CN2715187Y - Substrate adhering equipment - Google Patents
Substrate adhering equipment Download PDFInfo
- Publication number
- CN2715187Y CN2715187Y CN 200420042620 CN200420042620U CN2715187Y CN 2715187 Y CN2715187 Y CN 2715187Y CN 200420042620 CN200420042620 CN 200420042620 CN 200420042620 U CN200420042620 U CN 200420042620U CN 2715187 Y CN2715187 Y CN 2715187Y
- Authority
- CN
- China
- Prior art keywords
- electrostatic chuck
- baseplate
- laminating equipment
- electrode
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model discloses a substrate adhering equipment, comprising a first electrostatic chuck, a second electrostatic chuck and a controller. The second electrostatic chuck is arranged on the lower side of the first electrostatic chuck. The controller is connected with the second electrostatic chuck, and the controller controls the second electrostatic chuck to alternatively produce a positive voltage and a negative voltage.
Description
[technical field]
The utility model is about a kind of substrate processing apparatus, particularly a kind of baseplate-laminating equipment.
[background technology]
The processing procedure of display panels mainly comprises the step that two glass substrates are fitted in vacuum environment, so that two glass substrates are formed the receiving space that can pour into liquid crystal.
Because before vacuum abutted processing procedure, be formed with circuit structure on one of them glass substrate, in vacuum abutted processing procedure, electrostatic defending just has key effect, if can not in time eliminate buildup of static electricity, very likely, cause product bad because of static discharge destroys circuit on the glass substrate.
Prior art discloses a kind ofly has baseplate-laminating equipment that static eliminates function as shown in Figure 1, and this baseplate-laminating equipment comprises first electrostatic chuck 10, second electrostatic chuck 20 and ion generator 13 and 23.This first electrostatic chuck 10 comprises first suction cup main body 11, is arranged on first electrode 12 and first power supply 14 that is connected with this first electrode 12 in this first suction cup main body 11, this second electrostatic chuck 20 is arranged on this first electrostatic chuck, 10 downsides, comprises second suction cup main body 21, is arranged on second electrode 22 and the second source 24 that is connected with this second electrode 22 in this second suction cup main body 21.This first power supply 14 and second source 24 are high-voltage DC power supply, and the one end is connected with second electrode 22 with this first electrode 12 respectively, the equal ground connection of the other end.When this first power supply 14 and second source 24 apply voltage on this first electrode 12 and second electrode 22 time, this first electrode 12 and second electrode 22 produce the electric charge accumulation, charges accumulated produces electrostatic attraction, thereby make first electrostatic chuck 10 adsorb first substrate 15 by electrostatic induction, second electrostatic chuck 20 can adsorb second substrate 25 by electrostatic induction, and these two substrates 15,25 are fitted.Ion generator 13,23 respectively to should first substrate 15, second substrate 25, it can produce positive and negative ion, with the static that first substrate 15 that neutralizes, second substrate 25 are produced, avoids buildup of static electricity excessively to cause destruction to substrate 15,25.
But, the ion generator the 13, the 23rd that the aforesaid substrate abutted equipment adopts uses the form that positive and negative ion is blown over substrate 15,25 to eliminate static, this kind dynamical fashion may cause the foreign matter in the environment to follow positive and negative ion stream together by substrate 15,25, cause the pollution to substrate 15,25, this is very much unfavorable concerning cleanliness factor requires high display panels.
[utility model content]
Cause the problem to substrate contamination when eliminating static for the baseplate-laminating equipment that overcomes prior art easily, the utility model provides a kind of baseplate-laminating equipment of eliminating buildup of static electricity and avoiding simultaneously substrate is polluted.
The technical scheme that the utility model technical solution problem is adopted is: a kind of baseplate-laminating equipment is provided, it comprises first electrostatic chuck, second electrostatic chuck and controller, this second electrostatic chuck is arranged on this first electrostatic chuck downside, this controller is connected this second electrostatic chuck, controls this second electrostatic chuck and alternately produces positive voltage and negative voltage.
Compared to prior art, because baseplate-laminating equipment of the present utility model adopts a controller to be connected on this second electrostatic chuck, before this controller can the substrate after applying breaks away from second electrostatic chuck, alternately produce positive voltage and negative voltage, the positive and negative electric charge that this positive voltage and negative voltage produced can in and the static on the substrate, eliminate buildup of static electricity; Simultaneously, because the generation of positive and negative electric charge and alternately change and do not cause flowing of air on second electrostatic chuck, can avoid causing pollution to substrate because of gas flow.
[description of drawings]
Fig. 1 is a kind of diagrammatic cross-section of prior art baseplate-laminating equipment.
Fig. 2 is the sectional view of the utility model baseplate-laminating equipment.
Fig. 3 to Fig. 5 is the process synoptic diagram of two substrates of the utility model baseplate-laminating equipment applying.
[embodiment]
As shown in Figure 2, be the sectional view of the utility model baseplate-laminating equipment.This baseplate-laminating equipment 100 comprises first electrostatic chuck 30, second electrostatic chuck 40 and controller 45.
This first electrostatic chuck 30 comprises first suction cup main body 31, is arranged on first electrode 32 and first power supply 34 that is connected with this first electrode 32 in this first suction cup main body 31.This second electrostatic chuck 40 is arranged on this first electrostatic chuck, 30 downsides, comprise second suction cup main body 41, be arranged on second electrode 42 and the second source 44 that is connected with this second electrode 42 in this second suction cup main body 41, a plurality of support columns 43 are set on this second suction cup main body 41, and this support column 43 can be done lifting moving with respect to second suction cup main body 41.This controller 45 links to each other with the second source 44 of this second electrostatic chuck 40.
This first power supply 34 and second source 44 are high-voltage DC power supply.One end of this first power supply 34 is connected other end ground connection with this first electrode 32.One end of this second source 44 is connected with this second electrode 42, and the other end is connected in this controller 45 back ground connection.This controller 45 can be controlled this second source 44 and alternately produce positive voltage and negative voltage.
Below in conjunction with Fig. 3 to Fig. 5 the mode of action of the utility model baseplate-laminating equipment 100 is described.
With reference to Fig. 3, when this first power supply 34 applies voltage on this first electrode 32 time, this first electrode 32 produces electric charges accumulation, and charges accumulated produces electrostatic attraction, thereby makes first electrostatic chuck 30 adsorb first substrate 36 by electrostatic induction.When this second source 44 applies voltage on this second electrode 42 time, this second electrode 42 produces the electric charge accumulation, charges accumulated produces electrostatic attraction, thereby make second electrostatic chuck 40 adsorb second substrate 46 by electrostatic induction, at this moment, in these a plurality of these second electrostatic chucks 40 of support column 43 retractions.
With reference to Fig. 4, after this first electrostatic chuck 30 and second electrostatic chuck 40 adsorb first substrate 36 and second substrate 46 respectively, drive this first electrostatic chuck 30 by drive unit (figure does not show) and move, this substrate 36,46 is fitted towards second electrostatic chuck 40.
With reference to Fig. 5, after these two substrates 36,46 were fitted and finished, this first electrostatic chuck 30 was removed the Electrostatic Absorption power to first substrate 36, and rises to certain altitude, not hinder next step operation.This second electrostatic chuck 40 is removed the Electrostatic Absorption power to second substrate 46, and drive a plurality of support columns 43 outstanding these second electrostatic chucks 40, lift two substrates 36,46 after the applying, with two substrates, 36,46 taking-ups after making things convenient for mechanical arm (figure does not show) to fit.Because of being lifted, these two substrates 36,46 have the partial electrostatic accumulation before, for eliminating this partial electrostatic, before can two substrates 36,46 after lifting applying, alternately produce positive voltage and negative voltage by controller 45 control second sources 44, the positive and negative electric charge that this positive voltage and negative voltage produced can in and the static on the substrate 36,46, eliminate buildup of static electricity.
Because baseplate-laminating equipment 100 of the present utility model adopts controller 45 to be connected on this second electrostatic chuck 40, this controller 45 can be after applying substrate 36,46 break away from second electrostatic chuck 40 before, alternately produce positive voltage and negative voltage, the positive and negative charge effect that this positive voltage and negative voltage produced is with the positive and negative ion that ion generator produced of prior art, can in and the static on the substrate 36,46, eliminate buildup of static electricity; Simultaneously, because of the generation of positive and negative electric charge on second electrostatic chuck 40 with alternately change and do not cause flowing of air, can avoid because gas flow causes the pollution to substrate 36,46.
Claims (8)
1. baseplate-laminating equipment, comprise first electrostatic chuck and second electrostatic chuck, this second electrostatic chuck is arranged on this first electrostatic chuck downside, it is characterized in that: this baseplate-laminating equipment further comprises a controller, this controller is connected this second electrostatic chuck, controls this second electrostatic chuck and alternately produces positive voltage and negative voltage.
2. baseplate-laminating equipment as claimed in claim 1 is characterized in that: this first electrostatic chuck comprises first suction cup main body, is arranged on first electrode and first power supply that is connected with this first electrode in this first suction cup main body.
3. baseplate-laminating equipment as claimed in claim 1, it is characterized in that: this second electrostatic chuck comprises second suction cup main body, is arranged on second electrode and the second source that is connected with this second electrode in this second suction cup main body, and this controller is controlled this second source and alternately produced positive voltage and negative voltage.
4. baseplate-laminating equipment as claimed in claim 3 is characterized in that: on this second suction cup main body a plurality of support columns are set, this support column can be done lifting moving with respect to second suction cup main body.
5. baseplate-laminating equipment as claimed in claim 2 is characterized in that: this first power supply is a high-voltage DC power supply.
6. baseplate-laminating equipment as claimed in claim 3 is characterized in that: this second source is a high-voltage DC power supply.
7. baseplate-laminating equipment as claimed in claim 2 is characterized in that: this first power supply has an earth terminal.
8. baseplate-laminating equipment as claimed in claim 3 is characterized in that: ground connection behind this second source connection controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420042620 CN2715187Y (en) | 2004-02-14 | 2004-02-14 | Substrate adhering equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420042620 CN2715187Y (en) | 2004-02-14 | 2004-02-14 | Substrate adhering equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2715187Y true CN2715187Y (en) | 2005-08-03 |
Family
ID=34872000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420042620 Expired - Lifetime CN2715187Y (en) | 2004-02-14 | 2004-02-14 | Substrate adhering equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2715187Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101316777B (en) * | 2006-09-29 | 2012-01-18 | 信越工程株式会社 | Workpiece transfer method and electro-static sucker device and substrate sticking method |
-
2004
- 2004-02-14 CN CN 200420042620 patent/CN2715187Y/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101316777B (en) * | 2006-09-29 | 2012-01-18 | 信越工程株式会社 | Workpiece transfer method and electro-static sucker device and substrate sticking method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20140214 Granted publication date: 20050803 |
|
| DD01 | Delivery of document by public notice |
Addressee: Xu Tingning Document name: Notification of Expiration of Patent Right Duration |