CN205538072U - Utilize foil gage to measure device of microchannel gas distribution formula pressure - Google Patents
Utilize foil gage to measure device of microchannel gas distribution formula pressure Download PDFInfo
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- CN205538072U CN205538072U CN201620312000.XU CN201620312000U CN205538072U CN 205538072 U CN205538072 U CN 205538072U CN 201620312000 U CN201620312000 U CN 201620312000U CN 205538072 U CN205538072 U CN 205538072U
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- pmma
- pressure
- foil gage
- straight channel
- microchannel
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Abstract
The utility model discloses an utilize the measuring device of the microchannel gas distribution formula pressure of high sensitivity foil gage, the device includes standard pressure source, syringe pump, PMMA chip, multichannel strain gauge and computer, the PMMA chip comprises upper and lower two -layer PMMA base plate, add section chief's direct current way on the PMMA of the lower floor base plate, say at long direct current that the both sides a plurality of sizes of processing equal, evenly distributed and the square chamber that feeds through with long direct current way, correspond the position with square chamber and set up the rectangular hole on upper PMMA base plate, resistance strain gauge is pasted to the rectangular hole upper seal, when gas flow during through the runner, thereby the velocity of flow can make the foil gage produce corresponding microstrain to the foil gage generate pressure after stable, utilize the multichannel strain -ga(u)ge measurement to come from the value of meeting an emergency of foil gage. Since among this measuring device sensitivity and the precision of foil gage and multichannel strain gauge can both reach very high, so numerical value and the distribution characteristics of measuring gas pressure in the microchannel that can be accurate.
Description
Technical field
This utility model relates to application and the microchannel gas pressure measurement technology of foil gauge, a kind of utilizes the microstrain technology of foil gauge to measure the device of microchannel gas pressure distribution.
Background technology
Micro-fluidic technologies refers to control under microscopic dimensions, operate and the technology of detection of complex fluid, is the brand-new cross discipline grown up on the basis of microelectronics, micromechanics, micro Process.And microfluid pressure measxurement is also the most important research direction in microchannel, especially for the control of micro-pressure, such as biology, biomedical chip, micromechanics electronics, microminiature spacecraft and the pressure measxurement etc. of organism microcirculqtory system.
Pressure measxurement the most both at home and abroad is from simple mechanical measurement (such as spring-tube type, diaphragm type, diaphragm pressure gage), develop into the pressure transducer of various different principle, such as resistance-strain type, condenser type, piezoelectric type, diffused silicon piezoresistive pressure sensor etc..These existing large scale pressure tester comparative maturities, but many difficulties are existed for the micro pressure measuring device under microchannel or minute yardstick.First microfluid force value is small is difficult to detection, and the sensitivity of load cell, precision etc. require far above conventional yardstick or the application of large scale.And much field high spatial resolution to be related to and measurements of temporal resolution: the pressure measxurement of the sample flow in such as multiphase flow or chip lab, it is all unsteady flo w (for the time) and non-homogeneous (for space), therefore, the frequency response for the time measured and space requires also far above conventional yardstick.Therefore developing high frequency sound, the pressure gauge that spatial resolution is high is particularly significant.
For measuring difficult point above, the micro-pressure apparatus for measuring distribution of distributed (or array) is used effectively to solve.This device can realize in a region pressure measxurement a little, and there is the highest frequency response, the research for minute yardstick multiphase flow and complicated microfluid pressure distribution is significant.
Summary of the invention
The purpose of this utility model is for the deficiencies in the prior art, it is provided that a kind of device utilizing foil gauge to measure microchannel gas distributed pressure.
