CN221079966U - Silicon wafer correction mechanism - Google Patents

Abstract

The utility model discloses a silicon wafer correction mechanism which comprises a positioning structure, wherein a flower basket structure is arranged above the positioning structure, two identical calibration structures are symmetrically arranged on two sides of the flower basket structure, one side, far away from the flower basket structure, of each calibration structure is provided with a pushing structure, and a plurality of silicon wafers are arranged in the flower basket structure. According to the utility model, the two calibration structures are arranged, the stepping motor is started, so that the stepping motor drives the driving belt to move, meanwhile, the connecting block drives the calibration upright post to calibrate the silicon wafer in the basket structure in the X direction, the precision of the silicon wafer during automatic basket loading is improved, the quality of the silicon wafer during automatic basket loading is improved, the silicon wafer can be accurately calibrated to a specific position, and meanwhile, due to the two calibration structures, the silicon wafer in the basket structure is simultaneously calibrated from two sides, the precision of silicon wafer correction can be effectively improved, and the deflection problem of the silicon wafer is corrected at one side.

Description

Silicon wafer correction mechanism

Technical Field

The utility model relates to the field of daily automation, in particular to a silicon wafer correction mechanism.

Background

The silicon wafer is a thin sheet manufactured based on silicon materials, generally has a flat surface and a specific crystal structure, has wide application in the fields of electronics, photoelectricity, semiconductors and the like, and is required to be placed in a fixture by copper electroplating technology which is being developed in the photovoltaic industry.

The used frock of photovoltaic cell electroplating equipment is in carrying out automatic loading and unloading silicon chip in-process, needs to load the silicon chip to the silicon chip basket to adjust the specific position with the silicon chip, but in prior art the frock position accuracy requirement that photovoltaic cell electroplating equipment used is not so high, and the automatic loading and unloading piece precision of using also does not reach the user demand, has caused the quality of silicon chip automation loading lower, can't reach the requirement of productivity.

Disclosure of utility model

The technical problem to be solved by the utility model is that the position accuracy requirement of a tooling used by the photovoltaic cell electroplating equipment in the prior art is not high, the precision of the used automatic loading and unloading piece cannot meet the use requirement, the quality of automatic loading of silicon wafers is lower, and the requirement of productivity cannot be met.

In order to solve the technical problems, the utility model adopts a technical scheme that: the utility model provides a silicon chip correction mechanism, including location structure, location structure's top is provided with the basket of flowers structure, the bilateral symmetry of basket of flowers structure is provided with two the same calibration structures, two the one side that the basket of flowers structure was kept away from to the calibration structure all is provided with a pushing structure, be provided with a plurality of silicon chip in the basket of flowers structure.

Through the technical scheme, the silicon wafer on one side can be corrected by the calibration structure, and meanwhile, as the calibration structure and the pushing structure are arranged on the two sides of the basket structure, when the silicon wafer in the basket structure is simultaneously corrected from the two sides, the accuracy of correcting the silicon wafer can be effectively improved, and the deflection problem of the silicon wafer is corrected on one side.

The utility model further provides that the calibration structure comprises a structure fixing plate, any end of the top surface of the structure fixing plate is fixedly connected with a stepping motor, one end of the top surface of the structure fixing plate, which is far away from the stepping motor, is fixedly connected with a roller fixing frame, the roller fixing frame is rotatably connected with a transmission roller, the transmission roller is rotatably connected with a bearing of the stepping motor through a transmission belt, and the transmission belt is provided with a first connecting block, a second connecting block, a third connecting block and a fourth connecting block.

Through the technical scheme, the closed-loop stepping motor is used for closed-loop control, so that the error and the step-out problem of the stepping motor can be reduced, the precision and the stability are improved, and the accuracy of silicon wafer calibration is effectively improved.

The utility model is further arranged that the first connecting block is arranged at a lower position close to the stepping motor, the second connecting block is arranged at an upper position close to the first connecting block, the third connecting block is arranged at a lower position close to the second connecting block, the fourth connecting block is arranged at an upper position close to the transmission roller, a first calibration upright post is fixedly connected to the first connecting block, a second calibration upright post is fixedly connected to the second connecting block, a third calibration upright post is fixedly connected to the third connecting block, and a fourth calibration upright post is fixedly connected to the fourth connecting block.

Through the technical scheme, when the stepping motor is started, the four connecting blocks are driven to move, and meanwhile, the four calibration stand columns are driven to move, and the silicon wafer in the flower basket structure is calibrated in the X direction respectively, so that the silicon wafer can be accurately calibrated to a specific position.

The utility model is further characterized in that one side of the structure fixing plate far away from the first calibration upright post is fixedly connected with a guide rail, and two guide rods are connected in a sliding way of the guide rail.

Through above-mentioned technical scheme, can make the promotion structure push away the calibration structure to the basket of flowers structure more accurately, make four calibration stands can be moved to in the basket of flowers structure better.

The positioning structure comprises a supporting plate, two jacking reserved openings are arranged in the middle of the supporting plate, a fixed reserved opening is formed in the position, close to any jacking reserved opening, of the supporting plate, an X-direction fixed reference block is fixedly connected to the position, close to the jacking reserved opening, of the top surface of the supporting plate, a Y-direction fixed reference block is fixedly connected to the position, close to the X-direction fixed reference block, of the top surface of the supporting plate, a second fixed cylinder is fixedly connected to one side, far from the X-direction fixed reference block, of the top surface of the supporting plate, a moving block is fixedly connected to a piston rod of the second fixed cylinder, two first fixed cylinders are fixedly connected to the top surface, far from the moving block, of the X-direction fixed reference block, two first fixed cylinders are fixedly connected to the top surface of the moving block, and a fixed pressing block is fixedly connected to the piston rods of the four first fixed cylinders.

Through above-mentioned technical scheme, set up X direction fixed reference block and Y direction fixed reference block simultaneously, make correction mechanism possess a relatively accurate benchmark as the reference, improve the precision of calibration, first fixed cylinder can be fixed from top to bottom to the basket of flowers structure simultaneously, prevents that the basket of flowers structure from reciprocating.

The utility model is further characterized in that a third fixed cylinder is fixedly connected to the bottom surface of the supporting plate at a position close to the fixed reserved opening, a fixed stop block is fixedly connected to a piston rod of the third fixed cylinder, the fixed stop block is arranged in the fixed reserved opening, a structural bottom plate is arranged at the bottom end of the supporting plate, two jacking cylinders are fixedly connected to the top surface of the structural bottom plate at positions below the two jacking reserved openings, and a jacking block is fixedly connected to piston rods of the two jacking cylinders.

Through the technical scheme, the third fixed cylinder and the second fixed cylinder can be used for fixing the flower basket structure in the X direction and the Y direction simultaneously, so that the flower basket structure cannot move in the calibration process, and the accuracy of silicon wafer calibration is further improved.

The flower basket structure further comprises a flower basket bottom plate, a flower basket top plate is arranged at the top end of the flower basket bottom plate, the flower basket top plate and the flower basket bottom plate are symmetrically arranged, a flower basket handle is fixedly connected to the top surface of the flower basket top plate, and a plurality of flower basket side rods penetrate through the flower basket top plate and the flower basket bottom plate.

Through the technical scheme, a plurality of silicon chips can be placed in the basket structure through adjusting the number of the side rods of the basket, and simultaneously, a plurality of silicon chips can be placed in each row, and the basket handle can enable the silicon chip basket to be more convenient and faster to assemble and disassemble.

The utility model further provides that the pushing structure comprises a fixed bottom plate, two sliding rails are fixedly connected to the middle position of the top surface of the fixed bottom plate, a screw rod module is connected to the two sliding rails in a sliding mode, and a driving motor is arranged on one side, far away from the flower basket structure, of the screw rod module.

Through the technical scheme, the lead screw module can move on the sliding rail, and the driving motor provides power for the lead screw module, so that the lead screw module can push the calibration structure to the flower basket structure and calibrate the Y direction of the silicon wafer.

The beneficial effects of the utility model are as follows:

1. According to the utility model, the two calibration structures are arranged, the stepping motor is started, so that the stepping motor drives the driving belt to move, meanwhile, the connecting block drives the calibration upright post to calibrate the silicon wafer in the basket structure in the X direction, the precision of the silicon wafer during automatic basket loading is improved, the quality of the silicon wafer during automatic basket loading is improved, the silicon wafer can be accurately calibrated to a specific position, and meanwhile, due to the two calibration structures, the silicon wafer in the basket structure is simultaneously calibrated from two sides, the precision of silicon wafer correction can be effectively improved, and the deflection problem of the silicon wafer is corrected at one side.

2. According to the utility model, the positioning structure is arranged, and the X-direction fixed reference block and the Y-direction fixed reference block are arranged at the same time, so that the correction mechanism has a relatively accurate reference as a reference, the accuracy of calibration is improved, meanwhile, the first fixed cylinder can fix the flower basket structure up and down to prevent the flower basket structure from moving up and down, and the third fixed cylinder and the second fixed cylinder can fix the flower basket structure in the X direction and the Y direction at the same time, so that the flower basket structure cannot move in the calibration process, and the accuracy of silicon wafer calibration is further improved.

Drawings

FIG. 1 is a schematic perspective view of the present utility model;

FIG. 2 is a schematic perspective view of a basket structure according to the present utility model;

FIG. 3 is a schematic perspective view of a positioning structure according to the present utility model;

FIG. 4 is a right side plan view of the positioning structure of the present utility model;

FIG. 5 is a schematic perspective view of a calibration structure according to the present utility model;

FIG. 6 is an enlarged view of the point A of FIG. 5 in accordance with the present utility model;

FIG. 7 is a front plan view of a calibration structure of the present utility model;

fig. 8 is a schematic perspective view of a pushing structure in the present utility model.

In the figure: 1. a flower basket structure; 101. a flower basket top plate; 102. a flower basket bottom plate; 103. flower basket side bars; 104. basket handles; 2. a positioning structure; 201. a structural bottom plate; 202. a support plate; 203. jacking the reserved opening; 204. fixing a reserved opening; 205. fixing a reference block in the X direction; 206. a first fixed cylinder; 207. fixing the pressing block; 208. a second fixed cylinder; 209. a moving block; 210. a third fixed cylinder; 211. a fixed stop block; 212. jacking the air cylinder; 213. a jacking block; 214. fixing a reference block in the Y direction; 3. a calibration structure; 301. a structural fixing plate; 302. a first calibration column; 303. a second calibration column; 304. a third calibration post; 305. a fourth calibration post; 306. a stepping motor; 307. a roller fixing frame; 308. a transmission roller; 309. a transmission belt; 310. a first connection block; 311. a second connection block; 312. a third connecting block; 313. a fourth connecting block; 314. a guide rail; 315. a guide rod; 4. a pushing structure; 401. a fixed bottom plate; 402. a slide rail; 403. a screw rod module; 404. a driving motor; 5. a silicon wafer;

Detailed Description

The preferred embodiments of the present utility model will be described in detail below with reference to the accompanying drawings so that the advantages and features of the present utility model can be more easily understood by those skilled in the art, thereby making clear and defining the scope of the present utility model.

Referring to fig. 1, a silicon wafer correction mechanism comprises a positioning structure 2, wherein a basket structure 1 is arranged above the positioning structure 2, two identical calibration structures 3 are symmetrically arranged on two sides of the basket structure 1, and a pushing structure 4 is arranged on one side, away from the basket structure 1, of each of the two calibration structures 3.

As shown in fig. 2, the flower basket structure 1 comprises a flower basket bottom plate 102, a flower basket top plate 101 is arranged at the top end of the flower basket bottom plate 102, the flower basket top plate 101 and the flower basket bottom plate 102 are symmetrically arranged, a flower basket handle 104 is fixedly connected to the top surface of the flower basket top plate 101, a plurality of flower basket side rods 103 penetrate through the flower basket top plate 101 and the flower basket bottom plate 102, and a plurality of silicon wafers 5 are arranged in the flower basket structure 1.

As shown in fig. 3 and fig. 4, the positioning structure 2 includes a support plate 202, two jacking reserved openings 203 are disposed in the middle of the support plate 202, a fixed reserved opening 204 is disposed at a position of the support plate 202 near any one of the jacking reserved openings 203, an X-direction fixed reference block 205 is fixedly connected to a position of the top surface of the support plate 202 near the jacking reserved opening 203, a Y-direction fixed reference block 214 is fixedly connected to a position of the top surface of the support plate 202 near the X-direction fixed reference block 205, a second fixed cylinder 208 is fixedly connected to one side of the top surface of the support plate 202 far from the X-direction fixed reference block 205, a moving block 209 is fixedly connected to a piston rod of the second fixed cylinder 208, two first fixed cylinders 206 are fixedly connected to a top surface of the X-direction fixed reference block 205 far from the moving block 209, two first fixed cylinders 206 are fixedly connected to the top surface of the moving block 209, and a fixed pressing block 207 is fixedly connected to piston rods of the four first fixed cylinders 206.

The bottom surface of the supporting plate 202 is close to the fixed reserved opening 204, a third fixed cylinder 210 is fixedly connected to the bottom surface of the supporting plate 202, a fixed stop block 211 is fixedly connected to a piston rod of the third fixed cylinder 210, the fixed stop block 211 is arranged in the fixed reserved opening 204, a structural bottom plate 201 is arranged at the bottom end of the supporting plate 202, two jacking cylinders 212 are fixedly connected to the top surface of the structural bottom plate 201 at positions below the two jacking reserved openings 203, and a jacking block 213 is fixedly connected to piston rods of the two jacking cylinders 212.

As shown in fig. 5, 6 and 7, the calibration structure 3 includes a structure fixing plate 301, a stepper motor 306 is fixedly connected to any end of the top surface of the structure fixing plate 301, a roller fixing frame 307 is fixedly connected to one end of the top surface of the structure fixing plate 301 away from the stepper motor 306, a driving roller 308 is rotatably connected to the roller fixing frame 307, the driving roller 308 is rotatably connected to a bearing of the stepper motor 306 through a driving belt 309, and a first connecting block 310, a second connecting block 311, a third connecting block 312 and a fourth connecting block 313 are arranged on the driving belt 309.

The first connecting block 310 is arranged at a lower position close to the stepping motor 306, the second connecting block 311 is arranged at an upper position close to the first connecting block 310, the third connecting block 312 is arranged at a lower position close to the second connecting block 311, the fourth connecting block 313 is arranged at an upper position close to the transmission roller 308, a first calibration upright 302 is fixedly connected to the first connecting block 310, a second calibration upright 303 is fixedly connected to the second connecting block 311, a third calibration upright 304 is fixedly connected to the third connecting block 312, a fourth calibration upright 305 is fixedly connected to the fourth connecting block 313, a guide rail 314 is fixedly connected to one side, far from the first calibration upright 302, of the structure fixing plate 301, and two guide rods 315 are slidably connected to the sliding grooves of the guide rail 314.

As shown in fig. 8, the pushing structure 4 includes a fixed bottom plate 401, two sliding rails 402 are fixedly connected to the middle position of the top surface of the fixed bottom plate 401, a screw rod module 403 is slidably connected to the two sliding rails 402, and a driving motor 404 is disposed on one side of the screw rod module 403 away from the basket structure 1.

When the utility model is used, firstly, the silicon wafer 5 is transmitted into the flower basket structure 1, the third fixing cylinder 210 and the second fixing cylinder 208 are started, the flower basket structure 1 is clamped, the flower basket structure 1 is fixed in the X direction and the Y direction, then, the four first fixing cylinders 206 are started, the first fixing cylinders 206 drive the fixing press blocks 207 to move, the flower basket structure 1 is fixed up and down, then, the two jacking cylinders 212 are started, the two jacking cylinders 212 drive the two jacking blocks 213 to move, the eight flower basket side rods 103 are jacked, the silicon wafer 5 is in a free state, then, the driving motor 404 is started, power is provided for the screw rod module 403, the screw rod module 403 pushes the calibration structure 3, the first calibration upright 302, the second calibration upright 303, the third calibration upright 304 and the fourth calibration upright 305 are pushed into the flower basket structure 1, after the silicon wafer 5 is calibrated in the Y direction, the stepping motor 306 is started, the stepping motor 306 rotates anticlockwise to drive the four calibration columns to move, the first calibration column 302 and the second calibration column 303 are made to be close to each other, the third calibration column 304 and the fourth calibration column 305 are made to be close to each other, the silicon wafer 5 in the first row and the third row is calibrated, after the silicon wafer 5 in the first row and the third row is calibrated, the stepping motor 306 rotates clockwise to drive the four calibration columns to calibrate the silicon wafer 5 in the second row, after the silicon wafer 5 is completely calibrated, the two jacking cylinders 212 are closed to reset the eight flower basket side rods 103, and therefore basket loading and positioning of the silicon wafer 5 are completed.

The foregoing description is only illustrative of the present utility model and is not intended to limit the scope of the utility model, and all equivalent structures or equivalent processes or direct or indirect application in other related technical fields are included in the scope of the present utility model.

Claims (7)

1. The utility model provides a silicon chip correction mechanism, includes location structure (2), its characterized in that: the positioning structure is characterized in that a flower basket structure (1) is arranged above the positioning structure (2), two identical calibration structures (3) are symmetrically arranged on two sides of the flower basket structure (1), one side, far away from the flower basket structure (1), of each calibration structure (3) is provided with a pushing structure (4), and a plurality of silicon chips (5) are arranged in the flower basket structure (1);

The calibrating structure (3) comprises a structure fixing plate (301), any one end of the top surface of the structure fixing plate (301) is fixedly connected with a stepping motor (306), one end of the top surface of the structure fixing plate (301) away from the stepping motor (306) is fixedly connected with a roller fixing frame (307), a transmission roller (308) is rotationally connected to the roller fixing frame (307), the transmission roller (308) is rotationally connected with a bearing of the stepping motor (306) through a transmission belt (309), and a first connecting block (310), a second connecting block (311), a third connecting block (312) and a fourth connecting block (313) are arranged on the transmission belt (309).

2. A silicon wafer rectification mechanism as defined in claim 1, wherein: the first connecting block (310) is arranged at a lower position close to the stepping motor (306), the second connecting block (311) is arranged at an upper position close to the first connecting block (310), the third connecting block (312) is arranged at a lower position close to the second connecting block (311), the fourth connecting block (313) is arranged at an upper position close to the transmission roller (308), a first calibration upright (302) is fixedly connected to the first connecting block (310), a second calibration upright (303) is fixedly connected to the second connecting block (311), a third calibration upright (304) is fixedly connected to the third connecting block (312), and a fourth calibration upright (305) is fixedly connected to the fourth connecting block (313).

3. A silicon wafer rectification mechanism as defined in claim 2, wherein: one side of the structure fixing plate (301) far away from the first calibration upright post (302) is fixedly connected with a guide rail (314), and two guide rods (315) are connected in a sliding way of the guide rail (314) in a sliding way.

4. A silicon wafer rectification mechanism as defined in claim 1, wherein: the positioning structure (2) comprises a supporting plate (202), two jacking reserved openings (203) are arranged in the middle of the supporting plate (202), one fixed reserved opening (204) is arranged at the position, close to any jacking reserved opening (203), of the supporting plate (202), an X-direction fixed reference block (205) is fixedly connected to the top surface of the supporting plate (202) close to the jacking reserved opening (203), a Y-direction fixed reference block (214) is fixedly connected to the top surface of the supporting plate (202) close to the position of the X-direction fixed reference block (205), one second fixed cylinder (208) is fixedly connected to one side, far away from the X-direction fixed reference block (205), of the supporting plate (202), one moving block (209) is fixedly connected to a piston rod of the second fixed cylinder (208), two first fixed cylinders (206) are fixedly connected to the top surface, close to the moving block (209), of the two first fixed cylinders (206) are fixedly connected to the top surface of the moving block (209), and the piston rod (207) is fixedly connected to the first cylinder (207).

5. The wafer conditioning mechanism of claim 4, wherein: the fixed cylinder (210) of position fixedly connected with that backup pad (202) bottom surface is close to fixed reservation mouth (204), fixed dog (211) of fixedly connected with on the piston rod of third fixed cylinder (210), fixed dog (211) set up in fixed reservation mouth (204), backup pad (202) bottom is provided with a structure bottom plate (201), the position fixedly connected with two jacking cylinders (212) that structure bottom plate (201) top surface is located two jacking reservation mouths (203) below, two equal fixedly connected with jacking piece (213) on the piston rod of jacking cylinder (212).

6. A silicon wafer rectification mechanism as defined in claim 1, wherein: the flower basket structure (1) comprises a flower basket bottom plate (102), a flower basket top plate (101) is arranged at the top end of the flower basket bottom plate (102), the flower basket top plate (101) and the flower basket bottom plate (102) are symmetrically arranged, a flower basket handle (104) is fixedly connected to the top surface of the flower basket top plate (101), and a plurality of flower basket side rods (103) penetrate through the flower basket top plate (101) and the flower basket bottom plate (102).

7. A silicon wafer rectification mechanism as defined in claim 1, wherein: the pushing structure (4) comprises a fixed bottom plate (401), two sliding rails (402) are fixedly connected to the middle position of the top surface of the fixed bottom plate (401), a screw rod module (403) is connected to the sliding rails (402) in a sliding mode, and a driving motor (404) is arranged on one side, far away from the flower basket structure (1), of the screw rod module (403).