CN100573337C - A kind of circle center locating method - Google Patents
A kind of circle center locating method Download PDFInfo
- Publication number
- CN100573337C CN100573337C CNB2007100469565A CN200710046956A CN100573337C CN 100573337 C CN100573337 C CN 100573337C CN B2007100469565 A CNB2007100469565 A CN B2007100469565A CN 200710046956 A CN200710046956 A CN 200710046956A CN 100573337 C CN100573337 C CN 100573337C
- Authority
- CN
- China
- Prior art keywords
- circle
- center
- mark
- coordinate
- work stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
A kind of circle center locating method, the center of circle locating device of its use comprises work stage, is positioned at the X-Y-Z coordinate system, and rotates in XOY plane; Sniffer is positioned at the work stage top, is used to write down the coordinate of first mark and second mark; First mark and second mark are positioned on the work stage, the physical location in the center of circle that is used to determine to rotatablely move, this method comprises: at first utilize sniffer to determine the horizontal ordinate and the ordinate of first mark and second mark, respectively note do (x0, y0) and (x1, y1); Secondly reach a new position after work stage being rotated, utilize sniffer to determine the horizontal ordinate and the ordinate of first mark and second mark again, respectively note do (x2, y2) and (x3, y3); At last, (x0 is y0) to (x2, the perpendicular bisector of line segment y2) is with (x1 is y1) to (x3, the intersection point of the perpendicular bisector of line segment y3) is the center of circle of silicon chip.It calculates simple, and error is little.
Description
Technical field
The present invention relates to a kind of circle center locating method, relate in particular to a kind of method that positions to the center of circle that rotatablely moves.
Background technology
In some high-accuracy motion control apparatus, need to give the center of circle that rotatablely moves to determine the position, be called for short " location, the center of circle ".Can rotate as the work stage in the litho machine, but because each part of work stage itself just has scale error, finally being assembled in the process of work stage also has error, so the actual center of circle that rotatablely moves is not on the position that design drawing requires.Determine the position in the actual center of circle, help to improve the litho machine productive rate.
U.S. Pat 4529610 announced a kind of judge rotating object rotatablely move in the device (Device for Detection of Center of Roatation of Rotating Object) of home position, be called for short " patent 1 ", principle is to utilize the Doppler effect of laser to measure tested speed that goes up each point, calculates home position; Chinese patent 97109378.4A has announced a kind of " eccentric position of dead axle rotary head device and the measuring method of quality and device thereof ", is called for short " patent 2 ", and principle is to make the magnetic head high speed rotating, simultaneously the shaft flexing that is caused with laser measurement off-centre.The shortcoming of these two patents is that tested high speed of requirement done 360 degree rotations, and work stage can not high-speed rotation, can not do 360 degree and rotate.
U.S. Pat 5982492 (Method of and apparatus for Determing the Center of aGenerally Circular Workpiece Relative to a Rotation Axis of the Workpiece), be called for short " patent 3 ", the circle center locating method of being announced is to have proposed a kind of method of utilizing rectilinear visual detector (for example linear CCD) to detect the center of circle, but the actual distance that is the rotation center of work stage to the silicon chip center of circle that it detects.If can not determine the position of work stage rotation center in advance, just can't use this method at all.
U.S. Pat 6747764 (System and Method for Finding the center of Rotation ofan R-theta Atage), be called for short " patent 4 ", proposed a kind of circle center locating method based on single optical alignment mark, shortcoming is to need work stage to do the wide-angle rotation.To reach 180 precision when spending the highest when the anglec of rotation, if reduce the anglec of rotation, precision will significantly descend.And the work stage of litho machine can only be rotated 1 to 2 degree, far can not meet the demands.In addition, this method also requirement can accurately be controlled rotational angle, and this also is unappeasable many times.
Chinese patent 03243876.1 has been announced a kind of " the axle center centralising device that is used for slewing ", is called for short " patent 5 ", be used for determining two axles the axle center deviation what.But its shortcoming is, measurement mechanism will with tested rotation synchronously, for example this patent itself just requires a camera and light source to be separately fixed on two axles, order axle rotation synchronously again, and measurement mechanism can not rotate under many circumstances; Although this patent claims in addition " device just is rotated arbitrarily angled ", because its principle is a mark, 3 definite circles, so if rotational angle is less, precision will be very low.In fact, if determine a circle with 3 points, when then having only 3 intervals of pressing 120 degree equally distributed, precision is just the highest.Therefore in fact, this patent still requires equipment can rotate bigger angle, preferably can reach 240 degree, just obvious effects can be arranged, otherwise effect is just very undesirable.
Concerning litho machine, existing patent 1,2 and 3 also has a common shortcoming simultaneously: need the extra specialized equipment that increases.Patent 1 requires to increase knotmeter, and patent 2 requires to increase the equipment of surveying shaft flexing, and patent 3 requires to increase rectilinear visual detector.
Summary of the invention
The present invention is that the home position error that calculates during solution rotatablely moves is too big, and a kind of new circle center locating method is provided, and it calculates simple, and error is little.
The present invention is for solving the deficiencies in the prior art, and the technical characterictic that is adopted is:
A kind of circle center locating method, the center of circle locating device of its use comprises work stage, is arranged in the X-Y-Z coordinate system, and rotates in XOY plane; Sniffer is positioned at the top of work stage, is used to write down the coordinate of first mark and second mark; First mark and second mark are positioned on the work stage, the physical location in the center of circle that is used to determine to rotatablely move.This method comprises:
At first, utilize sniffer to determine the horizontal ordinate and the ordinate of first mark and second mark, respectively the note do (x0, y0) and (x1, y1);
Secondly, reach a new position after work stage rotated, utilize sniffer to determine the horizontal ordinate and the ordinate of first mark and second mark again, respectively note do (x2, y2) and (x3, y3);
At last, (x0 is y0) to (x2, the perpendicular bisector of line segment y2) is with (x1 is y1) to (x3, the intersection point of the perpendicular bisector of line segment y3) is the center of circle of silicon chip.
The coordinate in the wherein said center of circle (x, computing formula y) is:
Further, with a plurality of different angles of work stage (1) rotation, and calculate corresponding perpendicular bisector intersecting point coordinate respectively by described method, then the mean value of a plurality of perpendicular bisector intersecting point coordinates is defined as central coordinate of circle or will arrives described each perpendicular bisector intersection point being defined as central coordinate of circle apart from the coordinate of the point of sum minimum or will arriving described each perpendicular bisector being defined as central coordinate of circle apart from the coordinate of the point of sum minimum.
The invention also discloses a kind of circle center locating method, the center of circle locating device of its use comprises work stage (1), is arranged in the X-Y-Z coordinate system, and rotates in XOY plane; Sniffer (3) is positioned at the top of work stage (1), is used to write down the coordinate of a plurality of marks; A plurality of marks are positioned on the work stage (1), the physical location in the center of circle that is used to determine to rotatablely move,
At first, utilize sniffer (3) to determine the horizontal ordinate and the ordinate of a plurality of marks;
Secondly, with reaching a new position after work stage (1) rotation, utilize sniffer to determine the horizontal ordinate and the ordinate of a plurality of marks again;
At last, same mark rotation front-back direction is linked to be line segment, utilize a plurality of marks to obtain many line segments and make perpendicular bisector respectively, perpendicular bisector is intersected that maximum points is defined as the center of circle or the point apart from the sum minimum that the point at the mean value place of described perpendicular bisector intersecting point coordinate is defined as the center of circle or will arrives described each perpendicular bisector intersection point is defined as the center of circle or will arrives described each perpendicular bisector being defined as the center of circle apart from the point of sum minimum.
The present invention compared with prior art has following advantage and good effect owing to adopted above technology:
1, the present invention utilizes round characteristic to determine the center of circle, makes error of the present invention much smaller than prior art;
2, device of the present invention can all be the existing device of litho machine, does not increase cost, and calculates simple.
Description of drawings
Fig. 1 is the side view of center of circle locating device;
Fig. 2 is the vertical view of center of circle locating device;
Fig. 3 is a positioning principle of the present invention;
Fig. 4 is the error analysis of prior art;
Fig. 5 is error analysis of the present invention.
Embodiment
Fig. 1 and Fig. 2 are the structural representation of this center of circle locating device, and wherein work stage 1 is in the X-Y-Z coordinate system, and rotate in XOY plane, and a sniffer 3 is arranged above work stage 1, and two telltale marks 4 and 5 are arranged on the work stage 1.When work stage 1 rotation, X, the Y coordinate of first mark 4 and second mark 5 will change thereupon, and sniffer 3 can detect X, the Y coordinate of first mark 4 and second mark 5.
In litho machine, can with the exposure method be produced on first mark 4 and second mark 5 on the silicon chip, again this silicon slice placed on work stage, utilize the vacuum suction function of work stage that silicon chip is fixed on the work stage, can not slide.And the alignment device in the litho machine has the X of mark on definite silicon chip, the function of Y position, so can be with alignment device as sniffer 3.Like this, utilize the existing equipment of litho machine fully, can constitute the needed system of this patent.
Measuring method of the present invention is: at first determine X, the Y position of first mark 4 and second mark 5 with sniffer 3, note is (x respectively
0, y
0) and (x
1, y
1); Make then work stage 1 turn an angle (angular dimension is not had accurately regulation) arrive new position, determine X, the Y position of first marks 4 and second mark 5 again with sniffer 3, note is (x respectively
2, y
2) and (x
3, y
3), as shown in Figure 3.
Wherein AO is from (x
0, y
0) to (x
2, y
2) the perpendicular bisector of line segment, BO is from (x
1, y
1) to (x
3, y
3) the perpendicular bisector of line segment.Basis then: the perpendicular bisector of string must be crossed the center of circle of this string place circle, so the intersection point O of the perpendicular bisector AO of two uneven strings and BO is exactly the center of circle that rotatablely moves.
Wherein the coordinate of O (x, y) as shown in the formula calculating:
Come the advantage of comparative analysis the present invention below by an example with respect to prior art:
Suppose that the radius that rotatablely moves is 150mm, the anglec of rotation is 20mrad (1mrad=10
-3Rad, 20mrad are equivalent to 1.15 degree), sniffer is 100nm in the error of X, Y direction.
Prior art is " 3 the concyclic " method of coming of improving on the basis of patent 5, that is: the original position of bidding note is (x
1, y
1); Behind the rotation 10mrad, mark position becomes (x
2, y
2); After rotating 10mrad again, become (x again
3, y
3); Utilize these 3 coordinates to determine the center of circle.
For the ease of analyzing, can utilize round symmetry that problem is suitably simplified, as shown in Figure 4, promptly with (x
2, y
2) set up coordinate system for initial point, and chose (x
2, y
2) and the straight line in the center of circle as the Y coordinate axis.We do not consider the error of sniffer at directions X yet, only consider the error of Y direction.Through quantitative Analysis, can determine (x
1, y
1) be (1.5mm ,-7.5um ± Δ
1), Δ wherein
1Be detecting error, be 100nm.Equally, (x
3, y
3) be (1.5mm ,-7.5um ± Δ
3).And (x
2, y
2) be (0, ± Δ
2).We suppose the coordinate in the center of circle be (0, y).According to " concyclic ", following two equations are arranged at 3:
(±Δ
2-y)
2＝(-1.5mm)
2+(-7.5um±Δ
1-y)
2
(±Δ
2-y)
2＝(1.5mm)
2+(-7.5um±Δ
3-y)
2
(1) works as Δ
1=Δ
3=-100nm and Δ
2During=100nm, result of calculation is y ≈-146.108mm;
(2) work as Δ
1=Δ
3=100nm and Δ
2During=-100nm, result of calculation is y ≈-154.113mm;
Clearly, the ideal value of y should be-150mm in this example, so the maximum error of prior art approximately is 4mm.
Adopt method of the present invention, as shown in Figure 5, two mark A, B become 90 degree to be provided with, and the physical location of supposing the center of circle is in true origin.At first record the coordinate (x of A
0, y
0) and the coordinate (x of B
1, y
1), rotating 20mrad subsequently, mark A arrives A ' point, and B arrives B ' point, records the coordinate (x of A '
2, y
2) and the coordinate (x of B '
3, y
3), its cathetus L1 is the perpendicular bisector of AA ', and L2 is the perpendicular bisector of BB ', and then the intersection point of L1 and L2 is measured home position.
Utilize radius 150mm and anglec of rotation 20mrad, can calculate to such an extent that the length of line segment AA ' is 3mm.Straight line L1 is the perpendicular bisector of AA '.If the x that sniffer is measured
0Error, while x that 100nm is arranged
2Have-error of 100nm, then AA ' can be crooked, and L1 is also therefore crooked, becomes the appearance of dotted line among the figure, and crooked angle is
This angle can cause L1 to produce size at center of circle O place
Error, also be that the intersection point of L1, L2 can be to the positive dirction deviation 10um of Y-axis.
Similarly, as the measured y of sniffer
1Error and y that 100nm is arranged
3Have-error of 100nm the time, because L2's is crooked, the intersection point of L1, L2 can be to the negative direction deviation 10um of X-axis.
When the intersection point of L1, L2 not only to the positive dirction deviation 10um of Y-axis, but also during to the negative direction deviation 10um of X-axis, the error maximum, then this intersection point reaches maximal value to the distance of true origin (the actual center of circle)
If L1, L2 are crooked round about, then its intersection point remains 14.14um to true origin apart from maximum.
That is to say, utilize the maximum error in the center of circle that method of the present invention records to be 14.14um.
Simultaneously, two mark A, B and their postrotational some A ', the line segment that B ' forms, it is not parallel just passable that promptly the string AA ' of their place circle and BB ' need only assurance, and do not require that AA ' and BB ' they must be vertical relations, but when AA ' is vertical with BB ', the center of circle error minimum of being tried to achieve.
The center of circle error that records by relatively the present invention and prior art as can be known, error of the present invention is far smaller than the error of prior art (in above-mentioned example, the maximum error that adopts prior art to calculate is 4mm, and maximum error of the present invention is 14.14um), so the home position that adopts the present invention to calculate is more accurate.
Equally in order more accurately to calculate home position, we can also utilize a plurality of marks, all make after the rotation of each mark with last example in the same perpendicular bisector, perpendicular bisector is intersected maximum points be defined as the center of circle, also can average all intersecting point coordinates, then with the coordinate of this average coordinates as the asking center of circle; Also can will be defined as the center of circle apart from the point of sum minimum to all intersection points, also can be being defined as central coordinate of circle apart from the coordinate of the point of sum minimum to all perpendicular bisectors.
Also can be with a plurality of different angles of work stage 1 rotation, so just can obtain a plurality of first marks 4 and second mark, 5 postrotational coordinates, utilize the method for asking the center of circle recited above, obtain a plurality of central coordinate of circle, the a plurality of central coordinate of circle that to try to achieve are then averaged, with the mean value of trying to achieve, as desired central coordinate of circle, also can will be defined as central coordinate of circle from the coordinate of the point of sum minimum to all distance of center circle, also can be being defined as central coordinate of circle apart from the coordinate of the point of minimum to perpendicular bisector.
The present invention adopts conventional device fully in the litho machine application, not only can accurately record the home position of silicon chip, and does not increase cost.
Claims (4)
1, a kind of circle center locating method, the center of circle locating device of its use comprises work stage (1), is arranged in the X-Y-Z coordinate system, and rotates in XOY plane; Sniffer (3) is positioned at the top of work stage (1), is used to write down the coordinate of first mark (4) and second mark (5); First mark (4) and second mark (5) are positioned on the work stage (1), and the physical location in the center of circle that is used to determine to rotatablely move is characterized in that this method comprises:
At first, utilize sniffer (3) to determine the horizontal ordinate and the ordinate of first mark (4) and second mark (5), respectively the note do (x0, y0) and (x1, y1);
Secondly, reach a new position after work stage (1) rotated, utilize sniffer to determine the horizontal ordinate and the ordinate of first mark (4) and second mark (5) again, respectively note do (x2, y2) with (x3, y3); At last, (x0 is y0) to (x2, the perpendicular bisector of line segment y2) is with (x1 is y1) to (x3, the intersection point of the perpendicular bisector of line segment y3) is the center of circle of silicon chip.
2, circle center locating method as claimed in claim 1 is characterized in that, the coordinate in the described center of circle (x, computing formula y) is:
3, circle center locating method as claimed in claim 1, it is characterized in that, with a plurality of different angles of work stage (1) rotation, and calculate corresponding perpendicular bisector intersecting point coordinate respectively by described method, then the mean value of a plurality of perpendicular bisector intersecting point coordinates is defined as central coordinate of circle or will arrives described each perpendicular bisector intersection point being defined as central coordinate of circle apart from the coordinate of the point of sum minimum or will arriving described each perpendicular bisector being defined as central coordinate of circle apart from the coordinate of the point of sum minimum.
4, a kind of circle center locating method, the center of circle locating device of its use comprises work stage (1), is arranged in the X-Y-Z coordinate system, and rotates in XOY plane; Sniffer (3) is positioned at the top of work stage (1), is used to write down the coordinate of a plurality of marks; A plurality of marks are positioned on the work stage (1), and the physical location in the center of circle that is used to determine to rotatablely move is characterized in that,
At first, utilize sniffer (3) to determine the horizontal ordinate and the ordinate of a plurality of marks;
Secondly, with reaching a new position after work stage (1) rotation, utilize sniffer to determine the horizontal ordinate and the ordinate of a plurality of marks again;
At last, same mark rotation front-back direction is linked to be line segment, utilize a plurality of marks to obtain many line segments and make perpendicular bisector respectively, perpendicular bisector is intersected that maximum points is defined as the center of circle or the point apart from the sum minimum that the point at the mean value place of described perpendicular bisector intersecting point coordinate is defined as the center of circle or will arrives described each perpendicular bisector intersection point is defined as the center of circle or will arrives described each perpendicular bisector being defined as the center of circle apart from the point of sum minimum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100469565A CN100573337C (en) | 2007-10-11 | 2007-10-11 | A kind of circle center locating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100469565A CN100573337C (en) | 2007-10-11 | 2007-10-11 | A kind of circle center locating method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101174094A CN101174094A (en) | 2008-05-07 |
| CN100573337C true CN100573337C (en) | 2009-12-23 |
Family
ID=39422675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007100469565A Active CN100573337C (en) | 2007-10-11 | 2007-10-11 | A kind of circle center locating method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100573337C (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102751210B (en) * | 2011-04-18 | 2015-02-11 | 中芯国际集成电路制造(上海)有限公司 | Method and system for measuring wafer rotation parameters |
| CN102193346B (en) * | 2011-05-11 | 2014-08-06 | 武汉东羽光机电科技有限公司 | Non-contact quick pre-positioning method for substrate of LED (light-emiting diode) automatic exposure machine |
| CN110634786A (en) * | 2013-09-22 | 2019-12-31 | 盛美半导体设备（上海）有限公司 | Alignment device and alignment method |
| CN104979257B (en) * | 2014-04-14 | 2021-03-09 | 睿励科学仪器（上海）有限公司 | Positioning method for measuring non-pattern silicon wafer |
| CN105444643B (en) * | 2014-08-12 | 2018-05-04 | 睿励科学仪器（上海）有限公司 | The calibrating method and device of object pivot |
| CN106141813A (en) * | 2016-08-04 | 2016-11-23 | 怀宁县断天自动化设备有限公司 | The method that fixture center of rotation overlaps with specified point on workpiece |
| CN108020135B (en) * | 2017-12-28 | 2020-12-29 | 佛山市大拓玻璃机械有限公司 | Automatic measurement method for size of plane quadrangle |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1461977A (en) * | 2002-05-31 | 2003-12-17 | 株式会社阿迪泰克工程 | Projection exposure device, position alignment device and position alignment method |
| CN1787200A (en) * | 2005-10-28 | 2006-06-14 | 清华大学 | Method for controlling pre-aligning of silicon wafer |
| CN1794440A (en) * | 2005-12-30 | 2006-06-28 | 清华大学 | Detection of silicon chip state in box and its center relocation method |
-
2007
- 2007-10-11 CN CNB2007100469565A patent/CN100573337C/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1461977A (en) * | 2002-05-31 | 2003-12-17 | 株式会社阿迪泰克工程 | Projection exposure device, position alignment device and position alignment method |
| CN1787200A (en) * | 2005-10-28 | 2006-06-14 | 清华大学 | Method for controlling pre-aligning of silicon wafer |
| CN1794440A (en) * | 2005-12-30 | 2006-06-28 | 清华大学 | Detection of silicon chip state in box and its center relocation method |
Non-Patent Citations (6)
| Title |
|---|
| 圆心定位装置的设计及应用. 周文忠.计量技术，第1期. 2007 |
| 圆心定位装置的设计及应用. 周文忠.计量技术，第1期. 2007 * |
| 掩模硅片自动对准误差校正算法. 梁友生等.显微、测量、微细加工技术与设备，第1期. 2005 |
| 掩模硅片自动对准误差校正算法. 梁友生等.显微、测量、微细加工技术与设备，第1期. 2005 * |
| 晶片传输系统中切边探测和预对准技术. 杨兴平.电子工业专用设备，第102期. 2003 |
| 晶片传输系统中切边探测和预对准技术. 杨兴平.电子工业专用设备，第102期. 2003 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101174094A (en) | 2008-05-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100573337C (en) | A kind of circle center locating method | |
| CN105423946B (en) | Axle journal axle center measuring device based on laser displacement sensor and measurement scaling method | |
| CN207963770U (en) | A kind of calibration test specimen of laser triangulation optical detection apparatus | |
| CN106289145B (en) | A kind of cylindricity On-machine Test method | |
| CN102313557B (en) | Calibrator for handheld type laser ranger finder | |
| US20010008047A1 (en) | Traverse linearity compensation method and rotational accuracy compensation method of measuring device | |
| CN201724654U (en) | Five-dimensional coordinate telecentric optical measurement system | |
| CN107607077B (en) | Building ground measurement method of planeness | |
| CN108917604A (en) | A kind of normal direction measuring device and its scaling method | |
| CN107560585B (en) | The detection method of large scale correction-plate surface shape error in ring throwing | |
| CN209541664U (en) | A kind of calibration test specimen of direct-injection type dot laser Three-coordinate measurer | |
| CN104515481B (en) | Measure the device and method of large diameter circle facial plane degree | |
| CN102927018A (en) | Device and method for alignment measurement and adjustment of particle image velocimetry (PIV) camera of centrifugal pump | |
| CN108344363B (en) | A kind of calibration test specimen of laser triangulation optical detection apparatus | |
| CN109813343A (en) | A kind of measurement method of centrifuge Initial Alignment Error | |
| CN102818542A (en) | Method for measuring cone angle of cone mirror | |
| CN106989670A (en) | A kind of non-contact type high-precision large-scale workpiece tracking measurement method of robot collaboration | |
| CN202926660U (en) | Device for calibrating and adjusting camera during PIV of centrifugal pump | |
| CN105627945B (en) | Non-spherical element center and the measurement apparatus and measuring method of cylindrical center shift amount | |
| CN107389316A (en) | Testing device of display panel and display panel method of testing | |
| CN102095366A (en) | Method for measuring large-gradient aspheric surface profile | |
| CN107607061B (en) | High-precision angle measurement method for virtual optical axis and structural leaning surface | |
| JPH01259211A (en) | Diameter measuring instrument for circularity measuring machine | |
| CN110631523B (en) | Device and method for measuring position error between shafts of precise two-dimensional rotary table | |
| CN107869963A (en) | Measurement apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee before: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
|
| CP01 | Change in the name or title of a patent holder |