CN111562060A - Helium detection method and system - Google Patents

Helium detection method and system Download PDF

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Publication number
CN111562060A
CN111562060A CN202010571409.4A CN202010571409A CN111562060A CN 111562060 A CN111562060 A CN 111562060A CN 202010571409 A CN202010571409 A CN 202010571409A CN 111562060 A CN111562060 A CN 111562060A
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CN
China
Prior art keywords
helium
workpiece
vacuum
vacuum box
detection
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Pending
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CN202010571409.4A
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Chinese (zh)
Inventor
黄伟涛
李诗华
任海军
徐荣华
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Shanghai Zhenlan Instrument Technology Co ltd
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Shanghai Zhenlan Instrument Technology Co ltd
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Priority to CN202010571409.4A priority Critical patent/CN111562060A/en
Publication of CN111562060A publication Critical patent/CN111562060A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/12Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using tracer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/08Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
    • G01N3/10Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces generated by pneumatic or hydraulic pressure
    • G01N3/12Pressure testing

Abstract

The invention discloses a helium detection method and a system thereof, wherein the method comprises the following steps: step S1, manually placing the workpiece on a feeding sliding table; step S2, the loading manipulator automatically grabs the workpiece into the vacuum box, and then the vacuum box moves horizontally and the box body closes the door; step S3, filling compressed air into the workpiece to perform a pressure resistance test; and S4, deflating the workpiece after the pressure resistance test is finished, automatically entering a helium detection process by the system, automatically vacuumizing the vacuum box and the workpiece by the vacuumizing system, wherein the system comprises the vacuum box for placing the workpiece to be detected, a helium mass spectrometer leak detector, a vacuum box vacuumizing system, a workpiece vacuumizing system, a helium charging system, a PLC (programmable logic controller), a feeding manipulator, a helium recovery system, an air pressure detection device or a helium concentration monitoring device, a vacuum degree detection device, a workpiece vacuum breaking system and a vacuum box vacuum breaking system. The invention has high detection efficiency, can not be interfered by the detection visual field, and greatly reduces the possibility of false detection and missed detection.

Description

Helium detection method and system
Technical Field
The invention relates to the technical field of vacuum degree detection, in particular to a helium detection method and a helium detection system.
Background
At present, most of gas meters are membrane gas meters, two modes, namely a dry comparison method and a water test method, are generally adopted for gas meter leak detection, dry air is filled into the gas meters by the dry comparison method, after pressure is balanced, the pressure change of high-pressure gas in the meters is measured to judge the tightness of the gas meters, and the detection efficiency is low because the pressure cannot reach balance in a short time. The water test method is characterized in that the gas meter is filled with air with a certain pressure and then soaked in water, and whether the leakage condition exists in the gas meter is judged by observing whether bubbles exist in the water. However, the water test method has the problems of possible false detection and missed detection, limited detection visual field and low detection efficiency.
Disclosure of Invention
The present invention is directed to a helium testing method and system thereof, so as to solve the problems mentioned in the background art.
In order to achieve the purpose, the invention provides the following technical scheme: a helium detection method comprises the following steps:
step S1, manually placing the workpiece on a feeding sliding table;
step S2, the loading manipulator automatically grabs the workpiece into the vacuum box, and then the vacuum box moves horizontally and the box body closes the door;
step S3, filling compressed air into the workpiece to perform a pressure resistance test;
step S4, deflating the workpiece after the pressure resistance test is finished, automatically entering a helium detection flow by the system, and automatically vacuumizing the vacuum box and the workpiece by the vacuumizing system;
step S5, the vacuum box reaches a set vacuum degree, the leak detection valve is opened, the helium filling device continuously fills 10KPa of helium into the workpiece, 5 revolution volumes of helium are needed, the helium mass spectrometer leak detector is automatically started and performs middle leak detection, the step S6 is continued after the detection is qualified, the alarm device alarms when the detection is unqualified, the helium recovery system automatically recovers the helium, the vacuum box is opened by air filling, and the NG cache line with the leaked workpiece is taken out;
step S6, continuously filling 75KPa helium gas into the workpiece, detecting the micro-leakage by a helium mass spectrometer leak detector, continuing the step S7 when the micro-leakage is detected to be qualified, alarming by an alarm device if the micro-leakage is detected to be unqualified, automatically recovering the helium gas by a helium gas recovery system, inflating a vacuum box to open a door, and taking out the NG cache line with the leaked workpiece;
and step S7, automatically recovering helium by a helium recovery system and cleaning, inflating a vacuum box to open a door, taking out qualified workpieces, putting the qualified workpieces on a qualified wire body, and entering the next procedure.
Preferably, the pressure resistance test is performed under the condition of charging 175KPa of compressed air and maintaining the pressure for 1 min.
Preferably, the helium mass spectrometer leak detector is automatically started under the condition that the pressure of a vacuum box is pumped to 30Pa and the pressure of a workpiece reaches 1000 Pa.
A helium detection system comprises a vacuum box, a helium mass spectrometer leak detector, a vacuum box vacuumizing system, a workpiece vacuumizing system and a helium charging system, wherein the vacuum box, the helium mass spectrometer leak detector, the vacuum box vacuumizing system, the workpiece vacuumizing system and the helium charging system are used for placing a workpiece to be detected, a PLC (programmable logic controller), a feeding manipulator, a helium recovery system, a gas pressure detection device or a helium concentration monitoring device, a vacuum degree detection device, a workpiece vacuumizing system and a vacuum box vacuumizing system are used for grabbing the workpiece into the vacuum box, the feeding manipulator is used for vacuumizing the vacuum box, the workpiece vacuumizing system is used for vacuumizing the vacuum box, the helium charging system is used for charging helium into the workpiece, the helium mass spectrometer leak detector is used for detecting helium in the vacuum box, the helium recovery system is used for recovering helium in the workpiece, and the gas pressure detection device or the helium concentration monitoring device is used for monitoring the helium concentration in the workpiece, the vacuum degree detection device is used for detecting the vacuum degrees in the workpiece and the vacuum box respectively, the PLC is used for setting parameters and controlling each component, and the workpiece vacuum breaking system and the vacuum box vacuum breaking system are used for breaking the vacuum in the workpiece and the vacuum box respectively.
Preferably, the vacuum box comprises an upper box body, a lower box body, a sliding table, a rack and a box closing mechanism, wherein the lower box body is arranged on the sliding table in a sliding mode, and the box closing mechanism is used for closing the upper box body on the lower box body.
Preferably, the device further comprises a helium removing device, and the helium removing device is used for removing helium in the vacuum box and each system.
Preferably, the helium cleaning device, the workpiece vacuumizing system, the helium recovery system, the helium filling system and the workpiece breaking system are connected with the workpiece through the internal expansion type sealing head.
Preferably, the vacuum box is made of stainless steel or high-quality aluminum, and the inner surface of the vacuum box is polished and cleaned after being processed.
Preferably, the pipeline connected with each system and the workpiece is provided with a filter for filtering impurities, water and oil stains.
Preferably, the number of the vacuum boxes is 7.
Compared with the prior art, the invention has the beneficial effects that:
the invention has high detection efficiency, can not be interfered by the detection visual field, and greatly reduces the possibility of false detection and missed detection.
Drawings
FIG. 1 is a flow chart of the helium test method of the present invention;
FIG. 2 is a schematic diagram of the helium testing system of the present invention;
FIG. 3 is a schematic view of the vacuum box structure of the present invention;
FIG. 4 is a schematic view of the coupling mechanism of the helium gas charging system and the workpiece of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: a universal optical port adapting device comprises the following steps:
step S1, manually placing the workpiece on a feeding sliding table;
step S2, the loading manipulator automatically grabs the workpiece into the vacuum box, and then the vacuum box moves horizontally and the box body closes the door;
step S3, filling compressed air into the workpiece to perform a pressure resistance test;
step S4, deflating the workpiece after the pressure resistance test is finished, automatically entering a helium detection flow by the system, and automatically vacuumizing the vacuum box and the workpiece by the vacuumizing system;
step S5, the vacuum box reaches a set vacuum degree, the leak detection valve is opened, the helium filling device continuously fills 10KPa of helium into the workpiece, 5 revolution volumes of helium are needed, the helium mass spectrometer leak detector is automatically started and performs middle leak detection, the step S6 is continued after the detection is qualified, the alarm device alarms when the detection is unqualified, the helium recovery system automatically recovers the helium, the vacuum box is opened by air filling, and the NG cache line with the leaked workpiece is taken out;
step S6, continuously filling 75KPa helium gas into the workpiece, detecting the micro-leakage by a helium mass spectrometer leak detector, continuing the step S7 when the micro-leakage is detected to be qualified, alarming by an alarm device if the micro-leakage is detected to be unqualified, automatically recovering the helium gas by a helium gas recovery system, inflating a vacuum box to open a door, and taking out the NG cache line with the leaked workpiece;
and step S7, automatically recovering helium by a helium recovery system and cleaning, inflating a vacuum box to open a door, taking out qualified workpieces, putting the qualified workpieces on a qualified wire body, and entering the next procedure.
Specifically, the pressure resistance test was performed under the condition of charging 175KPa of compressed air and maintaining the pressure for 1 min.
Specifically, the helium mass spectrometer leak detector is automatically started under the condition that the pressure of a vacuum box is pumped to 30Pa, and the pressure of a workpiece reaches 1000 Pa.
A helium detection system comprises a vacuum box for placing a workpiece to be detected, a helium mass spectrometer leak detector, a vacuum box vacuumizing system, a workpiece vacuumizing system and a helium filling system, a PLC (programmable logic controller), a feeding manipulator, a helium recovery system, an air pressure detection device or a helium concentration monitoring device, a vacuum degree detection device, a workpiece vacuum breaking system and a vacuum box vacuum breaking system, wherein the feeding manipulator is used for grabbing the workpiece into the vacuum box, the vacuum box vacuumizing system is used for vacuumizing the vacuum box, the workpiece vacuumizing system is used for vacuumizing the workpiece, the helium filling system is used for filling helium into the workpiece, the helium mass spectrometer leak detector is used for detecting the helium in the vacuum box, the helium recovery system is used for recovering the helium in the workpiece, the air pressure detection device or the helium concentration monitoring device is used for monitoring the helium concentration in the workpiece, and the vacuum degree detection devices are respectively used for detecting the vacuum degrees in the workpiece and the vacuum box, the PLC is used for setting parameters and controlling each component, and the workpiece air breaking system and the vacuum box air breaking system are respectively used for breaking air in the workpiece and the vacuum box.
Specifically, the vacuum box comprises an upper box body 3, a lower box body 4, a sliding table 5, a rack 1 and a box closing mechanism 2, wherein the lower box body is arranged on the sliding table 5 in a sliding mode, and the box closing mechanism 2 is used for closing the upper box body 3 on the lower box body 4.
Specifically, the device further comprises a helium removing device, and the helium removing device is used for removing helium in the vacuum box and each system.
Specifically, the helium cleaning device, the workpiece vacuumizing system, the helium recovery system, the helium filling system and the workpiece vacuum breaking system are connected with the workpiece through the internal expansion type sealing head 6.
Specifically, the vacuum box is made of stainless steel or high-quality aluminum, and the inner surface of the vacuum box is polished and cleaned after being processed.
Specifically, the pipeline connected with each system and the workpiece is provided with a filter for filtering impurities, water and oil stains.
Specifically, the number of vacuum boxes is 7.
When the equipment detects different workpieces, a tool in the vacuum box, an air charging and discharging joint, a clamping jaw of a feeding manipulator and the like need to be replaced.
The internal expansion type seal head provides only two kinds of diameter seal heads (phi 22 and phi 27).
Detecting parameters:
pressure resistance (absolute pressure): 145-326KPa (adjustable pressure in the range)
Helium pressure (absolute): 45-250 KPa (pressure is adjustable in the range);
maximum outer dimension of the workpiece: length 205 × width 135 × height 230mm (confirmed with the acquirer);
the size and the volume of the inner cavity of the vacuum box (the size is temporarily determined, and after a product digital model is provided by an acquirer, the confirmation of the acquirer and the two parties during design is taken as the standard): about 15.4L at 280 (width) X220 (length) X250 (height) mm;
note: the size of the vacuum box is set by the demander according to the size of the existing workpiece, if the size or the placing mode of the workpiece is adjusted by the demander in the later period, the volume of the vacuum box of the supplier is changed, and a supplement protocol needs to be signed again or the detection time of the vacuum box is prolonged according to the increased proportion of the vacuum box.
The number of vacuum boxes: 7 groups;
each group of vacuum boxes detects the number of workpieces: 2 pieces;
the vacuum box door opening mode: the upper box and the lower box are combined, and the workpiece taking and placing manipulator is responsible for taking and placing workpieces at the workpiece taking and placing position.
The feeding manipulator takes materials at a material taking station, the workpiece is firstly carried to the feeding station by manpower, and then the workpiece is carried to the vacuum box by the feeding manipulator. And automatically detecting the pressure resistance and the air tightness of the workpiece. After the detection is finished, the manipulator of the helium detection equipment automatically grabs the detected workpiece to a qualified or unqualified wire body, and then the detected workpiece is taken out of the wire body manually.
b. The ground clearance between the upper surface of the wire body and the helium detection line is 900 +/-20 mm;
height of vacuum box from ground (unit mm): 900 plus or minus 20mm, which height can take effect after being confirmed by the required party;
leak detector open test (vacuum box internal) pressure: less than or equal to 30 Pa;
evacuation pressure of the workpiece: less than or equal to 2000pa (the pressure can be adjusted upwards);
the pressure difference requirement is as follows: in order to prevent the workpiece from deforming in the leak detection process, the system needs to ensure that the pressure in the workpiece is not lower than the pressure in the vacuum box. And the pressure difference is ensured: the steel shell is less than 75 kPa; the pressure of the 0.8 liter small aluminum shell is within 45 kPa; 1.2 liter large aluminum shell within 225 kPa;
the work piece fills gassing mode: the air charging and discharging speed is less than or equal to 35Kpa/s, and the air inlet and the air outlet simultaneously perform air charging or air discharging;
workpiece recovery pressure: less than or equal to 2000pa (the pressure can be adjusted upwards);
the helium recovery rate is more than or equal to 85 percent;
and (3) leak detection precision: 1X 10-6Pa · m 3/s;
and (3) leakage rate control setting: setting on a leak detector or a system according to the process requirements of a demander;
leak detection beat (single device):
single-box vacuum box beating: 154 seconds/bin;
seven-box linkage beat: 22 seconds per box, and 2 workpieces are detected in each box, namely 11s per workpiece;
note: the two devices meet the capacity of 5.5 s/piece; the protocol main configuration table is configured according to a single set.
The helium detection system works in the following mode: the single vacuum box can work, and seven groups of vacuum boxes can also work in a linkage manner;
automatic control range
Manually placing a workpiece to be detected on a feeding position, automatically grabbing the workpiece by a feeding manipulator and placing the workpiece in a vacuum box of helium detection equipment, carrying out pressure resistance, vacuum pumping in the workpiece, helium filling, leakage detection, helium recovery and other detection processes of the workpiece after the vacuum box is translated, automatically carrying out work, identification, control and alarm according to programs, and displaying a work process or alarming by a touch screen;
the display device can display the working process, the dynamic leakage rate, the qualification and the disqualification, diagnose the fault and carry out statistics;
has the production statistical function: the detection number, the qualified number, the unqualified number and the qualified rate of each shift can be displayed;
the operation parameters (set by a password on a touch display screen) which do not influence the operation of the equipment, such as pressure resistance pressure, pressure resistance time, leakage rate, detection time, detection pressure, alarm value and the like, can be set according to the process requirements;
the electric control system has various reliable interlocking and protecting functions and has alarm prompt;
the fault counting function can record the latest fault time;
the system has a fault prompt function and can display error contents or codes;
the automatic helium removal function is complete, residual helium in the box body and on the pipeline can be quickly and effectively eliminated, and the leak detection precision and the repeatability are reliable;
all parts in the system are reasonably distributed, and all easily-damaged parts are easy to detach, replace and maintain; the arrangement of each sliding rail, guard board, guardrail, etc. should be beautiful and elegant;
the equipment has a password protection function, and prevents irrelevant personnel from modifying parameters or manually operating; and can set multiple parameter groups, in order to facilitate the parameter setting to different products that require;
the specific bar code scanning device of the equipment can store the leakage detection result and the corresponding information such as the vacuum box and the like;
the system is provided with an Ethernet communication interface which can be butted with an MES system of a demander;
the equipment has a box body calibration function, so that workers can check the equipment every day;
the equipment is provided with an industrial personal computer, and the functions of storing and inquiring the workpiece leakage detection result can be realized.
And manually distinguishing the left meter and the right meter by the demander, manually carrying out helium detection pipeline line detection, and manually selecting the type of the detection meter on the touch screen before detection.
Note: the left and right gauges refer to workpieces with the same appearance, and the positions of the air inlet and the air outlet are opposite.
When detecting a 1.2L steel shell workpiece, low-pressure 10Kpa leakage detection is needed, 5 rotation volumes are ventilated at the maximum flow, and middle leakage detection is carried out. After the low pressure medium leak test, the gauge was stopped from venting and the pressure increased to 75Kpa for microleakage testing.
Note: and (4) calculating that the ventilation time of 5 revolution volumes is about 4s, and performing middle leakage detection by the helium detection equipment through introducing low-pressure helium for 4s during detection.
The vacuum box part comprises a vacuum box, a vacuum pump group, a vacuum measuring device, an electromagnetic valve, a sliding table device, a vacuum box jacking mechanism, a pipeline, a rack and the like.
The tool in the vacuum box adopts a combined type rapid prototyping tool, and when a detection workpiece is switched, the prototyping speed is improved by rapidly replacing a corresponding tool block; the tool is made of a non-metal material, and has the advantages of good positioning performance, good wear resistance, no gas accumulation and the like.
The helium detection and pressure-resistant inflation tool adopts an internal expansion type sealing head mode, adopts materials with good wear resistance and excellent sealing property, and reduces the replacement frequency. Due to the fact that the distances between the inlet and the outlet of the workpiece are different, the mode of quickly adjusting the distances is adopted structurally, and the type changing work can be completed only by adjusting the corresponding distances.
The vacuum box is made of stainless steel or high-quality aluminum, and the inner surface of the vacuum box is polished and cleaned after being processed, so that good background and extremely small gas accumulation are guaranteed, and the pumping speed of the vacuum box is improved. The vacuum box door adopts a pneumatic switch mechanism, so that the operation is simple and reliable, and the safety of an operator is ensured.
The workpiece vacuum pumping system adopts a Laibao vacuum pump, and the performance is stable and reliable.
The vacuum measuring device adopts vacuum measurement of Infokang company, and the electromagnetic valve adopts German GSR/GVT or Japan CKD products, so that the measurement and control are more accurate, more stable and more reliable.
The equipment taking and placing manipulator automatically grips and places the workpiece into a vacuum box of the helium detection equipment, and working procedures of translation, mould closing, pressure resistance testing, vacuumizing, helium filling and leakage detection, air breaking, workpiece discharging and the like of a sliding table of the vacuum box are automatically carried out; when the workpieces are unqualified, the system gives an audible and visual alarm, automatically clamps the unqualified workpieces to an unqualified temporary storage line through a manipulator for storage, and unloads the workpieces through manual interference when the temporary storage line is full of workpieces to be alarmed; if the workpiece is not leaked, the system automatically gives a good product prompt, and meanwhile, the manipulator automatically clamps the workpiece to a qualified line body.
Leak detector part
The leak detector part mainly comprises a helium mass spectrometer leak detector, a control valve, a calibration part and the like. The helium mass spectrometer leak detector adopts a waxy SFJ-261F leak detector, has advanced technology, stable performance and convenient installation and maintenance, and can make full use of years of research on the leak detector by a supplier so that the leak detector is more harmonious and compact in connection with a vacuum box.
Electric control part
The electric control part adopts PLC control and operates and displays various set information on a color touch screen. The system can set different parameters according to the type of the workpiece to be produced, and the parameters are stored in the system for selection when the production is needed. The system can store the parameters of various workpieces, and corresponding prompts should be provided when setting the parameters.
The control system has the following functions:
all parameters can be displayed and modified on the touch screen.
The parameter setting picture can be accessed only by using a password, and the password can be modified on a screen.
And when the system alarms, automatically entering an alarm picture, prompting by sound, and returning to an initial operation interface after pressing alarm confirmation.
Each element (including vacuum pump, valve, etc.) can be operated and debugged on the touch screen.
The system comprises a manual operation screen, and the manual operation has the same process function as the automatic operation.
The PLC state monitoring picture can clearly display the running conditions of all parts of the equipment, and real-time monitoring and control of system running are achieved.
The method has the function of respectively accumulating the unqualified boxes after each startup, and can be manually reset.
Has fault diagnosis function.
The system has the functions of self calibration, chain protection and alarm, and an emergency stop button, and ensures the reliable and safe operation of the system and the safety of the detected workpiece.
The PLC state monitoring picture can clearly display the running condition of each part of the equipment, and the real-time monitoring and control of the system running are realized.
Introduction to helium cleaning System
The equipment has a helium cleaning function, when the leakage rate of unqualified products is too high, the system automatically fills high-purity nitrogen into the polluted vacuum box and the public pipeline to clean the helium background, and the equipment is ensured not to generate false alarm (the helium concentration in the surrounding environment cannot exceed the standard) caused by the helium background pollution (namely the helium background is too high) in the vacuum box.
3.9 System Security Explanation
The system has the following safety configuration, and ensures the safety of system work and operators:
overload protection of the vacuum pump set;
helium under-pressure automatic protection;
the equipment has safety door protection;
the vacuum pneumatic valve fails to automatically protect and alarm;
the leak detector is not ready for automatic protection and alarm;
the leak detector is in failure during working and automatically protects and alarms;
the leak detector is higher than the control point for automatic protection, alarm and waiting;
when the workpiece is subjected to leak detection and evacuation, a leak can be automatically alarmed for prompting, and the qualified and unqualified workpieces are clearly distinguished;
the mechanical arm and the respective automated components realize the prompting of interlocking, failure, alarm and the like;
the manipulator has the power-off and gas-off protection functions, and the workpiece cannot be damaged due to power-off or gas-off at any time;
the emergency stop switch of the operation surface is provided with a corresponding safe operation instruction.
Device appearance and other description:
all parts in the system are reasonably distributed (a display instrument, a control switch, an indicator light, all electrical parts, a filter and the like), and all easily-damaged parts are easy to detach, replace and maintain;
both ends of the control circuit are provided with definite labels; the wiring row seat is provided with a corresponding wiring terminal text description;
each air pipe is marked with a flow direction, and the wire is provided with a wire groove which is made of firm material;
the pipeline trend is standard and reasonable, the color accords with the relevant national standard, and clear character marks and flow direction marks are provided, so that the messy intersection is avoided;
each air source and each power supply are provided with a main switch and are arranged at positions easy to operate;
the leakage rate during leak detection can be displayed in front of the helium detector, so that staff can conveniently check the leakage rate;
the steering mark of the motor of the equipment is clear, and a protective cover and other protection devices are added on the exposed transmission part;
the instrument panel of the equipment conforms to the relevant industry standard and national standard.
The helium leakage detection equipment can share a recovery system (the distance between the recovery system and the helium detection equipment is less than or equal to 3 m).
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (10)

1. A helium detection method is characterized by comprising the following steps:
step S1, manually placing the workpiece on a feeding sliding table;
step S2, the loading manipulator automatically grabs the workpiece into the vacuum box, and then the vacuum box moves horizontally and the box body closes the door;
step S3, filling compressed air into the workpiece to perform a pressure resistance test;
step S4, deflating the workpiece after the pressure resistance test is finished, automatically entering a helium detection flow by the system, and automatically vacuumizing the vacuum box and the workpiece by the vacuumizing system;
step S5, the vacuum box reaches a set vacuum degree, the leak detection valve is opened, the helium filling device continuously fills 10KPa of helium into the workpiece, 5 revolution volumes of helium are needed, the helium mass spectrometer leak detector is automatically started and performs middle leak detection, the step S6 is continued after the detection is qualified, the alarm device alarms when the detection is unqualified, the helium recovery system automatically recovers the helium, the vacuum box is opened by air filling, and the NG cache line with the leaked workpiece is taken out;
step S6, continuously filling 75KPa helium gas into the workpiece, detecting the micro-leakage by a helium mass spectrometer leak detector, continuing the step S7 when the micro-leakage is detected to be qualified, alarming by an alarm device if the micro-leakage is detected to be unqualified, automatically recovering the helium gas by a helium gas recovery system, inflating a vacuum box to open a door, and taking out the NG cache line with the leaked workpiece;
and step S7, automatically recovering helium by a helium recovery system and cleaning, inflating a vacuum box to open a door, taking out qualified workpieces, putting the qualified workpieces on a qualified wire body, and entering the next procedure.
2. A helium testing method according to claim 1, characterised in that: the pressure resistance test conditions are that 175KPa compressed air is filled and the pressure is maintained for 1 min.
3. A helium testing method according to claim 1, characterised in that: the helium mass spectrometer leak detector is automatically started under the condition that the pressure of a vacuum box is pumped to 30Pa, and the pressure of a workpiece reaches 1000 Pa.
4. A helium detection system is characterized by comprising a vacuum box, a helium mass spectrometer leak detector, a vacuum box vacuumizing system, a workpiece vacuumizing system and a helium filling system, wherein the vacuum box, the helium mass spectrometer leak detector, the vacuum box vacuumizing system, the workpiece vacuumizing system and the helium filling system are used for placing a workpiece to be detected, a PLC (programmable logic controller), a feeding manipulator, a helium recovery system, a gas pressure detection device or a helium concentration monitoring device, a vacuum degree detection device, a workpiece vacuum breaking system and a vacuum box vacuum breaking system are used for grabbing the workpiece into the vacuum box, the vacuum box vacuumizing system is used for vacuumizing the vacuum box, the helium filling system is used for filling helium into the workpiece, the helium mass spectrometer leak detector is used for detecting helium in the vacuum box, the helium recovery system is used for recovering helium in the workpiece, the gas pressure detection device or the helium concentration monitoring device is used for monitoring the helium concentration in the workpiece, the vacuum degree detection device is used for detecting the vacuum degrees in the workpiece and the vacuum box respectively, the PLC is used for setting parameters and controlling each component, and the workpiece vacuum breaking system and the vacuum box vacuum breaking system are used for breaking the vacuum in the workpiece and the vacuum box respectively.
5. A helium testing system according to claim 1, wherein: the vacuum box comprises an upper box body, a lower box body, a sliding table, a rack and a box closing mechanism, wherein the lower box body is arranged on the sliding table in a sliding mode, and the box closing mechanism is used for closing the upper box body on the lower box body.
6. A helium testing system according to claim 1, wherein: the device also comprises a helium removing device which is used for removing helium in the vacuum box and each system.
7. A helium testing system according to claim 1 or 5, wherein: the helium cleaning device, the workpiece vacuumizing system, the helium recovery system, the helium filling system and the workpiece vacuum breaking system are connected with the workpiece through the internal expansion type sealing head.
8. A helium testing system according to claim 1, wherein: the vacuum box is made of stainless steel or high-quality aluminum, and the inner surface of the vacuum box is polished and cleaned after being processed.
9. A helium testing system according to claim 1, wherein: and the pipeline for connecting each system and the workpiece is provided with a filter for filtering impurities, water and oil stains.
10. A helium testing system according to claim 1, wherein: the number of the vacuum boxes is 7.
CN202010571409.4A 2020-06-22 2020-06-22 Helium detection method and system Pending CN111562060A (en)

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CN116216302B (en) * 2023-05-08 2023-07-11 爱发科东方检测技术(成都)有限公司 Automatic leak hunting transfer system of product
CN116216302A (en) * 2023-05-08 2023-06-06 爱发科东方检测技术(成都)有限公司 Automatic leak hunting transfer system of product

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Application publication date: 20200821