CN215866573U - Cover plate for packaging micro-nano gas sensor - Google Patents
Cover plate for packaging micro-nano gas sensor Download PDFInfo
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- CN215866573U CN215866573U CN202121465985.7U CN202121465985U CN215866573U CN 215866573 U CN215866573 U CN 215866573U CN 202121465985 U CN202121465985 U CN 202121465985U CN 215866573 U CN215866573 U CN 215866573U
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- cover plate
- gas sensor
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- base body
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Abstract
The utility model discloses a cover plate for packaging a micro-nano gas sensor, wherein an annular groove for accommodating an adhesive for connecting the cover plate and a packaging base body is formed in the inner bottom wall of a cover plate base body, a circular window is formed in the center of the cover plate base body, and a waterproof breathable film is bonded on the circular window; the inner side wall of the cover plate base body is provided with a rubber sealing ring. The design of the round window can reduce the influence of the window on the sensitivity of the micro-nano gas sensor to a certain extent, and the waterproof breathable film 4 is adopted to seal the round window, so that the service life of the micro-nano gas sensor can be prolonged to a certain extent; a circular window is formed in the center of the cover plate substrate, and the area of the window can cover most of the micro-nano gas sensor chip. The waterproof breathable film is used for sealing the round window so as to ensure that external water vapor can not influence the service life of the micro-nano gas sensor.
Description
Technical Field
The utility model relates to the field of sensor packaging, in particular to a cover plate for packaging a micro-nano gas sensor.
Background
The sensor package is an important ring in the sensor assembly, not only plays a role in mounting, fixing, sealing, protecting the chip, etc., but also is connected to pins of the package housing through the contacts on the chip by wires, and the pins are connected with other devices through wires, thereby realizing the connection of the internal chip and the external circuit.
In the whole packaging structure, the design of the packaging cover plate is very important, particularly for the micro-nano gas sensor, a contact window on the packaging cover plate is the only channel for the micro-nano gas sensor chip to contact with external gas, and the micro-nano gas sensor has the requirement on the air tightness of the joint of the cover plate and the packaging substrate, so the design of the packaging cover plate becomes very important.
At present, the design of a packaging cover plate for a micro-nano gas sensor is not many, and the existing design usually adopts a multi-window form, so that although the whole chip can be contacted with the outside gas, the sensitive material of the micro-nano gas sensor chip is not contacted with the outside gas in a large area, and the sensitivity of the micro-nano gas sensor chip is reduced to a certain extent. Meanwhile, the requirement of air tightness is neglected in the design of some packaging cover plates, and the stability of the micro-nano gas sensor is influenced to a certain degree.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a cover plate for packaging a micro-nano gas sensor, which can meet the requirement of air tightness of the joint of the cover plate and a packaging substrate and reduce the influence on the sensitivity of a micro-nano gas sensor chip to a certain extent.
In order to achieve the above purpose, the embodiment of the utility model adopts the following technical scheme:
according to an embodiment provided by the utility model, the utility model provides a cover plate for packaging a micro-nano gas sensor, which comprises a cover plate base body, wherein an annular groove for accommodating an adhesive for connecting the cover plate and the packaging base body is formed in the inner bottom wall of the cover plate base body, a circular window is formed in the center of the cover plate base body, and a waterproof breathable film is adhered to the circular window; the inner side wall of the cover plate base body is provided with a rubber sealing ring.
Preferably, the cover plate base body is provided with a fold-line-shaped clamping groove, and the rubber sealing ring is clamped in the fold-line-shaped clamping groove.
Preferably, the rubber packing has a height corresponding to the height of the sidewall of the cap base.
Preferably, the annular groove is formed in the inner bottom wall of the cover plate base body connected with the side wall.
Preferably, the depth of the annular groove corresponds to the thickness of the adhesive layer.
Preferably, the waterproof breathable film is inside the bonded circular window by an adhesive.
Preferably, the area of the waterproof breathable film is larger than that of the circular window.
Preferably, the thickness of the waterproof breathable film is smaller than that of the circular window.
The utility model has the beneficial effects that:
the design of the circular window with the diameter of 2mm is adopted, so that the influence of the window on the sensitivity of the micro-nano gas sensor can be reduced to a certain extent, and the waterproof breathable film 4 is adopted to seal the circular window, so that the service life of the micro-nano gas sensor can be prolonged to a certain extent;
a circular window is formed in the center of the cover plate substrate, and the area of the window can cover most of the micro-nano gas sensor chip. The waterproof breathable film is used for sealing the round window so as to ensure that external water vapor can not influence the service life of the micro-nano gas sensor.
The rubber sealing rings are used for connection, the air tightness requirement of the connection position is guaranteed, the cover plate base body is provided with the fold-line-shaped clamping groove for determining the position of the rubber sealing rings, and enough gaps are reserved between the cover plate base body and the rubber sealing rings to contain adhesives to improve the air tightness of connection.
The utility model adopts the rubber sealing ring to realize the connection of the cover plate 1 and the packaging base body, which increases the air tightness of the connection to a certain extent, and the whole cover plate design takes the volume of the adhesive into consideration and designs enough space to contain the adhesive, thereby ensuring the air tightness requirement of the connection part of the cover plate and the packaging base body.
Drawings
FIG. 1 is a schematic diagram of the apparatus of the present invention;
FIG. 2 is a front view of the cover substrate 1 of the device of the present invention;
FIG. 3 is a side sectional view of the cover substrate 1 of the device of the present invention;
FIG. 4 is an overall side sectional view of the device of the present invention.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1, the cover plate for packaging a micro-nano gas sensor provided by the embodiment includes a cover plate base body 1, an annular groove 2 for connecting with a packaging base body is arranged in the cover plate base body 1, the annular groove 2 is designed according to the upper surface of the packaging base body, and the annular groove 2 is arranged on the inner bottom wall of the cover plate base body 1 connected with the side wall; and the concave design of the annular groove 2 can contain the adhesive, and the depth of the annular groove 2 is consistent with the thickness of the adhesive layer, so that the connection air tightness is improved.
A circular window 5 is formed in the middle of the cover plate base body 1 and used for enabling a micro-nano gas sensor chip to be in contact with external gas, in order to ensure that the sensitivity of the micro-nano gas sensor is not affected, the area of the circular window 5 is enough to cover a main body of the micro-nano gas sensor chip, the circular window 5 with the diameter of 2mm is adopted, and the size of most of micro-nano gas sensor chips can be met. The round window 5 and the waterproof breathable film 4 are connected to the inner side of the bonded round window 5 through the adhesive 3, the area of the waterproof breathable film 4 is larger than that of the round window 5, and the thickness of the waterproof breathable film 4 is smaller than that of the round window 5, so that the service life of the micro-nano gas sensor is ensured.
In order to further ensure the requirement of the air tightness of the connection of the cover plate and the packaging base body, the rubber sealing ring 6 and the cover plate base body 1 are connected together by using an adhesive 7 on the inner side wall of the cover plate base body 1, the height of the rubber sealing ring 6 is consistent with that of the side wall of the cover plate base body 1, the rubber sealing ring 6 is provided with a chamfer angle design so as to be convenient for the connection of the cover plate and the packaging base body, in order to ensure the position requirement of the cover plate base body 1 and the rubber sealing ring 6 and ensure that enough space is used for containing the adhesive 7 so as to ensure the air tightness, a fold-line-shaped clamping groove is formed in the cover plate base body 1, and the rubber sealing ring is clamped in the fold-line-shaped clamping groove.
As shown in fig. 1, 2 and 3, a cover plate design for micro-nano gas sensor packaging comprises a cover plate base body 1, wherein an annular groove 2 and a circular window 5 are formed in the cover plate base body 1.
With reference to fig. 3, it is possible to see the lateral configuration of the annular groove 2 and of the circular window 5, the annular groove 2 being designed to receive an adhesive, which enhances the tightness of the connection. The circular window 5 is used for detecting the micro-nano gas sensor chip by contacting with the outside gas.
Referring to fig. 2 and 4, it can be seen from fig. 2 that a zigzag-shaped slot is designed for installing the rubber seal ring 6 and reserving a receiving space for the adhesive 7, the size of the slot corresponds to the size of the rubber seal ring 6, so that the rubber seal ring 6 is conveniently installed on the cover plate base body 1, and the reserved space is enough for receiving the adhesive 7 to connect the rubber seal ring 6 and the cover plate base body 1;
in order to prolong the service life of the micro-nano gas sensor, the external water vapor must be blocked, the waterproof breathable film 4 is selected to seal the circular window 5, and the waterproof breathable film 4 is bonded with the cover plate base body 1 through the adhesive 3 as can be seen from a figure 4, so that the gas sensor can be prevented from being corroded by the water vapor when detecting the external gas, and the service life of the micro-nano gas sensor is prolonged to a certain extent.
By utilizing the design of the utility model, the influence of the cover plate on the sensitivity of the micro-nano gas sensor can be reduced to a certain extent, the service life of the micro-nano gas sensor is prolonged, the whole cover plate design ensures the connection air tightness, and the utility model is also greatly helpful for improving the stability of the micro-nano gas sensor.
The present invention is not limited to the above-mentioned embodiments, and based on the technical solutions disclosed in the present invention, those skilled in the art can make some substitutions and modifications to some technical features without creative efforts according to the disclosed technical contents, and these substitutions and modifications are all within the protection scope of the present invention.
Claims (8)
1. The cover plate for packaging the micro-nano gas sensor is characterized by comprising a cover plate base body, wherein an annular groove for containing an adhesive for connecting the cover plate and the packaging base body is formed in the inner bottom wall of the cover plate base body, a circular window is formed in the center of the cover plate base body, and a waterproof breathable film is bonded on the circular window; the inner side wall of the cover plate base body is provided with a rubber sealing ring.
2. The cover plate for packaging the micro-nano gas sensor according to claim 1, wherein a fold-line-shaped clamping groove is reserved on a cover plate base body, and the rubber sealing ring is clamped in the fold-line-shaped clamping groove.
3. The cover plate for micro-nano gas sensor packaging according to claim 1, wherein the height of the rubber sealing ring is consistent with the height of the side wall of the cover plate substrate.
4. The cover plate for packaging the micro-nano gas sensor according to claim 1, wherein the annular groove is formed in the inner bottom wall of the base of the cover plate connected with the side wall.
5. The cover plate for micro-nano gas sensor packaging according to claim 1, wherein the depth of the annular groove is consistent with the thickness of the adhesive layer.
6. The cover plate for micro-nano gas sensor packaging according to claim 1, wherein the waterproof breathable film is adhered to the inner side of the circular bonding window through an adhesive.
7. The cover plate for micro-nano gas sensor packaging according to claim 6, wherein the area of the waterproof breathable film is larger than that of the circular window.
8. The cover plate for micro-nano gas sensor packaging according to claim 5, wherein the thickness of the waterproof breathable film is smaller than that of the circular window.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121465985.7U CN215866573U (en) | 2021-06-29 | 2021-06-29 | Cover plate for packaging micro-nano gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121465985.7U CN215866573U (en) | 2021-06-29 | 2021-06-29 | Cover plate for packaging micro-nano gas sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215866573U true CN215866573U (en) | 2022-02-18 |
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ID=80335881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121465985.7U Active CN215866573U (en) | 2021-06-29 | 2021-06-29 | Cover plate for packaging micro-nano gas sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215866573U (en) |
-
2021
- 2021-06-29 CN CN202121465985.7U patent/CN215866573U/en active Active
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