CN212540119U - Microscopic angle-resolved transmitted light phase information characterization system - Google Patents
Microscopic angle-resolved transmitted light phase information characterization system Download PDFInfo
- Publication number
- CN212540119U CN212540119U CN202021262393.0U CN202021262393U CN212540119U CN 212540119 U CN212540119 U CN 212540119U CN 202021262393 U CN202021262393 U CN 202021262393U CN 212540119 U CN212540119 U CN 212540119U
- Authority
- CN
- China
- Prior art keywords
- light
- sample
- focal plane
- phase information
- objective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The patent relates to a microscopic angle-resolved transmitted light phase information characterization system, which comprises a light path 1 and a light path 2, wherein both the light paths have microscopic functions, a lens in front of two sample platforms is an objective lens and can be used as a Fourier transform device, and the corresponding relation between the angle of light emitted by a sample and the position on the focal plane of the objective lens is realized; the rear end 1/4 wave plate and the analyzer modulate the light, and finally the light is converged to an image plane through the lens. The device can simultaneously measure the intensity and phase information of transmitted light in sample micro-regions under different incident angles, can acquire comprehensive information of transmission spectrum, and provides a practical spectrum detection technology for systems such as artificial micro-nano structures of super-structure materials, optical antennas, plasmon arrays and the like, optical films, natural materials and the like.
Description
Technical Field
The patent relates to the technical field of material micro-area transmitted light intensity and phase detection, in particular to development of an ultraviolet, visible-near infrared and other waveband spectrum type transmitted light intensity and phase characterization system.
Background
The phase is one of the basic physical quantities describing an electromagnetic wave. For the transmission of electromagnetic waves, when the electromagnetic waves are incident on an interface composed of two different media, the phases of the electromagnetic waves are generally not changed, but when the electromagnetic waves propagate in a medium with a certain thickness, the phases are accumulated along with the increase of the optical path, and meanwhile, the phases are also obviously influenced by different incident angles. In recent years, a super-structured material (super-structured surface) composed of sub-wavelength artificial microstructure units has attracted much attention, which has peculiar properties not possessed by natural materials and brings about new physical phenomena and interesting applications. Therefore, people have more and more intensive research on the fields of small structures, short-wavelength super surfaces and the like, the requirements on miniaturization and integration of devices are higher and higher, and people put forward new requirements on a spectrum detection technology in order to master the regulation and control performance of a complex micro-scale space structure on electromagnetic waves: firstly, the phase is an important physical quantity for describing the electromagnetic wave, and in order to more accurately grasp the propagation behavior of the electromagnetic wave, the phase information needs to be known; secondly, how to realize accurate spectral information test representation for the miniaturized integrated microscale device; finally, in order to grasp the regulation and control capability of the device under different incident angles of electromagnetic waves, angle-resolved spectrum information is also required. However, the prior art is not uncommon for detecting phase information, and especially for high-frequency band electromagnetic waves such as infrared, visible light, even ultraviolet light and the like with microscopic angle resolution, the method for measuring the phase information is much less and less. The patent discloses a microscopic angle-resolved transmitted light phase information characterization device and a measurement method thereof. The front end of the device is divided into two light paths, namely a light path 1 and a light path 2, by a polarization beam splitter, the two light paths have a microscopic function, a lens in front of two sample platforms is an objective lens and can be used as a Fourier transform device, and the corresponding relation between the angle of light emitted by a sample and the position on a focal plane of the objective lens is realized; the rear end 1/4 wave plate and the analyzer modulate the light to make the test light carrying the sample information and the reference light generate coherent interference, and the phase information is calculated by detecting the spectrum intensity. The device can measure the intensity and the phase information of the transmitted light of small sample pieces with different angles simultaneously, can acquire the comprehensive information of the transmission spectrum, and provides a practical spectrum detection technology for artificial micro-nano structures such as a super-structure material, an optical antenna, a plasmon array and the like and material systems such as an optical film, a natural material and the like.
Disclosure of Invention
The invention aims to provide a spectral transmission intensity and phase test characterization system, which makes up the defect that visible-near infrared phase information can only be simulated by simulation software, and realizes a synchronous measurement technology of the visible-near infrared band spectral intensity and phase information.
The first purpose of this patent is that transmitted light intensity information and the phase information of the sample under test are tested simultaneously, acquire the full aspect transmission spectrum information of the sample under test.
The second purpose of the patent is to test the transmission spectrum intensity and phase information of the micro-nano area of the small sample of the tested sample.
The third purpose of this patent is to test the transmitted spectrum intensity and phase information of different angles.
The purpose of the patent can be realized by the following technical scheme:
1. a microscopic angle-resolved transmitted light phase information characterization system apparatus, comprising: the device comprises a light source 1, a collimator 2, a polarizer 3, a first polarization beam splitter 4, a first reflecting mirror 5, a second reflecting mirror 6, a first condenser lens 7, a first sample stage 8, a first objective lens 9, a first focal plane 10, a second condenser lens 11, a second sample stage 12, a second objective lens 13, a second focal plane 14, a second polarization beam splitter 15, an 1/4 wave plate 16, an analyzer 17, a lens 18, an image plane 19, a precision translation pinhole 20, an optical fiber 21 and a detector 22.
2. Light from a light source 1 firstly passes through a collimator 2 and then a polarizer 3, secondly passes through a first polarization beam splitter 4 to transmit P polarized light as test light and reflect S polarized light as reference light, the test light passes through two reflectors and then is irradiated on a first sample platform (a sample to be tested is placed above the first sample platform) 8 by a first condenser lens 7, a focal plane of a first objective lens 9 is a first focal plane 10, light of the same angle emitted from the sample to be tested is converged at the same point on the first focal plane 10 through the first objective lens 9 and then passes through a second polarization beam splitting cube 15; another beam of reflected S polarized light is irradiated on a second sample platform (a vertically placed reference sample) 12 through a second condenser 11, a focal plane of a second objective 13 is a second focal plane 14, light emitted from the reference sample at the same angle is converged at the same point on the second focal plane 14 through the second objective 13, then is interfered with test light through a second polarization beam splitter 15, the interference light beam is converged on an image plane 19 through a lens 18 after passing through a quarter-wave plate 16 and an analyzer 17, the position on the image plane 19 corresponds to the test angle one by one, reflected light information at different incident angles is received through a moving precision translation pinhole 20, and finally is received by a detector 22 through an optical fiber 21.
3. The splitting ratio of the first polarization beam splitter 4 is 1: 1.
4. the light emitted by the test sample on the first sample platform 8 and having the same angle is converged at the same point on the first focal plane 10, and the light having different angles is in one-to-one correspondence with the positions on the first focal plane 10; the lights emitted from the reference sample on the second sample platform 12 at the same angle converge at the same point on the second focal plane 14, and the lights at different angles correspond to the positions on the second focal plane 14 one by one. Finally, the positions on the image plane 19 correspond to the test angles one by one, and the system realizes the test of the reflected light information at different angles.
5. The system tests sample micro-regions.
6. A measuring method based on a microscopic angle-resolved transmitted light phase information characterization system comprises the following specific steps:
step 1: fixing the position of the precision translation pinhole 20;
step 2: background testing: the standard sample piece is put into simultaneously with second sample platform 12 in first sample platform 8, and four light intensity that the test corresponds when detecting analyzer 17 azimuth and being 0 degree, 45 degrees, 90 degrees, 135 degrees respectively: i is00、I01、I02、I03；
And step 3: one polarization reflected light test of the tested sample: the tested sample is placed on the first sample table 8, the standard sample piece is still placed on the second sample table 12, and four corresponding light intensities are tested when the azimuth angles of the detection analyzer 17 are respectively 0 degree, 45 degrees, 90 degrees and 135 degrees: i is10、I11、I12、I13；
And 4, step 4: calculating the spectral change I of the sample under the polarization, caused by the reflection of the angle alpha degree under the corresponding polarization, as follows:
I0＝I10-I00，I1＝I11-I01，I2＝I12-I02，I3＝I13-I03
and 5: calculating the phase change of the sample caused by the alpha degree reflection of the angle
Comprises the following steps:
step 6: and (3) changing the position of the precision translation pinhole 20, repeating the steps 2-5 for testing, and calculating the beta-degree reflected light intensity and phase.
And 7: in step 3, a standard sample is placed on the first sample table 8, a measured sample is placed on the second sample table 12, and the steps 3-6 are repeated to measure the spectral intensity and phase information of the other polarized reflected light of the sample.
Compared with the prior art, this patent has following beneficial effect:
1. the phase test system of this patent does not limit the detection wavelength range.
2. This patent is measured intensity and the phase information of the micro-regional transmitted light of sample of being surveyed simultaneously.
3. This patent incident angle scope is big, and minimum measurement angle is 0 degree.
4. This patent light path is simple.
5. The phase calculation method is simple and convenient.
6. The device tests transmission information under arbitrary polarized incident light conditions.
Drawings
FIG. 1 is a light path diagram of a microscopic angle-resolved phase information characterization device of transmitted light according to the present invention;
reference numerals:
the device comprises a light source 1, a collimator 2, a polarizer 3, a first polarization beam splitter 4, a first reflector 5, a second reflector 6, a first focusing mirror 7, a first sample stage 8, a first objective 9, a first objective lens 10, a first focal plane 11, a second focusing mirror 12, a second sample stage 13, a second objective 14, a second focal plane 15, a second polarization beam splitter 16-1/4, a 17-analyzer, a lens 18, an image plane 19, a precision translation pinhole 20, an optical fiber 21 and a detector 22.
Detailed Description
The patent is described in detail below with reference to the figures and the specific embodiments. The present embodiment is implemented on the premise of the patent technical solution, and a detailed implementation manner and a specific operation process are given, but the protection scope of the patent is not limited to the following embodiments.
As shown in fig. 1, a microscopic angle-resolved transmitted light phase information characterization system optical path:
light from a light source 1 firstly passes through a collimator 2 and then a polarizer 3, secondly passes through a first polarization beam splitter 4 to transmit P polarized light as test light and reflect S polarized light as reference light, the test light passes through two reflectors and then is irradiated on a first sample platform (a sample to be tested is placed above the first sample platform) 8 by a first condenser lens 7, a focal plane of a first objective lens 9 is a first focal plane 10, light of the same angle emitted from the sample to be tested is converged at the same point on the first focal plane 10 through the first objective lens 9 and then passes through a second polarization beam splitter 15; another beam of reflected S polarized light is irradiated on a second sample platform (a vertically placed reference sample) 12 through a second condenser 11, a focal plane of a second objective 13 is a second focal plane 14, light emitted from the reference sample at the same angle is converged at the same point on the second focal plane 14 through the second objective 13, then is interfered with test light through a second polarization beam splitter 15, the interference light beam is converged on an image plane 19 through a lens 18 after passing through a quarter-wave plate 16 and an analyzer 17, the position on the image plane 19 corresponds to the test angle one by one, reflected light information at different incident angles is received through a moving precision translation pinhole 20, and finally is received by a detector 22 through an optical fiber 21.
A microscopic angle-resolved transmitted light phase information characterization system and a measurement method thereof comprise the following steps:
step 1: fixing the position of the precision translation pinhole 20;
step 2: background testing: the standard sample piece is put into simultaneously with second sample platform 12 in first sample platform 8, and four light intensity that the test corresponds when detecting analyzer 17 azimuth and being 0 degree, 45 degrees, 90 degrees, 135 degrees respectively: i is00、I01、I02、I03；
And step 3: one polarization reflected light test of the tested sample: the tested sample is placed on the first sample table 8, the standard sample piece is still placed on the second sample table 12, and four corresponding light intensities are tested when the azimuth angles of the detection analyzer 17 are respectively 0 degree, 45 degrees, 90 degrees and 135 degrees: i is10、I11、I12、I13；
And 4, step 4: calculating the spectral change I of the sample under the polarization, caused by the reflection of the angle alpha degree under the corresponding polarization, as follows:
I0＝I10-I00，I1＝I11-I01，I2＝I12-I02，I3＝I13-I03
and 5: calculating the phase change of the sample caused by the alpha degree reflection of the angle
Comprises the following steps:
step 6: and (3) changing the position of the precision translation pinhole 20, repeating the steps 2-5 for testing, and calculating the beta-degree reflected light intensity and phase.
And 7: in step 3, a standard sample is placed on the first sample table 8, a measured sample is placed on the second sample table 12, and the steps 3-6 are repeated to measure the spectral intensity and phase information of the other polarized reflected light of the sample.
Example one
A microscopic angle-resolved transmitted light phase information characterization system and a measurement method thereof are provided, wherein the test method comprises the following steps:
a microscopic angle-resolved transmitted light phase information characterization system and a measurement method thereof are provided, wherein a light path shown in figure 1 is built, and the method for measuring the transmitted spectrum intensity and the phase information is as follows:
step 1: fixing the position of the precision translation pinhole 20;
step 2: background testing: the standard sample piece is put into simultaneously with second sample platform 12 in first sample platform 8, and four light intensity that the test corresponds when detecting analyzer 17 azimuth and being 0 degree, 45 degrees, 90 degrees, 135 degrees respectively: i is00、I01、I02、I03；
And step 3: one polarization reflected light test of the tested sample: the tested sample is placed on the first sample table 8, the standard sample piece is still placed on the second sample table 12, and four corresponding light intensities are tested when the azimuth angles of the detection analyzer 17 are respectively 0 degree, 45 degrees, 90 degrees and 135 degrees: i is10、I11、I12、I13；
And 4, step 4: calculating the spectral change I of the sample under the polarization, caused by the reflection of the angle alpha degree under the corresponding polarization, as follows:
I0＝I10-I00，I1＝I11-I01，I2＝I12-I02，I3＝I13-I03
and 5: calculating the phase change of the sample caused by the alpha degree reflection of the angle
Comprises the following steps:
step 6: and (3) changing the position of the precision translation pinhole 20, repeating the steps 2-5 for testing, and calculating the beta-degree reflected light intensity and phase.
And 7: in step 3, a standard sample is placed on the first sample table 8, a measured sample is placed on the second sample table 12, and the steps 3-6 are repeated to measure the spectral intensity and phase information of the other polarized reflected light of the sample.
In addition, it should be noted that the specific embodiments described in the present specification may have different names, and the above contents described in the present specification are only illustrations of the patent structures. Minor or simple changes in the structure, features and principles of the present patent concepts are intended to be included within the scope of the present patent. Various modifications or additions may be made to the described embodiments or methods may be similarly employed by those skilled in the art without departing from the scope of the patent as defined in the accompanying claims.
Claims (2)
1. A microscopic angle-resolved transmitted light phase information characterization system, comprising: the device comprises a light source (1), a collimator (2), a polarizer (3), a first polarization beam splitter (4), a first reflector (5), a second reflector (6), a first condenser (7), a first sample stage (8), a first objective (9), a first focal plane (10), a second condenser (11), a second sample stage (12), a second objective (13), a second focal plane (14), a second polarization beam splitter (15), an 1/4 wave plate (16), an analyzer (17), a lens (18), an image plane (19), a precision translation pinhole (20), an optical fiber (21) and a detector (22); the method is characterized in that:
light coming out of a light source (1) firstly passes through a collimator (2) and a polarizer (3) and secondly passes through a first polarization beam splitter (4), and is divided into two light paths, namely a light path 1 and a light path 2; light of the light path 1 passes through the two reflectors and then is irradiated on a first sample table (8) through a first condenser (7), the focal plane of a first objective (9) is a first focal plane (10), and light with the same transmission angle on a sample to be detected is converged at the same point of the first focal plane (10) through the first objective (9) and then enters a second polarization beam splitter (15); the light of the light path 2 is irradiated on a second sample stage (12) through a second condenser (11), the focal plane of a second objective (13) is a second focal plane (14), the light of the same transmission angle on the standard sample piece is converged at the same point of the second focal plane (14) through the second objective (13), then enters a second polarization beam splitter (15), the two converged beams of light are simultaneously emitted and sequentially pass through 1/4 wave plates (16), an analyzer (17) and a lens (18), imaging is carried out at an image plane (19), the positions on the image plane (19) correspond to test angles one by one, reflected light information of different incidence angles is received through a movable precision translation pinhole (20), and finally the reflected light information is received by a detector (22) through an optical fiber (21).
2. A microscopic angle-resolved transmitted light phase information characterization system according to claim 1, wherein the first polarizing beam splitter (4) has a splitting ratio of 1: 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021262393.0U CN212540119U (en) | 2020-07-01 | 2020-07-01 | Microscopic angle-resolved transmitted light phase information characterization system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021262393.0U CN212540119U (en) | 2020-07-01 | 2020-07-01 | Microscopic angle-resolved transmitted light phase information characterization system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212540119U true CN212540119U (en) | 2021-02-12 |
Family
ID=74522033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021262393.0U Active CN212540119U (en) | 2020-07-01 | 2020-07-01 | Microscopic angle-resolved transmitted light phase information characterization system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212540119U (en) |
-
2020
- 2020-07-01 CN CN202021262393.0U patent/CN212540119U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101443647B (en) | Optical measurement system with simultaneous multiple wavelengths, multiple angles of incidence and angles of azimuth | |
| CN110702613B (en) | Device and method for testing full-polarization bidirectional reflection distribution of sample | |
| CN113777049B (en) | Angle-resolved snapshot ellipsometer and measuring system and method thereof | |
| CN108036744A (en) | The large area dynamic measurement device and method of a kind of nano thin-film preparation process | |
| CN105572076B (en) | THz wave spectrometry device and its measurement method based on scattering effect | |
| CN111624161A (en) | Microscopic angle-resolved transmitted light phase information characterization system and measurement method thereof | |
| CN114812889A (en) | Large-caliber optical element stress detection device and detection method thereof | |
| Pezzaniti et al. | Imaging polarimeters for optical metrology | |
| CN108132026A (en) | Infrared visible ray dual wavelength transmission-type interference testing device in semiconductor | |
| CN117470780B (en) | Generalized terahertz time-domain ellipsometry detection system capable of acquiring Jones matrix in real time | |
| CN117110205B (en) | Single-wavelength ellipsometry device with continuously variable angle and measurement method | |
| CN212540119U (en) | Microscopic angle-resolved transmitted light phase information characterization system | |
| CN109883553B (en) | Polarization measuring device and polarization measuring method | |
| CN114739298B (en) | Linear terahertz ellipsometer calibrated by using visible light and thickness measuring method | |
| CN212540118U (en) | Microscopic angle-resolved reflected light phase information characterization system | |
| CN111443047A (en) | Reflected light phase information characterization device and measurement method thereof | |
| CN216771491U (en) | Polarization resolution second harmonic testing device | |
| CN111624162A (en) | Microscopic angle-resolved reflected light phase information characterization system and measurement method thereof | |
| CN212932371U (en) | Reflected light phase information characterization device | |
| CN115031629A (en) | Device and method for detecting positioning of cube beam splitter prism before gluing | |
| US7710564B1 (en) | Polarized broadband wafer inspection | |
| CN212622224U (en) | Normal incidence formula transmitted light phase information representation light path system | |
| CN110426397B (en) | Optical detection system, device and method | |
| CN212622220U (en) | Normal incidence formula reverberation phase information representation light path system | |
| CN207816210U (en) | Infrared visible light dual wavelength transmission-type interference testing device in semiconductor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |