CN2569514Y

CN2569514Y - Plasma generator

Info

Publication number: CN2569514Y
Application number: CN 02264297
Authority: CN
Inventors: 张芬红
Original assignee: Individual
Current assignee: Individual
Priority date: 2002-09-09
Filing date: 2002-09-09
Publication date: 2003-08-27
Anticipated expiration: 2012-09-09

Abstract

The utility model discloses a plasma generator which uses vapor phase synthesis to prepare nanometer silicon nitride ceramic powders. The plasma generator comprises a positive anode body provided with a cathode component and an anode component which are matched by a conic gap. A cyclone device is arranged in the matching position of the cathode component and the anode component, can be wrapped on the periphery of an ion arc and can input arc starting gas and arc rotating gas in a cyclone mode. On the aspect of the structure, the utility model adopts compression in a mode of rotary airflow, the compression of the mechanical structure of the anode, and the compression of cooling water to lead an ion arc produced to be effectively compressed and centralized. Consequently, an ion arc with high-speed and stable flame is formed, which provides the guarantee of reliable energy for preparing high quality nanometer silicon nitride ceramic powders.

Description

Plasma generator

Technical field

The utility model discloses a kind of equipment for preparing nano-silicon nitride ceramics powder, specifically is the plasma arc generator of the synthetic preparation of gas phase nano-silicon nitride ceramics powder.

Background technology

The silicon nitride ceramics powder application is very wide, as wear resistant tools and part, and general heat-and corrosion-resistant parts, gas turbine, Diesel engine, chemical industry, national defence and other thermic devices.At present, the preparation of general beta-silicon nitride powder is the liquid process that adopts silicon powder nitride, ultra-fine grinding by the nitrogenize product, (100～10nm) grades silicon nitride then needs to adopt the new technology of induced with laser, and it is less and cost an arm and a leg that present domestic laser method prepares ultrafine powder of silicon nitride body scale to obtain nanometer.In order to overcome the deficiency that laser method exists, the technical staff begins energy is concentrated in the research of plasma arc synthesis of nano silicon nitride ceramics powder, in the hope of reducing production costs, though can produce qualified nano-silicon nitride ceramics powder, plasma generator as the energy supplier of gas phase nano materials exists the defective that energy disperses, speed is slow, scouring force is not enough and arc flame is unstable, thus the product quality of the nano-silicon nitride ceramics powder that influence makes.

Technology contents

The purpose of this utility model provides a kind of arc flame concentration of energy, stable, the fireballing plasma generator of arc flame.

For achieving the above object, the technical solution adopted in the utility model is: plasma generator, comprise positive anode bodies, negative electrode, anode component that being provided with in its tube chamber is fitted to each other is used to produce the ion arc is characterized in that: there is the tubular cavity that passes through for the ion arc described anode component inside, the one end is the taper hole shape and constitutes matched in clearance with the conical end portion of negative electrode that the other end links to each other with apparatus for gas-phase synthesis; The cooperation position place of close negative electrode, anode component is provided with can wrap the cyclonic arrangement that is attached to around the ion arc and imports the starting the arc, commentaries on classics arc gas in the cyclone mode; Around the tubular cavity of above-mentioned anode component, be provided with cooling water cavity.

As shown from the above technical solution, the scheme that the utility model has structurally adopted three cascade combined pressures to contract, promptly provide the mode of swirling eddy to compress, the compression of the mechanical structure of anode and cooling water compression, scheme by above-mentioned three grades of compressions makes the ion arc that is produced by effectively compression is concentrated, thereby the ion arc of the high speed of formation, the retention flame provides reliable energy safeguard for preparing high-quality nano-silicon nitride ceramics powder.

Summary of drawings

Fig. 1 is a structural representation of the present utility model;

Fig. 2 is the structural representation of anode bodies;

Fig. 3 is an A-A cutaway view among Fig. 2;

Fig. 4 is the structural representation that revolves gas bushing;

Fig. 5 is an A-A cutaway view among Fig. 4;

Fig. 6 is a B-B cutaway view among Fig. 4.

Embodiment

Below in conjunction with drawings and Examples the utility model is further described.

As Fig. 1, plasma generator comprises positive anode bodies 10, the anode that being provided with in its tube chamber is fitted to each other is used to produce the ion arc,

cathode assembly

20,30, there is the tubular cavity 21 that passes through for the ion arc described anode component 20 inside, the one end is the taper hole shape and constitutes matched in clearance with the conical end portion of negative electrode 30, the other end links to each other with apparatus for gas-phase synthesis, introduce in the apparatus for gas-phase synthesis of silicon nitride, by this tubular cavity 21 by the ion arc that this device produces for synthesizing silicon nitride provides reliable thermal source; The cooperation position place of close anode,

cathode assembly

20,30 is provided with can wrap the cyclonic arrangement that is attached to around the ion arc and imports the starting the arc, commentaries on classics arc gas in the cyclone mode, under the effect of this cyclonic arrangement, when the starting the arc, commentaries on classics arc gas enter the position of anode,

cathode assembly

20,30 cooperation generation plasma arcs, because the starting the arc, commentaries on classics arc gas are cold air, therefore under the double action of revolving gas and cold conditions of the starting the arc, commentaries on classics arc gas, the plasma arc that produces can be compressed effectively, concentrate, avoid plasma arc to disperse.The tubular cavity 21 of described anode component 20 inside is roughly step-like cylindrical cavity, position near taper hole is a minor diameter elongated hole section, when the cavity of this aperture structure passes through at the guiding plasma arc, the effect of can effectively play compression, concentrating plasma arc; The cooling water path 11 that is provided with on cooling water cavity 22 around the above-mentioned tubular cavity 21 and the anode bodies 10 is communicated with, and the effect that cooling water cavity 22 can play compression, concentrated plasma arc equally is set.

Referring to Fig. 1,4,5,6, described cyclonic arrangement comprises that revolves a gas bushing 40, its tube wall is provided with and is communicated with the inside and outside through hole 41 of sleeve pipe, the source of the gas pipeline connection of the outer end of through hole 41 and the starting the arc, commentaries on classics arc gas, introduce along the tangential direction of revolving gas bushing 40 inwalls the inner of through hole 41, can guarantee the effective compression to the plasma arc that is produced like this.What the described through hole 41 that revolves on the gas bushing 40 was mutually symmetrical on same cross section is provided with 3～5, what provide among Fig. 5 is 4 through holes, they enter from the four direction of arranging symmetrically each other along circumference in same cross section, and the through hole 41 among Fig. 5 is for having imported arc gas; On another cross section, along circumference each other symmetrically be provided with 3～5, the through hole 41 among Fig. 6 is four, their change arc gas for input.Shown in the structure among Fig. 5,6, the air-flow of the through hole 41 on two cross sections enter that the back forms direction of rotation identical, can strengthen the cyclone effect like this, make the compression uniformity that is subjected to around the ion arc, make that it keeps concentrating, characteristic fast.

Referring to Fig. 1,2,3, the Kong Changyu aperture ratio of the minor diameter elongated hole section in the described tubular cavity 21 is generally 2: 5, and ratio is 3: 4 comparatively ideals.Described anode bodies 10 is provided with input port 12 and two delivery outlets 13 of two cooling waters, the structure of this multichannel cooling water path can guarantee the uniformity cooled off, thereby guarantee the compression uniformity that is subjected to around the ion arc, make that it keeps concentrating, characteristic fast.Input port 12 is corresponding to the position at fit clearance place between the conical surface of anode,

cathode assembly

20,30, the taper hole, two input ports, the 12 parallel to each other and reverse tangential directions along anode bodies 10 inner chambers are introduced, and the setting of this position is in order to make the ion arc begin both to be subjected to from compression uniformly and effectively on every side from firm generation.

As seen from Figure 3, two current delivery outlets 13 lay respectively at the diameter two ends vertical with above-mentioned input port 12, simultaneously referring to Fig. 1,2,3, be connected with the sleeve pipe 50 that is enclosed within anode component 20 outsides on the described anode bodies 10, the cavity 51 between the outer wall of sleeve pipe 50 and anode component 20 links to each other with cooling water path 11 with above-mentioned tubular cavity 21 respectively and constitutes the path of cooling water.Sleeve pipe 50 is process structure parts, is convenient to constitute the path of cooling water on the one hand by adding sleeve pipe 50, makes the structure of each parts be unlikely too complex again simultaneously.

As shown in Figure 1, described anode bodies 10 is provided with the adjusting mechanism of fit clearance between the conical surface of regulating anode,

cathode assembly

20,30, the taper hole, fit clearance is implemented to regulate between the conical surface by this adjusting mechanism antianode,

cathode assembly

20,30, the taper hole, can change the flow of working gas, this has remarkable result to changing the plasma arc arc voltage, thereby can satisfy the requirement of the product of different process requirement to voltage and current.The adjusting mechanism of described fit clearance comprises that a local body is positioned at anode bodies 10 inner and sleeve pipes 60 relatively-stationary with it, the inner end of sleeve pipe 60 is resisted against revolves on the gas bushing 40, cathode assembly 30 links to each other with the adjusting rod 70 that inside is provided with cooling water channel, adjusting rod 70 is at sleeve pipe 60 and revolve in gas bushing 40 inner chambers and can move vertically, and the cylindrical outer surface of cathode assembly 30 enters the path clearance between anode,

cathode assembly

20,30 conical surfaces with revolving to have between the gas bushing 40 for the starting the arc, commentaries on classics arc gas.

Below in conjunction with Fig. 1 operation principle of the present utility model is made brief description.

