CN221102045U - Electrostatic chuck and edge protection structure - Google Patents
Electrostatic chuck and edge protection structure Download PDFInfo
- Publication number
- CN221102045U CN221102045U CN202322946449.4U CN202322946449U CN221102045U CN 221102045 U CN221102045 U CN 221102045U CN 202322946449 U CN202322946449 U CN 202322946449U CN 221102045 U CN221102045 U CN 221102045U
- Authority
- CN
- China
- Prior art keywords
- layer
- protective layer
- epoxy
- electrostatic chuck
- epoxy resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000003822 epoxy resin Substances 0.000 claims abstract description 41
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 41
- 239000011241 protective layer Substances 0.000 claims abstract description 40
- 238000010438 heat treatment Methods 0.000 claims abstract description 33
- 238000007789 sealing Methods 0.000 claims abstract description 32
- 239000004593 Epoxy Substances 0.000 claims abstract description 17
- 239000010410 layer Substances 0.000 claims description 76
- 239000012790 adhesive layer Substances 0.000 claims description 27
- 239000000919 ceramic Substances 0.000 claims description 8
- 239000001307 helium Substances 0.000 claims description 5
- 229910052734 helium Inorganic materials 0.000 claims description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 5
- 229920005989 resin Polymers 0.000 abstract description 5
- 239000011347 resin Substances 0.000 abstract description 5
- 238000005530 etching Methods 0.000 abstract description 4
- 238000012423 maintenance Methods 0.000 abstract description 3
- 230000002035 prolonged effect Effects 0.000 abstract description 2
- 239000000853 adhesive Substances 0.000 abstract 4
- 230000001070 adhesive effect Effects 0.000 abstract 4
- 239000007789 gas Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 239000000126 substance Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- RRZIJNVZMJUGTK-UHFFFAOYSA-N 1,1,2-trifluoro-2-(1,2,2-trifluoroethenoxy)ethene Chemical compound FC(F)=C(F)OC(F)=C(F)F RRZIJNVZMJUGTK-UHFFFAOYSA-N 0.000 description 1
- BLTXWCKMNMYXEA-UHFFFAOYSA-N 1,1,2-trifluoro-2-(trifluoromethoxy)ethene Chemical compound FC(F)=C(F)OC(F)(F)F BLTXWCKMNMYXEA-UHFFFAOYSA-N 0.000 description 1
- 229920001774 Perfluoroether Polymers 0.000 description 1
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 229920006335 epoxy glue Polymers 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- UJMWVICAENGCRF-UHFFFAOYSA-N oxygen difluoride Chemical compound FOF UJMWVICAENGCRF-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229920001897 terpolymer Polymers 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to the field of electrostatic chucks (ESCs), in particular to an electrostatic chuck and an edge protection structure, which comprises: the base, first adhesive linkage, second adhesive linkage, zone of heating, epoxy protective layer, O-ring sealing washer (select for use perfluororubber to design), set up an annular groove structure along vertical direction on the base corresponds, resin can fill into the recess when filling epoxy and fill the gum, forms the more tight epoxy protective layer of protection of an embedding style, and the side of parcel is lived first adhesive linkage, zone of heating, second adhesive linkage, and the epoxy protective layer is lived in the parcel in the outer O-ring sealing washer encirclement again, wherein, O-ring sealing washer can directly dismantle from the zone of heating side, can regularly change it and maintain, has reduced the maintenance cost. Further, when epoxy is filled, resin can be filled into the groove, gaps are effectively prevented from being generated on the lower edge of the epoxy resin protective layer, the epoxy resin protective layer is wrapped by the O-ring sealing ring, and the epoxy resin is protected from being consumed by etching to expose internal parts, so that double protection of the side edges of the ESC is achieved, and the overall service life of the electrostatic chuck can be effectively prolonged by several times.
Description
Technical Field
The utility model relates to the field of electrostatic chucks (ESCs), in particular to an electrostatic chuck and an edge protection structure.
Background
When the electrostatic chuck (ESC) adsorbs a wafer to operate in a Plasma cavity, the electrostatic chuck is synchronously exposed to Plasma (Plasma), and Epoxy (Epoxy resin) used for protecting the internal structure of the electrostatic chuck edge is synchronously damaged by bombardment etching along with the increase of the operation time. The consumption rate and damage level of the Epoxy portion indirectly lead to the failure of the electrostatic chuck (ESC), and the service life of the portion will determine the overall service life of the electrostatic chuck.
Chinese utility CN 219677210U discloses an electrostatic chuck comprising: the ceramic sealing device comprises a substrate, a heating layer, a ceramic layer, a first bonding layer, a second bonding layer, an inner sealing ring and an outer sealing ring, wherein the inner sealing ring is used for wrapping the side surfaces of the first bonding layer, the heating layer and the second bonding layer in a surrounding manner, the outer sealing ring is used for wrapping the inner sealing ring in a surrounding manner, the inner sealing ring at least wraps the side surfaces of the heating layer in a surrounding manner, the side surfaces of the first bonding layer and the side surfaces of the second bonding layer in a surrounding manner, and the outer sealing ring wraps the inner sealing ring in a surrounding manner. There is a problem in that the installation of the inner seal ring is difficult.
The following problems are common in the electrostatic chuck protection mechanisms of the prior art (including the above-described invention):
Etching is started from the lower edge of the resin, once gaps exist below, the protection effect is lost, and the inner sealing ring cannot completely cover all the gaps;
When the inner sealing ring is installed, the inner sealing ring needs to be unfolded and sleeved, and the inner ring is difficult to install due to the smaller diameter of the inner ring.
Disclosure of utility model
The utility model aims to provide an electrostatic chuck and an edge protection structure, which are used for solving the problem that the inner leakage protection effect occurs on the side edge of an ESC and effectively prolonging the whole service life of the electrostatic chuck by several times.
In order to solve the above technical problems, the present utility model provides an electrostatic chuck and an edge protection structure, comprising: the base, the first bonding layer, the second bonding layer, the heating layer, the epoxy resin protective layer and the O-ring sealing ring, wherein,
The heating layer is bonded on the base through the first bonding layer; the second adhesive layer is bonded on the heating layer;
An annular groove structure is correspondingly formed in the base along the vertical direction, the epoxy resin protective layer is embedded into the groove part, the epoxy resin protective layer is filled with the annular groove structure to wrap at least the side face of the heating layer, the side face of the first bonding layer and the side face of the second bonding layer, and the O-ring sealing ring wraps the epoxy resin protective layer in a surrounding mode.
An electrostatic chuck and edge protection structure according to claim 1, wherein the thickness of the epoxy protective layer is greater than or equal to the total thickness of the heating layer, the first adhesive layer and the second adhesive layer.
Optionally, in the electrostatic chuck and the edge protection structure, the O-ring seal ring is made of perfluororubber.
Optionally, in the electrostatic chuck and edge protection structure, the width of the O-ring seal ring is greater than or equal to the thickness of the epoxy resin protection layer with the width of the inner seal ring.
Optionally, in the electrostatic chuck and edge protection structure, the electrostatic chuck edge protection structure further includes: helium through holes penetrate through the base, the first bonding layer, the second bonding layer, the heating layer and the ceramic layer.
The technical scheme of the application at least comprises the following advantages:
According to the application, the annular groove structure is correspondingly formed on the base along the vertical direction, resin can be filled into the groove when epoxy glue is filled, an epoxy resin protective layer with more tight protection in an embedded mode is formed, the side surfaces of the first adhesive layer, the heating layer and the second adhesive layer are wrapped, and the outer O-ring sealing ring is used for wrapping the epoxy resin protective layer in a surrounding manner, wherein the O-ring sealing ring can be directly detached from the side of the heating layer, so that the epoxy resin protective layer can be replaced and maintained regularly, and the maintenance cost is reduced.
Furthermore, the epoxy resin protective layer is formed by filling the grooves, so that gaps are effectively prevented from being generated below the epoxy resin protective layer, the O-ring sealing ring wraps the epoxy resin protective layer, the protective resin is not etched and consumed to expose the internal parts, double protection of the side edges of the ESC is achieved, and the whole service life of the electrostatic chuck can be effectively prolonged by several times.
Drawings
Fig. 1 is a schematic structural diagram of an electrostatic chuck and an edge protection structure according to an embodiment of the present utility model.
