CN221055888U - Linear displacement guiding device for Michelson interferometer - Google Patents
Linear displacement guiding device for Michelson interferometer Download PDFInfo
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- CN221055888U CN221055888U CN202322963075.7U CN202322963075U CN221055888U CN 221055888 U CN221055888 U CN 221055888U CN 202322963075 U CN202322963075 U CN 202322963075U CN 221055888 U CN221055888 U CN 221055888U
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Abstract
The utility model relates to a Michelson interferometer, in particular to a linear displacement guiding device for the Michelson interferometer, which solves the problem that a flexible supporting mechanism in the existing reflector displacement guiding device has poor bearing capacity. The utility model comprises a bracket, wherein a voice coil motor is arranged on a vertical plate of the bracket, the axis of a rotor of the voice coil motor coincides with the geometric center of the end face of a main motion platform in a flexible supporting mechanism, the main motion platform is connected with secondary motion platforms symmetrically arranged at two sides of the main motion platform through outer side leaf springs at two ends, a reflector is positioned on the main motion platform, the gravity center of the reflector is positioned in a vertical plane where the central line of the main motion platform along the horizontal direction is positioned, rigid constraint plates with gaps with the side walls of the rigid constraint plates are symmetrically arranged at two sides of the main motion platform, the rigid constraint plates are connected onto the inner walls of the secondary motion platform through inner side leaf springs arranged at two ends, and the bottoms of the rigid constraint plates are provided with fixed rigid bodies for connecting with a transverse plate of the bracket.
Description
Technical Field
The utility model relates to a Michelson interferometer, in particular to a linear displacement guiding device for the Michelson interferometer.
Background
The time modulation type interference spectrum imaging technology is to utilize the principle of amplitude division method interference, to generate time series interference fringes for a target light source by an interferometer, and then to carry out Fourier transformation on the generated interference pattern to obtain spectrum information of the target. The method is widely applied in astronomy, medical treatment, climate monitoring, atmospheric science, agricultural production and other fields.
The Michelson interferometer is used as a core component of the time modulation type interference spectrometer, the most critical part is a precise reflector movement system, the movement stroke of a reflector in the movement system determines the spectrum resolution of the whole interference spectrometer, the guide precision of the reflector determines the imaging quality of an interference pattern, and if the reflector inclines in the movement process or moves transversely along the non-movement direction, the interference efficiency is seriously affected, and even interference cannot be generated. The uniformity of the speed of the mirror motion directly affects the signal-to-noise ratio and accuracy of the interferogram and the recovered spectrum. Therefore, a high precision displacement guide is critical to a michelson interferometer.
In the displacement guide device, the supporting mechanism for supporting the reflecting mirror has the greatest influence on the displacement precision, and the traditional reflecting mirror supporting mechanism comprises a linear bearing type, a magnetic suspension type, an air suspension guide rail type, a flexible supporting type and the like; the linear bearing belongs to a contact type support, is rarely applied to a high-precision space instrument, has the main defects of large abrasion and difficulty in maintaining lubrication, is used for a sliding bearing of a reflector driving system, has very high mechanical processing precision requirement, is generally difficult to realize, and can gradually reduce the precision of the sliding bearing along with the increase of abrasion even if the mechanical processing precision barely meets the requirement; the magnetic levitation type motor shaft and the reflecting mirror component are in a levitation state under the suction force of a group of electromagnets, and the magnetic levitation type motor shaft and the reflecting mirror component have the advantages of no friction and no abrasion, but have the defects of complex technology, high cost, high quality, high power loss and the like; the air-float guide rail type is a mode of using high-pressure gas to suspend and support the motor shaft and the reflecting mirror assembly, and has extremely high sealing requirements due to the fact that the air-float guide rail type needs to be inflated with air storage equipment, is huge and complex, and is rarely used. The current reflector displacement guiding device mostly adopts flexible support type, and has the advantages of less component number, simple structure and low cost; no additional intermediate transmission mechanism is needed, friction is avoided during use, and therefore lubrication is not needed; elastic potential energy can be stored during movement, so that the device has return counter force, can effectively resist external vibration impact, and is easy to match with other non-mechanical forces; the accuracy and the uniformity of the structure movement can be ensured by matching the laser position measurement module and the movement control execution module, and the defects of the linear bearing type, the magnetic suspension type and the air suspension guide rail type are overcome. However, most flexible support mechanisms still have the problem of poor bearing capacity, and a compromise between movement travel and structural rigidity is required in the design.
Disclosure of utility model
The utility model aims to solve the technical problem that the flexible supporting mechanism in the existing reflector displacement guiding device has poor bearing capacity, so that compromise processing needs to be carried out between a motion stroke and structural rigidity in design, and provides a linear displacement guiding device for a Michelson interferometer.
In order to solve the technical problems in the prior art, the utility model provides the following technical solutions:
a linear displacement guider for michelson interferometer, includes speculum, support, its special character lies in: the device also comprises a flexible supporting mechanism and a driving mechanism;
The bracket comprises a vertical plate and a transverse plate arranged at one side of the bottom of the vertical plate;
The driving mechanism comprises a voice coil motor, one end of a stator of the voice coil motor is fixed on the vertical plate, and a rotor of the voice coil motor is connected with the flexible supporting mechanism;
The flexible supporting mechanism comprises a main motion platform and secondary motion platforms symmetrically arranged on two sides of the main motion platform, the main motion platform and the two secondary motion platforms are connected through two outer side leaf springs arranged on two ends of the main motion platform respectively and form a cuboid structure, the reflecting mirror is arranged on the upper surface of the main motion platform, one end of the main motion platform is connected with a rotor of the voice coil motor, the axis of the rotor coincides with the geometric center of the end face of the main motion platform, the gravity center of the reflecting mirror is located in a vertical plane where the center line of the main motion platform along the horizontal direction is located, constraint structures are arranged between the main motion platform and each secondary motion platform, each constraint structure comprises rigid constraint plates symmetrically arranged on two sides of the main motion platform, gaps exist between the rigid constraint plates and the side walls of the main motion platform, the rigid constraint plates are connected to the inner walls of the secondary motion platform through inner side leaf springs arranged on two ends of the rigid constraint plates, and the bottoms of the rigid constraint plates are provided with fixed rigid bodies connected with transverse plates.
Further, a transfer table is arranged between the reflector and the main motion platform, the cross section of the transfer table is of a T-shaped structure with a convex bottom, the convex width is not larger than the width of the main motion platform, the convex is connected with the main motion platform, the reflector is arranged at the center position of the upper surface of the transfer table, and the center line of the transfer table along the horizontal direction is parallel to the center line of the main motion platform along the horizontal direction and is positioned in the same vertical plane.
Further, the gap size is 1mm.
Further, the flexible supporting mechanism is of an integral structure and is made of aluminum alloy materials.
Further, the right angle junction of outside leaf spring and main motion platform and secondary motion platform is provided with the fillet, and the right angle junction of inboard spring leaf and secondary motion platform and rigid restraint board also is provided with the fillet.
Further, the transverse plate both sides are provided with the backup pad of L type, and the vertical section and the transverse plate side of backup pad are connected, have seted up the butt joint hole on the fixed rigid body, and the horizontal section of backup pad is to deviating from the direction extension of transverse plate and have seted up the connecting hole that is used for being connected with the butt joint hole on it.
Further, a diamond-shaped weight-reducing cavity is formed in the center of the main motion platform, and a rectangular weight-reducing cavity is formed in the center of the switching platform.
Further, the voice coil motor is a cylindrical moving magnet type voice coil motor.
Compared with the prior art, the utility model has the beneficial effects that:
(1) The utility model provides a linear displacement guiding device for a Michelson interferometer, which comprises a reflecting mirror, a bracket, a flexible supporting mechanism and a driving mechanism, wherein the reflecting mirror is arranged on the bracket; the flexible supporting mechanism comprises a main motion platform and secondary motion platforms symmetrically arranged on two sides of the main motion platform, the reflecting mirrors are arranged on the upper surface of the main motion platform, the main motion platform and the secondary motion platform are connected through outer side leaf springs, constraint structures are further arranged on two sides of the main motion platform, the flexible supporting mechanism comprises rigid constraint plates symmetrically arranged on two sides of the main motion platform, gaps are reserved between the rigid constraint plates and the side walls of the main motion platform, the motion of the main motion platform is prevented from being influenced, the rigid constraint plates are fixed on the inner walls of the secondary motion platform through inner side leaf springs arranged on two ends of the rigid constraint plates, fixed rigid bodies connected with a support are arranged at the bottoms of the rigid constraint platforms, and a voice coil motor of the driving mechanism is connected with one end of the main motion platform to provide driving force for the voice coil motor.
(2) The reflector in the linear displacement guiding device for the Michelson interferometer is arranged on the main motion platform through the switching table, so that when the reflectors with different installation hole site specifications are faced, the reflectors can be replaced through different switching tables, the whole flexible supporting mechanism is not required to be replaced, the operation is simple, and the cost is low.
(3) The flexible supporting mechanism in the linear displacement guiding device for the Michelson interferometer is of an integrated structure and made of aluminum alloy, and compared with a spliced structure, the integrated structure is small in overall error and high in structural strength, and is beneficial to improving the overall bearing capacity of the device.
(4) According to the linear displacement guiding device for the Michelson interferometer, the right-angle connection part of the outer side leaf spring, the main motion platform and the secondary motion platform is provided with the round angle, and the right-angle connection part of the inner side leaf spring, the secondary motion platform and the rigid constraint plate is also provided with the round angle, so that the stress concentration at the right-angle connection part can be effectively reduced, and the service life of the device is prolonged.
(5) According to the linear displacement guiding device for the Michelson interferometer, the main motion platform and the center position of the adapter plate are provided with the weight reduction cavities, so that the dead weight of the device is reduced on the premise of not affecting the normal function, and the bearing capacity of the device is improved.
(6) The clearance between the rigid constraint plate and the side wall of the main motion platform in the linear displacement guide device for the Michelson interferometer is 1mm, so that the rigid constraint plate can not interfere and rub with the main motion platform during motion, and the length of the inner side leaf spring can be effectively increased to realize the displacement as large as possible.
Drawings
FIG. 1 is a schematic perspective view of an embodiment of a linear displacement guide for a Michelson interferometer according to the present utility model;
FIG. 2 is a schematic perspective view of a flexible support mechanism in an embodiment of a linear displacement guide for a Michelson interferometer according to the present utility model;
FIG. 3 is a top view of a flexible support mechanism in an embodiment of a linear displacement guide for a Michelson interferometer according to the present utility model;
FIG. 4 is a schematic view of the structure of a stage in an embodiment of a linear displacement guide for a Michelson interferometer according to the present utility model;
FIG. 5 is a schematic view of the structure of a support in an embodiment of a linear displacement guide for a Michelson interferometer according to the present utility model;
FIG. 6 is a schematic diagram of a flexible support mechanism in motion in an embodiment of a linear displacement guide for a Michelson interferometer according to the present utility model;
Fig. 7 is a schematic view of the structure of the voice coil motor in the linear displacement guide for michelson interferometer according to the embodiment of the present utility model.
The reference numerals are explained as follows:
1-brackets, 11-vertical plates, 12-transverse plates and 121-supporting plates; 2-voice coil motor, 21-stator, 22-active cell; the device comprises a 3-reflector, a 4-switching table and a 41-rectangular weight-reducing cavity; the device comprises a 5-flexible supporting mechanism, a 51-main motion platform, a 511-diamond weight-reducing cavity, a 52-outer side plate spring, a 53-inner side plate spring, a 54-rigid constraint plate, a 55-secondary motion platform and a 56-fixed rigid body.
Detailed Description
The utility model will be further described with reference to the drawings and specific examples.
Referring to fig. 1 to 7, the linear displacement guide device for a michelson interferometer of the present utility model comprises a bracket 1, a reflecting mirror 3, a flexible supporting mechanism 5 and a voice coil motor 2 for driving the flexible supporting mechanism 5 to reciprocate linearly, wherein the bracket 1 comprises a vertical plate 11 and a transverse plate 12 arranged at one side of the bottom of the vertical plate 11, the vertical plate 11 and the transverse plate 12 form a right-angle structure, and two sides of the transverse plate 11 are further provided with L-shaped supporting plates 121, the vertical sections of the supporting plates 121 are connected with the side edges of the transverse plate 12, and the horizontal sections extend towards the direction away from the transverse plate 12 and are provided with connecting holes thereon for connecting with the flexible supporting mechanism 5.
As shown in fig. 7, the voice coil motor 2 includes a stator 21 and a mover 22, wherein one end of the stator 21 is fixed on the vertical plate 11, and the mover 22 is connected with the flexible supporting mechanism 5, so as to drive the flexible supporting mechanism 5 to do reciprocating rectilinear motion. The voice coil motor 2 adopts a cylindrical moving magnet type, so that the problems of repeated bending of coil leads and poor heat dissipation capability in the moving process of a common moving coil motor are avoided, and the service life of the device is effectively prolonged.
The structure of the flexible supporting mechanism 5 is shown in fig. 2 and 3, and comprises a main motion platform 51 positioned at the center, one end of the main motion platform 51 is connected with a rotor 22 of a voice coil motor 2, the axis of the rotor 22 coincides with the geometric center of the end face of the main motion platform 51, secondary motion platforms 55 are arranged on two sides of the main motion platform 51, and the two secondary motion platforms 55 are connected with the main motion platform 51 through two outer side leaf springs 52 on two ends of the main motion platform 51, so that the main motion platform 51, the two secondary motion platforms 55 and the outer side leaf springs 52 form a cuboid structure. There is a cavity between the main motion platform 51 and each sub motion platform 55, there is a constraint structure in these two cavities to compensate the coupling displacement of the non-motion direction, the constraint structure includes rigid constraint plates 54 symmetrically disposed on both sides of the main motion platform 51, the rigid constraint plates 54 are connected to the inner wall of the sub motion platform 55 through inner side leaf springs 53 disposed on both ends thereof, in order not to affect the motion of the main motion platform 51, there is a gap of 1mm between the rigid constraint plates 54 and the side wall of the main motion platform 51, so that the main motion platform 51 will not rub with the rigid constraint plates 54 when reciprocating in the horizontal direction, and the gap of 1mm can effectively increase the length of the inner side leaf springs 53 under the premise of ensuring that the normal motion of the main motion platform 51 is not affected, so as to realize the displacement as large as possible and improve the spectral resolution. The outer leaf springs 52 and the inner leaf springs 53 are designed in different lengths, wherein the length of the outer leaf springs 52 is 63mm, the length of the inner leaf springs 53 is 59mm, the width of the inner leaf springs and the width of the outer leaf springs are 30mm, and the thickness of the inner leaf springs and the outer leaf springs are 1mm. The bottom of the rigid constraint plate 54 is provided with a fixed rigid body 56, and a butt joint hole is formed on the fixed rigid body 56 and is used for being connected with a connecting hole bolt on the supporting plate 121, after the connection, the two supporting plates 121 lift the whole flexible supporting mechanism 5, so that the bottom of the main motion platform 51 is far away from the transverse plate 12, friction is prevented from being generated in the motion process, and the precision is influenced.
In order to reduce stress concentration at the right-angle joints of the flexible supporting mechanism 5, a round angle with a radius of 0.5mm is arranged at the right-angle joint of the outer leaf spring 52, the main motion platform 51 and the secondary motion platform 55, and a round angle with a radius of 0.5mm is also arranged at the right-angle joint of the inner leaf spring 53, the secondary motion platform 55 and the rigid constraint plate 54. In order to further improve the bearing capacity of the flexible supporting mechanism 5, the whole flexible supporting mechanism 5 is made of an integral structure and an aluminum alloy material, flexible components, namely an inner side leaf spring 53 and an outer side leaf spring 52, are machined by adopting an electric spark or wire cutting process, rigid components, namely a main motion platform 51, a secondary motion platform 55, a rigid constraint plate 54 and a fixed rigid body 56, are machined by adopting mechanical milling, and machining stress is removed after machining is finished, so that assembly errors are avoided, precision is improved, and the bearing capacity of the integral structure is stronger.
The reflector 3 is connected with the main motion platform 51 through the switching platform 4, and the section of switching platform 4 is the T type structure that has the evagination for the bottom, and the evagination is connected with main motion platform 51, through changing different switching platform 4, can adapt to different reflectors 3, has improved the suitability of device to T type structure also separates the switching platform 4 be used for installing the part of reflector 3 and inside and outside leaf spring, avoids appearing the condition of mutual friction when the motion. The reflector 3 is installed in the central position of the upper surface of the transfer platform 4, so that the gravity center of the reflector 3 is located in the central position of the transfer platform 4, the central line of the transfer platform 4 along the horizontal direction is parallel to the central line of the main motion platform 51 along the horizontal direction and is located in the same vertical plane, and therefore, the gravity center of the reflector 3, the center of the transfer platform 4 and the projection of the center of the main motion platform 51 in the vertical direction are located on the same horizontal axis, no additional torque is generated in the vertical direction during motion, and displacement precision is affected. The width of the outer protrusion is not greater than the width of the main motion platform 51, preventing friction with the inner and outer leaf springs and the rigid constraint plate 54. The whole set of flexible supporting mechanism 5 is horizontally arranged, the gravity of the reflecting mirror 3 and the switching table 4 is distributed along the width direction of each inner and outer leaf spring, namely, the deformation direction of the non-leaf spring, and the thrust of the voice coil motor 2 is along the thickness direction of each inner and outer leaf spring, namely, the deformation direction of the leaf spring, so that the gravity of the reflecting mirror 3 and the switching table 4 is perpendicular to the deformation direction, the linear displacement is not influenced, and the bearing capacity and the movement stroke of the flexible supporting mechanism 5 are increased to the greatest extent.
In order to further lighten the dead weight of the device and improve the bearing capacity, a rectangular weight-reducing cavity 41 is arranged in the center of the switching table 4, a diamond weight-reducing cavity 511 is arranged in the center of the main motion platform 51, the dead weight is lightened under the condition that the function is not affected, a heavier reflecting mirror 3 can be loaded, and the bearing capacity of the device is improved.
In use, the reflector 3 is mounted on the main motion platform 51 through the transfer table 4, then the voice coil motor 2 is started, the outer side plate spring 52 and the inner side plate spring 53 are elastically deformed under the pushing of the voice coil motor 2, the main motion platform 51 is also strictly linearly moved under the constraint of the inner side plate spring and the outer side plate spring, because the adjacent outer side plate springs 52 and the inner side plate springs 53 are in serial distribution, namely the inner side plate springs 53 are not connected with the main motion platform 51 and the rigid constraint plate 54 is fixed on the bracket 1, when the main motion platform 51 linearly moves, the deformation condition as shown in figure 6 occurs, the inner side plate springs 53 and the outer side plate springs 52 are simultaneously elastically deformed, and the deformation directions of the inner side plate springs 53 and the outer side plate springs 52 are opposite, at this time, the displacement of the main moving platform 51 will be equal to the deformation of the inner leaf spring 53 plus the deformation of the outer leaf spring 52, if the inner leaf spring 53 is connected to the main moving platform 51 and the sub-moving platform 55 is fixed on the bracket 1 to form parallel distribution, the deformation directions of the inner leaf spring and the outer leaf spring are the same, and the deformation of the inner leaf spring and the outer leaf spring are the same, the displacement of the main moving platform 51 is equal to the deformation of the inner leaf spring 53 or the outer leaf spring 52, and compared with the parallel distribution, the displacement distance of the main moving platform 51 can be greater by adopting the serial distribution of the inner leaf spring and the outer leaf spring of the flexible supporting mechanism 5 in this embodiment.
The above embodiments are merely illustrative of specific embodiments of the present utility model and are not intended to limit the scope of the present utility model, and various modifications and improvements made by those skilled in the art to the technical solution of the present utility model should fall within the protection scope defined by the claims of the present utility model without departing from the design spirit of the present utility model.
Claims (8)
1. A linear displacement guider for michelson interferometer, includes speculum (3), support (1), its characterized in that: the device also comprises a flexible supporting mechanism (5) and a driving mechanism;
The bracket (1) comprises a vertical plate (11) and a transverse plate (12) arranged at one side of the bottom of the vertical plate (11);
The driving mechanism comprises a voice coil motor (2), one end of a stator (21) of the voice coil motor is fixed on a vertical plate (11), and a rotor (22) of the voice coil motor (2) is connected with the flexible supporting mechanism (5);
The flexible supporting mechanism (5) comprises a main motion platform (51) and secondary motion platforms (55) symmetrically arranged on two sides of the main motion platform (51), the main motion platform (51) and the two secondary motion platforms (55) are respectively connected through two outer side leaf springs (52) arranged on two ends of the main motion platform (51) to form a cuboid structure, the reflecting mirror (3) is arranged on the upper surface of the main motion platform (51), one end of the main motion platform (51) is connected with a rotor (22) of the voice coil motor (2), the axis of the rotor (22) coincides with the geometric center of the end face of the main motion platform (51), the gravity center of the reflecting mirror (3) is located in a vertical plane where the center line of the main motion platform (51) is located in the horizontal direction, constraint structures are arranged between the main motion platform (51) and each secondary motion platform (55), the constraint structures comprise rigid constraint plates (54) symmetrically arranged on two sides of the main motion platform (51), gaps exist between the rigid constraint plates (54) and the side walls of the main motion platform (51), and the rigid constraint plates (54) are connected with the rigid constraint plates (56) through rigid constraint plates (53) arranged on two ends of the rigid constraint plates (54) which are arranged on the inner walls of the rigid constraint plates (53) and are connected with the rigid plates (56) of the rigid plates (12).
2. The linear displacement guide for a michelson interferometer of claim 1, wherein: be provided with switching platform (4) between speculum (3) and main motion platform (51), the section of switching platform (4) is the T type structure of bottom with the evagination, and the evagination width is not greater than the width of main motion platform (51), and the evagination is connected with main motion platform (51), and speculum (3) are installed in switching platform (4) upper surface central point put, and the central line of switching platform (4) along the horizontal direction is parallel and lie in same vertical plane with the central line of main motion platform (51) along the horizontal direction.
3. The linear displacement guide for a michelson interferometer according to claim 2, wherein: the gap size was 1mm.
4. A linear displacement guide for a michelson interferometer according to claim 3, characterized in that: the flexible supporting mechanism (5) is of an integrated structure and is made of aluminum alloy.
5. The linear displacement guide for a michelson interferometer of claim 4, wherein: the right angle connection part of the outer side leaf spring (52) and the main motion platform (51) and the secondary motion platform (55) is provided with a round angle, and the right angle connection part of the inner side leaf spring (53) and the secondary motion platform (55) and the rigid constraint plate (54) is also provided with a round angle.
6. The linear displacement guide for a michelson interferometer according to any of claims 1-5, wherein: the transverse plate is characterized in that L-shaped supporting plates (121) are arranged on two sides of the transverse plate, vertical sections of the supporting plates (121) are connected with the side edges of the transverse plate (12), butt joint holes are formed in the fixed rigid bodies (56), horizontal sections of the supporting plates (121) extend in the direction away from the transverse plate (12), and connecting holes used for being connected with the butt joint holes are formed in the horizontal sections of the supporting plates.
7. The linear displacement guide for a michelson interferometer according to claim 2, wherein: the center of the main motion platform (51) is provided with a diamond-shaped weight-reducing cavity (511), and the center of the switching platform (4) is provided with a rectangular weight-reducing cavity (41).
8. The linear displacement guide for a michelson interferometer of claim 1, wherein: the voice coil motor (2) is a cylindrical moving-magnet voice coil motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322963075.7U CN221055888U (en) | 2023-11-02 | 2023-11-02 | Linear displacement guiding device for Michelson interferometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322963075.7U CN221055888U (en) | 2023-11-02 | 2023-11-02 | Linear displacement guiding device for Michelson interferometer |
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| CN221055888U true CN221055888U (en) | 2024-05-31 |
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| CN202322963075.7U Active CN221055888U (en) | 2023-11-02 | 2023-11-02 | Linear displacement guiding device for Michelson interferometer |
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