CN109506844A - A kind of ring network cabinet SF6 gas tank helium check system and method - Google Patents
A kind of ring network cabinet SF6 gas tank helium check system and method Download PDFInfo
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- CN109506844A CN109506844A CN201811612392.1A CN201811612392A CN109506844A CN 109506844 A CN109506844 A CN 109506844A CN 201811612392 A CN201811612392 A CN 201811612392A CN 109506844 A CN109506844 A CN 109506844A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
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Abstract
The invention discloses a kind of ring network cabinet SF6 gas tank helium check system and methods, are applicable in and carry out dry type leak detection to 10kV ring network cabinet SF6 gas tank.The system includes for placing the vacuum box leak detection device of examined workpiece, for filling helium to vacuum box leak detection device and examined workpiece and recycling helium recyclable device, the helium mass spectrometer leak detector for hunting leak to examined workpiece and the PLC for controlling helium recyclable device and helium mass spectrometer leak detector of helium.
Description
Technical field
A kind of field this disclosure relates to which ring network cabinet SF6 gas tank is hunted leak, and in particular to helium inspection for ring network cabinet SF6 gas tank
Leakage and helium recovery system and method.
Background technique
Ring network cabinet is the capital equipment in distribution system, and Stability and dependability is directly related to the peace of electric system
Entirely, stable operation.Ring network cabinet is sealed in the components such as multiloop arc-chutes, bus, inlet-outlet line in single gas tank, and gas tank is exhausted
Edge gas SF6 gas provides a closed container, ensure that the work of product long time stability.
Existing ring network cabinet SF6 gas tank when leaving the factory, needs to detect the leakproofness of switchgear, the past uses always
SF6 detains the leak detection of cover method, and the period is very long, and accuracy rate is lower.Especially only after charging SF6 gas, gas can have just been discovered whether
The problem of body leaks, this does not only result in the serious waste done over again with SF6 gas, and the production cycle is greatly affected.
Summary of the invention
In order to overcome the above-mentioned deficiencies of the prior art, present disclose provides a kind of ring network cabinet SF6 gas tank helium check system and sides
Method is applicable in and carries out dry type leak detection to 10kV ring network cabinet SF6 gas tank.
Technical solution used by the disclosure is:
A kind of ring network cabinet SF6 gas tank helium check system, the system include for place the vacuum box leak detection device of examined workpiece,
For to vacuum box leak detection device and examined workpiece fill helium and recycle helium fill helium recyclable device, for examined workpiece examine
The helium mass spectrometer leak detector of leakage and for controlling the PLC for filling helium recyclable device and helium mass spectrometer leak detector.
Further, the helium recyclable device that fills includes high pressure helium gas tank, low pressure helium tank and helium recovery unit, described
High pressure helium gas tank is connect by high pressure helium tube road with the high-pressure aerated mouth on vacuum chamber, and the low pressure helium tank passes through low pressure
Helium recovery pipeline is connect with the lower pressure extraction mouth on vacuum chamber, is connected between the high pressure helium gas tank and low pressure helium tank
Helium recovery unit.
Further, the helium recovery unit includes compressor, device for drying and filtering, helium separator, compression pump and oil
Separator；The low pressure helium tank is connect by compressor with high pressure helium gas tank, and the high pressure helium gas tank is by being sequentially connected
Device for drying and filtering, helium separator, compression pump and oil water separator connect with low pressure helium tank.
Further, the compressor is connected with cooling equipment；The high pressure helium tube is provided with pressure sensor on road
And solenoid valve, the pressure sensor and solenoid valve are connect with PLC respectively.
Further, the vacuum box leak detection device includes the vacuum chamber and vacuum chamber for placing measured workpiece
The vacuum-pressure detection table group for vacuumizing pump group, being arranged on vacuum chamber that is connected, the gas that vacuum chamber side is set
Dynamic door opener and the buffer unit that bottom in vacuum chamber is set.
Further, the buffer unit includes the slideway for being inclined at the vacuum tank bottom of box, the slideway and true
Multiple springs are connected between the empty bottom of box；Roller is provided on the slideway；The intracorporal bottom periphery of vacuum tank is also
It is provided with rubber pad.
