CN110285916A - A kind of composite type pressure sensor - Google Patents

A kind of composite type pressure sensor Download PDF

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Publication number
CN110285916A
CN110285916A CN201910355010.XA CN201910355010A CN110285916A CN 110285916 A CN110285916 A CN 110285916A CN 201910355010 A CN201910355010 A CN 201910355010A CN 110285916 A CN110285916 A CN 110285916A
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CN
China
Prior art keywords
pressure
oil circuit
differential pressure
static pressure
pressure end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910355010.XA
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Chinese (zh)
Inventor
王刚
段九勋
柳欢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mike Sensors Ltd By Share Ltd Xi'an Branch
Original Assignee
Mike Sensors Ltd By Share Ltd Xi'an Branch
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mike Sensors Ltd By Share Ltd Xi'an Branch filed Critical Mike Sensors Ltd By Share Ltd Xi'an Branch
Priority to CN201910355010.XA priority Critical patent/CN110285916A/en
Publication of CN110285916A publication Critical patent/CN110285916A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627Protection against aggressive medium in general
    • G01L19/0645Protection against aggressive medium in general using isolation membranes, specially adapted for protection

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention discloses a kind of composite type pressure sensors, including pedestal, differential pressure chip and static pressure chip;One end of the pedestal is differential pressure end, and the other end is static pressure end, is provided with the first oil circuit and the second oil circuit on pedestal, the first oil circuit is connected to differential pressure end, and differential pressure end is connected to by the second oil circuit with static pressure end;The differential pressure chip is arranged in the pressure chamber at differential pressure end, and closes the intercommunicating pore of the second oil circuit and differential pressure end;Static pressure chip is arranged in the pressure chamber at static pressure end;The pressure top of chamber at the differential pressure end and static pressure end is fixedly installed convoluted diaphragm.The composite type pressure sensor combines three discrete measuring systems together, is incorporated into a measuring cell, effectively reduces client's operation cost, and the structure of small size, use more convenient to install.

Description

A kind of composite type pressure sensor
Technical field
The present invention relates to instrument and meter industry technical field, specially a kind of composite type pressure sensor.
Background technique
Differential pressure transmitter is very extensive with field, has almost touched various industries, has greatly driven differential pressure pick-up Development.
Demand of the existing market to small-sized differential pressure pick-up is increasing, but the current major product in market can only carry out list One differential pressure measurement cannot detect static pressure size, and the inspection to use environment temperature although can apply static pressure to product It surveys, can only also be completed by independent system for detecting temperature, in some field of industry detection, limited to certain use Property, and detection system operation cost is increased to a certain extent.
Therefore, it is necessary to design a kind of composite type pressure sensor, existing technical problem is solved.
Summary of the invention
Aiming at the problems existing in the prior art, the present invention provides a kind of composite type pressure sensor, breaks through differential pressure sensing The use limitation of device can complete the measurement of differential pressure, static pressure and temperature, expand the scope of application.
The present invention is to be achieved through the following technical solutions:
A kind of composite type pressure sensor, including pedestal, differential pressure chip and static pressure chip;
One end of the pedestal is differential pressure end, and the other end is static pressure end, is provided with the first oil circuit and the second oil circuit on pedestal, First oil circuit is connected to differential pressure end, and differential pressure end is connected to by the second oil circuit with static pressure end;
The differential pressure chip is arranged in the pressure chamber at differential pressure end, and closes the intercommunicating pore of the second oil circuit and differential pressure end;Static pressure Chip is arranged in the pressure chamber at static pressure end;
The pressure top of chamber at the differential pressure end and static pressure end is fixedly installed convoluted diaphragm.
Preferably, temperature and resistance is additionally provided in the pressure chamber at the differential pressure end or static pressure end.
Preferably, the temperature and resistance is platinum resistance thermometer sensor, PT1000.
Preferably, pressing ring is arranged in the top of the convoluted diaphragm, and pressing ring, convoluted diaphragm and pedestal are welded to each other.
Preferably, the differential pressure end is connected with static pressure end by oil circuit board, and first oil circuit and the second oil circuit are respectively provided with On oil circuit board, the oil inlet of the first oil circuit and the second oil circuit is arranged on the side wall of oil circuit board, the oil outlet of the first oil circuit It is connected to the pressure chamber at differential pressure end, two oil outlets of the second oil circuit are connected to the pressure chamber at differential pressure end and static pressure end respectively.
Preferably, the oil inlet of first oil circuit and the second oil circuit passes through pin and is blocked.
Preferably, multiple electrical definition pins are provided in the pressure chamber at the differential pressure end and static pressure end, electrical definition is drawn One end of foot is connect with differential pressure chip or static pressure chip, and the electrical other end for defining pin, which passes through, presses the bottom of chamber and corresponding inspection Measurement equipment connection.
Preferably, the electrical definition pin is connect by gold thread with differential pressure chip or static pressure chip.
Preferably, be arranged in the pressure chamber at the static pressure end it is fluted, static pressure chip be arranged in a groove.
Preferably, silicone oil is perfused in the pressure chamber at the differential pressure end and static pressure end.
Compared with prior art, the invention has the following beneficial technical effects:
A kind of composite type pressure sensor provided by the invention, by the oil-filled road of the pressure chamber at differential pressure end and the pressure chamber at static pressure end Diameter is separated from each other, and differential pressure end uses independent first oil circuit;Static pressure end uses the second oil circuit connection to differential pressure end, and differential pressure chip is close The first outlet of the second oil circuit has been sealed, and the second outlet of the second oil circuit is connected to static pressure end, therefore reaches differential pressure and static pressure two The compatible effect of person, and ensure that the independence of differential pressure oil circuit, avoid the influence by static pressure measurement.Differential pressure end and quiet simultaneously Pressure side all uses stainless steel convoluted diaphragm to be isolated, and can measure a variety of non-corrosive media and improve the use longevity of sensor Life.
Temperature and resistance is further set in pressure chamber, and temperature test end can measure essence with precise measurement surrounding medium temperature Degree can be controlled in ± 1 DEG C, while temperature-compensating is passed through at differential pressure end, improves the measurement accuracy in certain temperature range.
Oil circuit is arranged on oil circuit board, easy to process, improves production efficiency.
Groove further is set in the pressure chamber at static pressure end, makes the mounting height for pressing chamber to meet static pressure chip, makes sensor Monnolithic case meets mark and requires.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of composite type pressure sensor of the present invention;
Fig. 2 is the oil circuit distribution map of composite type pressure sensor of the present invention;
Fig. 3 is the internal structure chart of composite type pressure sensor of the present invention;
Fig. 4 is the plan view at composite type pressure sensor differential pressure of the present invention end;
Fig. 5 is the plan view at composite type pressure sensor static pressure of the present invention end.
In figure: 1- differential pressure chip;3- convoluted diaphragm;4- pressing ring;5- pedestal;6- pin;7- sealing ring;8- electrical pin; 9- spun gold;10- static pressure chip;11- temperature and resistance;12- silicone oil;20- differential pressure end;30- static pressure end;40- oil circuit board;50- first Oil circuit;The second oil circuit of 60-.
Specific embodiment
Present invention will be described in further detail below with reference to the accompanying drawings, described to be explanation of the invention rather than limit It is fixed.
Refering to fig. 1-5, a kind of composite type pressure sensor, including pedestal 5, differential pressure chip 1, static pressure chip 10 and temperature electricity Resistance 11.
The pedestal 5 includes oil circuit board 40 and differential pressure end 20 and static pressure end 30, and differential pressure end 20 and static pressure end 30 are cylinder Body structure, differential pressure end 20 and static pressure end 30 are provided with the silicone oil slot for silicone oil 12 to be perfused, which is circular groove, poor It is provided with seal groove on the outer wall at pressure side 20 and static pressure end 30, sealing ring 7 is provided in seal groove;Oil circuit board 40 is rectangle knot Structure.
Differential pressure end 20 and static pressure end 30 are separately positioned on the both ends of oil circuit board 40, and in differential pressure end 20 and static pressure end 30 The heart is overlapped with the center of oil circuit board ends respectively.The length of connecting plate is identical as the diameter at differential pressure end, and the width of oil circuit board 40 is small Diameter in differential pressure end 20.
Referring to Fig.2, the first oil circuit 50 and the second oil circuit 60 are arranged in oil circuit board 40, the first oil circuit 50 is used for and differential pressure end 20 The section of connection, the first oil circuit 50 is L-type structure, and the arrival end of the first oil circuit 50 is arranged on the side wall of oil circuit board 40, passes through Silicone oil 12 is perfused to differential pressure end in first oil circuit.
The section of second oil circuit 60 be T-type structure, differential pressure end 20 be connected to static pressure end, the second oil circuit 60 including one into Hydraulic fluid port and two outlets, the entrance of the second oil circuit 60 are arranged on the side wall of oil circuit board, and first outlet is located at the silicone oil at differential pressure end 20 In slot, second outlet is located in the silicone oil slot at static pressure end 30, and first outlet and second outlet pass through vertical oil communication, silicone oil 12 enter from oil inlet, are entered in the silicone oil slot at static pressure end 30 by second outlet.
With continued reference to Fig. 3, differential pressure chip 1 is arranged in the silicone oil slot at differential pressure end 20, and is located at the first of the second oil circuit 60 In outlet, differential pressure chip 1 closes the first outlet of the second oil circuit 60, and the depth of silicone oil slot is greater than the height of differential pressure chip 1, poor Convoluted diaphragm 3 is arranged in the top of pressure side 20, and pressing ring 4 is arranged in the top of convoluted diaphragm 3, by pressing ring 4, convoluted diaphragm 3 and differential pressure end 20 upper surface is welded to each other, and realizes the fixation of convoluted diaphragm 3 and the sealing of silicone oil slot.
With continued reference to Fig. 4, is also set up in the silicone oil slot at differential pressure end and define pin mounting hole, electrical definition there are six electrical Pin is arranged in mounting hole and seals, and electrical one end for defining pin 8 is connect by gold thread 9 with differential pressure chip, and electrical definition is drawn The bottom that the other end of foot 8 passes through differential pressure end can be connect with external measurement devices.
By the entrance of the first oil circuit 50 by Silicone oil injection, differential pressure chip 1 is immersed in silicone oil 12, using pin 6 by silicone oil It is sealed, to guarantee the leakproofness of oil-filled cavity.
With continued reference to Fig. 5, static pressure chip 10 and temperature and resistance 11 are arranged in the silicone oil slot at static pressure end 30, the setting of silicone oil slot There are 6 electrical definition pin mounting holes, the electrical pin that defines is arranged in mounting hole and seals, one end of 4 electrical definition pins 8 It is connect by gold thread 9 with static pressure chip, 2 electrical one end for defining pin 8 are connected with the pin of temperature and resistance 11,6 electricity The bottom that the other end that gas defines pin passes through static pressure end 30 can be connect with external measurement devices.
Since the height of static pressure chip 10 is greater than the height of silicone oil slot, groove is set in the bottom of silicone oil slot, by static pressure core Piece 10 is arranged in a groove, meets the requirements of the standard pedestal integrally.
Convoluted diaphragm 3 is arranged in the top of 30 silicone oil slot of static pressure end, and pressing ring 4 is arranged in the top of convoluted diaphragm 3, by pressing ring 4, wave The upper surface at line diaphragm 3 and differential pressure end 20 is welded to each other, and realizes the fixation of convoluted diaphragm 3 and the sealing of silicone oil slot.
By the entrance of the second oil circuit 60 by Silicone oil injection, the second outlet of silicone oil from the second oil circuit 60 enters static pressure end 30 Silicone oil slot in, static pressure chip 10 and temperature and resistance 11 are immersed in silicone oil 12, are carried out the entrance of the second oil circuit 60 using pin 6 Sealing, to guarantee the leakproofness of oil-filled cavity.
The temperature and resistance is platinum resistance thermometer sensor, PT1000.
Below to a kind of elaboration that the measuring principle of composite type pressure sensor carries out provided by the invention.
1, differential pressure measurement
Differential pressure chip is by the pressure from both ends, respectively silicon in the pressure of 20 silicone oil of differential pressure end and the second oil circuit 60 The pressure of oil, the pressure at differential pressure end 20 is passed to by convoluted diaphragm 3 charges silicone oil, then pressure is passed to differential pressure by silicone oil 12 Chip 1 after differential pressure chip is pressurized, converts electric signal output variation for the pressure difference variation at both ends, to complete differential pressure pressure The detection of power.Need to guarantee that differential pressure end pressing force is greater than or equal to static pressure end pressure when differential pressure measurement, and pressure at two ends difference is most It is no more than turnout greatly and determines range ability.
2, static pressure measurement
Static pressure end must apply same size pressure at differential pressure end and static pressure end simultaneously, guarantee static pressure when pressurizeing measurement Accurate measurement, and to influence≤0.5mV/MPa of differential pressure end output.
The differential pressure end 20 and static pressure end 30 of sensor apply uniform pressure simultaneously when static pressure measurement, and the pressure at static pressure end 30 is logical It crosses convoluted diaphragm and passes to and charge silicone oil, then pressure is passed into static pressure measurement chip by silicone oil, after chip is pressurized, by static pressure Variation be converted into electric signal output variation, to complete the pressure detecting of static pressure.
3, temperature measures
High-precision platinum resistance thermometer sensor, PT1000 is selected in temperature measurement, and temperature and resistance 11 and static pressure measurement chip share a chamber Body after charging silicone oil, not only ensure that the electrical characteristic of temperature and resistance, but also will not influence the electric insulating quality of product entirety, and It is built in the intracorporal temperature and resistance of sensor oil-filled chamber, it will be more accurate and reliable to the temperature measurement of medium.
A kind of composite type pressure sensor provided by the invention, using integral sintering pedestal, which meets differential pressure survey The oil-filled path of the pressure chamber at differential pressure end and the pressure chamber at static pressure end is separated from each other by amount not by the function influence at static pressure measurement end, poor Pressure side uses independent first oil circuit;The measurement of static pressure must apply same size pressure, static pressure end in differential pressure and static pressure end simultaneously The second oil circuit connection is used to differential pressure end, one end of differential pressure chip seals the first outlet of the second oil circuit, and the second oil circuit Second outlet is connected to static pressure end, and the compatible effect of both differential pressure and static pressure, Er Qiebao can be fully achieved in such structure design The independence for having demonstrate,proved differential pressure oil circuit avoids the influence by static pressure measurement.
Composite type pressure sensor provided by the invention not only guarantees that differential pressure is surveyed compared with current single differential pressure measurement element The performance indexes of amount meets measurement requirements, additionally it is possible to implement precise measurement to static pressure, static pressure measurement precision can reach 0.25%FS can reach ± 1 DEG C simultaneously for the measurement accuracy of media environment temperature.And differential pressure measurement precision under a static pressure is not It is impacted.Composite type pressure sensor combines three discrete measuring systems together, is incorporated into a measuring cell, effectively Reduce client's operation cost, and the structure of small size, use more convenient to install.
Composite type pressure sensor uses Stainless steel 316 L, can meet answering for most of non-corrosive Medium Measurement environment With;Base interior encapsulates three kinds of measuring cells simultaneously, not only meets multi-party measurement demand, and do not do mutually between each measuring signal It disturbs.
The above content is merely illustrative of the invention's technical idea, and this does not limit the scope of protection of the present invention, all to press According to technical idea proposed by the present invention, any changes made on the basis of the technical scheme each falls within claims of the present invention Protection scope within.

Claims (10)

1. a kind of composite type pressure sensor, which is characterized in that including pedestal (5), differential pressure chip (1) and static pressure chip (10);
One end of the pedestal (5) is differential pressure end (20), and the other end is static pressure end (30), and pedestal is provided with the first oil circuit on (5) (50) it is connected to the second oil circuit (60), the first oil circuit (50) with differential pressure end, the second oil circuit (60) is by differential pressure end (20) and static pressure end (30) it is connected to;
The differential pressure chip (1) is arranged in the pressure chamber of differential pressure end (20), and closes the second oil circuit (60) and differential pressure end (20) Intercommunicating pore;Static pressure chip (10) is arranged in the pressure chamber of static pressure end (30);
The pressure top of chamber of the differential pressure end (20) and static pressure end (30) is fixedly installed convoluted diaphragm (3).
2. composite type pressure sensor according to claim 1, which is characterized in that the differential pressure end (20) or static pressure end (30) Pressure chamber in be additionally provided with temperature and resistance (11).
3. composite type pressure sensor according to claim 2, which is characterized in that the temperature and resistance (11) is platinum resistance thermometer sensor, PT1000。
4. composite type pressure sensor according to claim 1, which is characterized in that the top of the convoluted diaphragm (3) is arranged Pressing ring (4), pressing ring, convoluted diaphragm (3) and pedestal (5) are welded to each other.
5. composite type pressure sensor according to claim 1, which is characterized in that the differential pressure end (20) and static pressure end (30) It is connected by oil circuit board (40), first oil circuit (50) and the second oil circuit are arranged on oil circuit board (40), the first oil circuit (50) it is arranged on the side wall of oil circuit board (40) with the oil inlet of the second oil circuit (60), the oil outlet of the first oil circuit (50) and poor The pressure chamber of pressure side is connected to, and two oil outlets of the second oil circuit (60) connect with the pressure chamber of differential pressure end (20) and static pressure end (30) respectively It is logical.
6. composite type pressure sensor according to claim 5, which is characterized in that first oil circuit (50) and the second oil circuit Oil inlet pass through pin and blocked.
7. composite type pressure sensor according to claim 1, which is characterized in that the differential pressure end (20) and static pressure end (30) Pressure chamber in be provided with multiple electrical definition pins, electrical one end for defining pin and differential pressure chip (1) or static pressure chip (10) it connects, the bottom that the electrical other end for defining pin passes through pressure chamber is connected with corresponding detection device.
8. composite type pressure sensor according to claim 7, which is characterized in that the electrical definition pin (8) passes through gold Line (9) is connect with differential pressure chip (1) or static pressure chip (10).
9. composite type pressure sensor according to claim 1, which is characterized in that be provided in the pressure chamber at the static pressure end recessed Slot, static pressure chip (10) are arranged in a groove.
10. composite type pressure sensor according to claim 1, which is characterized in that the differential pressure end (20) and static pressure end (30) silicone oil (12) are perfused in pressure chamber.
CN201910355010.XA 2019-04-29 2019-04-29 A kind of composite type pressure sensor Pending CN110285916A (en)

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CN201910355010.XA CN110285916A (en) 2019-04-29 2019-04-29 A kind of composite type pressure sensor

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Application Number Priority Date Filing Date Title
CN201910355010.XA CN110285916A (en) 2019-04-29 2019-04-29 A kind of composite type pressure sensor

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115824317A (en) * 2023-02-16 2023-03-21 四川新川航空仪器有限责任公司 Multifunctional sensor
CN115962880A (en) * 2021-10-11 2023-04-14 精量电子(深圳)有限公司 Sensing device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1055060A (en) * 1990-03-19 1991-10-02 株式会社日立制作所 Integrated compound sensor and the static pressure and differential pressure transmitter and the device systems that use this integrated compound sensor
US6543291B1 (en) * 2000-01-06 2003-04-08 Kulite Semiconductor Products, Inc. Wet-to-wet pressure sensing assembly
EP1394522A2 (en) * 2002-08-30 2004-03-03 Yokogawa Electric Corporation Differential pressure/pressure transmitter
CN2758712Y (en) * 2004-12-01 2006-02-15 中国石油天然气集团公司 Intelligent differential pressure transmitter
CN107063555A (en) * 2016-02-10 2017-08-18 森萨塔科技有限公司 For the system, apparatus and method using two MEMS sensing elements measurement differential pressures and absolute pressure
CN208606927U (en) * 2018-08-27 2019-03-15 麦克传感器股份有限公司西安分公司 It is a kind of for measuring the miniaturized pressure sensing element of differential pressure signal

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1055060A (en) * 1990-03-19 1991-10-02 株式会社日立制作所 Integrated compound sensor and the static pressure and differential pressure transmitter and the device systems that use this integrated compound sensor
US6543291B1 (en) * 2000-01-06 2003-04-08 Kulite Semiconductor Products, Inc. Wet-to-wet pressure sensing assembly
EP1394522A2 (en) * 2002-08-30 2004-03-03 Yokogawa Electric Corporation Differential pressure/pressure transmitter
CN2758712Y (en) * 2004-12-01 2006-02-15 中国石油天然气集团公司 Intelligent differential pressure transmitter
CN107063555A (en) * 2016-02-10 2017-08-18 森萨塔科技有限公司 For the system, apparatus and method using two MEMS sensing elements measurement differential pressures and absolute pressure
CN208606927U (en) * 2018-08-27 2019-03-15 麦克传感器股份有限公司西安分公司 It is a kind of for measuring the miniaturized pressure sensing element of differential pressure signal

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115962880A (en) * 2021-10-11 2023-04-14 精量电子(深圳)有限公司 Sensing device
CN115824317A (en) * 2023-02-16 2023-03-21 四川新川航空仪器有限责任公司 Multifunctional sensor

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Application publication date: 20190927