CN2585414Y - 具有温度均衡通道的散热器 - Google Patents
具有温度均衡通道的散热器 Download PDFInfo
- Publication number
- CN2585414Y CN2585414Y CN 02249338 CN02249338U CN2585414Y CN 2585414 Y CN2585414 Y CN 2585414Y CN 02249338 CN02249338 CN 02249338 CN 02249338 U CN02249338 U CN 02249338U CN 2585414 Y CN2585414 Y CN 2585414Y
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- Prior art keywords
- radiator
- base
- conduit
- heat
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000007788 liquid Substances 0.000 claims abstract description 19
- 230000000694 effects Effects 0.000 abstract description 9
- 229910052751 metal Inorganic materials 0.000 abstract description 4
- 239000002184 metal Substances 0.000 abstract description 4
- 238000001816 cooling Methods 0.000 abstract description 3
- 230000005855 radiation Effects 0.000 abstract description 2
- 238000010438 heat treatment Methods 0.000 abstract 3
- 239000007787 solid Substances 0.000 abstract 1
- 238000007789 sealing Methods 0.000 description 9
- 230000017525 heat dissipation Effects 0.000 description 7
- 238000001704 evaporation Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 6
- 230000006378 damage Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 125000003158 alcohol group Chemical group 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003416 augmentation Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005514 two-phase flow Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
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- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 02249338 CN2585414Y (zh) | 2002-11-08 | 2002-11-08 | 具有温度均衡通道的散热器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 02249338 CN2585414Y (zh) | 2002-11-08 | 2002-11-08 | 具有温度均衡通道的散热器 |
Publications (1)
Publication Number | Publication Date |
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CN2585414Y true CN2585414Y (zh) | 2003-11-05 |
Family
ID=33719790
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 02249338 Expired - Fee Related CN2585414Y (zh) | 2002-11-08 | 2002-11-08 | 具有温度均衡通道的散热器 |
Country Status (1)
Country | Link |
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CN (1) | CN2585414Y (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7436645B2 (en) | 2004-10-07 | 2008-10-14 | Applied Materials, Inc. | Method and apparatus for controlling temperature of a substrate |
US7544251B2 (en) | 2004-10-07 | 2009-06-09 | Applied Materials, Inc. | Method and apparatus for controlling temperature of a substrate |
US7648914B2 (en) | 2004-10-07 | 2010-01-19 | Applied Materials, Inc. | Method for etching having a controlled distribution of process results |
CN1997273B (zh) * | 2006-01-06 | 2010-07-21 | 富准精密工业(深圳)有限公司 | 环路式散热模组 |
CN101806441A (zh) * | 2010-03-31 | 2010-08-18 | 西北有色金属研究院 | 翅片具有热管功能的大功率led灯散热器 |
US8226769B2 (en) | 2006-04-27 | 2012-07-24 | Applied Materials, Inc. | Substrate support with electrostatic chuck having dual temperature zones |
TWI463588B (zh) * | 2006-04-27 | 2014-12-01 | Applied Materials Inc | 具有雙溫度區之靜電夾盤的基材支撐件 |
CN106595359A (zh) * | 2016-10-07 | 2017-04-26 | 南京艾科美热能科技有限公司 | 一种多层均热板 |
-
2002
- 2002-11-08 CN CN 02249338 patent/CN2585414Y/zh not_active Expired - Fee Related
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7436645B2 (en) | 2004-10-07 | 2008-10-14 | Applied Materials, Inc. | Method and apparatus for controlling temperature of a substrate |
US7544251B2 (en) | 2004-10-07 | 2009-06-09 | Applied Materials, Inc. | Method and apparatus for controlling temperature of a substrate |
US7648914B2 (en) | 2004-10-07 | 2010-01-19 | Applied Materials, Inc. | Method for etching having a controlled distribution of process results |
US8075729B2 (en) | 2004-10-07 | 2011-12-13 | Applied Materials, Inc. | Method and apparatus for controlling temperature of a substrate |
CN1997273B (zh) * | 2006-01-06 | 2010-07-21 | 富准精密工业(深圳)有限公司 | 环路式散热模组 |
US8226769B2 (en) | 2006-04-27 | 2012-07-24 | Applied Materials, Inc. | Substrate support with electrostatic chuck having dual temperature zones |
US8663391B2 (en) | 2006-04-27 | 2014-03-04 | Applied Materials, Inc. | Electrostatic chuck having a plurality of heater coils |
TWI463588B (zh) * | 2006-04-27 | 2014-12-01 | Applied Materials Inc | 具有雙溫度區之靜電夾盤的基材支撐件 |
CN101806441A (zh) * | 2010-03-31 | 2010-08-18 | 西北有色金属研究院 | 翅片具有热管功能的大功率led灯散热器 |
CN106595359A (zh) * | 2016-10-07 | 2017-04-26 | 南京艾科美热能科技有限公司 | 一种多层均热板 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: 510640 WUSHAN SECTION, GUANGZHOU ENERGY INSTITUTE Free format text: FORMER NAME OR ADDRESS: ROOM 1201, BUILDING 2, JINAN GARDEN, NO. 78, TAOYU ROAD, HUANGPU AVENUE, GUANGZHOU CITY, GUANGDONG PROVINCE, 510630 |
|
CP03 | Change of name, title or address |
Patentee address after: 510640 Guangdong city of Guangzhou province Chinese Wushan Guangzhou Institute of Energy Research Institute of Wushan District Patentee address before: Whampoa road in Guangzhou city Guangdong province 510630 peach breeding Jinan Garden Road No. 78 building 1201 room 2 |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20031105 Termination date: 20111108 |