Further, the Pneumatic door-opening device include cylinder mounting base, the lifting cylinder that is arranged in cylinder mounting base
And the sliding door of cylinder axis bottom is set.
It further, further include SF6 gas cylinder, the SF6 gas cylinder fills interface by the SF6 on pipeline and vacuum chamber and connects
It connects.
A kind of ring network cabinet SF6 gas tank helium detecting method, this method are based on ring network cabinet SF6 gas tank helium check system as described above
It realizes, method includes the following steps:
Measured workpiece is placed in vacuum tank, the sliding door of vacuum tank is closed；
Vacuum tank and workpiece are vacuumized, until pressure is 20Pa in vacuum tank, pressure is extracted into 1000Pa in examined workpiece
When, pressure maintaining 150S；
The variation of vacuum values in switchgear and vacuum tank is measured, if vacuum degree variation is no more than setting value in vacuum tank,
Then show examined workpiece without big leakage, continues to vacuumize in inspection, micro- leakage；Otherwise show that examined workpiece has big leakage, alarm, while to work
Atmosphere is poured in part and vacuum chamber, door of unpacking stops detection.
Further, it is described vacuumize inspection in, micro- leakage the step of are as follows:
If not finding to leak greatly, when the vacuum values of vacuum tank and examined workpiece all reach requirement, to being filled in examined workpiece
Enter low pressure helium, examined in leak, as without in leak, to be filled in examined workpiece setting pressure helium, simulation workpiece building ring
Border carries out examining micro- leakage；
If examined workpiece is unqualified, alarm, and it is filled with atmosphere to vacuum tank, while being filled with helium to pressure into workpiece
For 150000pa, workpiece is removed out of vacuum tank, recycles helium in vacuum tank；
If micro- leak detection examined workpiece is qualified, recycle in workpiece that vacuum degree is kept to 1000Pa in helium to workpiece,
It is 150000pa that SF6 is filled into workpiece to pressure, opens chamber door, takes out workpiece, detection is completed.
Through the above technical solutions, the beneficial effect of the disclosure is:
(1) disclosure realizes the dry type leak detection to 10kV ring network cabinet SF6 gas tank, can synchronize to examined workpiece and vacuum
Case vacuumizes, and makes workpiece inside and outside differential pressure no more than 0.05Mpa, moreover it is possible to helium is filled to examined workpiece, using helium mass spectrometer leak detector
Carry out helium mass spectrum air-leakage test, judge qualification in examined workpiece with it is unqualified, and can be by the helium in examined workpiece
Recycling, is also filled with the SF6 working gas of authorized pressure into workpiece；
(2) disclosure is realized using helium recyclable device is filled and carries out filling helium and helium recovery processing to examined workpiece；With helium
Atmospheric pressure monitoring and helium are automatically replenished function, when the pressure of system detection to helium is lower than setting value, then automatically open valve
Door supplement high-purity helium；
(3) disclosure places examined workpiece using vacuum tank, quickly determines leak source by helium mass spectrometer leak detector, and can be certainly
The pressure changing of workpiece and vacuum tank during dynamic record, storage vacuumize, fill helium, helium is examined.
Detailed description of the invention
The Figure of description for constituting a part of this disclosure is used to provide further understanding of the disclosure, and the disclosure is shown
Meaning property embodiment and its explanation do not constitute the improper restriction to the disclosure for explaining the application.
Fig. 1 is the structure chart of ring network cabinet SF6 gas tank helium check system；
Fig. 2 is the structure chart for filling helium recyclable device；
Fig. 3 is the structure chart of vacuum box leak detection device；
Fig. 4 is the structure chart of buffer unit；
Fig. 5 is the flow chart of ring network cabinet SF6 gas tank helium detecting method.
Specific embodiment
The disclosure is described further with embodiment with reference to the accompanying drawing.
It is noted that following detailed description is all illustrative, it is intended to provide further instruction to the disclosure.Unless another
It indicates, all technical and scientific terms that the disclosure uses have logical with disclosure person of an ordinary skill in the technical field
The identical meanings understood.
It should be noted that term used herein above is merely to describe specific embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singular
Also it is intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet
Include " when, indicate existing characteristics, step, operation, device, component and/or their combination.
One or more embodiments provide a kind of ring network cabinet SF6 gas tank helium check system, are applicable in 10kV ring network cabinet SF6 gas tank
(hereinafter referred to as workpiece) carries out dry type leak detection.
As shown in Figure 1, the system includes filling helium recyclable device 1, vacuum box leak detection device 2, helium mass spectrometer leak detector 3, SF6 gas
Bottle 5 and PLC4, it is described fill helium recyclable device 1, helium mass spectrometer leak detector 3 connect with PLC respectively, by PLC control fill helium, helium recycling
And leak detection.
Specifically, it is described fill helium recyclable device 1 include high pressure helium gas tank 11, it is low pressure helium tank 12, compressor 13, dried
Filter 14, helium separator 15, compression pump 16, oil water separator 17, cooling equipment 18 and the electromagnetism being arranged on each pipeline
Valve EV, as shown in Figure 2.Workpiece is carried out filling the processing such as helium and helium recycling within the set time by filling helium recyclable device 1.
The low pressure helium tank 12 is connect by low pressure helium recovery pipeline with the lower pressure extraction mouth on vacuum chamber, described
Low pressure helium tank 12 is connect by compressor 13 with high pressure helium gas tank 11, and the compressor 13 is also connected by cooling line and cooled down
Equipment 18；The high pressure helium gas tank 11 is connect by pipeline with the import of device for drying and filtering 14, and the device for drying and filtering 14 goes out
Mouth is connect by pipeline with the import of helium separator 15, and the helium separator 15 is connected by one end of pipeline and compression pump
It connects, the other end of the compression pump is connect by pipeline with the import of oil water separator 17, the outlet of the oil water separator 17
It is connect with low pressure helium tank 12, the high pressure helium gas tank 11 is connected by the high-pressure aerated mouth on high pressure helium tube road and vacuum chamber
It connects, the SF6 gas cylinder 5 fills interface with the SF6 on vacuum chamber by pipeline and connect.
What the present embodiment proposed fills helium recyclable device 1 in use, filling helium to vacuum tank by high pressure helium gas tank 11, used
Helium afterwards enters compressor 13 by low pressure helium tank 12, and helium is sent into dry by high pressure helium gas tank 1 after compressor will compress
Dry filter 14, helium enters helium separator 15 and is purified after device for drying and filtering filters, and purifies through helium separator 15
It after helium afterwards enters the compression of compression pump 16, is filtered into oil water separator 17, filtered helium passes through low pressure helium
Tank 12 and compressor 13 enter high pressure helium gas tank 11.
In the present embodiment, it is provided with pressure sensor on high pressure helium tube road, for detecting helium pressure；It is described
Pressure sensor and solenoid valve are connect with PLC respectively, when detecting the pressure of helium lower than setting value, are then controlled solenoid valve and are beaten
Open supplement high-purity helium.
The vacuum box leak detection device 2 includes for placing the vacuum chamber 21 of measured workpiece 6, being connected with vacuum chamber
The vacuum-pressure detection table group 23 for vacuumizing pump group 22, being arranged on vacuum chamber, the pneumatic of vacuum chamber side is set
Door opener 24 and the buffer unit that bottom in vacuum chamber is set, as shown in Figure 3.
In the present embodiment, the return pump 22 uses Lay treasured vacuum pump and Edward's Roots's pump group, takes out under a high vacuum
Speed is faster；The pump group 22 that vacuumizes includes at least two vacuum pumping pumps, is respectively used to take out vacuum chamber and measured workpiece true
It is empty.The vacuum-pressure detection table group 23 includes at least two vacuum-pressure detection tables, is respectively used to pressure in detection vacuum tank
With pressure in measured workpiece.
Measured workpiece impacts vacuum chamber in order to prevent, and bottom is provided with buffering setting in vacuum chamber.Such as Fig. 4 institute
Show, the buffer unit includes the slideway 25 for being inclined at the bottom of box, is connected between the slideway and vacuum chamber bottom
There are multiple springs 26；Roller is provided on the slideway 25.
In the present embodiment, the intracorporal bottom periphery of the vacuum tank is additionally provided with rubber pad.
In the present embodiment, the Pneumatic door-opening device 24 includes cylinder mounting base, the liter being arranged in cylinder mounting base
Sending down abnormally ascending cylinder and the sliding door that cylinder axis bottom is set.
In the present embodiment, the vacuum chamber is made of stainless steel, be provided in vacuum chamber it is multiple with it is detected
The quick coupling of workpiece interface connection.
In the present embodiment, the helium mass spectrometer leak detector is connect with vacuum chamber, and work is detected in vacuum chamber for detecting
The leak source of part；Valve is provided on the pipeline that helium mass spectrometer leak detector is connect with vacuum chamber.
In the present embodiment, the helium mass spectrometer leak detector uses English Citroen zx LDS3000 helium mass spectrometer leak detector.
In the present embodiment, all valves of the PLC connection, solenoid valve, pressure sensor, vacuum-pressure detection table group,
Vacuumize pump group, helium mass spectrometer leak detector, cylinder connection, control system vacuumizes, fill helium, leak detection, helium recycling, fill SF6 automatically into
Row；The PLC is also connected with touch screen, for showing the course of work, dynamic leak rate, qualified and unqualified and fault time, also
The pumpdown time of vacuum tank and workpiece and inflation and the pressure recovery of pressure parameter and helium can be set by touch display screen
Etc. parameters.
As shown in figure 5, the course of work for the ring network cabinet SF6 gas tank helium check system that the present embodiment proposes are as follows:
(1) detecting leakage is vacuumized.
First examined workpiece is placed on workpiece supporting plate when leak detection, examined workpiece supporting plate and workpiece are manually pushed into vacuum chamber
It is interior, then the quick coupling of the interface of workpiece and vacuum chamber is connected, closes chamber door.
PLC control vacuumizes pump group and vacuumizes to vacuum tank and workpiece, and vacuum values and vacuum tank in monitoring workpiece simultaneously
Vacuum values, and guarantee in examined workpiece that pressure ratio vacuum tank pressure is no more than 0.05MPa；When vacuum tank internal pressure power be 20Pa,
Pressure maintaining 150S when pressure is extracted into 1000Pa in examined workpiece measures the variation of vacuum values in switchgear and vacuum tank, if vacuum
Vacuum degree variation is no more than setting value (such as 100Pa) and illustrates that examined workpiece without leaking greatly, continues to vacuumize in inspection, micro- leakage in case；It is no
Then illustrate that workpiece has big leakage, PLC controls touch screen display alarm information, while pouring atmosphere into workpiece and vacuum chamber, opens
Chamber door stops detection.
(2) it leaked in inspection, examine micro- leakage.
If not finding to leak greatly, (live can be set such as when the vacuum values of vacuum chamber and examined workpiece all reach requirement
Vacuum tank 20Pa, workpiece 1000Pa absolute pressure) when, to low pressure helium (such as 0.01Mpa) is filled in examined workpiece, examined in leak,
As leaked without in, to the helium for being filled with setting pressure in examined workpiece, simulation workpiece working environment carries out examining micro- leakage.
If examined workpiece is unqualified, PLC controls touch screen display alarm information, is then filled with atmosphere to vacuum tank, together
When is filled with helium into workpiece, and to pressure, for 150000pa (absolute pressure), (this process also needs that workpiece inside and outside differential pressure is kept to be not more than
0.05Mpa), then stop detection program, workpiece is removed out of vacuum tank.
If micro- leak detection is qualified, helium is recycled, helium flows into low pressure helium tank by filling helium recyclable device 1 in workpiece.
In workpiece after helium recovery, vacuum tank keeps vacuum, and system automatically opens SF6 filling interface simultaneously, fills in workpiece
SF6 to 150000pa opens chamber door, takes out workpiece, and detection is completed.
It can be seen from the above description that above-mentioned one or more embodiments realize following technical effect:
(1) disclosure realizes the dry type leak detection to 10kV ring network cabinet SF6 gas tank, can synchronize to examined workpiece and vacuum
Case vacuumizes, and makes workpiece inside and outside differential pressure no more than 0.05Mpa, moreover it is possible to helium is filled to examined workpiece, using helium mass spectrometer leak detector
Carry out helium mass spectrum air-leakage test, judge qualification in examined workpiece with it is unqualified, and can be by the helium in examined workpiece
Recycling, is also filled with the SF6 working gas of authorized pressure into workpiece；
(2) disclosure is realized using helium recyclable device is filled and carries out filling helium and helium recovery processing to examined workpiece；With helium
Atmospheric pressure monitoring and helium are automatically replenished function, when the pressure of system detection to helium is lower than setting value, then automatically open valve
Door supplement high-purity helium；
(3) disclosure places examined workpiece using vacuum tank, quickly determines leak source by helium mass spectrometer leak detector, and can be certainly
The pressure changing of workpiece and vacuum tank during dynamic record, storage vacuumize, fill helium, helium is examined.
Although above-mentioned be described in conjunction with specific embodiment of the attached drawing to the disclosure, model not is protected to the disclosure
The limitation enclosed, those skilled in the art should understand that, on the basis of the technical solution of the disclosure, those skilled in the art are not
Need to make the creative labor the various modifications or changes that can be made still within the protection scope of the disclosure.
Claims (10)
1. a kind of ring network cabinet SF6 gas tank helium check system, characterized in that hunt leak and fill including the vacuum tank for placing examined workpiece
Set, for vacuum tank and examined workpiece fill helium and recycle helium fill helium recyclable device, for examined workpiece hunt leak
Helium mass spectrometer leak detector and for controlling the PLC for filling helium recyclable device and helium mass spectrometer leak detector.
2. ring network cabinet SF6 gas tank helium check system according to claim 1, characterized in that the helium recyclable device that fills includes
High pressure helium gas tank, low pressure helium tank and helium recovery unit, the high pressure helium gas tank pass through high pressure helium tube road and vacuum chamber
On the connection of high-pressure aerated mouth, the low pressure helium tank passes through the lower pressure extraction mouth on low pressure helium recovery pipeline and vacuum chamber
Connection, is connected with helium recovery unit between the high pressure helium gas tank and low pressure helium tank.
3. ring network cabinet SF6 gas tank helium check system according to claim 2, characterized in that the helium recovery unit includes
Compressor, device for drying and filtering, helium separator, compression pump and oil water separator；The low pressure helium tank passes through compressor and height
The connection of helium tank is pressed, the high pressure helium gas tank passes through sequentially connected device for drying and filtering, helium separator, compression pump and grease point
It is connect from device with low pressure helium tank.
4. ring network cabinet SF6 gas tank helium check system according to claim 3, characterized in that the compressor is connected with cooling
Equipment；Be provided with pressure sensor and solenoid valve on high pressure helium tube road, the pressure sensor and solenoid valve respectively with
PLC connection.
5. ring network cabinet SF6 gas tank helium check system according to claim 1, characterized in that the vacuum box leak detection device packet
Include the vacuum chamber for placing measured workpiece, be connected with vacuum chamber vacuumize pump group, be arranged on vacuum chamber
Vacuum-pressure detection table group, the Pneumatic door-opening device that vacuum chamber side is set and the slow of bottom in vacuum chamber is set
Flushing device.
6. ring network cabinet SF6 gas tank helium check system according to claim 5, characterized in that the buffer unit includes inclination
The slideway of the vacuum tank bottom of box is set, multiple springs, the slideway are connected between the slideway and vacuum chamber bottom
On be provided with roller；The intracorporal bottom periphery of vacuum tank is additionally provided with rubber pad.
7. ring network cabinet SF6 gas tank helium check system according to claim 1, characterized in that the Pneumatic door-opening device includes
Cylinder mounting base, the lifting cylinder being arranged in cylinder mounting base and the sliding door that cylinder axis bottom is set.
8. ring network cabinet SF6 gas tank helium check system according to claim 1, characterized in that further include SF6 gas cylinder, the SF6
Gas cylinder fills interface with the SF6 on vacuum chamber by pipeline and connect.
9. a kind of ring network cabinet SF6 gas tank helium detecting method, this method is based on ring network cabinet of any of claims 1-8
What SF6 gas tank helium check system was realized, characterized in that method includes the following steps:
Measured workpiece is placed in vacuum tank, the sliding door of vacuum tank is closed；
Vacuum tank and workpiece are vacuumized, until pressure is 20Pa in vacuum tank, when pressure is extracted into 1000Pa in examined workpiece, protected
Press 150S；
The variation of vacuum values in switchgear and vacuum tank is measured, if vacuum degree variation is no more than setting value, table in vacuum tank
Bright examined workpiece continues to vacuumize in inspection, micro- leakage without big leakage；Otherwise show that examined workpiece has big leakage, alarm, at the same to workpiece and
Atmosphere is poured in vacuum chamber, door of unpacking stops detection.
10. ring network cabinet SF6 gas tank helium detecting method according to claim 9, characterized in that it is described vacuumize inspection in, micro- leakage
The step of are as follows:
It is low to being filled in examined workpiece when the vacuum values of vacuum tank and examined workpiece all reach requirement if not finding to leak greatly
Press helium, examined in leak, as without in leak, to be filled in examined workpiece setting pressure helium, simulation workpiece working environment into
Row examines micro- leakage；
If examined workpiece is unqualified, alarm, and it is filled with atmosphere to vacuum tank, while being filled with helium to pressure into workpiece and being
150000pa removes workpiece out of vacuum tank, recycles helium in vacuum tank；
If micro- leak detection examined workpiece is qualified, recycle in workpiece that vacuum degree is kept to 1000Pa, Xiang Gong in helium to workpiece
It is 150000pa that SF6 is filled in part to pressure, opens chamber door, takes out workpiece, detection is completed.
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| CN201811612392.1A CN109506844A (en) | 2018-12-27 | 2018-12-27 | A kind of ring network cabinet SF6 gas tank helium check system and method |
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| CN201811612392.1A CN109506844A (en) | 2018-12-27 | 2018-12-27 | A kind of ring network cabinet SF6 gas tank helium check system and method |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110068429A (en) * | 2019-05-08 | 2019-07-30 | 中南大学 | A kind of leakage test method of aerospace composite component at low ambient temperatures |
| CN110793729A (en) * | 2019-10-18 | 2020-02-14 | 徐遂涛 | Auxiliary equipment for detecting and protecting sealing performance of welding port of vacuum cavity by using helium property |
| CN111562060A (en) * | 2020-06-22 | 2020-08-21 | 上海真兰仪表科技股份有限公司 | Helium detection method and system |
| CN112098008A (en) * | 2020-08-25 | 2020-12-18 | 广东鸿图科技股份有限公司 | Device for detecting air tightness of workpiece |
| CN112710437A (en) * | 2020-12-21 | 2021-04-27 | 东部超导科技（苏州）有限公司 | SF6Dry type vacuum leak detection system and leak detection method for breaker box body |
| CN113028277A (en) * | 2021-03-02 | 2021-06-25 | 安徽博为光电科技有限公司 | Vacuum box type helium leak detection recovery system |
| CN113218590A (en) * | 2021-04-16 | 2021-08-06 | 江苏国富氢能技术装备股份有限公司 | Device and process for detecting air tightness of opening of inner container of gas cylinder |
| CN114563135A (en) * | 2022-03-02 | 2022-05-31 | 苏州中科科美科技有限公司 | Full-automatic air tightness detection device and detection method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110068429A (en) * | 2019-05-08 | 2019-07-30 | 中南大学 | A kind of leakage test method of aerospace composite component at low ambient temperatures |
| CN110793729A (en) * | 2019-10-18 | 2020-02-14 | 徐遂涛 | Auxiliary equipment for detecting and protecting sealing performance of welding port of vacuum cavity by using helium property |
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| CN113218590A (en) * | 2021-04-16 | 2021-08-06 | 江苏国富氢能技术装备股份有限公司 | Device and process for detecting air tightness of opening of inner container of gas cylinder |
| CN114563135A (en) * | 2022-03-02 | 2022-05-31 | 苏州中科科美科技有限公司 | Full-automatic air tightness detection device and detection method |
| CN114563135B (en) * | 2022-03-02 | 2023-02-03 | 苏州中科科美科技有限公司 | Full-automatic air tightness detection device and detection method |
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