CN221183994U - Cleaning device for diffusion furnace tube - Google Patents
Cleaning device for diffusion furnace tube Download PDFInfo
- Publication number
- CN221183994U CN221183994U CN202322864240.3U CN202322864240U CN221183994U CN 221183994 U CN221183994 U CN 221183994U CN 202322864240 U CN202322864240 U CN 202322864240U CN 221183994 U CN221183994 U CN 221183994U
- Authority
- CN
- China
- Prior art keywords
- disc
- tank
- cleaning
- furnace tube
- diffusion furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 51
- 238000009792 diffusion process Methods 0.000 title claims abstract description 46
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 25
- 238000005406 washing Methods 0.000 claims description 21
- 238000001914 filtration Methods 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 4
- 239000012535 impurity Substances 0.000 description 9
- 239000012459 cleaning agent Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 4
- 239000002351 wastewater Substances 0.000 description 4
- 238000010306 acid treatment Methods 0.000 description 3
- 239000013043 chemical agent Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model relates to the technical field of cleaning devices and discloses a cleaning device for a diffusion furnace tube, which comprises a base, wherein a cleaning tank is fixedly arranged in the middle of the top of the base, support plates are arranged on two sides of the cleaning tank, a rotary rod is rotatably arranged between the support plates, a servo motor connected with the rotary rod is fixedly arranged on the outer side of the support plates, one sides of the two support plates are respectively connected with a first disc and a second disc which are positioned in the cleaning tank, and the diffusion furnace tube is arranged between the first disc and the second disc.
Description
Technical Field
The utility model belongs to the technical field of cleaning devices, and particularly relates to a cleaning device for a diffusion furnace tube.
Background
The diffusion furnace is one of important process equipment in the front process of semiconductor production line, and is used in diffusion, oxidation, annealing, alloy, sintering and other processes in large scale integrated circuit, discrete device, power electronic, photoelectric device, optical fiber and other industry.
The existing diffusion furnace tube is made of quartz materials generally, the purpose of diffusion is achieved through a liquid source tube type diffusion method, after the furnace tube is used for a period of time or is polluted, impurities such as crystals are attached to the inner wall of the diffusion furnace tube, and the impurities such as crystals affect the diffusion quality of a silicon wafer during diffusion, so that the furnace tube needs to be removed periodically for cleaning, the efficiency of a diffusion process is improved, and the diffusion quality is guaranteed.
However, the prior art diffusion furnace tube cleaning device is complex in the whole fixing step of the furnace tube, is inconvenient to rapidly disassemble and assemble the cleaned furnace tube, and meanwhile, the traditional diffusion furnace tube is cleaned, waste chemical agent and water are mostly used for soaking acid treatment, and the cleaned impurities cannot be collected intensively, so that blockage is easily caused.
Disclosure of utility model
Aiming at the situation, in order to overcome the defects of the prior art, the utility model provides the cleaning device for the diffusion furnace tube, which effectively solves the problems that the whole fixing step is complex, the cleaned furnace tube is inconvenient to rapidly disassemble and assemble, meanwhile, the traditional diffusion furnace tube is cleaned, the immersed acid treatment is mostly used for wasting chemical agent and water, the cleaned impurities cannot be collected and treated in a concentrated way, and the blockage is easy to cause.
In order to achieve the above purpose, the present utility model provides the following technical solutions: a belt cleaning device for diffusion furnace tube, includes the base, base top intermediate position fixed mounting has the washing tank, the extension board is all installed to the washing tank both sides, rotate between the extension board and be provided with the rotary rod, extension board outside fixed mounting has the servo motor who is connected with the rotary rod, two extension board one sides are connected with the inside first disc and the second disc that are located the washing tank respectively, be provided with diffusion furnace tube between first disc and the second disc, base top one side fixed mounting has the cleaner case, the cleaner case passes through water pipe and washing tank intercommunication, the water tank is installed to base bottom one side, the collecting tank with the washing tank intercommunication is installed to base bottom opposite side, the base top is provided with the water pump that is connected with the water tank, the inside supersonic generator that is provided with of base, supersonic generator one end is connected with ultrasonic transducer, the collecting tank, cleaner case and washing tank intercommunication department all are provided with the solenoid valve.
Preferably, the first disc is close to second disc one side surface annular setting interval and installs the dead lever, and the second disc surface stretches out and draws back to be provided with dead lever assorted regulation pole, adjusts pole, dead lever, first disc and second disc surface and all is provided with the protection pad, and the protection pad is wear-resisting rubber material.
Preferably, the second disc surface annular is offered and is adjusted the flexible groove of pole mutual match, and flexible inslot portion rotates and is provided with the lead screw with adjusting pole threaded connection, and the second disc opposite side rotates and is provided with the rotatory piece of being connected with the lead screw.
Preferably, the cleaning holes are uniformly arranged above the inner side surface of the cleaning tank, the cavity communicated with the cleaning holes is arranged in the side wall of the cleaning tank, and the water pump is communicated with the cavity through a water pipe.
Preferably, the inside filter frame that is provided with of washing tank, the logical groove that matches each other with the filter frame is seted up on the washing tank surface, and filter frame outside fixed mounting has the closing plate, and closing plate inboard fixed mounting has sealed lug, and logical groove outside washing tank outside has been seted up the sealed recess that matches each other with sealed lug, and the rotation of closing plate outside four corners is provided with fixing bolt.
Compared with the prior art, the utility model has the beneficial effects that:
1) According to the utility model, the diffusion furnace tube is inserted into the fixed rod for preliminary fixing, then the adjusting rod is driven to move out of the telescopic groove to the other end of the diffusion furnace tube for fixing by rotating the screw rod, meanwhile, the diffusion furnace tube is protected by the protection pad, the adjusting rod is driven to pull out of the diffusion furnace tube by reversing the screw rod, so that the diffusion furnace tube can be detached, and the whole working efficiency is improved by simplifying the disassembly and assembly steps of the diffusion furnace;
2) The impurity in the waste water is filtered through the filter frame, can pull out the washing tank with the filter frame through reversing fixing bolt, and the people of being convenient for will handle the impurity of filtering, also make things convenient for people to wash the filter frame simultaneously, be convenient for continue to carry out the filtration work, then insert the filter frame inside the washing tank again, this moment through inserting sealed lug inside the sealed recess to fine sealed effect has been played.
Drawings
The accompanying drawings are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the embodiments of the utility model, serve to explain the utility model. In the drawings:
FIG. 1 is a front view of the present utility model;
FIG. 2 is a perspective view of a second disc of the present utility model;
FIG. 3 is a perspective view of a cleaning tank of the present utility model;
In the figure: 1. a base; 2. a cleaning tank; 3. a support plate; 4. a rotating rod; 5. a first disc; 6. a second disc; 7. a diffusion furnace tube; 8. a cleaning agent tank; 9. a collection box; 10. a water pump; 11. an ultrasonic generator; 12. a fixed rod; 13. an adjusting rod; 14. a telescopic slot; 15. a screw rod; 16. a protective pad; 17. cleaning the hole; 18. a cavity; 19. a filter frame; 20. a through groove; 21. a closing plate; 22. a sealing bump; 23. sealing the groove; 24. a servo motor; 25. a water tank.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model; all other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The first embodiment is shown in fig. 1, 2 and 3, the utility model comprises a base 1, a cleaning tank 2 is fixedly arranged in the middle of the top of the base 1, support plates 3 are arranged on two sides of the cleaning tank 2, a rotary rod 4 is rotatably arranged between the support plates 3, a servo motor 24 connected with the rotary rod 4 is fixedly arranged on the outer side of the support plates 3, a first disc 5 and a second disc 6 which are positioned in the cleaning tank 2 are respectively connected on one side of the two support plates 3, a diffusion furnace tube 7 is arranged between the first disc 5 and the second disc 6, a cleaning agent tank 8 is fixedly arranged on one side of the top of the base 1, the cleaning agent tank 8 is communicated with the cleaning tank 2 through a water pipe, a water tank 25 is arranged on one side of the bottom of the base 1, a collecting tank 9 communicated with the cleaning tank 2 is arranged on the other side of the bottom of the base 1, a water pump 10 connected with the water tank 25 is arranged on the top of the base 1, an ultrasonic generator 11 is arranged in the base 1, one end of the ultrasonic generator 11 is connected with an ultrasonic transducer, and electromagnetic valves are arranged at the positions of the collecting tank 9 and the cleaning agent tank 8 and the cleaning tank 2;
The surface of one side of the first disc 5, which is close to the second disc 6, is annularly provided with fixed rods 12 at intervals, the surface of the second disc 6 is telescopically provided with adjusting rods 13 matched with the fixed rods 12, the surfaces of the adjusting rods 13, the fixed rods 12, the first disc 5 and the second disc 6 are all provided with protection pads 16, and the protection pads 16 are made of wear-resistant rubber materials;
the surface of the second disc 6 is provided with a telescopic groove 14 which is matched with the adjusting rod 13 in an annular way, a screw rod 15 which is in threaded connection with the adjusting rod 13 is arranged in the telescopic groove 14 in a rotating way, and a rotating block which is connected with the screw rod 15 is arranged on the other side of the second disc 6 in a rotating way;
The upper part of the inner side surface of the cleaning tank 2 is uniformly provided with cleaning holes 17, the inner side wall of the cleaning tank 2 is provided with a cavity 18 communicated with the cleaning holes 17, and the water pump 10 is communicated with the cavity 18 through a water pipe;
The inside filter frame 19 that is provided with of washing tank 2, the logical groove 20 that matches each other with filter frame 19 has been seted up on washing tank 2 surface, be convenient for insert filter frame 19 inside washing tank 2 to impurity filter the collection, filter frame 19 outside fixed mounting has closure plate 21, closure plate 21 inboard fixed mounting has sealed lug 22, the sealed recess 23 that matches each other with sealed lug 22 has been seted up in logical groove 20 outside washing tank 2 outside, the rotation of closure plate 21 outside four corners is provided with fixing bolt, insert inside sealed recess 23 through sealed lug 22, thereby play fine sealed effect.
Working principle: during operation, the diffusion furnace tube 7 is inserted into the fixed rod 12 for preliminary fixing, then the screw rod 15 is driven to rotate through the rotating block, the screw rod 15 is in threaded connection with the adjusting rod 13, so that the adjusting rod 13 is driven to move out of the telescopic groove 14, the adjusting rod 13 can be inserted into the other end of the diffusion furnace tube 7, the effect of mounting and fixing is finished by inserting two ends of the diffusion furnace tube 7, meanwhile, the diffusion furnace tube 7 in motion is conveniently protected by the aid of the protection pad 16, a plurality of diffusion furnace tubes 7 are sequentially mounted between the first disc 5 and the second disc 6 through repeated mounting actions, then the electromagnetic valve on the cleaning agent box 8 is opened, so that cleaning agent automatically flows into the cleaning tank 2, then the servo motor 24 is started to drive the first disc 5 and the second disc 6 on the rotating rod 4 to rotate, so that the diffusion furnace tube 7 sequentially rotates and moves into the cleaning tank 2, at this time, ultrasonic wave is generated by starting the ultrasonic generator 11 to be matched with the ultrasonic transducer, and the ultrasonic wave is matched with the cleaning agent to clean the diffusion furnace tube 7, so that the waste of the chemical agent and water caused by the immersion type acid treatment is avoided, after the cleaning is finished, the waste water is guided into the collecting box 9 to be concentrated and collected, then the water pump 10 is started to guide the water in the water tank 25 into the cavity 18, then the diffusion furnace tube 7 rotating into the cleaning tank 2 is flushed through the cleaning hole 17 to be convenient for flushing the residual cleaning agent and dirt on the surface of the diffusion furnace tube 7, the screw rod 15 is driven to rotate reversely through the rotating block, the adjusting rod 13 is driven to retract into the telescopic groove 14, the diffusion furnace tube 7 can be detached, the whole working efficiency is improved by simplifying the disassembly and assembly steps of the diffusion furnace tube 7, when deriving waste water, filter the impurity in the waste water through filter frame 19, after filtering a period of time, remove the fixed to closure plate 21 through reversing fixing bolt, can pull out filter frame 19 washing tank 2 through leading to groove 20 this moment, be convenient for people will handle the impurity of filtration, also make things convenient for people to wash filter frame 19 simultaneously, be convenient for continue to carry out the filtration work, then insert filter frame 19 inside washing tank 2 again, this moment is through inserting sealed lug 22 inside sealed recess 23, thereby fine sealed effect has been played.
Claims (5)
1. The utility model provides a belt cleaning device for diffusion furnace tube, includes base (1), its characterized in that: the utility model discloses a cleaning device, including base (1), washing tank (2), backup pad (3) are all installed to base (1) top intermediate position fixed mounting, rotate between backup pad (3) and be provided with rotary rod (4), servo motor (24) that are connected with rotary rod (4) are fixedly installed in backup pad (3) outside, two backup pad (3) one side are connected with respectively and are located inside first disc (5) and second disc (6) of washing tank (2), be provided with diffusion furnace tube (7) between first disc (5) and second disc (6), base (1) top one side fixed mounting has cleaner case (8), cleaner case (8) are through water pipe and washing tank (2) intercommunication, tank (25) are installed to base (1) bottom one side, collecting tank (9) with washing tank (2) intercommunication are installed to base (1) bottom opposite side, base (1) top is provided with water pump (10) that are connected with water tank (25), inside being provided with supersonic generator (11), supersonic generator (11) one end is connected with ultrasonic transducer, collecting tank (9), cleaner case (8) and cleaning tank (2) all are provided with solenoid valve department intercommunication.
2. The cleaning apparatus for a diffusion furnace tube of claim 1, wherein: the first disc (5) is close to the annular setting interval of second disc (6) one side surface and installs dead lever (12), and second disc (6) surface flexible be provided with dead lever (12) assorted regulation pole (13), dead lever (12), first disc (5) and second disc (6) surface all are provided with protection pad (16), and protection pad (16) are wear-resisting rubber material.
3. The cleaning apparatus for a diffusion furnace tube of claim 1, wherein: the surface of the second disc (6) is annularly provided with a telescopic groove (14) which is matched with the adjusting rod (13), a screw rod (15) which is in threaded connection with the adjusting rod (13) is rotatably arranged in the telescopic groove (14), and the other side of the second disc (6) is rotatably provided with a rotating block which is connected with the screw rod (15).
4. The cleaning apparatus for a diffusion furnace tube of claim 1, wherein: the cleaning tank is characterized in that cleaning holes (17) are uniformly arranged above the inner side surface of the cleaning tank (2), a cavity (18) communicated with the cleaning holes (17) is formed in the side wall of the cleaning tank (2), and the water pump (10) is communicated with the cavity (18) through a water pipe.
5. The cleaning apparatus for a diffusion furnace tube of claim 1, wherein: the cleaning tank is characterized in that a filtering frame (19) is arranged inside the cleaning tank (2), a through groove (20) matched with the filtering frame (19) is formed in the surface of the cleaning tank (2), a sealing plate (21) is fixedly arranged on the outer side of the filtering frame (19), a sealing lug (22) is fixedly arranged on the inner side of the sealing plate (21), a sealing groove (23) matched with the sealing lug (22) is formed in the outer side of the cleaning tank (2) on the outer side of the through groove (20), and fixing bolts are arranged at four corners of the outer side of the sealing plate (21) in a rotating mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322864240.3U CN221183994U (en) | 2023-10-25 | 2023-10-25 | Cleaning device for diffusion furnace tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322864240.3U CN221183994U (en) | 2023-10-25 | 2023-10-25 | Cleaning device for diffusion furnace tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221183994U true CN221183994U (en) | 2024-06-21 |
Family
ID=91518518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322864240.3U Active CN221183994U (en) | 2023-10-25 | 2023-10-25 | Cleaning device for diffusion furnace tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221183994U (en) |
-
2023
- 2023-10-25 CN CN202322864240.3U patent/CN221183994U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |