CN2670902Y - Rotary kinematic angle displacement precision tester - Google Patents

Rotary kinematic angle displacement precision tester Download PDF

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Publication number
CN2670902Y
CN2670902Y CN 200320109938 CN200320109938U CN2670902Y CN 2670902 Y CN2670902 Y CN 2670902Y CN 200320109938 CN200320109938 CN 200320109938 CN 200320109938 U CN200320109938 U CN 200320109938U CN 2670902 Y CN2670902 Y CN 2670902Y
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CN
China
Prior art keywords
turntable
slide
precision
tested
testing
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Expired - Fee Related
Application number
CN 200320109938
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Chinese (zh)
Inventor
黄玉美
彭中波
高峰
史文浩
程祥
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Xian University of Technology
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Xian University of Technology
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Priority to CN 200320109938 priority Critical patent/CN2670902Y/en
Application granted granted Critical
Publication of CN2670902Y publication Critical patent/CN2670902Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a rotary kinematic angle displacement precision tester, which is used for testing the accuracy of the rotary kinematic positioning and the repositioning. The accurate testing turntable 1 of the tester is arranged on a tested turntable 2. A two-axis precision flatform 9 comprises a sliding plate 5, a slide seat 6, a sliding plate 7 and a slide seat 8. A high precision displacement transducer 3 is arranged on the accurate tested turntable 2. A regional master gage 4 is arranged on the sliding plate 5 which is arranged on the slide seat 6 and can move along the slide seat 6 in the Y axis direction. The slide seat 6 is connected with the sliding plate 7, which is arranged on the slide seat 8 and can move along the slide seat 8 in the X axis direction. The tester has a wide applicability. The tester not only can be used to test the accuracy of positioning and repositioning of the testing turntable and the tested turntable which are arranged coaxially, but also can be used under the situation that the testing turntable and the tested turntable can not be arranged coaxially. The utility model has high testing precision and high testing efficiency.

Description

Gyration angular displacement instrument for testing precision
Technical field
The utility model relates to a kind of angular displacement instrument for testing precision of angular displacement instrument for testing precision, particularly a kind of gyration, can be applicable to the bearing accuracy of gyration, the Angular Displacement Detecting of repetitive positioning accuracy.
Background technology
The angular displacement precision of gyration is generally estimated with the bearing accuracy and the repetitive positioning accuracy of gyration, the revolution bearing accuracy of tested turntable and the traditional detection method of repetitive positioning accuracy are to adopt autocollimator and polyhedron to measure, and this method can not be carried out the evaluation of rotary precision comprehensively.Britain RENISHAW company released with laser interferometer and RX10 turntable annex and combined the method for carrying out the rotary precision detection in recent years, and this method can be carried out the gyration assessment comprehensively; But remain problem be: install under the situation of decentraction inapplicable for turntable annex and tested turntable.The turning axle angle swing instrument that U.S. API company releases is to utilize electrolevel, but the problem that it exists is: 1, can't be directly used in the situation that tested turntable is a horizontal revolving stage, and must strictly install with one heart.2, because the viscosity of level meter liquid, following can not be too fast, can't tracking Control, and detection efficiency is lower.
The utility model has designed a kind of gyration angular displacement instrument for testing precision at the deficiency of above-mentioned prior art; This detector both can be used for detecting turntable and the coaxial mounted situation of tested turntable, and can be used for both again can not coaxial mounted situation.
To achieve these goals, the utility model adopts following technical scheme: gyration angular displacement instrument for testing precision includes and detects turntable, tested turntable, detects turntable and is installed on the tested turntable; Also include displacement transducer, regional master gage and a diaxon precision surface plate of forming by slide plate, slide, slide plate and slide; Sensor is installed on and detects on the turntable, and regional master gage is installed on the slide plate, and slide plate is installed on the slide, and can move in the Y direction along slide; Slide is connected with slide plate, and slide plate is installed on the slide, and can move at directions X along slide.Detect turntable and can coaxially install, also can disalignment install with tested turntable; Detect turntable by driven by servomotor, and high precision circle grating chi is housed; The diaxon precision surface plate is by driven by servomotor, and high precision linear grating chi is housed; Sensor is minimum must install two, also can install a plurality ofly simultaneously, and sensor can adopt contact, also can adopt contactless.
Description of drawings
Fig. 1 is a vertical working platform front view for the detected Work turning table of the utility model;
Fig. 2 is the vertical view of vertical working platform for the detected Work turning table of the utility model;
Fig. 3 is the front view of horizontal worktable for the detected Work turning table of the utility model;
Fig. 4 is the vertical view of horizontal worktable for the detected Work turning table of the utility model.
Embodiment
It is following that the utility model is described in further detail with reference to accompanying drawing.
The vertical working platform front view and the vertical view that see figures.1.and.2, the accurate turntable 1 that detects is installed on the tested turntable 2, has formed diaxon precision surface plate 9 by slide plate 5, slide 6, slide plate 7 and slide 8; High accuracy displacement sensor 3 is installed on accurate the detection on the turntable 1, and regional master gage 4 is installed on the slide plate 5, and slide plate 5 is installed on the slide 6, and can move in Y direction along slide 6; Slide 6 is connected with slide plate 7, and slide plate 7 is installed on the slide 8, and can move in X-direction along slide 8.
With reference to horizontal worktable front view and the vertical view of Fig. 3 and Fig. 4, detected Work turning table is horizontal placement, and its axis is a horizontal axis, and version is identical with the vertical working platform.
The accurate turntable that detects of the present utility model is by driven by servomotor, in order to guarantee accuracy of detection, and high precision circle grating chi is housed detecting on the turntable 1; Each of the accurate detection platform of diaxon be by driven by servomotor, and on detection turntable 1 accurate linear grating chi is housed.
The utility model has two kinds of testing processes:
1, detects turntable 1 and tested turntable 2 concentric installations, detect turntable 1 and rotate, can measure the angular displacement deviation of tested Work turning table by the change in displacement of two sensor 3 relative datums rule 4 with detected Work turning table 2 synchronous backwards.Utilize said method can carry out the bearing accuracy of tested Work turning table and the detection of repetitive positioning accuracy.
2, different but when detecting turntable and installing with tested turntable decentraction for the position, when detecting tested relatively turntable center, turntable center one eccentric throw being arranged, detection turntable center has produced the skew of X, Y direction in the testing process.During detection, one side is done synchronously by detection turntable and tested turntable but reversed turning is n 2=-n 1Drive the accurate detection platform of diaxon on the other hand and do synchronously motion in the same way with the skew that detects turntable X, Y direction.Thereby the relative position relation that has guaranteed to be installed in the displacement transducer that detects on the turntable and regional master gage is constant, can carry out the revolution bearing accuracy of tested turntable and the measurement of repetitive positioning accuracy with method 1.
Embodiment 1:
By illustrated in figures 1 and 2, detected Work turning table 2 is the vertical working platform, i.e. the axis normal of worktable; When detecting turntable 1 with tested worktable 2 concentric installation, detect turntable 1 and the rotation of tested Work turning table 2 synchronous backwards in the testing process, at this moment diaxon precision detection platform 9 only adjusts usefulness, and is motionless in testing process; When detecting turntable 1 and tested worktable 2 decentraction, then detection turntable 1 one side and tested Work turning table 2 synchronous backwards rotate in the testing process, and work is mobile in the same way synchronously simultaneously for diaxon detection platform 9 on the one hand.
Embodiment 2:
By Fig. 3 and shown in Figure 4, detected Work turning table 2 is horizontal worktable, and promptly axis is a horizontal axis, detects turntable 1 in the testing process and rotates with tested Work turning table 2 synchronous backwards, and at this moment the accurate detection platform of diaxon or only adjust usefulness is motionless in testing process; Or do synchronously in the same way the moving of X, Y direction with tested worktable.
Characteristics of the present utility model are applied widely, and this detector both can be used for detecting turntable and tested turning to The coaxial mounted location of platform and repetitive positioning accuracy detect, and can be used for again both can not coaxial mounted precision Detect accuracy of detection and detection efficiency height.

Claims (5)

1, a kind of gyration angular displacement instrument for testing precision, include and detect turntable (1) and tested turntable (2), detect turntable (1) and be installed on the tested turntable (2), it is characterized in that this instrument for testing precision also includes displacement transducer (3), regional master gage (4) and a diaxon precision surface plate (9) of being made up of slide plate (5), slide (6), slide plate (7) and slide (8); Sensor (3) is installed on and detects on the turntable (1), and regional master gage (4) is installed on the slide plate (5), and slide plate (5) is installed on the slide (6), and can move in the Y direction along slide (6); Slide (6) is connected with slide plate (7), and slide plate (7) is installed on the slide (8), and can move at directions X along slide (8).
2, gyration angular displacement instrument for testing precision as claimed in claim 1 is characterized in that detecting turntable (1) and can coaxially install with tested turntable (2); Also can disalignment install.
3, gyration angular displacement instrument for testing precision as claimed in claim 1 is characterized in that detecting turntable (1) by driven by servomotor, and high precision circle grating chi is housed on detection turntable (1).
4, gyration angular displacement instrument for testing precision as claimed in claim 1 is characterized in that precision surface plate (9) diaxon by driven by servomotor, and on the detection turntable (1) high precision linear grating chi is housed.
5, gyration angular displacement instrument for testing precision as claimed in claim 1 is characterized in that sensor (3) is minimum must install two, also can install a plurality ofly simultaneously, and sensor (3) can adopt contact, also can adopt contactless.
CN 200320109938 2003-12-15 2003-12-15 Rotary kinematic angle displacement precision tester Expired - Fee Related CN2670902Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200320109938 CN2670902Y (en) 2003-12-15 2003-12-15 Rotary kinematic angle displacement precision tester

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200320109938 CN2670902Y (en) 2003-12-15 2003-12-15 Rotary kinematic angle displacement precision tester

Publications (1)

Publication Number Publication Date
CN2670902Y true CN2670902Y (en) 2005-01-12

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CN 200320109938 Expired - Fee Related CN2670902Y (en) 2003-12-15 2003-12-15 Rotary kinematic angle displacement precision tester

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CN (1) CN2670902Y (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101619920B (en) * 2008-07-04 2011-02-02 上海华虹Nec电子有限公司 Revolving table position acknowledging device for rotary drier and method thereof
CN101968340A (en) * 2010-09-19 2011-02-09 大连理工大学 End face runout and deflection measuring device and method
CN102059576A (en) * 2010-11-25 2011-05-18 西安理工大学 Biaxial linear moving micro driving device
CN102384732A (en) * 2011-10-31 2012-03-21 西安理工大学 Axis coplanarity detection device for orthogonal spinning axis with built-in intersection point and precision detection method thereof
CN102426000A (en) * 2011-08-30 2012-04-25 西安理工大学 Intersection point exposed two serial-connected adjacent crossing rotary axes coplane degree detection device and method
CN102636508A (en) * 2012-03-20 2012-08-15 中国科学院上海应用物理研究所 Sample platform used for grazing incidence XAFS method
CN103551919A (en) * 2013-10-17 2014-02-05 北京工业大学 Measuring device of repeated positioning accuracy of automatic tool changing of rotary manipulator
CN106524944A (en) * 2015-09-10 2017-03-22 河北太行计量检测有限公司 Non-coaxial circular grating angle measurement device and angle measurement method
CN108571943A (en) * 2018-04-10 2018-09-25 北京工业大学 A kind of two cylinder axis intersecting angle self-operated measuring unit of contact

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101619920B (en) * 2008-07-04 2011-02-02 上海华虹Nec电子有限公司 Revolving table position acknowledging device for rotary drier and method thereof
CN101968340A (en) * 2010-09-19 2011-02-09 大连理工大学 End face runout and deflection measuring device and method
WO2012068927A1 (en) * 2010-11-25 2012-05-31 西安理工大学 Biaxial linear-motion micro drive apparatus
CN102059576B (en) * 2010-11-25 2012-02-08 西安理工大学 Biaxial linear moving micro driving device
CN102059576A (en) * 2010-11-25 2011-05-18 西安理工大学 Biaxial linear moving micro driving device
CN102426000A (en) * 2011-08-30 2012-04-25 西安理工大学 Intersection point exposed two serial-connected adjacent crossing rotary axes coplane degree detection device and method
CN102426000B (en) * 2011-08-30 2013-10-23 西安理工大学 Intersection point exposed two serial-connected adjacent crossing rotary axes coplane degree detection device and method
CN102384732A (en) * 2011-10-31 2012-03-21 西安理工大学 Axis coplanarity detection device for orthogonal spinning axis with built-in intersection point and precision detection method thereof
CN102636508A (en) * 2012-03-20 2012-08-15 中国科学院上海应用物理研究所 Sample platform used for grazing incidence XAFS method
CN103551919A (en) * 2013-10-17 2014-02-05 北京工业大学 Measuring device of repeated positioning accuracy of automatic tool changing of rotary manipulator
CN103551919B (en) * 2013-10-17 2016-01-06 北京工业大学 A kind of repetitive positioning accuracy measurement mechanism of rotating machine arm automatic tool changer
CN106524944A (en) * 2015-09-10 2017-03-22 河北太行计量检测有限公司 Non-coaxial circular grating angle measurement device and angle measurement method
CN108571943A (en) * 2018-04-10 2018-09-25 北京工业大学 A kind of two cylinder axis intersecting angle self-operated measuring unit of contact
CN108571943B (en) * 2018-04-10 2019-10-29 北京工业大学 A kind of two cylinder axis intersecting angle self-operated measuring unit of contact

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C19 Lapse of patent right due to non-payment of the annual fee
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