CN221024937U - Vacuum pre-storage device for electron microscope samples - Google Patents

Abstract

The application relates to vacuum pre-storage equipment for an electron microscope sample, wherein a vacuum storage chamber is arranged on a lower base, an upper sealing cover is detachably arranged on the vacuum storage chamber in a vacuum sealing mode, and the vacuum storage chamber is used for providing a vacuum environment to accommodate the electron microscope sample; the controller, the oil-free dry vacuum pump and the vacuum gauge are respectively arranged on the lower base; the controller is connected with oilless dry vacuum pump and vacuum gauge electricity respectively, and the detection end of vacuum gauge is located vacuum storage cavity inside, and oilless dry vacuum pump's air inlet intercommunication vacuum storage cavity is inside. The vacuum storage and vapor removal functional requirements of the electron microscope sample are met, and the vacuumizing time of the pre-stored electron microscope sample is greatly shortened; the electron microscope sample is isolated from water vapor and pollutants in the atmosphere to the greatest extent, and organic pollution residues cannot be generated due to vacuum pre-storage, so that pollution to a vacuum chamber and components of the electron microscope is reduced; the pressure maintaining effect is good, continuous starting is not needed, and the noise and vibration are relatively small.

Description

Vacuum pre-storage device for electron microscope samples

Technical Field

The application relates to the field of transmission electron microscopes, in particular to a vacuum pre-storage device for an electron microscope sample.

Background

The electron microscope is referred to as electron microscope, and the electron microscope sample may be referred to as a transmission electron microscope sample, a scanning electron microscope sample, and the like.

After the transmission electron microscope sample is first prepared and observed, the transmission electron microscope sample may be required to be preserved in some cases so as to facilitate subsequent repeated observation and test. At this time, the transmission electron microscope sample is exposed to the atmosphere for a long period of time, and moisture and residual contaminants in the air adhere to the surface of the transmission electron microscope sample. When a transmission electron microscope sample enters the transmission electron microscope along with a sample rod, the following problems occur:

1. The residual water vapor on the surface of the sample is slowly released, so that the vacuumizing time of the electron microscope is greatly prolonged;

2. Residual contaminants can contaminate the sample to be observed and even the electron microscope vacuum chamber, internal pole pieces, detectors, etc.

Aiming at the two problems, a heating table or a halogen lamp and other modes are adopted to heat the sample to more than 100 ℃ so as to volatilize residual water vapor and pollutants as much as possible. Meanwhile, the sample is stored in a drying box containing a drying agent and is used for isolating water vapor and pollutants in the atmosphere. However, there is still a great risk that the water vapor and the pollutants are removed by heating and storing the water vapor and the pollutants in a drying oven. For example, the desiccant needs to be replaced frequently, moisture and pollutants in the drying box cannot be completely isolated from the atmosphere, samples may be modified during baking, and the sample pretreatment time is prolonged from another aspect.

With the development of vacuum technology in recent years, a drying box containing a drying agent is externally connected with a set of vacuum obtaining system, usually a rotary vane mechanical pump. But the system brings convenience and simultaneously also creates new technical problems:

1. the rotary vane mechanical pump requires vacuum pump oil as a vacuum obtaining medium, and can generate organic pollutant residues for the internal environment of a vacuum system and storage media such as a transmission sample;

2. the system can not automatically maintain pressure, needs 24 hours of continuous starting work and has vibration/noise influence on the laboratory environment;

3. The system is generally large in size, typically not less than 1m x 1.5m, and requires special space for use in a crowded laboratory environment.

Similarly, the vacuum storage of the scanning electron microscope sample also has the requirement of vacuum storage so as to facilitate the subsequent taking and observation at any time, thus the scanning electron microscope sample also depends on a similar electron microscope sample storage system and also encounters similar use problems.

In summary, in the electron microscope field, for the sample storage means, water vapor and organic pollutants in the ambient air cannot be completely isolated; or a conventional vacuum system can isolate environmental pollutants, but new risks of organic pollution residues can be generated due to the conventional vacuum system, so that new problems are caused. And the design structure of the traditional vacuum storage station cannot automatically maintain pressure, requires continuous starting operation and externally generates noise and vibration.

Disclosure of utility model

Based on this, it is necessary to provide a vacuum pre-storage device for electron microscopy samples.

In one embodiment, a vacuum pre-storage device for an electron microscope sample, comprising: the device comprises an upper sealing cover, a vacuum storage chamber, a lower base, a controller, an oil-free dry vacuum pump and a vacuum gauge;

The vacuum storage chamber is arranged on the lower base, the upper sealing cover is detachably arranged on the vacuum storage chamber in a vacuum sealing mode, and the vacuum storage chamber is used for providing a vacuum environment to accommodate an electron microscope sample;

The controller, the oil-free dry vacuum pump and the vacuum gauge are respectively arranged on the lower base;

The controller is respectively and electrically connected with the oil-free dry vacuum pump and the vacuum gauge, the detection end of the vacuum gauge is positioned inside the vacuum storage chamber, and the air inlet of the oil-free dry vacuum pump is communicated inside the vacuum storage chamber.

According to the vacuum pre-storage device for the electron microscope sample, the oil-free dry vacuum pump is matched with the design of the vacuum storage chamber, so that the vacuum pre-storage device is applicable to the transmission of the electron microscope sample and the scanning electron microscope sample, the vacuum storage and the vapor removal function requirements of the electron microscope sample are met, and the pre-stored electron microscope sample vacuumizing time is effectively shortened; on the other hand, the electron microscope sample is isolated from water vapor and pollutants in the atmosphere to the greatest extent, and organic pollution residues are not generated due to vacuum pre-storage, so that the pollution to the electron microscope vacuum chamber and components is reduced; on the other hand, the pressure maintaining effect is good, continuous starting is not needed, and the noise and vibration are relatively small; on the other hand, the floor space is small, and the device is particularly suitable for laboratories.

In one embodiment, the vacuum pre-storage device for an electron microscope sample further comprises a sample holder detachably arranged inside the vacuum storage chamber, and the sample holder is used for carrying the electron microscope sample.

In one embodiment, the number of the sample holders is at least two, the sample holders are arranged at intervals, and each sample holder is used for carrying one electron microscope sample.

In one embodiment, the vacuum pre-storage device for the electron microscope sample further comprises an observation window, wherein the observation window is hermetically arranged at the opening of the upper sealing cover and is used for penetrating out the electron microscope sample on the vacuum storage chamber.

In one embodiment, the viewing window is a circular quartz viewing window.

In one embodiment, the vacuum storage chamber is arranged on the lower base or is isolated from the lower base in a vacuum sealing manner; or alternatively

One of the upper sealing cover, the vacuum storage chamber and the lower base is provided with a through hole;

The vacuum pre-storage device for the electron microscope sample further comprises an electric valve arranged on the through hole, and the electric valve is electrically connected with the controller.

In one embodiment, the oil-free dry vacuum pump and the vacuum gauge are both disposed inside the lower base.

In one embodiment, the interior of the sub-mount is disposed in isolation from the interior of the vacuum storage chamber.

In one embodiment, the air inlet of the oil-free dry vacuum pump is directly communicated with the interior of the vacuum storage chamber, or is communicated with the interior of the vacuum storage chamber through a pipeline.

In one embodiment, the controller is a touch screen, and the touch screen is disposed on an outer surface of the lower base.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments or the conventional techniques of the present application, the drawings required for the descriptions of the embodiments or the conventional techniques will be briefly described below, and it is apparent that the drawings in the following descriptions are only some embodiments of the present application, and other drawings may be obtained according to the drawings without inventive effort for those skilled in the art.

Fig. 1 is a schematic structural diagram of an embodiment of a vacuum pre-storage device for electron microscope samples according to the present application.

FIG. 2 is another schematic view of the embodiment of FIG. 1.

Fig. 3 is a schematic cross-sectional view of the embodiment of fig. 1.

Fig. 4 is a schematic diagram of another embodiment of a vacuum pre-storage device for electron microscope samples according to the present application.

Reference numerals: the device comprises an upper sealing cover 1, a vacuum storage chamber 2, a lower base 3, a controller 4, a sample holder 5, an observation window 6, an oilless dry vacuum pump 7 and a vacuum gauge 8.

Detailed Description

In order that the above objects, features and advantages of the application will be readily understood, a more particular description of the application will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. The present application may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the application, whereby the application is not limited to the specific embodiments disclosed below.

It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When a component is considered to be "connected" to another component, it can be directly connected to the other component or intervening components may also be present. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and the like are used in the description of the present application for the purpose of illustration only and do not represent the only embodiment.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present application, unless expressly stated or limited otherwise, a first feature "up" or "down" on a second feature may be that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through intermedial media. Moreover, a first feature "above," "over" and "on" a second feature may be a first feature directly above or obliquely above the second feature, or simply indicate that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely under the second feature, or simply indicating that the first feature is less level than the second feature.

Unless defined otherwise, all technical and scientific terms used in the specification of the present application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and/or" as used in the description of the present application includes any and all combinations of one or more of the associated listed items.

The application discloses vacuum pre-storage equipment for an electron microscope sample, which comprises part of technical features or all the technical features of the following embodiments; that is, the vacuum pre-storage device for an electron microscope sample includes a part of or all of the following structures. In one embodiment of the application, a vacuum pre-storage device for an electron microscope sample comprises an upper sealing cover, a vacuum storage chamber, a lower base, a controller, an oil-free dry vacuum pump and a vacuum gauge; the vacuum storage chamber is arranged on the lower base, the upper sealing cover is detachably arranged on the vacuum storage chamber in a vacuum sealing mode, and the vacuum storage chamber is used for providing a vacuum environment to accommodate an electron microscope sample; the controller, the oil-free dry vacuum pump and the vacuum gauge are respectively arranged on the lower base; the controller is respectively and electrically connected with the oil-free dry vacuum pump and the vacuum gauge, the detection end of the vacuum gauge is positioned inside the vacuum storage chamber, and the air inlet of the oil-free dry vacuum pump is communicated inside the vacuum storage chamber. According to the vacuum pre-storage device for the electron microscope sample, the oil-free dry vacuum pump is matched with the design of the vacuum storage chamber, so that the vacuum pre-storage device is applicable to the transmission of the electron microscope sample and the scanning electron microscope sample, the vacuum storage and the vapor removal function requirements of the electron microscope sample are met, and the pre-stored electron microscope sample vacuumizing time is effectively shortened; on the other hand, the electron microscope sample is isolated from water vapor and pollutants in the atmosphere to the greatest extent, and organic pollution residues are not generated due to vacuum pre-storage, so that the pollution to the electron microscope vacuum chamber and components is reduced; on the other hand, the pressure maintaining effect is good, continuous starting is not needed, and the noise and vibration are relatively small; on the other hand, the floor space is small, and the device is particularly suitable for laboratories.

The vacuum pre-storage device for electron microscope samples will be described in detail with reference to fig. 1 to 4.

In one embodiment, a vacuum pre-storage device for electron microscope samples is shown in FIG. 1, and comprises an upper sealing cover 1, a vacuum storage chamber 2, a lower base 3 and a controller 4. The sub-mount 3 is used to house the vacuum pre-storage device for electron microscope samples, for example on a bench or other location. The vacuum storage chamber 2 is arranged on the lower base 3 and is used for providing a vacuum environment, and a pre-stored electron microscope sample is accommodated in the vacuum storage chamber 2. The upper sealing cover 1 is provided on the vacuum storage chamber 2 and seals the vacuum storage chamber 2. The controller 4 may be an electronically controlled switch, may also be an existing single-chip controller, may also be obtained by directly purchasing from the market, and may also be self-developed, where the controller 4 is not an innovation of the embodiments of the present application, and the embodiments of the present application do not limit the specific model of the controller 4, but only may be used to control the vacuum environment inside the vacuum storage chamber 2.

In one embodiment, as shown in fig. 1 and 3, the controller 4 is a touch screen, and the touch screen is disposed on the outer surface of the lower base 3. The touch screen is also a mature product which can be directly purchased, and the vacuum environment inside the vacuum storage chamber 2 can be easily controlled.

In various embodiments, the vacuum storage chamber 2 is disposed on the lower base 3, in a specific application, the vacuum storage chamber 2 may be a cylinder, and two ends of the cylinder are hollow, in this embodiment, the upper sealing cover 1 is detachably disposed on the vacuum storage chamber 2 in a vacuum sealing manner, and the vacuum storage chamber 2 is disposed on the lower base 3 in a vacuum sealing manner, so that the vacuum storage chamber 2 is used for providing a vacuum environment to accommodate an electron microscope sample.

Alternatively, the vacuum storage chamber 2 may be a relatively independent sealed environment, and in one embodiment, the vacuum storage chamber 2 is isolated from the lower base 3, that is, the inside of the lower base 3 is isolated from the inside of the vacuum storage chamber 2, that is, the vacuum storage chamber 2 is isolated from the lower base 3, for example, the vacuum storage chamber 2 is a cylinder with one end closed. By the design, the electron microscope sample is isolated from water vapor and pollutants in the atmosphere to the greatest extent, and organic pollution residues cannot be generated due to vacuum pre-storage, so that pollution to a vacuum chamber and components of the electron microscope is reduced.

In view of the taking and placing operation of the electron microscope sample, it is generally necessary to provide a detachable upper sealing cover 1, and in various embodiments, the upper sealing cover 1 is detachably provided on the vacuum storage chamber 2 in a vacuum sealing manner for maintaining a vacuum environment in the vacuum storage chamber 2 to accommodate the electron microscope sample when necessary, and the upper sealing cover 1 is detached to put the electron microscope sample into the vacuum storage chamber 2 or take the electron microscope sample out of the vacuum storage chamber 2 when necessary.

In order to facilitate confirmation of the condition of the electron microscope sample in the vacuum storage chamber 2, in one embodiment, as shown in fig. 2, the vacuum pre-storage device for electron microscope sample further comprises an observation window 6, wherein the observation window 6 is hermetically arranged at the opening of the upper sealing cover 1 and is used for penetrating out the electron microscope sample on the vacuum storage chamber 2. In one embodiment, the viewing window 6 is a circular quartz viewing window. By means of the structural design, the condition of the electron microscope sample in the vacuum storage chamber 2 can be observed on the premise that the vacuum environment in the vacuum storage chamber 2 is not affected.

In order to protect the electron microscope sample, in one embodiment, as shown in fig. 2, the vacuum pre-storage device for the electron microscope sample further comprises a sample holder 5, wherein the sample holder 5 is detachably arranged inside the vacuum storage chamber 2, and the sample holder 5 is used for carrying the electron microscope sample. I.e. the electron microscope sample is not in direct contact with the vacuum storage chamber 2, but is placed on the sample holder 5, through the sample holder 5 inside the vacuum storage chamber 2.

In order to facilitate storing more electron microscope samples, in one embodiment, the number of the sample holders 5 is at least two, each sample holder 5 is arranged at intervals, and each sample holder 5 is used for carrying one electron microscope sample. Further, in one of the embodiments, the sample holder 5 is provided with a cover, by which the electron microscope sample on the sample holder 5 is covered. By means of the structural design, the electronic mirror samples are mutually spaced in the vacuum storage chamber 2 through different sample holders 5, and the storage capacity of the vacuum pre-storage device for the electronic mirror samples is greatly improved.

In each embodiment, as shown in fig. 3, the vacuum pre-storage device for the electron microscope sample further comprises an oil-free dry vacuum pump 7 and a vacuum gauge 8; likewise, the vacuum storage chamber 2 is arranged on the lower base 3, the upper sealing cover 1 is detachably arranged on the vacuum storage chamber 2 in a vacuum sealing manner, and the vacuum storage chamber 2 is used for providing a vacuum environment to accommodate an electron microscope sample; the controller 4, the oil-free dry vacuum pump 7 and the vacuum gauge 8 are respectively arranged on the lower base 3; the detection end of the vacuum gauge 8 is located inside the vacuum storage chamber 2 and is used for detecting the vacuum degree of the vacuum environment inside the vacuum storage chamber 2. The air inlet of the oil-free dry vacuum pump 7 is communicated with the inside of the vacuum storage chamber 2, and is used for vacuumizing the inside of the vacuum storage chamber 2 when needed. In one embodiment, the air inlet of the oil-free dry vacuum pump 7 is directly communicated with the inside of the vacuum storage chamber 2, or the air inlet of the oil-free dry vacuum pump 7 is communicated with the inside of the vacuum storage chamber 2 through a pipeline. The structure design is beneficial to flexibly controlling the position of the oil-free dry vacuum pump 7, only the air inlet of the oil-free dry vacuum pump 7 is directly or indirectly communicated with the inside of the vacuum storage chamber 2, so that the inside of the vacuum storage chamber 2 is vacuumized to form a vacuum environment with a certain vacuum degree for storing an electron microscope sample, the structure design is suitable for transmitting the electron microscope sample and a scanning electron microscope sample, the vacuum storage and the steam removal function requirements of the electron microscope sample are met, and the vacuumizing time of the pre-stored electron microscope sample is effectively shortened.

In this embodiment, the oil-free dry vacuum pump 7 and the vacuum gauge 8 are both disposed inside the lower base 3. In other embodiments, the oil-free dry vacuum pump 7 and the vacuum gauge 8 may be disposed outside the lower base 3, or may be disposed outside the vacuum storage chamber 2, and may be flexibly disposed according to actual requirements. In view of the integrity and safety of the product, the oil-free dry vacuum pump 7 and the vacuum gauge 8 are usually provided inside the lower base 3.

In this embodiment, the controller 4 is electrically connected to the oil-free dry vacuum pump 7 and the vacuum gauge 8, and the controller 4 starts the oil-free dry vacuum pump 7 or shuts down the oil-free dry vacuum pump 7 according to the electric signal of the vacuum gauge 8. The oil-free dry vacuum pump 7 vacuumizes the vacuum storage chamber 2 in a starting state, so that the vacuum environment is formed inside the vacuum storage chamber 2 to accommodate an electron microscope sample; the oil-free dry vacuum pump 7 is in a closed state, so that the vacuum storage chamber 2 is kept in the vacuum environment, and when the vacuum degree is lost as the vacuum environment gradually enters the air, the controller 4 starts the oil-free dry vacuum pump 7 again according to the electric signal of the vacuum gauge 8, so that the circulation is performed. The structure design has good pressure maintaining effect, does not need continuous starting up and has relatively small noise and vibration; on the other hand, the automatic pressure maintaining effect of the whole system is realized.

Based on the above embodiments, in one embodiment, the vacuum storage chamber 2 is disposed on the lower base 3 in a vacuum sealing manner, and the other embodiments are the same, which is not described in detail.

Further, in combination with the embodiment having the touch screen disposed on the outer surface of the lower base 3, the oil-free dry vacuum pump 7 can be conveniently started or shut down at the vacuum pre-storage device for the electron microscope sample, and the content corresponding to the electric signal of the vacuum gauge 8 can be displayed.

Considering the problem of urgent need to open the vacuum pre-storage device for the electron microscope sample to urgent access the electron microscope sample stored therein, in one embodiment, one of the upper sealing cover 1, the vacuum storage chamber 2 and the lower base 3 is provided with a through hole; the vacuum pre-storage device for the electron microscope sample further comprises an electric valve arranged on the through hole, and the electric valve is electrically connected with the controller 4. Further, in one embodiment, the vacuum pre-storage device for an electron microscope sample further comprises an air filter mounted on the through hole, and the electric valve is communicated with the air filter. By means of the structural design, when the vacuum degree of the vacuum environment inside the vacuum storage chamber 2 is higher, if the electron microscope sample stored in the vacuum storage chamber is needed to be used suddenly, the controller 4 is only required to conduct a circuit, the electric valve is opened, the inside of the vacuum storage chamber 2 can be controlled to be communicated with the outside, and the outside air can quickly enter the inside of the vacuum storage chamber 2 after being filtered, so that the electron microscope sample stored in the vacuum storage chamber is taken out quickly, and pollution to other electron microscope samples can be avoided when air is taken in.

Because the oil-free dry vacuum pump 7 is matched with the design of the vacuum storage chamber 2, the structure can be controlled to be smaller, the oil-free dry vacuum pump has the advantage of small occupied area, is particularly suitable for a laboratory, and the prepared sample of the vacuum pre-storage device for the electron microscope sample is shown in fig. 4.

As can be seen from the description of the above embodiments, the embodiments of the present application realize the function of daily vacuum storage of electron microscope samples. The vacuum storage device has the advantages that the vacuum storage device is compact in structure and modularized, the vacuum storage functions of the transmission electron microscope sample and the scanning electron microscope sample are integrated in a breakthrough manner, the vacuum storage device is particularly suitable for daily vacuum storage of a platform-type electron microscope laboratory with multiple and miscellaneous electron microscope samples, the daily vacuum storage functions of the scanning electron microscope sample and the transmission electron microscope sample can be simultaneously realized, the vacuum storage functions of the two electron microscope samples can also be respectively and independently realized, the application of the vacuum storage functions of the two electron microscope samples can be realized without adding and subtracting functional accessories, the seamless switching of one machine can be realized, and the use efficiency of equipment is improved.

