CN2735342Y - Electric wetting micro-drop driver on dielectric layer - Google Patents
Electric wetting micro-drop driver on dielectric layer Download PDFInfo
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- CN2735342Y CN2735342Y CN 200420117901 CN200420117901U CN2735342Y CN 2735342 Y CN2735342 Y CN 2735342Y CN 200420117901 CN200420117901 CN 200420117901 CN 200420117901 U CN200420117901 U CN 200420117901U CN 2735342 Y CN2735342 Y CN 2735342Y
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- dielectric layer
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- drop
- substrate
- electric wetting
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Abstract
The utility model discloses an electric wetting micro-drop driver on dielectric layer, belonging to the range of micro-complete analysis and micro-electromechanical assembly. A monocrystal silicon has a lay of thermal oxidation SiO 2 lower counter electrode substrate and the substrate is an array of Ti/Pt lower electrode where a thin film medium layer covers up; a fluorocarbon polymer thin film anti-water layer covers up the medium layer; an upper counter electrode plate with anti-water layer and ITO is supported above the lower electrode by a supporter. The micro-drop driver has the advantages of low drop driving voltage, simple producing technology and low cost, and can further integrate the other operations of liquids into a chip.
Description
Technical field
The utility model belongs to micro-total analysis and microelectromechanicdevices devices scope, the electric wetting micro-droplet drive on particularly a kind of dielectric layer.
Background technology
Since Manz and Widmer propose micro-total analysis system (miniaturized total analysis system first in early 1990s, μ TAS) since the notion, Nian Zhongyi develops into one of sciemtifec and technical sphere of forefront on the our times surplus short ten.The purpose of μ TAS is by the microminiaturization of chemical analysis apparatus and integrated, to greatest extent the function of assay laboratory is transferred in the portable analytical equipment, even is integrated on the chip of heart size.Therefore, the μ TAS chip lab (LOC) that is otherwise known as.At present, μ FAS has wide practical use aspect the amplification of chemical analysis, biochemistry detection, drug delivery, molecular separation, nucleic acid molecules, ordering or synthetic, environment measuring and other.
Manipulation to trace even trace of liquid is to realize the basis of micro-total analysis system and the key issue that must solve with control.According in the micro-total analysis system to the mode of operation of liquid, micro-total analysis system can be divided into two kinds of continuous-flow system and discrete flow systems.At present, the micro-total analysis system of having reported is mostly based on continuous-flow system, and liquid flows in the sealing raceway groove that has been full of sample or chemical reagent aqueous solution, and utilizes devices such as Micropump and little valve to produce and control flowing of fluid.But the shortcoming of continuous-flow system is: (1) can produce some electrochemical reactions because electrode directly contacts with solution; (2) need devices such as Micropump and little valve, complex manufacturing technology, poor reliability; (3) though can reduce liquid remaining in the raceway groove by reducing channel dimensions, " dead band " phenomenon is inevitable; (4) continuity of liquid has limited the operation to liquid, and influencing each other between the raceway groove is serious.In order to address the above problem, in recent years to the manipulation of the little drop of discretize be controlled at the emphasis that becomes research in the world day by day.Because very similar with operating concept traditional in the biochemical analysis laboratory, the little liquid droplet system of discretize can directly apply to existing biochemical analysis rules in the chip lab.Different with the continuous microflow body, the liquid that it only needs seldom or not to need to add comes pre-service or fills microchannel, thereby can increase substantially the utilization factor to sample and reagent.Adopt at present pneumatic, dielectrophoresis (Dielectrophoresis), medium wetting (the electrowetting on dielectric that powers on, EWOD) etc. method can realize the generation of the little drop of discretize and transport, but have only EWOD (promptly controlling top liquid and deielectric-coating wettability of the surface) by changing the electromotive force of microelectrode array below the deielectric-coating really realized drop generation, transport, merge and cut apart the integrated and robotization of these four basic operations, thereby established solid foundation based on the chip lab of little drop for manufacturing.
At present, abroad the little drop device that drives based on EWOD is all by the glass substrate with microelectrode array with have tin indium oxide (ITO) transparent conducting glass cover plate and form, and drop is clipped between them; The crucial high hydrophobe deielectric-coating material that contacts with liquid all is to adopt Teflon AF1600 (teflon), utilizes rotation to remove the method for applying and is prepared into membrane structure.Because the price of Teflon AF1600 very expensive (be about gold 6 times) and consumption are bigger, use it for the research of micro-total analysis system and the industrialization of chip lab and can run into very big obstruction undoubtedly.In addition, because the dielectric strength of Teflon AF1600 is very low, must be at its following at first deposit SiO
2Wait other dielectric film, and the glass non-refractory, preparing these deielectric-coating can only carry out under lower temperature, will certainly cause dielectric-coating structure relatively more loose and insulating property are relatively poor, thereby have certain electric leakage and breakdown problem.
Summary of the invention
The purpose of this utility model is to propose the electric wetting micro-droplet drive on a kind of dielectric layer, it is characterized in that: the structure of described micro-droplet drive is that the dielectric layer on silicon substrate 1 is a bottom crown substrate 2, it on bottom crown substrate 2 Ti/Pt bottom electrode array 3, above thin film dielectric layer 4 covers, the fluorocarbon polymer film is detested water layer 5 and is covered on the dielectric layer 4, the top crown glass sheet 7 that band is detested water layer 5 and ITO layer 6 is supported on the top of bottom electrode array 3 by stilt 8, and bottom electrode array 3 is connected with outside lead 9.
Described thin film dielectrics layer is Si
3N
4Film or SiO
2Film.
Described silicon substrate is monocrystalline silicon or low-resistance polysilicon.
The dielectric layer of described bottom crown substrate is thermal oxide SiO
2Or monocrystalline silicon.
Described bottom crown material is Ti/Pt electrode or polysilicon electrode.
The micro-droplet drive that the beneficial effects of the utility model are based on EWOD adopts monocrystalline silicon as substrate, the fluorocarbon polymer film of gas sensing coupled plasma chemical vapor deposition (ICP-CVD) technology deposit is as detesting water layer, has that the drop driving voltage is low, manufacture craft is simple and easy, cost is low, can be further other operations of liquid be integrated in the characteristics on the chip.
Description of drawings
Fig. 1 is the structural representation of micro-droplet drive.
Fig. 2 is the structural representation of the top crown glass sheet of Fig. 1.
Fig. 3 is the bottom crown part-structure synoptic diagram of micro-droplet drive.
Embodiment
The utility model proposes the electric wetting micro-droplet drive on a kind of dielectric layer.Below in conjunction with embodiment and accompanying drawing the utility model is described in detail as follows:
Based on the structure of the micro-droplet drive of EWOD as shown in Figure 1, present embodiment adopts Ti and Pt or polysilicon as bottom electrode, and bottom electrode array 3 is connected with outside lead 9.The Si of LPCVD deposit
3N
4Film covers above the bottom electrode array 3 as dielectric layer 4, the fluorocarbon polymer film is detested water layer 5 and is covered on the dielectric layer 4, the top crown glass sheet 7 (as shown in Figure 2) that band is detested water layer 5 and ITO layer 6 is supported on the top of bottom electrode array 3 by stilt 8, and bottom electrode array 3 is connected (as shown in Figure 3) with outside lead 9.The drop 10 of deionized water is sandwiched in the middle of top electrode, two plate electrodes of bottom electrode array, and top electrode is as ground electrode, and bottom electrode is made up of a plurality of microelectrode arrays that can independently control.Each electrode is square, and the spacing between the electrode is 20 μ m.Adopt interdigitated configuration between two electrodes, make drop can be easier from an electrode movement to another electrode.For fear of the contact between liquid and the electrode with obtain good breakdown characteristics, all be coated with the Si of one deck as dielectric layer at upper and lower electrode surface
3N
4Film.In order successfully to drive drop, the size of the spacing of bottom crown and drop in the adjustment makes initial drop at least on three adjacent electrodes, and drop is contacted with top crown.For fear of the volatilization of drop with the resistance when reducing liquid drop movement, be another liquid immiscible around the drop with it, in the present embodiment silicone oil.
As shown in fig. 1, when drop on three adjacent electrodes, when applying electromotive force on the counter electrode of drop right side, and in the middle of the drop and during the counter electrode ground connection of left side, the electromotive force that applies makes the contact angle between drop and the solid become 85 ° from 110 °.And the drop left side still is 110 ° owing to there is not the contact angle of electromotive force effect and solid surface to remain unchanged.Therefore, this asymmetric deformation of drop has produced a pressure differential in the both sides of drop, and drop is moved towards right side charged electrode direction.
The preparation technology of present embodiment is:
1. adopt the substrate of monocrystalline silicon as bottom crown.
2. the SiO of thermal oxide growth 6000 under 1050 ℃ of conditions
2
3. the platinum that titanium that sputter 200 are thick and 1800 are thick is as bottom electrode, and utilizes positive glue stripping technology to make the figure of microelectrode array.Each electrode size is 1.4 * 1.4mm
2, the spacing between the electrode is 20 μ m; In scheme 2 with the polysilicon bottom electrode, the Ti/Pt electrode in the replacement scheme 1.
4. on microelectrode array, utilize LPCVD technology to cover the thick Si of one deck 2800
3N
4Film is as dielectric layer.
5. utilize ICP-CVD, at ambient temperature at Si
3N
4The fluorocarbon polymer film that deposit one deck 200 are thick on the film is as detesting water layer.Adopt the Mesc Multiples ICP equipment of Britain STS company during deposit, C
4F
8As reacting gas, flow is 80sccm, and pressure is 9Pa, and radio-frequency power is 600W.