Connect suitable high frequency to the utility model and play arc power, the elevated pressure nitrogen, hydrogen, the argon gas that meet process conditions through the cyclonic arrangement input, electrical system is the high frequency starting the arc under appropriate voltage and current conditions, the plasma arc that is produced revolve that air pressure contracts, obtain to concentrate under the polynary compound compressed environment of mechanical compress and cooled compressed, plasma arc fast, and arrive apparatus for gas-phase synthesis by arc footpath path and provide synthetic environment for it.

Below in conjunction with the operation principle brief description of Fig. 1 to the adjusting mechanism in gap.

Sleeve pipe 60 and to revolve gas bushing 40 fixing with anode bodies 10 by pressure cap 80, rotating casing 60 is provided with turning handle 90, because turning handle 90 can only rotate with respect to sleeve pipe 60, move along its axis with 70 of the adjusting rods of turning handle 90 threaded engagement, inner end owing to adjusting rod 70 links to each other with cathode assembly 30 simultaneously, so when rotating turning handle 90, the columned position of the rear of cathode assembly 30 moves in revolving gas bushing 40 vertically, thereby realized the adjustment of fit clearance between the conical surface, taper hole of anode,

cathode assembly

20,30.

Claims

1. plasma generator, it comprises anode bodies (10), the anode that being provided with in its tube chamber is fitted to each other is used to produce the ion arc, cathode assembly (20), (30), it is characterized in that: there is the tubular cavity (21) that passes through for the ion arc described anode component (20) inside, the one end is the taper hole shape and constitutes matched in clearance with the conical end portion of negative electrode (30) that the other end links to each other with apparatus for gas-phase synthesis; The cooperation position place of close anode, cathode assembly (20), (30) is provided with can wrap the cyclonic arrangement that is attached to around the ion arc and imports the starting the arc, commentaries on classics arc gas in the cyclone mode; Tubular cavity (21) in above-mentioned anode component (20) is provided with cooling water cavity (22) on every side.

2. plasma generator according to claim 1, it is characterized in that: the inner tubular cavity (21) of described anode component (20) is roughly step-like cylindrical cavity, position near taper hole is a minor diameter elongated hole section, and above-mentioned tubular cavity (21) cooling water cavity (22) is on every side gone up the cooling water path (11) that is provided with anode bodies (10) and is communicated with.

3. plasma generator according to claim 1 is characterized in that: described anode bodies (10) is provided with the adjusting mechanism of fit clearance between the conical surface of regulating anode, cathode assembly (20), (30), the taper hole.

4. plasma generator according to claim 1, it is characterized in that: described cyclonic arrangement comprises that revolves a gas bushing (40), its tube wall is provided with and is communicated with the inside and outside through hole (41) of sleeve pipe, the source of the gas pipeline connection of the outer end of through hole (41) and the starting the arc, commentaries on classics arc gas, introduce along the tangential direction of revolving gas bushing (40) inwall the inner of through hole (41).

5. according to claim 2 or 3 described plasma generators, it is characterized in that: the Kong Changyu aperture ratio of the minor diameter elongated hole section in the described tubular cavity (21) is 2: 5, described anode bodies (10) is provided with input port (12) and two delivery outlets (13) of two cooling waters, input port (12) is corresponding to the position at fit clearance place between the conical surface of anode, cathode assembly (20), (30), the taper hole, and two input ports (12) parallel to each other and reverse tangential direction along anode bodies (10) inner chamber is introduced.

6. plasma generator according to claim 5, it is characterized in that: two current delivery outlets (13) lay respectively at the diameter two ends vertical with above-mentioned input port (12), be connected with on the described anode bodies (10) and be enclosed within the outside sleeve pipe (50) of anode component (20), the cavity (51) between the outer wall of sleeve pipe (50) and anode component (20) links to each other with cooling water path (11) with above-mentioned tubular cavity (21) respectively and constitutes the path of cooling water.

7. plasma generator according to claim 4, it is characterized in that: described revolve on the gas bushing (40) through hole (41) upper edge, same cross section circumference each other symmetrically be provided with 3～5, another upper edge, cross section circumference each other symmetrically be provided with 3～5, it is identical that the air-flow of the through hole (41) on two cross sections enters the cyclone direction that the back forms.

8. according to claim 3 or 7 described plasma generators, it is characterized in that: the adjusting mechanism of described fit clearance comprises that a local body is positioned at the inner and sleeve pipe relatively-stationary with it (60) of anode bodies (10), the inner end of sleeve pipe (60) is resisted against revolves on the gas bushing (40), cathode assembly (30) links to each other with the inner adjusting rod (70) that is provided with cooling water channel, adjusting rod (70) is at sleeve pipe (60) and revolve in gas bushing (40) inner chamber and can move vertically, and the cylindrical outer surface of cathode assembly (30) and revolving has between the gas bushing (40) for the starting the arc, change arc gas and enter anode, cathode assembly (20), (30) path clearance between the conical surface.