CN2463956Y

CN2463956Y - Wafer sorting device for wafer tester

Info

Publication number: CN2463956Y
Application number: CN 01200270
Authority: CN
Inventors: 严灿焜
Original assignee: Dongjie Semiconductor Science & Technology Co Ltd
Current assignee: Contrel Semiconductor Technology Co Ltd
Priority date: 2001-01-22
Filing date: 2001-01-22
Publication date: 2001-12-05
Anticipated expiration: 2011-01-22

Abstract

The utility model relates to a wafer sorting device for a wafer tester, which comprises two feed pipes, a conveying mechanism and four discharging pipes. The top ends of the feed pipes are connected to a testing seat on the wafer tester, and the bottoms of the feed pipes are respectively provided with a blocking device. The conveying mechanism is composed of a track, two movable loading stages, and two drivers, wherein, the track is transversally arranged below the two feed pipes; the two movable loading stages are arranged on the track, and can transversal reciprocate along the track; the two drivers are arranged on both ends of the track, and are respectively connected with the two movable loading stages; the bottoms on the two movable loading stages are respectively provided with a blocking device. The four discharging pipes are arranged below the track, and two discharging pipes which are positioned on the inner side are aligned to the two feed pipes.

Description

The wafer sorter of wafer tester

The utility model is relevant with the device of testing wafer, more detailed it, be the wafer sorter that refers to a kind of wafer tester.

Press, known wafer tester, after wafer sort is finished, usually utilize a grabbing device with wafer by shifting out on the testboard, yet, this kind grabbing device utilizes two mechanical arms to be formed by at least two vacuum cups usually, utilizes this two mechanical arm to move this two vacuum cups wafer good, that reach poor quality is placed in respectively on the corresponding carrier, and then reach the effect of classification.

The shortcoming of aforesaid known grabbing device is: must use expensive equipment such as vacuum cups, mechanical arm, make cost high; Moreover the mechanism of mechanical arm and vacuum cups is comparatively complicated, also must precisely be located during assembling, and is also comparatively consuming time during its combination, take a lot of work.

Main purpose of the present utility model is promptly providing a kind of wafer sorter of wafer tester, and its member is very simple, and cost is lower.

Of the present utility model time a purpose is that a kind of wafer sorter of wafer tester is being provided, and its member is very simple, and is very easy during assembling.

Edge is, according to the wafer sorter of a kind of wafer tester provided by the utility model, be used for the wafer that test is finished is complied with its good bad classification, this processing unit includes: two feed pipes, the top is connected in the test bench on the wafer tester, and the bottom respectively is provided with a stopper; One carrying mechanism, formed by a track, two movable microscope carriers, two drivers, this track is horizontally set at the below of this two feed pipe, this two movable microscope carrier is arranged on this track and can laterally moves back and forth along this track, this two driver is arranged at this track two ends, and be connected to this two movable microscope carrier, the bottom of this two movable microscope carrier respectively is provided with a stopper; Four discharge nozzles are arranged at this track below, are positioned at two inboard discharge nozzles and are aligned with this two feed pipe; By this, after the wafer finished of test entered this two movable microscope carrier along this two feed pipe, this two movable microscope carrier was promptly driven and the good bad result of wafer after according to its test is moved to corresponding discharge nozzle respectively, and then reaches the effect that classification separates.

Wherein this stopper is to be a cylinder.

Wherein respectively this driver is to be an air compressing cylinder, is connected in this activity microscope carrier with its piston rod.

The bottom that wherein is positioned at two discharge nozzles in the outside in this four discharge nozzle is provided with a stopper.

Relevant detailed structure of the present utility model, feature and effect below are lifted a preferred embodiment now, and cooperate graphic being further described, wherein:

Fig. 1 is the combination schematic diagram of the utility model one preferred embodiment;

Fig. 2 is that the utility model one preferred embodiment is equipped with the combination schematic diagram on testboard;

Fig. 3 is that the utility model one preferred embodiment is equipped with the schematic side view on testboard;

Fig. 4 is the movement state diagram of the utility model one preferred embodiment;

Fig. 5 is another movement state diagram of the utility model one preferred embodiment;

Fig. 6 is a movement state diagram again of the utility model one preferred embodiment.

See also Fig. 1 to Fig. 2, the wafer sorter 10 of a kind of wafer tester that the utility model one preferred embodiment is provided, be to be with the installation of on the wafer tester 90 with two test benches 91, be used for the wafer that test is finished is complied with its good bad classification, this sorter 10 mainly is made up of two feed pipes 11, a carrying mechanism 21 and four discharge nozzles 31, wherein:

This two feed pipe 11, be connected in two test benches 91 on the two-seater wafer tester 90 with its top respectively, in order to accept the wafer after the test, the bottom of this two feed pipe 11 respectively is provided with a stopper 12, it in the present embodiment cylinder, be inserted into respectively with its piston rod (not shown) that the bottom of this feed pipe 11 produces actions such as block, release, can be used to control wafer whether drop out downwards;

This carrying mechanism 21, by a track 22, two movable microscope carriers 24, two drivers 26 are formed, this track 22 is horizontally set at this two feed pipes, 11 belows, this two movable microscope carrier 24 is arranged on this track 22 and can laterally moves back and forth along this track 22, this two driver 26, it in the present embodiment air compressing cylinder, being connected in respectively with its piston rod 27 should activity microscope carrier 24, use and drive these two movable microscope carrier 24 displacements, the bottom of these two movable microscope carriers 24 respectively is provided with a stopper 25, be a cylinder in the present embodiment, with its piston rod (not shown) be inserted into respectively should activity microscope carrier 24 the bottom produce block, whether actions such as release can be used to control wafer and drop out downwards;

This four discharge nozzle 31 is arranged at this track 22 belows, is positioned at two inboard discharge nozzles 31 and is aligned with this two feed pipe 11, and the bottom that is positioned at two discharge nozzles 31 in the outside then respectively is provided with a stopper 32, is to be a cylinder in the present embodiment.

Please consulting Fig. 3 again, when the utility model sorter 10 is equipped with on a wafer tester 90, is to be arranged on the board in the mode that tilts, and utilizes the mode of gravity to allow wafer glide;

The utility model is in when operation, is positioned at two inboard discharge nozzles 31 in earlier predetermined this four discharge nozzle 31 for being used for the ccontaining defective IC wafer by test, and two discharge nozzles 31 that are positioned at the outside are for being used for the IC wafer of ccontaining test passes; When the utility model does not move as yet, its state as shown in Figure 2, this two feed pipe 11 aligns two testboards, 91 belows that are connected on this wafer tester 90, in order to accept the wafer after the test; When IC wafer 99 after test is finished, promptly can slip into downwards in this two feed pipe 11 by this two testboard 91, as shown in Figure 4, this moment this two stopper 12 be in blocked state constitutes, 99 of IC wafers are barred from this two feed pipe 11 temporarily; Then, as shown in Figure 5, driving this two movable microscope carrier 24 through this two driver 26 makes it be aligned with the below of this two feed pipe 11, this two stopper 12 can transfer release condition to, be positioned at the IC wafer 99 of this two feed pipe 11 this moment and promptly fall into this two movable microscope carrier 24, stopper 25 on this two movable microscope carrier 24 is in blocked state constitutes, so IC wafer 99 can be carried by this two movable microscope carrier 24, as shown in Figure 6, this two movable microscope carrier 24 is driven according to this IC wafer 99 test results good bad is moved to corresponding discharge nozzle 31, transfer these stoppers 25 to release condition again, the IC wafer 99 that is positioned at this two movable microscope carrier 24 is promptly fallen into corresponding discharge nozzle 31; By this, can IC wafer 99 is good according to it, poor products matter places respectively in the different discharge nozzle 31, reaches the effect that separates classification.

Via above-mentioned structure, the utility model can produce following advantage:

One, member is simple, and cost is lower: the utility model mainly utilizes track structure and air compressing cylinder Between combination reach the classification of IC wafer action, can't use vacuum cups, machinery The expensive device such as arm, hence one can see that, and member of the present utility model is comparatively simple, and track structure reaches Air compressing cylinder is also more cheap far beyond vacuum cups, mechanical arm, so cost of the present utility model is practised The user is lower.

Two, assembling is easily: member of the present utility model is very simple, when assembling must with track, Relevant position calibration accuracy between feed pipe, discharge nozzle, and the mobile position of proofreading and correct these movable microscope carriers Put, namely finish assembling, practise the user and use vacuum cups, mechanical arm person in assembling, more to hold Easily.

In sum, the sorting device for wafer of wafer tester of the present utility model, it has aforementioned Be better than practising every advantage of user, practicality and progressive oneself is unquestionable, in addition, and this kind knot Structure always is not disclosed use or is exposed in various documents and materials, conjectures all new patent important documents, this case Should possess, request your juror and find time in the midst of pressing affairs and detailed be examination, and grant early quasi patent for praying.

Claims

1. the wafer sorter of a wafer tester is equipped with on the two-seater wafer tester, is used for the wafer that test is finished is complied with its good bad classification, it is characterized in that this processing unit includes:

Two feed pipes, top are connected in the test bench on the wafer tester, and the bottom of this two feed pipe respectively is provided with a stopper;

One carrying mechanism, formed by a track, two movable microscope carriers, two drivers, this track is horizontally set at the below of this two feed pipe, this two movable microscope carrier is arranged on this track and can laterally moves back and forth along this track, this two driver is arranged at this track two ends, and be connected to this two movable microscope carrier, the bottom of this two movable microscope carrier respectively is provided with a stopper;

Four discharge nozzles are arranged at this track below, are positioned at two inboard discharge nozzles and are aligned with this two feed pipe.

2. the wafer sorter of wafer tester according to claim 1 is characterized in that, wherein this stopper is to be a cylinder.

3. the wafer sorter of wafer tester according to claim 1 is characterized in that, wherein respectively this driver is to be an air compressing cylinder, is connected in this activity microscope carrier with its piston rod.

4. the wafer sorter of wafer tester according to claim 1 is characterized in that, wherein respectively this driver is to be an air compressing cylinder, is connected in this activity microscope carrier with its piston rod.