6. the substrate of top crown is the glass sheet that has transparent conductive film ITO.Under above-mentioned identical process conditions, detest water layer with the conduct of the ICP-CVD fluorocarbon polymer film that deposit one deck 200 are thick on ITO.
7. on bottom crown, make stilt, top crown is placed on the stilt with double sticky tape, the support thickness decision that the gap between the last bottom crown is made by double sticky tape, thickness is 150 μ m.
Claims (5)
1. the electric wetting micro-droplet drive on the dielectric layer, it is characterized in that: the structure of described micro-droplet drive is that the dielectric layer on silicon substrate (1) is bottom crown substrate (2), going up at bottom crown substrate (2) is Ti/Pt bottom electrode array (3), above thin film dielectric layer (4) covers, the fluorocarbon polymer film is detested water layer (5) and is covered on the dielectric layer (4), the top crown glass sheet (7) that band is detested water layer (5) and ITO layer (6) is supported on the top of bottom electrode array (3) by stilt (8), and bottom electrode array (3) is connected with outside lead (9).
2. according to the electric wetting micro-droplet drive on the described dielectric layer of claim 1, it is characterized in that: described thin film dielectrics layer is Si
3N
4Film or SiO
2Film.
3. according to the electric wetting micro-droplet drive on the described dielectric layer of claim 1, it is characterized in that: described silicon substrate is monocrystalline silicon or low-resistance polysilicon.
4. according to the electric wetting micro-droplet drive on the described dielectric layer of claim 1, it is characterized in that: the dielectric layer of described bottom crown substrate is thermal oxide SiO
2Or monocrystalline silicon.
5. according to the electric wetting micro-droplet drive on the described dielectric layer of claim 1, it is characterized in that: described bottom crown material is Ti/Pt electrode or polysilicon electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420117901 CN2735342Y (en) | 2004-10-20 | 2004-10-20 | Electric wetting micro-drop driver on dielectric layer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420117901 CN2735342Y (en) | 2004-10-20 | 2004-10-20 | Electric wetting micro-drop driver on dielectric layer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2735342Y true CN2735342Y (en) | 2005-10-19 |
Family
ID=35265216
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| CN 200420117901 Expired - Fee Related CN2735342Y (en) | 2004-10-20 | 2004-10-20 | Electric wetting micro-drop driver on dielectric layer |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7766457B2 (en) | 2007-06-29 | 2010-08-03 | Foxconn Technology Co., Ltd. | Ink-jet head and printer using the same |
| CN101374397B (en) * | 2007-08-24 | 2010-08-25 | 富准精密工业(深圳)有限公司 | Apparatus for cooling miniature fluid and used micro liquid droplet generator thereof |
| CN101559914B (en) * | 2009-05-15 | 2011-09-21 | 中国科学院上海微系统与信息技术研究所 | Digital micro-droplet drive with deep submicron pore structure and manufacturing method thereof |
| CN102350380A (en) * | 2011-09-26 | 2012-02-15 | 复旦大学 | Transparent uniplanar and unipolar digital microfluidic chip and control method thereof |
| CN101945767B (en) * | 2007-12-23 | 2013-10-30 | 先进液体逻辑公司 | Droplet actuator configurations and methods of conducting droplet operations |
| CN101808751B (en) * | 2007-08-24 | 2014-01-29 | 先进液体逻辑公司 | Bead manipulations on a droplet actuator |
-
2004
- 2004-10-20 CN CN 200420117901 patent/CN2735342Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7766457B2 (en) | 2007-06-29 | 2010-08-03 | Foxconn Technology Co., Ltd. | Ink-jet head and printer using the same |
| CN101332708B (en) * | 2007-06-29 | 2010-12-01 | 富准精密工业(深圳)有限公司 | Ink jet head and printing device using the ink jet head |
| CN101374397B (en) * | 2007-08-24 | 2010-08-25 | 富准精密工业(深圳)有限公司 | Apparatus for cooling miniature fluid and used micro liquid droplet generator thereof |
| CN101808751B (en) * | 2007-08-24 | 2014-01-29 | 先进液体逻辑公司 | Bead manipulations on a droplet actuator |
| CN101945767B (en) * | 2007-12-23 | 2013-10-30 | 先进液体逻辑公司 | Droplet actuator configurations and methods of conducting droplet operations |
| CN101559914B (en) * | 2009-05-15 | 2011-09-21 | 中国科学院上海微系统与信息技术研究所 | Digital micro-droplet drive with deep submicron pore structure and manufacturing method thereof |
| CN102350380A (en) * | 2011-09-26 | 2012-02-15 | 复旦大学 | Transparent uniplanar and unipolar digital microfluidic chip and control method thereof |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |