CN2758712Y - Intelligent differential pressure transmitter - Google Patents
Intelligent differential pressure transmitter Download PDFInfo
- Publication number
- CN2758712Y CN2758712Y CN 200420115994 CN200420115994U CN2758712Y CN 2758712 Y CN2758712 Y CN 2758712Y CN 200420115994 CN200420115994 CN 200420115994 CN 200420115994 U CN200420115994 U CN 200420115994U CN 2758712 Y CN2758712 Y CN 2758712Y
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- sensor
- diaphragm
- differential pressure
- pressure
- guide hole
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Abstract
The utility model relates to an intelligent differential pressure transmitter, which is composed of a sensor and a conversion amplifying circuit which is added, wherein the sensor is taken as a core body to form a detecting part. The utility model is characterized in that a multifunction sensor is adopted, causing static pressure and temperature influence to have compensation through a microprocessor in the transmitter, and a differential pressure sensor, a static pressure sensor and a temperature sensor are combined on a single crystal silicon chip. Thereby, the high precision, the high stability and the high reliability of the complete machine are realized. Secondly, an intelligent transmitter adopts high performance hardware and software, such as programmable A/D, D/A conversion, the microprocessor, HART communication, etc. in a signal conversion amplifying circuit, and the digitization and the intellectualization of the complete machine are realized.
Description
Technical field
The utility model relates to a kind of industrial automation instrument, particularly a kind ofly can measure differential pressure, static pressure and temperature simultaneously, and by static pressure and temperature are carried out the intelligent differential pressure transmitter that revisal realizes high precision, high stability and high reliability.
Background technology
At present, domestic existing transmitter adopts the main type of sensor to be: the silicon piezoresistance type of metal capacitance and simple function.
Because sensor function is single, can not measure static pressure and temperature simultaneously, so can not carry out revisal, make that the transmitter precision is low, stability and poor reliability to static pressure and temperature.
The purpose of this utility model is by static pressure and temperature are carried out revisal the linearity of differential pressure measurement well to be proofreaied and correct, thereby realizes high precision, high stability and the high reliability of intelligent differential pressure transmitter.
The utility model content
Intelligent differential pressure transmitter be by sensor as core body, and form detection part, Fu converter amplifier circuit forms again, converter amplifier circuit comprises sampling unit, microprocessing unit, D/A conversion unit, communication unit, it is characterized in that:
(a) sensor is a multifunctional silicone pressure drag compound sensor, the back side of silicon-sensitive chip 7 is sealed with two glass 8 of throwing with holes, wherein glass orifice is positioned at the below of the differential pressure sensitive diaphragm 4 at silicon-sensitive chip 7 back sides, static pressure sensitive diaphragm 5 is shut by two glass 8 top aporate areas of throwing with holes, two belows of throwing glass 8 with holes are sealed with connecting pipe 9, wherein glass orifice matches with the pressure guide hole of connecting pipe, remove and leave silicon-sensitive chip 7 fronts, connecting pipe enters the mouth outside the end, all parts are fixing with pedestal 11 encapsulation, be fixed with lead-in wire 10 on the pedestal, Si-Al wire 6 is with the responsive electric bridge 1 of differential pressure, the responsive electric bridge 2 of static pressure, temperature-sensing element (device) 3 links to each other with lead-in wire 10, forms complete all solid state encapsulated sensor;
(b) form detection part: with the sensor is core body, be with central seat 14 in the connecting pipe outer end, with body 12 with sensor core, central seat 14 is fixed into one, body has an areole, sensor signal can being gone between, 10 usefulness are soft draws from the areole of body 12 with 13, position body 12 in silicon-sensitive chip 7 fronts with respect to connecting pipe leaves pressure guide hole, this pressure guide hole outside dead center diaphragm 15, also be fixed with center diaphragm 15 in the other end central seat 14 connecting pipes outside simultaneously, with this susceptor body with body, central seat, sensor core is fixed therein, being connected between this susceptor body inboard and the body can be adopted Type of Welding, center diaphragm 15 all adopts the fixing method of periphery, be fixed between this susceptor body 17 and the body, the gap is all left in the outside in the diaphragm centre, center, do not contact with wall, this susceptor body is with respect to the pressure guide hole on the body 12, also respectively be equipped with pressure guide hole on the relative position at the pressure guide hole place of central seat 14 connecting pipes, the pressure guide hole outside at this susceptor body 17 is fixed with isolation diaphragm 16, isolation diaphragm can adopt periphery to be weldingly fixed on this susceptor body outer surface, the isolation diaphragm center is corresponding with pressure guide hole, and gapped with this susceptor body outer surface, inside charges the multifunctional silicone pressure drag compound sensor detection part that forms complete all solid state encapsulation behind the silicone oil.
The front of the N type silicon single crystal flake that silicon-sensitive chip 7 is meant in twin polishing in the utility model is injected boron and is formed the responsive electric bridge 1 of P type differential pressure, the responsive electric bridge 2 of static pressure, and be equipped with temperature-sensing element (device) 3 in two electric bridge connection places, the back side at silicon single crystal flake forms two deep mixed II connected in stars with the corresponding band of position of positive two Wheatstone bridges, make the wafer thickness of two positions not wait, promptly form differential pressure sensitive diaphragm 4 and static pressure sensitive diaphragm 5 that two diaphragm thickness do not wait; This chip is thrown with two that glass join, two throwing glass joins with connecting pipe, fix by the pedestal encapsulation again, can form multifunctional silicone pressure drag compound sensor described in the utility model.
In the utility model, the encapsulating structure of multifunctional silicone pressure drag compound sensor can make the responsive electric bridge 1 of the differential pressure of silicon-sensitive chip experience the pressure-differential pressure at sensor core two ends; And the responsive electric bridge 2 of static pressure can only be experienced the pressure-static pressure of the positive pressure side of sensor.Connecting pipe one end throws that glassy phases tap into and this side of being connected the silicon-sensitive chip is the malleation side with two, and a side of the connecting pipe other end of overcoat central seat is a suction side.
The sensor of this version encapsulation, when gaging pressure surpasses 5 times of ranges, the center motion of membrane; cause the isolation diaphragm motion; it is dead that isolation diaphragm and this susceptor body are pasted, and gaging pressure can't be transmitted on the sensitive chip 7, thereby has realized overvoltage protection from structure.Because the effect of differential pressure makes sensor bridge circuit resistance change, and the bridge circuit output voltage is directly proportional with differential pressure thereupon.
The sample conversion unit can be selected 24 high-precision programmable A/D conversion chips for use in the utility model, and small-signal sampling precision height is low to moderate under the 5mV situation in switching signal, and conversion accuracy can reach 0.015 ‰.
Microprocessing unit can be selected the microprocessor of motorola inc for use in the utility model, has extended out the ROM of 32K in this unit design, as program storage.Consider the interchange issues of site inspection and maintenance and amplifier, extended out the E of 2K
2PROM deposits the sensor setting parameter.A/D and D/A translation interface all adopt serial interface technologies, and digital display unit adopts the parallel interface technology, can more promptly reflect the real-time output of transmitter, can on-the-spotly show 26 kinds of engineering units simultaneously.Software compensation adopts excellent algorithm of mathematical model and online correction technique, realizes complete machine wide region, high-precision temperature and linear compensation, and the digital compensation precision can reach 0.01%.
D/A conversion unit can adopt the D/A conversion chip of U.S. AD company in the utility model, and this chip has 16 conversion accuracy, and not only precision height but also slewing rate are fast, integrates power supply, signal output and carrier communication.
Communication unit mainly is made up of input bandwidth-limited circuit, output Shaping filtering circuit, modulator-demodular unit etc. in the utility model, when transmitter receives the HART communication signal, the input tape bandpass filter is delivered to modulator-demodular unit after the sine wave of HART is become square wave, being demodulated to digital signal through modulator-demodular unit send CPU to handle, the digital signal that CPU returns is modulated into the HART frequency through modulator-demodular unit, becomes the HART sine wave of standard through the waveform circuit of adjusting.
Utilize differential pressure type intelligent transducer model machine stable performance that utility model obtains, reliable, have high precision (more than ± 0.1%).Performance has all reached the intelligent transducer technical requirement.
Description of drawings
Fig. 1 is the synoptic diagram of the multiple chip 7 of silicon-sensitive, among the figure:
1, the responsive electric bridge 2 of differential pressure, the responsive electric bridge 3 of static pressure, temperature-sensing element (device)
4, differential pressure sensitive diaphragm 5, static pressure sensitive diaphragm
Fig. 2 is the synoptic diagram of multifunctional silicone pressure drag composite pressure sensor, among the figure
1, the responsive electric bridge 2 of differential pressure, the responsive electric bridge 4 of static pressure, differential pressure sensitive diaphragm
5, static pressure sensitive diaphragm 6, Si-Al wire 7, silicon-sensitive chip
8, two throwing glass 9, connecting pipe 10, lead-in wire
11, pedestal
Fig. 3 is a kind of intelligent pressure transmitter structural representation of the present utility model, among the figure:
12, body 13, softly be with 14, central seat
15, center diaphragm 16, isolation diaphragm 17, this susceptor body
Fig. 4 is an intelligent pressure transmitter converter amplifier circuit function schematic block diagram of the present utility model
Differential pressure, static pressure, three sensors of temperature in intelligent pressure transmitter of the present utility model, have been adopted Be compounded in a Multifunction Sensor on the monocrystalline silicon piece, make it possible to by the microprocessor in the transmitter Static pressure and temperature effect are compensated. Thereby high accuracy, the high stability and highly reliable of complete machine have been realized The property; Next be intelligent transducer in the signal converter amplifier circuit, adopted programmable A/D, D/A the conversion, Microprocessor, the contour performance hardware and software of HART communication have been realized digitlization and the intellectuality of complete machine.
Embodiment
Adopt the intelligent pressure transmitter of structure shown in Figure 3, when measured differential pressure acts on detection part malleation side, because the pressure of malleation side impression is greater than the pressure of suction side, cause malleation side isolation diaphragm 16 to move to this susceptor body 17, the internal-filling liquid body passes to malleation side center diaphragm 15 with this pressure, cause that center diaphragm 15 moves, under the internal-filling liquid effect, this pressure is delivered to sensor core malleation side again, differential pressure sensitive diaphragm 4 and static pressure sensitive diaphragm 5 are experienced this pressure simultaneously, cause that the sensitive diaphragm resistance changes; Meanwhile, temperature-sensing element (device) 3 in the compound sensor is also experienced the temperature of detected fluid by the heat conduction of interior sealing liquid, cause the variation of temperature-sensing element (device) 3 resistances, at this moment, differential pressure, the variation that static pressure and temperature cause three kinds of parameters of compound sensor chip is all by signal lead 10 with softly be sent in the analog-digital converter able to programme of converter amplifier circuit sampling unit with 13, this signal is exaggerated after analog-digital converter converts digital signal to and delivers to microprocessor unit again, microprocessor through static pressure and the laggard line linearity correction of temperature compensation computing, converts the direct current 4-20 milliampere output signal that is directly proportional with measured differential pressure to through digital-analog converter to differential pressure signal again.The functional parameter of the differential pressure relevant with detection part, static pressure, temperature parameter and transmitter is stored in two storeies.
Claims (5)
1, a kind of intelligent differential pressure transmitter be by sensor as core body, and form detection part, Fu converter amplifier circuit forms again, converter amplifier circuit comprises sampling unit, microprocessing unit, D/A conversion unit, communication unit, it is characterized in that:
(a) sensor is a multifunctional silicone pressure drag compound sensor, the back side of silicon-sensitive chip (7) is sealed with two glass (8) of throwing with holes, wherein glass orifice is positioned at the below of the differential pressure sensitive diaphragm (4) at silicon-sensitive chip (7) back side, static pressure sensitive diaphragm (5) is shut by two top aporate areas of glass (8) of throwing with holes, two belows of throwing glass (8) with holes are sealed with connecting pipe (9), wherein glass orifice matches with the pressure guide hole of connecting pipe, remove and leave silicon-sensitive chip (7) front, connecting pipe enters the mouth outside the end, all parts are fixing with pedestal (11) encapsulation, be fixed with lead-in wire (10) on the pedestal, Si-Al wire (6) is with the responsive electric bridge (1) of differential pressure, the responsive electric bridge (2) of static pressure, temperature-sensing element (device) (3) links to each other with lead-in wire (10), forms complete all solid state encapsulated sensor;
(b) form detection part: with the sensor is core body, be with central seat (14) in the connecting pipe outer end, with body (12) with sensor core, central seat (14) is fixed into one, body has an areole, sensor signal can be gone between (10) draw from the areole of body (12) with soft band (13), leave pressure guide hole at the positive position body (12) of silicon-sensitive chip (7) with respect to connecting pipe, this pressure guide hole outside dead center diaphragm (15), also be fixed with center diaphragm (15) in other end central seat (14) the connecting pipe outside simultaneously, with this susceptor body with body, central seat, sensor core is fixed therein, being connected between this susceptor body inboard and the body can be adopted Type of Welding, center diaphragm (15) all adopts the fixing method of periphery, be fixed between this susceptor body (17) and the body, the gap is all left in the outside in the diaphragm centre, center, do not contact with wall, this susceptor body is with respect to the pressure guide hole on the body (12), also respectively be equipped with pressure guide hole on the relative position at the pressure guide hole place of central seat (14) connecting pipe, the pressure guide hole outside at this susceptor body (17) is fixed with isolation diaphragm (16), isolation diaphragm can adopt periphery to be weldingly fixed on this susceptor body outer surface, the isolation diaphragm center is corresponding with pressure guide hole, and gapped with this susceptor body outer surface, inside charges the multifunctional silicone pressure drag compound sensor detection part that forms complete all solid state encapsulation behind the silicone oil.
2. intelligent differential pressure transmitter according to claim 1, the responsive electric bridge (1) of boron formation P type differential pressure, the responsive electric bridge (2) of static pressure are injected in the front that it is characterized in that the N type silicon single crystal flake that silicon-sensitive chip (7) is meant in twin polishing, and be equipped with temperature-sensing element (device) (3) in two electric bridge connection places, the back side at silicon single crystal flake forms two deep mixed ∏ connected in stars with the corresponding band of position of positive two Wheatstone bridges, make the wafer thickness of two positions not wait, promptly form differential pressure sensitive diaphragm (4) and static pressure sensitive diaphragm (5) that two diaphragm thickness do not wait.
3. intelligent differential pressure transmitter according to claim 1 is characterized in that the sample conversion unit can select 24 high-precision programmable A/D conversion chips for use.
4. intelligent differential pressure transmitter according to claim 1 is characterized in that A/D and D/A translation interface all adopt serial line interface in the microprocessing unit.
5. intelligent differential pressure transmitter according to claim 1 is characterized in that D/A conversion unit adopts the D/A conversion chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420115994 CN2758712Y (en) | 2004-12-01 | 2004-12-01 | Intelligent differential pressure transmitter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420115994 CN2758712Y (en) | 2004-12-01 | 2004-12-01 | Intelligent differential pressure transmitter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2758712Y true CN2758712Y (en) | 2006-02-15 |
Family
ID=36078852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420115994 Expired - Lifetime CN2758712Y (en) | 2004-12-01 | 2004-12-01 | Intelligent differential pressure transmitter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2758712Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102168994A (en) * | 2010-12-29 | 2011-08-31 | 沈阳仪表科学研究院 | Silicon capacitive differential pressure transducer with multi-parameter and compensation method of static pressure influence |
| CN105973197A (en) * | 2016-07-22 | 2016-09-28 | 西安华恒仪表制造有限公司 | Liquid level static force level gauge |
| CN110285916A (en) * | 2019-04-29 | 2019-09-27 | 麦克传感器股份有限公司西安分公司 | A kind of composite type pressure sensor |
-
2004
- 2004-12-01 CN CN 200420115994 patent/CN2758712Y/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102168994A (en) * | 2010-12-29 | 2011-08-31 | 沈阳仪表科学研究院 | Silicon capacitive differential pressure transducer with multi-parameter and compensation method of static pressure influence |
| CN102168994B (en) * | 2010-12-29 | 2013-01-09 | 沈阳仪表科学研究院 | Silicon capacitance differential pressure transducer with multi-parameter and compensation method of static pressure influence |
| CN105973197A (en) * | 2016-07-22 | 2016-09-28 | 西安华恒仪表制造有限公司 | Liquid level static force level gauge |
| CN110285916A (en) * | 2019-04-29 | 2019-09-27 | 麦克传感器股份有限公司西安分公司 | A kind of composite type pressure sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20141201 Granted publication date: 20060215 |