Fig. 2 is a schematic structural view of an electrostatic chuck according to an embodiment of the present utility model, excluding an epoxy protective layer and an O-ring seal.
Fig. 3 is a schematic structural diagram of an epoxy protective layer according to an embodiment of the present utility model.
FIG. 4 is a schematic diagram of an O-ring seal in an embodiment of the utility model.
Wherein reference numerals are as follows:
the device comprises a base, a first bonding layer, a heating layer, a second bonding layer, a ceramic layer, an epoxy resin protective layer, a sealing ring, a helium gas through hole and a ring groove, wherein the base is arranged at the bottom of the base, the first bonding layer, the heating layer is arranged at the bottom of the base, the second bonding layer is arranged at the bottom of the base, the ceramic layer is arranged at the bottom of the base, the epoxy resin protective layer is arranged at the bottom of the base, the epoxy resin protective layer is arranged at the top.
Detailed Description
The electrostatic chuck edge protection structure according to the present utility model is described in further detail below with reference to the accompanying drawings and specific examples. The advantages and features of the present utility model will become more apparent from the following description. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the utility model. Furthermore, the structures shown in the drawings are often part of actual structures. In particular, the drawings are shown with different emphasis instead being placed upon illustrating the various embodiments.
An embodiment of the present utility model provides an electrostatic chuck and an edge protection structure, referring to fig. 1 to 4, fig. 1 is a schematic structural diagram of the electrostatic chuck and the edge protection structure of the embodiment of the present utility model, fig. 2 is a schematic structural diagram of the electrostatic chuck of the embodiment of the present utility model excluding an epoxy protection layer and an O-ring seal ring, fig. 3 is a schematic structural diagram of the epoxy protection layer of the embodiment of the present utility model, and fig. 4 is a schematic structural diagram of the O-ring seal ring of the embodiment of the present utility model.
Wherein, electrostatic chuck and edge protection structure include: the base 11, the first bonding layer 12, the heating layer 13, the second bonding layer 14, the ceramic layer 15, the epoxy resin protection layer 16 and the O-ring sealing ring 17, wherein the heating layer 13 is bonded on the base 11 through the first bonding layer 12; the ceramic layer 15 is bonded to the heating layer 13 via the second adhesive layer.
Further, the side of the base 11 protrudes from the side of the heating layer 13, the side of the first adhesive layer 12 and the side of the adhesive layer 14, as shown in fig. 2, so that an annular groove 19 may be formed above the base and at the side of the second adhesive layer.
In this embodiment, the base 11 is an aluminum base. An annular groove 19 is formed above the base.
Further, the epoxy resin protective layer is filled in the annular groove 19, and the epoxy resin protective layer wraps at least the side face of the heating layer 13, the side face of the first adhesive layer 12 and the side face of the second adhesive layer 14; the O-ring sealing ring 17 is arranged on the side face of the epoxy resin protective layer, and the O-ring sealing ring 17 surrounds the epoxy resin protective layer.
In this embodiment, as shown in fig. 1, the epoxy protective layer not only surrounds the side surface of the heating layer 13, but also is embedded in the annular groove 19 of the base 11, on the side surface of the first adhesive layer 12 and the side surface of the second adhesive layer 14.
Preferably, the material of the epoxy resin protective layer is epoxy resin, and the epoxy resin has the advantages of high strength, low contractibility, corrosion resistance and high insulation, can be well embedded into the annular groove and cling to the side surface of the ESC, and does not leave gaps, and as shown in fig. 1, the epoxy resin protective layer is embedded with the annular groove of the base 11. The epoxy protective layer surrounds at least the side of the heating layer 13, and the side of the first adhesive layer 12 and the side of the second adhesive layer 14 can effectively prevent the inner parts of the ESC from being corroded by chemical gas and ionic gas during daily operation.
Further, the width of the epoxy resin protective layer is greater than or equal to the total thickness of the heating layer 13, the first adhesive layer 12 and the second adhesive layer 13.
Preferably, the O-ring sealing ring 17 is made of perfluororubber, the perfluororubber is a terpolymer of perfluoro (methyl vinyl) ether, tetrafluoroethylene and perfluoro vinyl ether, and is also called perfluoroether rubber, the O-ring sealing ring of the perfluororubber has high elasticity, stable chemical property and good sealing performance, and can well wrap an Epoxy resin protective layer, so that Epoxy resin is prevented from being consumed by etching, internal parts are exposed, and the first adhesive layer 12 and the second adhesive layer 14 on the side face of the ESC can be further protected, so that the internal parts of the ESC are further prevented from being corroded by chemical gas and ion gas in daily work.
Preferably, as shown in fig. 3, the O-ring seal 17 is a flat ring.
Preferably, the width of the O-ring seal 17 is greater than or equal to the thickness of the epoxy protective layer.
Further, the electrostatic chuck further comprises: a plurality of helium gas through holes 19, wherein the through holes 19 penetrate through the base 11, the first adhesive layer 12 and the heating layer 13. The helium gas through hole 19 may be filled with a gas or a liquid for cooling the heating layer 13.
According to the application, the epoxy resin protection layer is used for wrapping at least the side surfaces of the first bonding layer 12, the heating layer 13 and the second bonding layer 14, and the O-ring sealing ring 17 is used for wrapping the epoxy resin protection layer 16, wherein the epoxy resin protection layer 16 is embedded with the annular groove on the base 11 to form a tighter epoxy resin protection layer, and the O-ring is easy to replace, so that the O-ring can be replaced and maintained regularly, and the maintenance cost is reduced. The epoxy resin protective layer with strong further parcel nature can fill the annular groove on the base when filling up the glue, can laminate completely with the side of zone 13, first adhesive layer 12, first adhesive layer 14 at least, prevent that the epoxy resin layer from producing the gap along the lower edge, O-ring sealing washer 17 can wrap up epoxy resin protective layer 16, thereby reach the double protection to the side of ESC, avoided first adhesive layer 12 and second adhesive layer 14 to receive the condition that chemical gas and ion body corrode and produce the crackle, avoided the ESC side to produce the gap, the inner structure receives the condition that contaminates the inefficacy, double-layer protection effectively prevents ESC daily work and receives chemical gas and ion body corrode, comprehensively, can effectively several times promote electrostatic chuck's life.
The above description is only illustrative of the preferred embodiments of the present utility model and is not intended to limit the scope of the present utility model, and any alterations and modifications made by those skilled in the art based on the above disclosure shall fall within the scope of the appended claims.
Claims (5)
1. An electrostatic chuck and edge protection structure, comprising: the base, the first bonding layer, the second bonding layer, the heating layer, the epoxy resin protective layer and the O-ring sealing ring, wherein,
The heating layer is bonded on the base through the first bonding layer; the second adhesive layer is bonded on the heating layer;
An annular groove structure is correspondingly formed in the base along the vertical direction, the epoxy resin protective layer is embedded into the groove part, the epoxy resin protective layer is filled with the annular groove structure to wrap at least the side face of the heating layer, the side face of the first bonding layer and the side face of the second bonding layer, and the O-ring sealing ring wraps the epoxy resin protective layer in a surrounding mode.
2. The electrostatic chuck and edge protection structure of claim 1, wherein a thickness of the epoxy protective layer is greater than or equal to a total thickness of the heating layer, the first adhesive layer, and the second adhesive layer.
3. The electrostatic chuck and edge protection structure of claim 1, wherein the O-ring seal is made of perfluororubber.
4. The electrostatic chuck and edge protection structure of claim 1, wherein a width of said O-ring seal is greater than or equal to a thickness of said inner seal's wide epoxy protective layer.
5. The electrostatic chuck and edge protection structure of claim 1, further comprising: helium through holes penetrate through the base, the first bonding layer, the second bonding layer, the heating layer and the ceramic layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322946449.4U CN221102045U (en) | 2023-11-01 | 2023-11-01 | Electrostatic chuck and edge protection structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322946449.4U CN221102045U (en) | 2023-11-01 | 2023-11-01 | Electrostatic chuck and edge protection structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221102045U true CN221102045U (en) | 2024-06-07 |
Family
ID=91314374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322946449.4U Active CN221102045U (en) | 2023-11-01 | 2023-11-01 | Electrostatic chuck and edge protection structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221102045U (en) |
-
2023
- 2023-11-01 CN CN202322946449.4U patent/CN221102045U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |