controlled through the part reflected signal of the rear surface of outgoing mirror convex surface reflection by the laser that is positioned at two mirror chamber outputs on symmetry system having symmetry axle, triangle water-cooled positive and negative electrode between adjacent two rectangular strip is under radio-frequency power supply excitation, make it that lasing reversion particle is provided in lath, therefore, from the laser of exporting in four mirror refrative cavities, be the good high power carbon dioxide laser beam of coherence, be conducive to the industrial processes such as laser high-precision processing, laser rapid processing.
3. according to the construction method identical with right 1, after the first reflecting surface reflection of the 3rd concave mirror (14) from the laser beam of two mirror chambeies outputs axle after outgoing mirror, be divergently injected in each lath and the vibration of setting up four mirror refrative cavities, so gained light beam is the good high power carbon dioxide laser beam of coherence; It is characterized in that first to the discharge tube electric discharge on symmetry system having symmetry axle, and the laser obtaining under two mirror chamber effects on symmetry system having symmetry axle, after partly reflecting, the first reflecting surface of the 3rd concave mirror (14) of this output beam after outgoing mirror is also divergently injected in each lath array; If this Injection Signal is stronger, it will be in the built-in vertical vibration of array lath under four mirror refrative cavity effects, and consume the reversion particle being produced by radio-frequency power supply excitation in array lath, and from the laser beam of array lath output, must be to control by injecting light beam, obtain phase-locked Laser output.
According to the similar construction method of right 2, difference is that the front surface (11) of outgoing mirror and outgoing mirror rear surface (12) are parallel plane, for obtaining the speculum of Injection Signal, by the first reflecting surface that is positioned at the 3rd concave mirror (14) after outgoing mirror, provided, utilize the method identical with right 2 can obtain the good high power carbon dioxide laser beam of coherence; It is characterized in that vibration light beam in array lath is that the part reflected signal of the first reflecting surface reflection of the 3rd concave mirror (14) after outgoing mirror by the laser that is positioned at two mirror chambeies outputs on symmetry system having symmetry axle is controlled, injecting light beam is injected in each lath array, set up the vibration of four mirror refrative cavities, consume the reversion particle in chamber, therefore from the laser of exporting in four mirror refrative cavities, be, the good high power carbon dioxide laser beam of coherence and beam quality.
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| CN104184040A (en) * | 2014-09-16 | 2014-12-03 | 西华大学 | Construction method and device of traveling wave cavity high-power carbon dioxide laser |
| CN105244753A (en) * | 2015-11-04 | 2016-01-13 | 西华大学 | Phase-locked two-mirror cavity concurrent combined carbon dioxide laser |
| CN105305220A (en) * | 2015-11-04 | 2016-02-03 | 西华大学 | Phase locking annular cavity array gas laser device |
| CN111788747A (en) * | 2018-01-29 | 2020-10-16 | Idea机器显影设计及生产有限公司 | Compact coaxial laser |
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Application publication date: 20140827 |