The purpose of this utility model is achieved through the following technical solutions: a kind of device utilizing foil gauge to measure microchannel gas distributed pressure, this device includes standard pressure generator, syringe pump, PMMA chip, multichannel deformeter and computer；Described PMMA chip is formed by upper and lower two-layer PMMA substrate bonded seal；Section chief's straight channel is added, in some equal in magnitude, the square chambeies that are uniformly distributed and connect with long straight channel of long straight channel both sides processing on lower floor's PMMA substrate；Upper strata PMMA substrate arranges rectangular opening with side's chamber correspondence position, rectangular opening seals adhering resistance strain sheets；Described long straight channel be respectively arranged at two ends with tunnel inlets and runner exit；Described standard pressure generator or syringe pump connect tunnel inlets by gas conduit；Described resistance strain gage is by foil gauge lead-in wire connecting multi-channel deformeter, and multichannel deformeter connects computer.
Further, the square chamber interlaced arrangement of described long straight channel both sides.
The beneficial effects of the utility model are: foil gauge is evenly distributed on the both sides of long straight channel, when gas flows through runner, foil gauge can be produced pressure so that foil gauge produces corresponding microstrain after flow speed stability, then utilize multichannel strain-ga(u)ge measurement from the strain value of foil gauge.Owing in this measurement apparatus, foil gauge and the sensitivity of multichannel deformeter and precision are attained by the highest, it is possible to measure numerical value and the characteristic distributions of gas pressure in microchannel accurately.
Accompanying drawing explanation
Fig. 1 is this utility model device normalization schematic diagram；
Fig. 2 is this utility model device mapping schematic diagram；
Fig. 3 is the overall structure schematic diagram of PMMA chip；
In figure: standard pressure generator 1, gas conduit 2, PMMA chip 3, tunnel inlets 4, resistance strain gage 5, runner exit 6, foil gauge lead-in wire 7, multichannel deformeter 8, computer 9, syringe pump 10, side chamber 11, long straight channel 12.
Detailed description of the invention
Below by accompanying drawing, this utility model is described in detail.
As Figure 1-3, this utility model provides a kind of device utilizing foil gauge to measure microchannel gas distributed pressure, and this device includes standard pressure generator 1, syringe pump 10, PMMA chip 3, multichannel deformeter 8 and computer 9.Described PMMA chip 3 is formed by upper and lower two-layer PMMA substrate bonded seal；Section chief's straight channel 12 is added, in some equal in magnitude, the square chambeies 11 that are uniformly distributed and connect with long straight channel 12 of long straight channel 12 both sides processing on lower floor's PMMA substrate；Upper strata PMMA substrate arranges rectangular opening with side's chamber 11 correspondence position, rectangular opening seals adhering resistance strain sheets 5；Described long straight channel 12 be respectively arranged at two ends with tunnel inlets 4 and runner exit 6；Described standard pressure generator 1 or syringe pump 10 connect tunnel inlets 4 by gas conduit 2；Described resistance strain gage 5 is gone between 7 connecting multi-channel deformeters 8 by foil gauge, and multichannel deformeter 8 connects computer 9.
Embodiment
The length of PMMA chip 3 is respectively as follows: 80mm × 30mm × 4mm, and length and width and the degree of depth of long straight channel 12 are respectively as follows: 68mm × 1mm × 500um.Long straight channel 12 both sides process that six size shape are identical and equally distributed side chamber 11 respectively, and square chamber 11 interlaced arrangement of both sides, the length in each side chamber 11 is respectively as follows: 2mm × 1mm × 500um.Two-layer PMMA substrate carries out bonded seal by high temperature hot pressing up and down.A length of 3.3mm of resistance strain gage 5, a width of 2.4mm, cavity can not only well be sealed by this model resistance strain gage, and size is little, highly sensitive.
Work process of the present utility model is as follows:
(1) first measurement apparatus is demarcated.As shown in Figure 1, wherein the tunnel inlets 4 in PMMA chip 3 is connected with standard pressure generator 1, runner exit 6 potted component seals, and the lead-in wire of the most all of resistance strain gage 5 is all connected to the Measurement channel interface in multichannel deformeter 8, and the data wire of multichannel deformeter 8 accesses computer 9 again.After all links connect, starting gradually to be incremented by from zero handkerchief by standard pressure generator 1, different pressure versus resistance foil gauges 5 produces different strain values, and the maximum efficient deformation of resistance strain gage 5 is i.e. the maximum of corresponding pressure.It is analyzed processing by computer by the force value obtained and corresponding strain value, draws respective function curve, both can complete the demarcation of strain value corresponding pressure value.
(2) this measurement apparatus Measurement channel gas pressure is utilized after having demarcated.As in figure 2 it is shown, standard pressure generator 1 is changed into microfluid syringe pump 10 access tunnel inlets 4, runner exit 6 and air being communicated, other parts are constant.Syringe pump 10 is the power source of gas in experiment channel.When experiment starts, opening syringe pump 10, gas enters the runner in PMMA chip 3.After stablizing after a while, owing to there is crushing from tunnel inlets end to the port of export, or there is complex pressure distribution for heterogeneous, multicomponent gas, the pressure that the position that therefore distance tunnel inlets end is different produces is different, causes the resistance strain gage 5 of correspondence position to produce different deformation.Multichannel deformeter 8, by corresponding for real time record strain value, utilizes the calibration function relation of force value and strain value can obtain pressure distribution and the feature thereof of fluid.
Claims (2)
1. one kind utilizes the device that foil gauge measures microchannel gas distributed pressure, it is characterized in that, this device includes standard pressure generator (1), syringe pump (10), PMMA chip (3), multichannel deformeter (8) and computer (9)；Described PMMA chip (3) is formed by upper and lower two-layer PMMA substrate bonded seal；Section chief's straight channel (12) is added, in some equal in magnitude, the square chambeies (11) that are uniformly distributed and connect with long straight channel (12) of long straight channel (12) both sides processing on lower floor's PMMA substrate；Upper strata PMMA substrate arranges rectangular opening with square chamber (11) correspondence position, rectangular opening seals adhering resistance strain sheets (5)；Described long straight channel (12) be respectively arranged at two ends with tunnel inlets (4) and runner exit (6)；Described standard pressure generator (1) or syringe pump (10) are by gas conduit (2) connection tunnel inlets (4)；Described resistance strain gage (5) connects computer (9) by foil gauge lead-in wire (7) connecting multi-channel deformeter (8), multichannel deformeter (8).
A kind of device utilizing foil gauge to measure microchannel gas distributed pressure the most according to claim 1, it is characterised in that square chamber (11) interlaced arrangement of described long straight channel (12) both sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620312000.XU CN205538072U (en) | 2016-04-13 | 2016-04-13 | Utilize foil gage to measure device of microchannel gas distribution formula pressure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620312000.XU CN205538072U (en) | 2016-04-13 | 2016-04-13 | Utilize foil gage to measure device of microchannel gas distribution formula pressure |
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| Publication Number | Publication Date |
|---|---|
| CN205538072U true CN205538072U (en) | 2016-08-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620312000.XU Expired - Fee Related CN205538072U (en) | 2016-04-13 | 2016-04-13 | Utilize foil gage to measure device of microchannel gas distribution formula pressure |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109470406A (en) * | 2018-09-17 | 2019-03-15 | 西北工业大学 | For static calibration system in the air of wall shear stress microsensor |
| CN111103234A (en) * | 2019-12-13 | 2020-05-05 | 中国电子科技集团公司第七研究所 | Testing device and testing method for bonding strength of microfluidic chip |
| CN111998985A (en) * | 2019-09-30 | 2020-11-27 | 南方科技大学 | Microchannel pressure sensor and microfluidic chip |
-
2016
- 2016-04-13 CN CN201620312000.XU patent/CN205538072U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109470406A (en) * | 2018-09-17 | 2019-03-15 | 西北工业大学 | For static calibration system in the air of wall shear stress microsensor |
| CN111998985A (en) * | 2019-09-30 | 2020-11-27 | 南方科技大学 | Microchannel pressure sensor and microfluidic chip |
| CN111103234A (en) * | 2019-12-13 | 2020-05-05 | 中国电子科技集团公司第七研究所 | Testing device and testing method for bonding strength of microfluidic chip |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160831 Termination date: 20180413 |
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| CF01 | Termination of patent right due to non-payment of annual fee |