CN2804796Y - Automatic elliptical polarization instrument for measuring thickness - Google Patents
Automatic elliptical polarization instrument for measuring thickness Download PDFInfo
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- CN2804796Y CN2804796Y CN 200520026085 CN200520026085U CN2804796Y CN 2804796 Y CN2804796 Y CN 2804796Y CN 200520026085 CN200520026085 CN 200520026085 CN 200520026085 U CN200520026085 U CN 200520026085U CN 2804796 Y CN2804796 Y CN 2804796Y
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Abstract
The utility model relates to an automatic elliptical polarization instrument for measuring thickness, which is composed of an electric control box, a light path supporting plate, a laser fixing bracket, a laser, a steering prism, a polarizer, a specimen stage, an analyzer and a detector, wherein the light path supporting plate is arranged above the electric control box; the analyzer, the specimen stage and the polarizer are respectively arranged above the light path supporting plate; the detector is arranged on one side of the analyzer, and the steering prism is arranged on one side of the polarizer. The utility model is characterized in that a laser fixing bracket is arranged below the light path supporting plate, and the laser is arranged on the optical path supporting plate; the laser uses a He-Ne laser with a brewster window. The utility model uses the He-Ne laser with a brewster window as a light source. The brightness, the wavelength and the polarization state of the light source are stable. Thus, the measuring accuracy is raised. The laser is arranged below a measuring plane, and the fixed position is hidden without revealing. The light source is not easy to collide to cause the damage of a light path, the integral structure of the utility model is compact and the integral space occupation is small. The utility model has the advantages of simple structure, easy processing, convenient operation, low cost and wide application.
Description
Technical field
The utility model relates to the instrument of optical measurement coating film thickness in the education experiment, particularly a kind of automatic elliptic polarization thicknessmeter.
Background technology
The elliptic polarization thicknessmeter utilizes the polarisation of light characteristic, that is: the light of a branch of elliptic polarization is behind upper and lower surface two secondary reflections of plated film, its polarization state can turn over certain angle, this turns over the refractive index of occurrence and the plated film and the substrate of angle, and coating film thickness is relevant, characteristic can draw the thickness and the refractive index of measured plated film under the situation of known substrate refractive index thus, light extinction method is ellipse to be that corresponding different sample produces a branch of specific elliptically polarized light and makes light beam reflect the back on sample to form linearly polarized light partially, detect the polarization direction of the linearly polarized light of the major axis angle of this elliptically polarized light and formation, can draw thickness and the refractive index of measuring plated film according to the refractive index of these two angles and known substrate.At present, the light source in the instrument is provided with the green lasers that adopt more, and measuring accuracy is limited to by it, is difficult to improve measuring accuracy; Laser instrument is arranged at the instrument integral upper, is easily caused light path destroyed by clashing and breaking, because structural design is not good enough, therefore can make troubles to education experiment.
The utility model content
The purpose of this utility model is to overcome above-mentioned weak point, for society provides reasonable, the automatic searching fast of a kind of topology layout extinction point, the automatic elliptic polarization thicknessmeter that measuring accuracy is high.
The technical scheme that the utility model adopted is for achieving the above object: a kind of automatic elliptic polarization thicknessmeter, by electric cabinet, light path supporting plate, laser holder, laser instrument, turn to prism, the polarizer, sample stage, analyzer, detector to form; The electric cabinet top is provided with the light path supporting plate, and light path supporting plate top is provided with analyzer, sample stage and the polarizer respectively; Be positioned at analyzer one side detector is set, be positioned at the polarizer one side setting and turn to prism; The below that it is characterized in that the light path supporting plate is provided with laser holder, which is provided with laser instrument.
Described laser instrument adopts the helium-neon laser of band Brewster window.
Described sample stage is the fixed sample stage of front surface.
The beneficial effects of the utility model are: the helium-neon laser that adopts the band Brewster window is as light source, the brightness of light source, wavelength and polarization state are stable, the green laser wavelength accuracy height that optical source wavelength uses than general elliptic polarization thicknessmeter, thus measuring accuracy improved.Laser instrument places the measurement plane below, and the fixed position is hidden does not expose, and light source is difficult for being caused light path destroyed by clashing and breaking, and makes the instrument one-piece construction compact more, and overall space takies little.Sample stage adopts front surface fixed, need not readjust sample stage to different samples, and is fixed more simple and convenient than the rear surface.This apparatus structure is simple, processes easy, easy to use; The instrument cost is low, applied range.
Description of drawings
Fig. 1 is the utility model structural representation;
Fig. 2 is the utility model light path synoptic diagram.
1 electric cabinet, 2 light path supporting plates, 3 laser holders, 4 laser instruments, 5 turn to prism, 6 polarizers, 7 sample stage, 8 analyzers, 9 detectors.
Embodiment
Below in conjunction with accompanying drawing and preferred embodiment, details are as follows to embodiment, structure, feature that foundation the utility model provides:
As shown in Figure 1, a kind of automatic elliptic polarization thicknessmeter is by electric cabinet 1, light path supporting plate 2, laser holder 3, laser instrument 4, turn to prism 5, the polarizer 6, sample stage 7, analyzer 8, detector 9 to form; Electric cabinet 1 top is provided with light path supporting plate 2, and light path supporting plate 2 tops are provided with analyzer 8, sample stage 7 and the polarizer 6 respectively; Be positioned at analyzer 8 one sides detector 9 is set, be positioned at the polarizer 6 one side settings and turn to prism 5; The below that it is characterized in that light path supporting plate 2 is provided with laser holder 3, which is provided with laser instrument 4.
Described laser instrument 4 adopts the helium-neon laser of band Brewster window.
Described sample stage 7 is the fixed sample stage of front surface.
Automatically the light path of elliptic polarization thicknessmeter as shown in Figure 2, from light source is that laser instrument 4 sends M1, the M2 of a branch of linearly polarized light through turning to prism 5 to comprise and reflects to form a branch of circular polarization, pass the polarizer 6, quarter wave plate C (632.8nm), incident light hurdle A, incide and pass reception light hurdle B after sample S goes up reflection, pass analyzer 8 again, arrive detector 9.The polarizer 6 is driven by stepper motor and rotates, adjust the polarization direction of light beam, see through the polarized light that quarter wave plate forms different shape again, incide sample S, folded light beam can become a branch of linearly polarized light when the polarizer 6 forwards a special angle to, analyzer 8 is also driven by a stepper motor, but rotates whether analyzer 8 detection of reflected light beams are linearly polarized light and direction thereof.Corresponding a kind of sample has two groups of extinction points in 180 °, it is average that instrument is all measured the back to two groups, effectively reduces the most error of instrument.
For being suitable for education experiment, this instrument can be furnished with full version and school edition two cover application software, to improve understanding and the computing power of student to instrument.In the various tests that this instrument also can be widely used in producing and testing.
Claims (3)
1, a kind of automatic elliptic polarization thicknessmeter is by electric cabinet, light path supporting plate, laser holder, laser instrument, turn to prism, the polarizer, sample stage, analyzer, detector to form; The electric cabinet top is provided with the light path supporting plate, and light path supporting plate top is provided with analyzer, sample stage and the polarizer respectively; Be positioned at analyzer one side detector is set, be positioned at the polarizer one side setting and turn to prism; The below that it is characterized in that the light path supporting plate is provided with laser holder, which is provided with laser instrument.
2, automatic elliptic polarization thicknessmeter according to claim 1 is characterized in that described laser instrument adopts the helium-neon laser of band Brewster window.
3, automatic elliptic polarization thicknessmeter according to claim 1 is characterized in that described sample stage is the fixed sample stage of front surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520026085 CN2804796Y (en) | 2005-06-07 | 2005-06-07 | Automatic elliptical polarization instrument for measuring thickness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520026085 CN2804796Y (en) | 2005-06-07 | 2005-06-07 | Automatic elliptical polarization instrument for measuring thickness |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2804796Y true CN2804796Y (en) | 2006-08-09 |
Family
ID=36910085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520026085 Expired - Fee Related CN2804796Y (en) | 2005-06-07 | 2005-06-07 | Automatic elliptical polarization instrument for measuring thickness |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2804796Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103267488A (en) * | 2013-06-03 | 2013-08-28 | 北京科技大学 | Device for measuring thickness of thin liquid film |
| CN106908002A (en) * | 2017-04-19 | 2017-06-30 | 张家港市欧微自动化研发有限公司 | A kind of measuring method based on spectral interference device |
| CN114264616A (en) * | 2021-12-22 | 2022-04-01 | 中北大学 | Dual-motor automatic angle-changing system structure of full-Mueller matrix ellipsometer |
-
2005
- 2005-06-07 CN CN 200520026085 patent/CN2804796Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103267488A (en) * | 2013-06-03 | 2013-08-28 | 北京科技大学 | Device for measuring thickness of thin liquid film |
| CN106908002A (en) * | 2017-04-19 | 2017-06-30 | 张家港市欧微自动化研发有限公司 | A kind of measuring method based on spectral interference device |
| CN106908002B (en) * | 2017-04-19 | 2019-10-01 | 泰州阿法光电科技有限公司 | A kind of measurement method based on spectral interference device |
| CN114264616A (en) * | 2021-12-22 | 2022-04-01 | 中北大学 | Dual-motor automatic angle-changing system structure of full-Mueller matrix ellipsometer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: TIANJIN CITY GANGDONG TECHNOLOGY DEVELOPMENT CO., Free format text: FORMER OWNER: GANGYI TECH DEVELOPMENT CO., LTD., TIANJIN CITY Effective date: 20061027 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20061027 Address after: 300384 Tianjin Huayuan Industrial Park Xinmao science and Technology Park G block Patentee after: Tianjin Gangdong Technical Co., Ltd. Address before: 300384 Tianjin city Nankai District Huayuan Industrial Zone Xinmao science and Technology Park G block EF unit two floor Patentee before: Gangyi Tech Development Co., Ltd., Tianjin City |
|
| C56 | Change in the name or address of the patentee |
Owner name: TIANJIN GANGDONG TECHNOLOGY DEVELOPMENT CO., LTD. Free format text: FORMER NAME: TIANJIN GANGDONG TECHNICAL CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: 300384 Tianjin Huayuan Industrial Zone Xinmao science and Technology Park G block two layer EF unit Patentee after: Tianjin Gangdong Technology Development Co., Ltd. Address before: 300384 Tianjin Huayuan Industrial Park Xinmao science and Technology Park G block Patentee before: Tianjin Gangdong Technical Co., Ltd. |
|
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060809 Termination date: 20130607 |