CN2720520Y - Radio-frequency identification induction system - Google Patents
Radio-frequency identification induction system Download PDFInfo
- Publication number
- CN2720520Y CN2720520Y CN 200420084411 CN200420084411U CN2720520Y CN 2720520 Y CN2720520 Y CN 2720520Y CN 200420084411 CN200420084411 CN 200420084411 CN 200420084411 U CN200420084411 U CN 200420084411U CN 2720520 Y CN2720520 Y CN 2720520Y
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- radio
- wafer
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- identification
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Abstract
The utility model relates to a radio-frequency identification induction system, comprising a loading control device, an output control device, an induction device, and a processing device. The loading and the output control devices respectively produce loading and output triggering signals; the induction device reads the identification code of the good and the data recorded in the radio-frequency identification filemark. When the processing device receives the loading triggering signals, the loading indicating device and the induction device are started, the identification code of the good is received, the identification code of the good and the loading triggering signals are sent to the host system, and the loading procedure of the good is performed; when the processing device receives the output triggering signals, the output indicating device and the induction device are started, the identification code of the good is received, the identification code of the good and the output triggering signals are sent to the host system, and the output procedure of the good is performed.
Description
Technical field
The utility model relates to a kind of cargo handling system, particularly relevant for a kind of by the RFID tag of installing on radio-frequency (RF) identification induction system and the goods, control the system of goods handling procedure.
Background technology
At the wafer factory, the wafer of sign Mission Number is all arranged on each wafer batch, and each machine table is selected the processing procedure job sequence (recipe) of correspondence just according to the wafer Mission Number, carries out the processing of wafer.The affirmation of wafer Mission Number, wafer process board in robotization is most important especially, the mistake of identification of wafer Mission Number or input, to make board use unsuitable processing procedure job sequence to carry out wafer process, and the wafer product that the wrong processing procedure job sequence of process was handled, gently then need to handle again, heavy then can't retrieve and must be destroyed.No matter be to handle again or destroy, all caused expending of board production capacity and cost.
Bar code (bar code) is a kind of traditional wafer batch discrimination method.According to the method, on each wafer transportation casket (cassette), post the bar coded sticker that is loaded with the wafer Mission Number, when being transported to board, wafer transportation casket carries when unloading portion, by manually with the bar code reading machine, read the content of bar coded sticker on this wafer transportation casket,, make this board can further handle the wafer sheet in this wafer transportation casket again by manually this wafer transportation casket being inserted the portion of unloading this year.In this kind method, it is two manual action of separating that the identification of bar code loads board with wafer, sometimes because artificial mistake, the wafer transportation casket that reads the bar code place is not the wafer transportation casket of actual loaded, and makes board according to reading bar code is handled loading with unsuitable processing procedure job sequence wafer sheet.
The method of identification objects appears coming with frequency identification system recently, if but directly the method is applied in the wafer factory, following problems may take place.If on each wafer transportation casket, post the RFID tag that is loaded with the wafer Mission Number, when being transported to board, wafer transportation casket carries when unloading portion, by the radio-frequency (RF) identification reading machine, automatically respond to and receive the contained content of RFID tag on this wafer transportation casket, self-starter tool arm is inserted carrying of this board with this wafer transportation casket and is unloaded portion then, makes it enter this board and handles.In this kind method, radio-frequency (RF) identification bar code reading machine is automatic startup, its may because have the radio-frequency (RF) identification bar code near or install optical inductor in addition and come the close of perception wafer transportation casket, and then self-starter tool arm start.Its may wafer transportation casket just carry out said procedure automatically when appearing near the board, make the automatic start of mechanical arm and cause site personnel's danger.
Summary of the invention
In view of this, the purpose of this utility model is for providing a kind of radio-frequency (RF) identification induction system, makes it possible to the mode with contact control, clearly controls the start of radio-frequency (RF) identification inductor and related equipment, makes board can correctly carry out the processing of wafer batch.
According to radio-frequency (RF) identification induction system of the present utility model, it is applicable between radio frequency recognition volume label and the host computer system, comprises add load control, output-controlling device, induction installation, treating apparatus.This loading and output-controlling device produce respectively and load and the output trigger signals.This induction installation reads goods identification code and the data that write down in the radio frequency recognition volume label.When this treating apparatus receives this loading trigger signals, start this loading indicating device and this induction installation, receive this goods identification code and itself and this loading trigger signals is sent to host computer system, make and carry out the goods loading procedure; When it receives this output trigger signals, start this output indicating device and this induction installation, receive this goods identification code and itself and this output trigger signals is sent to this host computer system, make and carry out the goods written-out program.
Description of drawings
Fig. 1 shows the synoptic diagram according to the utility model gallery device.
Symbol description:
100 wafer fabrication systems; 10 boards; Unloaded portion in 11 years; 12 wafer conveying arrangements; 13 radio-frequency (RF) identification induction systems; 131 load buttons; 132 transport control device; 133 load buttons; 134 transport button; 135 are written into pilot lamp; 136 transport pilot lamp; 137 treating apparatus; 139 induction installations; 14 mechanical arms; 15 host computer systems; 16 wafers transportation casket; 161 RFID tag: 165 wafers batch.
Embodiment
Now be example with wafer fabrication system 100, the enforcement of the utility model radio-frequency (RF) identification induction system is described.Above-mentioned wafer process board (being designated hereinafter simply as board) is in order to carry out the wafer process step, to handle at least one wafer.
Radio frequency recognition volume label induction system 13 comprises load button 131, transports control device 132, treating apparatus 137 and induction installation 139.
Wherein, load button 131 is the wafer batch identification work when in order to the execution desire wafer being transported casket loading board.Load button 131 comprises load button 133 and loads pilot lamp 135 (sending red cresset), produces loading signal when load button 133 is activated.Transport control device 132 and be the wafer batch identification work when carrying out desire wafer is transported casket and transports board.Transport control device 132 and comprise one and transport button 134 and transport pilot lamp 136 (sending green cresset), when transporting button 133 and be activated, produce and transport signal.
Treating apparatus 137 transports signal control loaded pilot lamp 135 and transport pilot lamp 136 and induction installation 139 respectively according to this loading signal and this.When treating apparatus 137 reception load buttons 133 are pressed the loading signal that is produced, start-up loading pilot lamp 135 and induction installation 139, make when induction installation 139 receives this wafer Mission Number, load pilot lamp 135 and continue to send red cresset, move to remind the operating personnel wafer not to be transported casket 16 this moment, in order to avoid interrupt reading of wafer Mission Number.Treating apparatus 137 and receive this wafer Mission Number that induction installation 139 reads and with this itself and this loading signal be sent to host computer system 15.Be written into pilot lamp 135 this moment and extinguish and no longer send red cresset, read with indication operating personnel wafer Mission Number and finished.When host computer system 15 received these loading signal and this wafer Mission Number that reads, it was to carry out a series of predetermined actions, made board 10 wafer to be transported casket 16 load and handle via unloading portion 11 its year.
When treating apparatus 137 receive transport button 134 be pressed produced transport signal the time, start and transport pilot lamp 136 and induction installation 139, make when induction installation 139 receives this wafer Mission Number, transport pilot lamp 136 and continue to send green cresset, move to remind the operating personnel wafer not to be transported casket 16 this moment, in order to avoid interrupt reading of wafer Mission Number.Treating apparatus 137 also receives this wafer Mission Number that induction installation 139 reads and transports signal with itself and this and be sent to host computer system 15.Transport pilot lamp 136 this moment and extinguish and no longer send green cresset, read with indication operating personnel wafer Mission Number and finished.When this transports signal and this wafer Mission Number that reads when host computer system 15 receptions, it is to carry out a series of predetermined actions, makes board 10 wafer to be transported casket 16 transport and via wafer conveying arrangement 12 board that it is sent to next fabrication steps is handled via unloading portion 11 its year.
The data of radio frequency recognition volume label induction system 13 in reading radio frequency recognition volume label 161, also can be according to the indication of host computer system 15, upgrade or write data in the radio frequency recognition volume label 161.When host computer system 15 write data in the RFID tag 161 through radio frequency recognition volume label induction system 13, it was sent to data and the write command of desiring to write in the treating apparatus 137.After treating apparatus 137 receives these data and write command, further make induction installation 139 with in this data load radio frequency recognition volume label 161, transmit indicator simultaneously respectively to loading pilot lamp 135 and transporting pilot lamp 136, make and to write when carrying out when data, load pilot lamp 135 and send red flicker cresset, send green flicker cresset and transport pilot lamp 136.After the data write step is finished, load pilot lamp 135 and transport pilot lamp 136 and all extinguish, finish to remind this data write activity of operating personnel.
Above-mentioned loading pilot lamp 135 and transport pilot lamp 136 and write fashionable cresset in data read and data and represent mode all can be adjusted according to the instruction of host computer system 15.The color of its cresset and luminous pattern (continue luminous or glimmer luminous) etc. all can be according to using the needs adjustment.
Above-mentioned PBU pushbutton unit can be the control device of any contact, and for example: control lever or touch panel etc., it is to design according to actual needs.
The utility model also provides a kind of wafer batch disposal route with discriminating function, and it is applicable to similar as the above-mentioned board with radio-frequency (RF) identification induction installation, and this radio-frequency (RF) identification induction installation is started by similar contact starter gear as button.