The vacuum pre-storage device for the electron microscope sample also prolongs the service life of the electron microscope host. The electron microscope sample to be tested is exposed to the atmosphere for a long time, and water vapor and pollutants in the air can be attached to the surface of the electron microscope sample. When the contaminated electron microscope samples are inserted into the electron microscope, pollutants on the surface of the electron microscope samples are released, so that the vacuum pumping time of the electron microscope is prolonged, and the vacuum chamber, the inner pole shoe, the detector and the like of the electron microscope are polluted. This contamination is long-term and cumulative, and is difficult to remove even if the electron microscope is normally maintained, which shortens the service life of the electron microscope. The embodiments of the application adopt an oil-free vacuum dry pump scheme, and create a clean high vacuum environment for the storage of the transmission electron microscope samples, wherein the vacuum storage is about equal to the water vapor adsorption amount stored in the atmosphere for one day. The vacuum pre-storage device for the electron microscope sample can isolate the electron microscope sample from atmospheric pollutants, so the vacuum pre-storage device for the electron microscope sample is a necessary choice for maintaining the normal operation and long-term stability of the transmission electron microscope instrument.

The vacuum pre-storage device for the electron microscope sample provided by the embodiment of the application has the advantages that the internal space is large, the partition storage function can be realized, the vacuum storage requirement of the large-volume scanning electron microscope sample can be realized, the whole space can be partitioned through the multi-layer sample support, and the independent partition storage requirements of electron microscope samples of different types or different operators can be realized.

The oil-free dry vacuum pump 7 is matched with the design of the vacuum gauge 8, and the vacuum pre-storage device for the electron microscope sample can also realize the function of automatic vacuum pressure maintaining setting of electron microscope sample storage, namely, when the lower limit of the system set vacuum pressure is reached, the vacuum dry pump stops for pressure maintaining; when the system is slowly boosted to reach the set upper limit of vacuum pressure, the vacuum dry pump is automatically started until the system pressure reaches the set lower limit of vacuum pressure. On the basis, the purposes of zero noise and zero vibration in the vacuum storage process of the electron microscope sample can be realized, and the external interference to the operation of the transmission electron microscope host is reduced to the greatest extent.

The vacuum pre-storage device for the electron microscope sample has the advantages of high automation degree, one-key start-stop, plug-and-play and the like, and can adopt a set of touch control system to control vacuum acquisition and air breaking, and realize the operations of real-time air pressure of the system, display of the working state of a vacuum dry pump, start-stop of a power supply and the like. The vacuum pre-storage device for the electron microscope sample provided by the embodiment of the application has the advantages of good mobility, high integration degree, small occupied area and capability of realizing the size of about one 4L mineral water bottle by a sample preparation machine; the oil-free dry vacuum pump 7 is adopted, so that the operation can be performed after the 220V civil power supply is switched on at any time and any place.

An example of a specific application is given below in connection with practical application, where the vacuum pre-storage device for an electron microscope sample is used for storing a transmission electron microscope sample, and has the functions of vacuum storage and vapor removal, so that the vacuum pre-storage device can be called a device for vacuum storage and vapor removal of a transmission electron microscope sample. In one embodiment, the apparatus for vacuum storage and moisture removal of a transmission electron microscope sample comprises an upper sealing cover, a vacuum storage chamber, a lower base, a controller, a sample holder, a quartz viewing window, an oil-free dry vacuum pump and a vacuum gauge. From the practical point of view, when not in use at ordinary times, the electron microscope sample is stored in a vacuum storage station for example; when in use, the electron microscope sample is taken out of the vacuum storage station and inserted into the electron microscope. In this way, an oil-free vacuum environment is provided to the overall system by utilizing an oil-free dry vacuum pump. After the electron microscope sample is observed, the electron microscope sample is required to be stored in a vacuum storage station, namely the vacuum pre-storage equipment for the electron microscope sample; when the electron microscope sample needs to be observed, the electron microscope sample is taken out of the vacuum storage station and is timely inserted into the electron microscope for observation. Therefore, the electron microscope sample can be isolated from water vapor and pollutants in the atmosphere to the greatest extent when being stored, long-time vacuum storage of the electron microscope sample is realized, and the problem of secondary pollution caused by pretreatment of the electron microscope sample is avoided to the greatest extent. Meanwhile, the pre-storage is realized, so that the vacuumizing time of the electron microscope sample can be effectively shortened, and the pollution to the electron microscope vacuum chamber and components is reduced.

In one embodiment, the vacuum pre-storage device for the electron microscope sample comprises an upper sealing cover 1, a vacuum storage chamber 2, a lower base 3, a controller 4, a sample holder 5, an observation window 6, an oil-free dry vacuum pump 7 and a vacuum gauge 8, wherein the upper sealing cover 1 and the vacuum storage chamber 2 are sequentially overlapped on the lower base 3 and are mutually vacuum-sealed; the controller 4 is arranged on the outer surface of the lower base 3 and is used for controlling the whole set of system by one key; the observation window 6 is arranged above the upper sealing cover 1, so that the condition of the sample in the vacuum storage chamber 2 can be observed at any time; the vacuum storage chamber 2 divides the internal space into x+1 independent subspaces for independent vacuum storage of samples through x sample holders 5; x is an integer and satisfies x.gtoreq.1. In this embodiment, the lower base 3 is internally provided with the oil-free dry vacuum pump 7, the vacuum gauge 8 and other components, which are respectively used for oil-free vacuum acquisition and vacuum degree characterization.

When the vacuum pump is specifically used, automatic vacuum pressure maintaining setting can be adopted, namely, when the lower limit of the system set vacuum pressure is reached, the vacuum pump set stops for pressure maintaining; when the system is slowly boosted to reach the set upper limit of vacuum pressure, the vacuum pump set is automatically started until the system pressure reaches the set lower limit of vacuum pressure. The automatic vacuum pressure maintaining design of the system can achieve the purposes of zero noise and zero vibration in the vacuum storage process of the electron microscope sample, and the external interference to the operation of the transmission electron microscope is reduced to the greatest extent. Therefore, the vacuum pre-storage device for the electron microscope sample adopts the design of the oil-free dry vacuum pump vacuum air exhaust path, realizes the functions of daily vacuum storage of the scanning electron microscope and the transmission electron microscope sample, and forms the vacuum pre-storage device for the transmission electron microscope sample. The invention solves the oil-free vacuum storage requirement of the transmission electron microscope sample for isolating vapor and pollutants in the atmosphere, and also has the zero noise/zero vibration requirement during storage. Meanwhile, a set of industrial control operation system of the air extraction system is creatively designed according to the requirements of the storage operation of the electron microscope sample, and the vacuum pumping/discharging operation of the storage station is controlled through one key of the touch screen, so that the vacuum automatic pressure maintaining function of the transmission electron microscope sample storage is skillfully realized.

When in use, the oil-free dry vacuum pump 7, the vacuum gauge 8 and the controller 4 are respectively arranged in the lower base 3; the vacuum storage chamber 2 is fixed on the upper sealing surface of the lower base 3; the upper sealing cover 1 is fixed on the upper sealing surface of the vacuum storage chamber 2 to realize the vacuum sealing of the whole system; the quartz observation window 6 is fixed through bolts and sealing rubber rings and is sealed on the upper surface of the upper sealing cover 1 in vacuum, so that the condition of storing an electron microscope sample in the system is observed in real time; the sample support 5 is placed inside the vacuum storage chamber 2 and separates the physical space, so that the electron microscope sample is stored in a partitioned mode.

The specific operation of the vacuum pre-storage device for electron microscopy samples is further described by the following specific examples. A sample holder 5 is provided inside the vacuum storage chamber 2 for carrying an electron microscope sample. The vacuum storage chamber 2 is fixed to the lower base 3, and the upper sealing cover 1 is fixed above the vacuum storage chamber 2, and all contact surfaces are ensured to be vacuum-sealed.

The oil-free dry vacuum pump 7 is started and vacuumizes the system by clicking a control screen, i.e., a start key on the controller 4. The vacuum gauge 8 detects the vacuum degree in the system in real time, and displays the real-time system air pressure data through the controller 4. The oil-free dry vacuum pump 7 works for about 30 seconds to 60 seconds, and reaches the lower limit of the vacuum pressure set by the system of 400Pa, and the oil-free dry vacuum pump 7 stops for maintaining pressure. When the system vacuum pressure slowly rises to more than 1000Pa after 5 hours to 10 hours, the controller 4 automatically starts the oil-free dry vacuum pump 7 to vacuumize, and automatically stops and maintains pressure after reaching the lower limit of the vacuum pressure of 400 Pa.

When the discharge mirror sample is required to be discharged and emptied, the 'discharging' key on the controller 4 is clicked, and the system automatically discharges and empties for 5 to 10 seconds. At the moment, after taking out the electron microscope sample or putting in a new electron microscope sample, fixing the upper sealing cover 1 again and vacuum-sealing the upper sealing surface of the vacuum storage chamber 2, clicking a start key on the controller 4, and stopping the oil-free dry vacuum pump 7 for pressure maintaining when the system reaches the set lower vacuum pressure limit of 400 Pa.

It should be noted that other embodiments of the present application further include a vacuum pre-storage device for an electron microscope sample, where the vacuum pre-storage device is formed by combining technical features of the foregoing embodiments.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of the application should be determined from the following claims.

Claims (10)

1. A vacuum pre-storage device for an electron microscope sample, comprising: the device comprises an upper sealing cover (1), a vacuum storage chamber (2), a lower base (3), a controller (4), an oil-free dry vacuum pump (7) and a vacuum gauge (8);

The vacuum storage chamber (2) is arranged on the lower base (3), the upper sealing cover (1) is detachably arranged on the vacuum storage chamber (2) in a vacuum sealing mode, and the vacuum storage chamber (2) is used for providing a vacuum environment to accommodate an electron microscope sample;

The controller (4), the oil-free dry vacuum pump (7) and the vacuum gauge (8) are respectively arranged on the lower base (3);

The controller (4) is respectively and electrically connected with the oil-free dry vacuum pump (7) and the vacuum gauge (8), the detection end of the vacuum gauge (8) is positioned inside the vacuum storage chamber (2), and the air inlet of the oil-free dry vacuum pump (7) is communicated with the inside of the vacuum storage chamber (2).

2. Vacuum pre-storage device for electron microscope samples according to claim 1, characterized in that it further comprises a sample holder (5), said sample holder (5) being detachably arranged inside the vacuum storage chamber (2), said sample holder (5) being intended to carry the electron microscope sample.

3. Vacuum pre-storage device for electron microscope samples according to claim 2, characterized in that the number of sample holders (5) is at least two, the sample holders (5) are arranged at intervals, each sample holder (5) being adapted to carry one electron microscope sample.

4. Vacuum pre-storage device for electron microscope samples according to claim 1, characterized in that it further comprises an observation window (6), said observation window (6) being arranged in a sealed manner at the opening of the upper sealing cover (1) for penetrating out the electron microscope sample on the vacuum storage chamber (2).

5. Vacuum pre-storage device for electron microscopy samples according to claim 4, characterized in that the viewing window (6) is a circular quartz viewing window.

6. Vacuum pre-storage device for electron microscope samples according to claim 1, characterized in that the vacuum storage chamber (2) is arranged on the lower base (3) in a vacuum-tight manner or is arranged isolated from the lower base (3); or alternatively

One of the upper sealing cover (1), the vacuum storage chamber (2) and the lower base (3) is provided with a through hole; the vacuum pre-storage device for the electron microscope sample further comprises an electric valve arranged on the through hole, and the electric valve is electrically connected with the controller (4).

7. Vacuum pre-storage device for electron microscope samples according to claim 1, characterized in that the oil-free dry vacuum pump (7) and the vacuum gauge (8) are both arranged inside the lower base (3).

8. Vacuum pre-storage device for electron microscope samples according to claim 7, characterized in that the interior of the sub-base (3) is arranged isolated from the interior of the vacuum storage chamber (2).

9. Vacuum pre-storage device for electron microscopy samples according to claim 1, characterized in that the air inlet of the oil-free dry vacuum pump (7) is in direct communication with the inside of the vacuum storage chamber (2) or in communication with the inside of the vacuum storage chamber (2) through a pipe.

10. Vacuum pre-storage device for electron microscope samples according to any of claims 1 to 9, characterized in that the controller (4) is a touch screen and the touch screen is arranged on the outer surface of the lower base (3).