CN212932371U - Reflected light phase information characterization device - Google Patents

Abstract

The patent discloses a reverberation phase place information characterization device, the device divide into left arm and right arm, includes: the device comprises a light source, a polarizer, a first 1/4 wave plate, a first polarization beam splitter, a first sample stage, a second polarization beam splitter, a first reflector, a second sample stage, a second reflector, a second 1/4 wave plate, an analyzer and a detector. The left arm and the right arm rotate around the central shaft vertical to the sample stage to change the incoming and outgoing angles. The light beam is divided into a light path 1 and a light path 2 after passing through the first polarization beam splitter, and is converged at the second polarization beam splitter. The device can simultaneously measure the intensity and phase information of reflected light of a sample under different incident angles, can acquire comprehensive information of a reflection spectrum, and provides a practical spectrum detection technology for systems such as artificial micro-nano structures of a super-structure material, an optical antenna, a plasmon array and the like, optical films, natural materials and the like.

Description

Reflected light phase information characterization device

Technical Field

The patent relates to the technical field of detection of intensity and phase of reflected light on the surface of a material, in particular to development of a spectrum type reflected light intensity and phase characterization system for ultraviolet, visible-infrared and other wave bands.

Background

Reflection phenomena generally occur when an electromagnetic wave is incident on an interface composed of two different media. In many cases, the reflected light is accompanied by a change in phase as well as a change in amplitude compared to the incident light, and its behavior is ultimately determined by both pieces of information. For example, when a light beam is normally incident to an optically dense medium interface from an optically thinner medium, the reflected light may have a pi phase abrupt change, which corresponds to an increase in the optical path length of 1/2 wavelengths in the reflected light beam; when light enters the light thinner medium interface from the optically dense medium and the incident angle is larger than the critical angle, the reflected light will have a phase change of 0-pi with the increase of the incident angle. In recent years, the concept of a metamaterial (a metamaterial surface) is a means for controlling electromagnetic waves of people, and artificial atoms, namely artificial sub-wavelength microstructure units, forming the material are used as secondary wave sources under external excitation, so that the random electromagnetic radiation intensity and phase distribution can be realized according to design, and the random electromagnetic wave wavefront regulation can be realized. Therefore, in order to accurately grasp the propagation behavior of the electromagnetic wave, it is necessary to know not only the amplitude but also the phase information of the electromagnetic wave. However, the prior art is mature in the aspect of measuring the spectral intensity information (so as to obtain the value of the amplitude), but the method for detecting the phase information is not common, and especially the method for measuring the phase information is much less and less for the electromagnetic wave in high frequency bands such as infrared, visible light, even ultraviolet light and the like. The patent discloses a reflected light phase information representation device and a measurement method thereof. The front end of the measuring device is split by the polarization beam splitter and is respectively used for sample piece detection and background reference, the rear end 1/4 wave plate and the analyzer modulate light so that test light and reference light carrying sample information generate coherent interference, and phase information is calculated through detection spectrum intensity. The device can simultaneously measure the intensity and phase information of reflected light of the sample piece under different incident angles, can acquire the comprehensive information of the reflection spectrum, and provides a practical spectrum detection technology for artificial micro-nano structures such as a super-structure material, an optical antenna, a plasmon array and the like and material systems such as an optical film, a natural material and the like.

Disclosure of Invention

The patent provides development of a spectral reflection phase test characterization system, and the method makes up the defect that phase information in a visible-infrared band can only be simulated by simulation software, and realizes a synchronous measurement technology of spectral intensity and phase information in the visible-near infrared band.

The first objective of the present invention is to simultaneously test the reflected light intensity information and the phase information of a sample to be tested, and obtain the full-range reflected spectrum information of the sample.

The second objective of this patent is to test the intensity and phase information of the reflection spectrum at different incident angles.

The purpose of the patent can be realized by the following technical scheme:

1. a reflected light phase information characterization apparatus, comprising: the device comprises a light source 1, a polarizer 2, a first 1/4 wave plate 3, a first polarization beam splitter 4, a first sample stage 5, a second polarization beam splitter 6, a first reflecting mirror 7, a second sample stage 8, a second reflecting mirror 9, a second 1/4 wave plate 10, an analyzer 11 and a detector 12.

2. A reflected light phase information characterizing device having a left arm on a left side and a right arm on a right side, wherein the left arm comprises: light source 1, polarizer 2, first 1/4 wave plate 3, first polarization beam splitter 4, first mirror 7, the right arm includes: a second polarizing beam splitter 6, a second mirror 9, a second 1/4 wave plate 10, an analyzer 11, a detector 12, and left and right arms, respectively, are rotatable about a central axis perpendicular to the sample plane.

3. Light from the light source 1 firstly passes through the polarizer 2, the first 1/4 wave plate 3 and secondly passes through the first polarization beam splitter 4, and the light path is divided into two light paths, namely a light path 1 and a light path 2. The light of the light path 1 enters the second polarization beam splitter 6 after passing through a sample to be measured on the sample stage 5, the light of the light path 2 enters the standard sample piece of the second sample stage 8 after passing through the first reflector 7, then enters the second polarization beam splitter 6 after passing through the second reflector 9, and the two beams of converged light simultaneously exit to sequentially pass through the second 1/4 wave plate 10 and the analyzer 11 and finally enter the detector 12.

4. The splitting ratio of the first polarization beam splitter (4) is 1: 1.

5. a method for measuring phase information of reflected light is characterized by comprising the following steps:

step 1: fixed incident angle theta₁；

Step 2: background testing: the first sample stage 5 and the second sample stage 8 are simultaneously placed in a standard sample detector to detect the spectrum I₀Calculating the phase angle delta₀；

And step 3: and (3) testing the polarized reflected light of the tested sample P: the sample to be tested is placed on the first sample stage 5, and the standard sample detector is still placed on the second sample stage 8 to detect the spectrum I₁Calculating the phase angle delta₁；

And 4, step 4: calculating the intensity change I of the reflection spectrum of the sample as follows:

I＝I₁-I₀

and 5: the phase change Δ caused by the sample reflection is calculated as:

Δ＝Δ₁-Δ₀

step 6: the incident angle and the emergent angle of the rotating left arm and the right arm are theta₂Repeating the steps 3-5 to measure the incident angle theta₂The intensity and phase of the reflected spectrum change.

And 7: in step 3, a standard sample is placed on the first sample stage 5, a sample to be measured is placed on the second sample stage 8, and the steps 3-6 are repeated to measure the intensity and phase information of the S-polarized reflection spectrum of the sample.

Compared with the prior art with phase information, this patent has following beneficial effect:

1. the phase test system of the present invention is not limited to the detection wavelength range.

2. This patent measures the intensity and the phase information of reverberation simultaneously.

3. The incident angle and the emergence angle of the system can be independently adjusted, and the adjustment ranges are respectively 10-90 degrees.

4. This patent light path is simpler.

5. The phase calculation method is simpler and more convenient.

6. The device can test the reflection information under the condition of arbitrarily polarized incident light.

Drawings

FIG. 1 is a light path diagram of a reflected light phase information characterization device according to the present invention;

reference numerals:

the device comprises a 1-light source, a 2-polarizer, a 3-first 1/4 wave plate, a 4-first polarization beam splitter, a 5-first sample stage, a 6-second polarization beam splitter, a 7-first reflector, an 8-second sample stage, a 9-second reflector, a 10-second 1/4 wave plate, an 11-analyzer and a 12-detector.

Detailed Description

The patent is described in detail below with reference to the figures and the specific embodiments. The present embodiment is implemented on the premise of the patent technical solution, and a detailed implementation manner and a specific operation process are given, but the protection scope of the patent is not limited to the following embodiments.

As shown in fig. 1, a reflected light phase information characterization device optical path:

light from the light source 1 firstly passes through the polarizer 2, the first 1/4 wave plate 3 and secondly passes through the first polarization beam splitter 4, and the light path is divided into two light paths, namely a light path 1 and a light path 2. The light of the light path 1 enters the second polarization beam splitter 6 after passing through a sample to be measured on the sample stage 5, the light of the light path 2 enters the standard sample piece of the second sample stage 8 after passing through the first reflector 7, then enters the second polarization beam splitter 6 after passing through the second reflector 9, and the two beams of converged light simultaneously exit to sequentially pass through the second 1/4 wave plate 10 and the analyzer 11 and finally enter the detector 12.

A method for developing and testing a spectral reflection phase test characterization system comprises the following steps:

step 1: fixed incident angle theta₁；

Step 2: background testing: the first sample stage 5 and the second sample stage 8 are simultaneously placed in a standard sample detector to detect the spectrum I₀Calculating the phase angle delta₀；

And step 3: and (3) testing the polarized reflected light of the tested sample P: the sample to be tested is placed on the first sample stage 5, and the standard sample detector is still placed on the second sample stage 8 to detect the spectrum I₁Calculating the phase angle delta₁；

And 4, step 4: calculating the intensity change I of the reflection spectrum of the sample as follows:

I＝I₁-I₀

and 5: the phase change Δ caused by the sample reflection is calculated as:

Δ＝Δ₁-Δ₀

step 6: the incident angle and the emergent angle of the rotating left arm and the right arm are theta₂Repeating the steps 3-5 to measure the incident angle theta₂The intensity and phase of the reflected spectrum change.

And 7: in step 3, a standard sample is placed on the first sample stage 5, a sample to be measured is placed on the second sample stage 8, and the steps 3-6 are repeated to measure the intensity and phase information of the S-polarized reflection spectrum of the sample.

Example one

A method for developing and testing a spectral reflection phase test characterization system comprises building a light path as shown in figure 1, and testing theta₁The method for the information of the reflection spectrum intensity and the phase of the P polarized light of the time-measured sample comprises the following steps:

step 1: fixed incident angle theta₁；

Step 2: background testing: the first sample stage 5 and the second sample stage 8 are simultaneously placed in a standard sample detector to detect the spectrum I₀Calculating the phase angle delta₀；

And step 3: and (3) testing the polarized reflected light of the tested sample P: the sample to be tested is placed on the first sample stage 5, and the standard sample piece probe is still placed on the second sample stage 8Detector detecting spectrum I₁Calculating the phase angle delta₁；

And 4, step 4: calculating the intensity change I of the reflection spectrum of the sample as follows:

I＝I₁-I₀

and 5: the phase change Δ caused by the sample reflection is calculated as:

Δ＝Δ₁-Δ₀

step 6: the incident angle and the emergent angle of the rotating left arm and the right arm are theta₂Repeating the steps 3-5 to measure the incident angle theta₂The intensity and phase of the reflected spectrum change.

And 7: in step 3, a standard sample is placed on the first sample stage 5, a sample to be measured is placed on the second sample stage 8, and the steps 3-6 are repeated to measure the intensity and phase information of the S-polarized reflection spectrum of the sample.

In addition, it should be noted that the specific embodiments described in the present specification may have different names, and the above descriptions in the present specification are only illustrations of the structures of the present invention. Minor or simple variations in the structure, features and principles of the present inventive concept are included within the scope of the present patent. Various modifications or additions may be made to the described embodiments or methods may be similarly employed by those skilled in the art without departing from the scope of the patent as defined in the accompanying claims.

Claims (2)

1. A reflected light phase information characterization apparatus, comprising: light source (1), polarizer (2), first 1/4 wave plate (3), first polarization beam splitter (4), first sample platform (5), second polarization beam splitter (6), first speculum (7), second sample platform (8), second speculum (9), second 1/4 wave plate (10), analyzer (11), detector (12), its characterized in that:

the left side of device is left arm, and the right side is right arm, and wherein left arm includes: light source (1), polarizer (2), first 1/4 wave plate (3), first polarization beam splitter (4), first mirror (7), the right arm includes: the polarization beam splitter comprises a second polarization beam splitter (6), a second reflector (9), a second 1/4 wave plate (10), an analyzer (11) and a detector (12), and the left arm and the right arm can independently rotate around a table top central axis vertical to the first sample table (5);

the light path is characterized in that: light coming out of a light source (1) firstly passes through a polarizer (2), a first 1/4 wave plate (3) and secondly passes through a first polarization beam splitter (4), and a light path is divided into a light path 1 and a light path 2; the light of the light path 1 enters the second polarization beam splitter (6) after passing through a tested sample on the sample table (5), the light of the light path 2 enters the second polarization beam splitter (6) after passing through the first reflector (7) and then enters the standard sample piece of the second sample table (8) after passing through the second reflector (9), and the two beams of converged light simultaneously exit and sequentially pass through the second 1/4 wave plate (10) and the analyzer (11) and finally enter the detector (12).

2. A reflected light phase information characterization device according to claim 1, wherein the splitting ratio of the first polarization beam splitter (4) is 1: 1.

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