When wafer batch desire loads a board when handling, at first RFID tag 161 is pasted and pay on wafer transportation casket 16, wafer batches 165 wherein is housed in this wafer transportation casket 16, radio frequency recognition volume label has then write down the wafer Mission Number of this wafer batch.When wafer batches 165 needed be handled by 10 boards, wafer transportation casket 16 was transported to board 10, and the operating personnel needs according to indication, assign instruction wafer is transported in the casket 16 loading boards 10 to mechanical arm 14.At this moment, the operating personnel need press the load button 131 of radio-frequency (RF) identification induction system, makes it produce loading signal.The treating apparatus 137 of radio-frequency (RF) identification induction system 13 receives this loading signal, sends indicating signal simultaneously to loading pilot lamp 135 and starting induction installation 139.After being activated, reads by induction installation 139 the wafer Mission Number of record in the radio frequency recognition volume label 161.Treating apparatus 137 receives this wafer Mission Number, and it is sent to host computer system 15 together with this loading signal.Host computer system 15 according to this wafer Mission Number, is chosen suitable processing procedure job sequence, and is transmitted action command according to this to board 10 after receiving these loading signal and this wafer Mission Number, makes it handle this wafer batch according to this action command.
When wafer batch is finished dealing with when desiring to transport board by board, wafer transportation casket 16 is transported to the portion of unloading of carrying of board 10, the operating personnel needs according to indication, mechanical arm 14 is assigned instruction transport board 10, make it possible to transport it to other board and handle by wafer conveying arrangement 12 wafer is transported casket 16.At this moment, what the operating personnel need press the radio-frequency (RF) identification induction system transports control device 132, makes its generation transport signal.The treating apparatus 137 of radio-frequency (RF) identification induction system 13 receives this and transports signal, sends indicating signal simultaneously to transporting pilot lamp 136 and starting induction installation 139.After being activated, reads by induction installation 139 the wafer Mission Number of record in the radio frequency recognition volume label 161.Treating apparatus 137 receives these wafer Mission Numbers, and it is transported signal together with this is sent to host computer system 15.After host computer system 15 receives this and transports signal and this wafer Mission Number,, read the processing schedule of this wafer batch, and transmit action command according to this, make it move this wafer batch according to this action command to mechanical arm 14 according to this wafer Mission Number.
Though the utility model discloses as above with preferred embodiment; right its is not in order to limit the utility model; anyly have the knack of this skill person; in not breaking away from spirit and scope of the present utility model; when doing a little change and retouching, therefore protection domain of the present utility model is as the criterion when looking appended the claim scope person of defining.
Claims (9)
1. radio-frequency (RF) identification induction system, it is applicable between radio frequency recognition volume label and the host computer system, it is characterized in that, comprising:
Control device, it comprises control module and indicating member that contact starts, produces trigger signals when this control module is activated;
Induction installation reads the goods identification code and the data that write down in this radio frequency recognition volume label when it starts; And
Treating apparatus, control this indicating member and this induction installation according to this trigger signals, when it receives this trigger signals, start this indicating device and this induction installation, receive this goods identification code that this induction installation reads and this goods identification code and this trigger signals are sent to this host computer system, make and carry out the goods handling procedure.
2. radio-frequency (RF) identification induction system according to claim 1 is characterized in that, this goods is a semiconductor wafer.
3. radio-frequency (RF) identification induction system according to claim 1 is characterized in that above-mentioned control module comprises PBU pushbutton unit.
4. radio-frequency (RF) identification induction system according to claim 1 is characterized in that above-mentioned indicating member comprises light-emitting device.
5. radio-frequency (RF) identification induction system according to claim 1 is characterized in that, when this trigger signals is sent to this host computer system, makes this host computer system carry out the goods loading procedure.
6. radio-frequency (RF) identification induction system according to claim 1 is characterized in that, when this trigger signals is sent to this host computer system, makes this host computer system carry out goods and transports program.
7. radio-frequency (RF) identification induction system according to claim 1 is characterized in that, this treating apparatus further receives write command and the data that this host computer system transmits, and makes this induction installation with in this RFID tag of this data load.
8. radio-frequency (RF) identification induction system according to claim 7 is characterized in that this treating apparatus further starts this indicating member.
9. radio-frequency (RF) identification induction system according to claim 1 is characterized in that, this treating apparatus further receives the indicative of settings signal that this host computer system transmits, the feasible light signal execution pattern of setting this indicating member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420084411 CN2720520Y (en) | 2004-07-20 | 2004-07-20 | Radio-frequency identification induction system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420084411 CN2720520Y (en) | 2004-07-20 | 2004-07-20 | Radio-frequency identification induction system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2720520Y true CN2720520Y (en) | 2005-08-24 |
Family
ID=35009478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420084411 Expired - Lifetime CN2720520Y (en) | 2004-07-20 | 2004-07-20 | Radio-frequency identification induction system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2720520Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100403328C (en) * | 2005-01-07 | 2008-07-16 | 台湾积体电路制造股份有限公司 | Manufacturing control systems using radio frequency identification |
-
2004
- 2004-07-20 CN CN 200420084411 patent/CN2720520Y/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100403328C (en) * | 2005-01-07 | 2008-07-16 | 台湾积体电路制造股份有限公司 | Manufacturing control systems using radio frequency identification |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20140720 Granted publication date: 20050824 |